ITRM20070677A1 - Procedimento per la separazione e il recupero dei sospendenti contenuti nelle sospensioni esauste provenienti dalle lavorazioni meccaniche del silicio. - Google Patents

Procedimento per la separazione e il recupero dei sospendenti contenuti nelle sospensioni esauste provenienti dalle lavorazioni meccaniche del silicio.

Info

Publication number
ITRM20070677A1
ITRM20070677A1 IT000677A ITRM20070677A ITRM20070677A1 IT RM20070677 A1 ITRM20070677 A1 IT RM20070677A1 IT 000677 A IT000677 A IT 000677A IT RM20070677 A ITRM20070677 A IT RM20070677A IT RM20070677 A1 ITRM20070677 A1 IT RM20070677A1
Authority
IT
Italy
Prior art keywords
suspendent
exhausted
suspensions
recovery
separation
Prior art date
Application number
IT000677A
Other languages
English (en)
Inventor
Guido Fragiacomo
Original Assignee
Garbo S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Garbo S R L filed Critical Garbo S R L
Priority to IT000677A priority Critical patent/ITRM20070677A1/it
Priority to JP2010540229A priority patent/JP2011509187A/ja
Priority to PCT/IT2008/000789 priority patent/WO2009084068A1/en
Priority to TW097150607A priority patent/TW200950927A/zh
Publication of ITRM20070677A1 publication Critical patent/ITRM20070677A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/12—Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
    • B01D21/0012—Settling tanks making use of filters, e.g. by floating layers of particulate material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
    • B01D21/26—Separation of sediment aided by centrifugal force or centripetal force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
    • B01D21/26—Separation of sediment aided by centrifugal force or centripetal force
    • B01D21/267—Separation of sediment aided by centrifugal force or centripetal force by using a cyclone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007—Use, recovery or regeneration of abrasive mediums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2221/00—Applications of separation devices
    • B01D2221/14—Separation devices for workshops, car or semiconductor industry, e.g. for separating chips and other machining residues
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Treatment Of Sludge (AREA)
IT000677A 2007-12-27 2007-12-27 Procedimento per la separazione e il recupero dei sospendenti contenuti nelle sospensioni esauste provenienti dalle lavorazioni meccaniche del silicio. ITRM20070677A1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT000677A ITRM20070677A1 (it) 2007-12-27 2007-12-27 Procedimento per la separazione e il recupero dei sospendenti contenuti nelle sospensioni esauste provenienti dalle lavorazioni meccaniche del silicio.
JP2010540229A JP2011509187A (ja) 2007-12-27 2008-12-23 シリコンの機械加工により排出されたスラリー中に含まれる懸濁流体を分離及び回収する方法
PCT/IT2008/000789 WO2009084068A1 (en) 2007-12-27 2008-12-23 Process for separating and recovering the suspending fluids contained in exhausted slurries from the machining of silicon
TW097150607A TW200950927A (en) 2007-12-27 2008-12-25 Process for separating and recovering the suspending fluids contained in exhausted slurries from the machining of silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000677A ITRM20070677A1 (it) 2007-12-27 2007-12-27 Procedimento per la separazione e il recupero dei sospendenti contenuti nelle sospensioni esauste provenienti dalle lavorazioni meccaniche del silicio.

Publications (1)

Publication Number Publication Date
ITRM20070677A1 true ITRM20070677A1 (it) 2009-06-28

Family

ID=40315856

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000677A ITRM20070677A1 (it) 2007-12-27 2007-12-27 Procedimento per la separazione e il recupero dei sospendenti contenuti nelle sospensioni esauste provenienti dalle lavorazioni meccaniche del silicio.

Country Status (4)

Country Link
JP (1) JP2011509187A (it)
IT (1) ITRM20070677A1 (it)
TW (1) TW200950927A (it)
WO (1) WO2009084068A1 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011003782A1 (de) * 2009-07-09 2011-01-13 Akw Apparate + Verfahren Gmbh Verfahren zur aufbereitung einer suspension

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010025606A1 (de) 2010-06-30 2012-01-05 Schott Solar Ag Verfahren zur Wiederaufbereitung von verbrauchten Sägeflüssigkeiten aus der Herstellung von Siliziumwafern
JP5722601B2 (ja) * 2010-11-30 2015-05-20 サンワバイオテック株式会社 シリコン切削廃液の処理方法
JP2012245582A (ja) * 2011-05-27 2012-12-13 Nippon Electric Glass Co Ltd 酸化セリウム系研磨材の製造方法
TW201312638A (zh) * 2012-03-03 2013-03-16 Hong Tung Resource Co Ltd 矽晶圓切割廢料之處理方法
SG11201603186PA (en) * 2013-10-24 2016-05-30 Metallkraft As Method and system for cleaning contaminated silicon carbide particles
EP3250507A1 (en) * 2015-01-27 2017-12-06 Metallkraft AS Non-chemical method and system for recovering silicon carbide particles and glycol from a slurry
CN112919415A (zh) * 2021-04-21 2021-06-08 沧州华宇特种气体科技有限公司 一种合成乙硼烷用溶剂的回收方法及回收装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09109145A (ja) * 1995-10-16 1997-04-28 Mitsubishi Materials Corp シリコン切断廃液からの砥粒回収装置
JP3249373B2 (ja) * 1996-02-21 2002-01-21 信越半導体株式会社 水溶性スラリー廃液の再利用システム
DE19960380C2 (de) * 1999-12-14 2002-05-29 Fraunhofer Ges Forschung Verfahren zum Fraktionieren einer Zerspanungssuspension
US7323416B2 (en) * 2001-03-14 2008-01-29 Applied Materials, Inc. Method and composition for polishing a substrate
JP2004082225A (ja) * 2002-08-22 2004-03-18 Jsr Corp 化学機械研磨用スラリー廃液の処理方法
JP2005313030A (ja) * 2004-04-27 2005-11-10 Sharp Corp スラリ再生方法
ITRM20050329A1 (it) * 2005-06-24 2006-12-25 Guido Fragiacomo Procedimento per il trattamento di sospensioni abrasive esauste per il recupero delle loro componenti riciclabili e relativo impianto.
JP4729428B2 (ja) * 2006-04-07 2011-07-20 Ａｇｃセイミケミカル株式会社 セリウム系研磨剤の再生方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011003782A1 (de) * 2009-07-09 2011-01-13 Akw Apparate + Verfahren Gmbh Verfahren zur aufbereitung einer suspension

Also Published As

Publication number Publication date
TW200950927A (en) 2009-12-16
WO2009084068A1 (en) 2009-07-09
JP2011509187A (ja) 2011-03-24

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