IT8647738A0 - Lappatrice a due plato' con dispositivo per la misura dello spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti - Google Patents

Lappatrice a due plato' con dispositivo per la misura dello spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti

Info

Publication number
IT8647738A0
IT8647738A0 IT8647738A IT4773886A IT8647738A0 IT 8647738 A0 IT8647738 A0 IT 8647738A0 IT 8647738 A IT8647738 A IT 8647738A IT 4773886 A IT4773886 A IT 4773886A IT 8647738 A0 IT8647738 A0 IT 8647738A0
Authority
IT
Italy
Prior art keywords
processed
measuring
piece
thickness
loading table
Prior art date
Application number
IT8647738A
Other languages
English (en)
Other versions
IT1190231B (it
Inventor
Melchiorre Lino
Original Assignee
Melchiorre Off Mecc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11262207&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IT8647738(A0) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Melchiorre Off Mecc filed Critical Melchiorre Off Mecc
Priority to IT47738/86A priority Critical patent/IT1190231B/it
Publication of IT8647738A0 publication Critical patent/IT8647738A0/it
Priority to DE8787830086T priority patent/DE3781188T2/de
Priority to EP87830086A priority patent/EP0241433B1/en
Application granted granted Critical
Publication of IT1190231B publication Critical patent/IT1190231B/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
IT47738/86A 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti IT1190231B (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT47738/86A IT1190231B (it) 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti
DE8787830086T DE3781188T2 (de) 1986-03-07 1987-03-05 Zweischeiben-laeppmaschine mit komparator zum ununterbrochenen messen der werkstueckdicke.
EP87830086A EP0241433B1 (en) 1986-03-07 1987-03-05 A two-plate lapping machine with comparator for continuously measuring the workpiece tichness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT47738/86A IT1190231B (it) 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti

Publications (2)

Publication Number Publication Date
IT8647738A0 true IT8647738A0 (it) 1986-03-07
IT1190231B IT1190231B (it) 1988-02-16

Family

ID=11262207

Family Applications (1)

Application Number Title Priority Date Filing Date
IT47738/86A IT1190231B (it) 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti

Country Status (3)

Country Link
EP (1) EP0241433B1 (it)
DE (1) DE3781188T2 (it)
IT (1) IT1190231B (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115808145A (zh) * 2022-12-02 2023-03-17 江苏希太芯科技有限公司 一种用于晶圆厚度多点测量装置及方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818159A1 (de) * 1988-05-28 1989-11-30 Wolters Peter Fa Verfahren und vorrichtung zur steuerung des betriebs von hon- oder schleifmaschinen
IT1243537B (it) * 1990-10-19 1994-06-16 Melchiorre Off Mecc Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau
DE10007390B4 (de) * 1999-03-13 2008-11-13 Peter Wolters Gmbh Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097458A (en) * 1960-05-13 1963-07-16 Method of accurately machining semiconductor bodies
US3304662A (en) * 1964-04-28 1967-02-21 Speedlap Corp Apparatus for lapping
JPS57168109A (en) * 1981-04-10 1982-10-16 Shinetsu Eng Kk Device for measuring thickness of work piece in lapping plate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115808145A (zh) * 2022-12-02 2023-03-17 江苏希太芯科技有限公司 一种用于晶圆厚度多点测量装置及方法

Also Published As

Publication number Publication date
IT1190231B (it) 1988-02-16
DE3781188T2 (de) 1992-12-17
EP0241433B1 (en) 1992-08-19
DE3781188D1 (de) 1992-09-24
EP0241433A3 (en) 1989-07-26
EP0241433A2 (en) 1987-10-14

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19940330