ITMI20130964A1 - Sensore di velocita' di rotazione - Google Patents

Sensore di velocita' di rotazione

Info

Publication number
ITMI20130964A1
ITMI20130964A1 IT000964A ITMI20130964A ITMI20130964A1 IT MI20130964 A1 ITMI20130964 A1 IT MI20130964A1 IT 000964 A IT000964 A IT 000964A IT MI20130964 A ITMI20130964 A IT MI20130964A IT MI20130964 A1 ITMI20130964 A1 IT MI20130964A1
Authority
IT
Italy
Prior art keywords
parallel
coriolis
partial areas
drive
yaw rate
Prior art date
Application number
IT000964A
Other languages
English (en)
Inventor
Thorsten Balslink
Daniel Christoph
Burkhard Kuhlmann
Rolf Scheben
Benjamin Schmidt
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20130964A1 publication Critical patent/ITMI20130964A1/it

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733Structural details or topology
    • G01C19/574Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
IT000964A 2012-06-20 2013-06-12 Sensore di velocita' di rotazione ITMI20130964A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012210374A DE102012210374A1 (de) 2012-06-20 2012-06-20 Drehratensensor

Publications (1)

Publication Number Publication Date
ITMI20130964A1 true ITMI20130964A1 (it) 2013-12-21

Family

ID=49487171

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000964A ITMI20130964A1 (it) 2012-06-20 2013-06-12 Sensore di velocita' di rotazione

Country Status (4)

Country Link
US (1) US9255801B2 (it)
CN (1) CN103512571B (it)
DE (1) DE102012210374A1 (it)
IT (1) ITMI20130964A1 (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012210374A1 (de) * 2012-06-20 2013-12-24 Robert Bosch Gmbh Drehratensensor
CN104215236B (zh) * 2013-06-05 2016-12-28 中国科学院地质与地球物理研究所 一种mems反相振动陀螺仪及其制造工艺
DE102015213447A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Drehratensensor mit minimierten Störbewegungen in der Antriebsmode
DE102015213455A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh OMM-Drehraten mit Antrieb ohne feststehende Elektroden
DE102015216459A1 (de) * 2015-08-28 2017-03-02 Robert Bosch Gmbh Kombi-Elektrode für Antrieb, Antriebsdetektion, Coriolisdetektion und Quadraturkompensation
DE102017213780A1 (de) * 2017-08-08 2019-02-14 Robert Bosch Gmbh Drehratensensor, Verfahren zur Herstellung eines Drehratensensors
DE102017215503A1 (de) * 2017-09-05 2019-03-07 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren
DE102020205372A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10108196A1 (de) * 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
EP1468248A1 (de) * 2002-01-12 2004-10-20 Robert Bosch Gmbh Drehratensensor
DE10203515A1 (de) 2002-01-30 2003-08-07 Bosch Gmbh Robert Mikromechanischer Drehratensensor
DE102009000606B4 (de) * 2009-02-04 2026-01-22 Robert Bosch Gmbh Mikromechanische Struktur
DE102010000811A1 (de) * 2010-01-12 2011-07-14 Robert Bosch GmbH, 70469 Mikromechanischer Drehratensensor mit zwei sensitiven Achsen und gekoppelten Detektionsmoden
DE102012210374A1 (de) * 2012-06-20 2013-12-24 Robert Bosch Gmbh Drehratensensor

Also Published As

Publication number Publication date
CN103512571A (zh) 2014-01-15
CN103512571B (zh) 2017-10-31
DE102012210374A1 (de) 2013-12-24
US20130340522A1 (en) 2013-12-26
US9255801B2 (en) 2016-02-09

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