ITRM20040445A1 - Processo per scavare trincee in un dispositivo ottico integrato. - Google Patents
Processo per scavare trincee in un dispositivo ottico integrato.Info
- Publication number
- ITRM20040445A1 ITRM20040445A1 IT000445A ITRM20040445A ITRM20040445A1 IT RM20040445 A1 ITRM20040445 A1 IT RM20040445A1 IT 000445 A IT000445 A IT 000445A IT RM20040445 A ITRM20040445 A IT RM20040445A IT RM20040445 A1 ITRM20040445 A1 IT RM20040445A1
- Authority
- IT
- Italy
- Prior art keywords
- excavating
- trench
- optical device
- integrated optical
- integrated
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/73—Etching of wafers, substrates or parts of devices using masks for insulating materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
- H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
- H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
- H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
- H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
- H10P76/405—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their composition, e.g. multilayer masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
- H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
- H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT000445A ITRM20040445A1 (it) | 2004-09-17 | 2004-09-17 | Processo per scavare trincee in un dispositivo ottico integrato. |
| US11/230,292 US20060068554A1 (en) | 2004-09-17 | 2005-09-19 | Process for etching trenches in an integrated optical device |
| US13/481,680 US8486741B2 (en) | 2004-09-17 | 2012-05-25 | Process for etching trenches in an integrated optical device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT000445A ITRM20040445A1 (it) | 2004-09-17 | 2004-09-17 | Processo per scavare trincee in un dispositivo ottico integrato. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ITRM20040445A1 true ITRM20040445A1 (it) | 2004-12-17 |
Family
ID=36099758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT000445A ITRM20040445A1 (it) | 2004-09-17 | 2004-09-17 | Processo per scavare trincee in un dispositivo ottico integrato. |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US20060068554A1 (it) |
| IT (1) | ITRM20040445A1 (it) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11901190B2 (en) * | 2017-11-30 | 2024-02-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of patterning |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2610140B1 (fr) * | 1987-01-26 | 1990-04-20 | Commissariat Energie Atomique | Circuit integre cmos et procede de fabrication de ses zones d'isolation electrique |
| FR2660440B1 (fr) * | 1990-04-03 | 1992-10-16 | Commissariat Energie Atomique | Composant optique integre protege contre l'environnement et son procede de fabrication. |
| US5163220A (en) * | 1991-10-09 | 1992-11-17 | The Unites States Of America As Represented By The Secretary Of The Army | Method of enhancing the electrical conductivity of indium-tin-oxide electrode stripes |
| DE69511810T2 (de) * | 1994-09-28 | 2000-05-18 | Nippon Telegraph And Telephone Corp., Tokio/Tokyo | Optische Halbleitervorrichtung und Herstellungsverfahren |
| US5895255A (en) * | 1994-11-30 | 1999-04-20 | Kabushiki Kaisha Toshiba | Shallow trench isolation formation with deep trench cap |
| US5682455A (en) * | 1996-02-29 | 1997-10-28 | Northern Telecom Limited | Semiconductor optical waveguide |
| US5741741A (en) * | 1996-05-23 | 1998-04-21 | Vanguard International Semiconductor Corporation | Method for making planar metal interconnections and metal plugs on semiconductor substrates |
| US6309918B1 (en) * | 1998-09-21 | 2001-10-30 | Motorola, Inc. | Manufacturable GaAs VFET process |
| EP1368680A2 (en) * | 2000-10-13 | 2003-12-10 | Massachusetts Institute Of Technology | Optical waveguides with trench structures |
| US6766082B2 (en) * | 2000-10-18 | 2004-07-20 | Nippon Telegraph And Telephone Corporation | Waveguide-type optical device and manufacturing method therefor |
| KR100427582B1 (ko) * | 2002-08-08 | 2004-04-28 | 한국전자통신연구원 | 광도파로 플랫폼 및 그 제조 방법 |
| US7099360B2 (en) * | 2003-02-03 | 2006-08-29 | Intel Corporation | Method and apparatus to generate and monitor optical signals and control power levels thereof in a planar lightwave circuit |
| US6920257B1 (en) * | 2003-03-24 | 2005-07-19 | Inplane Photonics, Inc. | Resonator cavity for optical isolation |
| AT502514B1 (de) * | 2005-10-13 | 2007-04-15 | Winter Udo Mag | Unterkalibriges geschoss |
-
2004
- 2004-09-17 IT IT000445A patent/ITRM20040445A1/it unknown
-
2005
- 2005-09-19 US US11/230,292 patent/US20060068554A1/en not_active Abandoned
-
2012
- 2012-05-25 US US13/481,680 patent/US8486741B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20120228260A1 (en) | 2012-09-13 |
| US8486741B2 (en) | 2013-07-16 |
| US20060068554A1 (en) | 2006-03-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE602004013116D1 (de) | Haptische tastengesteuerte Dateneingabe | |
| FI20060341L (fi) | Hiomatyökaluja, jotka on valmistettu käyttäen itseään välittävää hiomakideryhmitystä | |
| EP1829102A4 (en) | SEMICONDUCTOR COMPONENT | |
| ITTO20040847A1 (it) | Dispositivo di rilevamento di spostamenti per un apparecchio portatile | |
| NO20053170D0 (no) | Fremgangsmate for a forhindre gjenbruk i et analyttmalesystem. | |
| EP1774627A4 (en) | OPTICAL SEMICONDUCTOR ELEMENT | |
| DE502005000551D1 (de) | Werkzeugmaschine | |
| FI20031558L (fi) | Menetelmä käyttäjän autentikoimiseksi | |
| DE602005007428D1 (de) | Windschutzscheibeneinrichtung | |
| ITTO20050615A1 (it) | Dispositivo di ritenuta per motociclisti. | |
| EP1622158A4 (en) | SEMICONDUCTOR LASER ELEMENT | |
| EP1830405A4 (en) | SEMICONDUCTOR COMPONENT | |
| NO20032876D0 (no) | Anordning ved en gravemaskin | |
| ITMI20040306A1 (it) | Dispositivo di visualizzazione per un veicolo | |
| ITRM20040445A1 (it) | Processo per scavare trincee in un dispositivo ottico integrato. | |
| ITBO20050286A1 (it) | Macchina,metodo e dispositivo a pinza per un panello | |
| DE602005017694D1 (de) | Dateneingabevorrichtung | |
| DE602005011229D1 (de) | Fahrbare Vorrichtung für eine Reinigungsmaschine | |
| FR2871977B1 (fr) | Interface homme-machine mobile | |
| DE502005002802D1 (de) | Gleisbaumaschine | |
| DE602004013266D1 (de) | Verkaufsautomaten | |
| ITMO20040241A1 (it) | Metodo e mezzi per fissare stabilmente organi di aggancio a superfici. | |
| DK1727646T3 (da) | Drageranordning til en maskinportal samt fremgangsmåde til fremstilling af en sådan drageranordning | |
| FR2870283B3 (fr) | Support pour un verrou de cable | |
| FI20045353A7 (fi) | Menetelmä kiven rikkomiseksi |