ITTO20010705A0 - Modulatore elettromeccanico a sovracampionamento autocalibrante e relativo metodo di autocalibrazione. - Google Patents

Modulatore elettromeccanico a sovracampionamento autocalibrante e relativo metodo di autocalibrazione.

Info

Publication number
ITTO20010705A0
ITTO20010705A0 IT2001TO000705A ITTO20010705A ITTO20010705A0 IT TO20010705 A0 ITTO20010705 A0 IT TO20010705A0 IT 2001TO000705 A IT2001TO000705 A IT 2001TO000705A IT TO20010705 A ITTO20010705 A IT TO20010705A IT TO20010705 A0 ITTO20010705 A0 IT TO20010705A0
Authority
IT
Italy
Prior art keywords
self
calibrating
electromechanical
calibration method
oversampling modulator
Prior art date
Application number
IT2001TO000705A
Other languages
English (en)
Inventor
Ernesto Lasalandra
Fabio Pasolini
Valeria Greco
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT2001TO000705A priority Critical patent/ITTO20010705A1/it
Publication of ITTO20010705A0 publication Critical patent/ITTO20010705A0/it
Priority to US10/198,720 priority patent/US7155979B2/en
Publication of ITTO20010705A1 publication Critical patent/ITTO20010705A1/it
Priority to US11/567,159 priority patent/US7461553B2/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
IT2001TO000705A 2001-07-18 2001-07-18 Modulatore elettromeccanico a sovracampionamento autocalibrante e relativo metodo di autocalibrazione. ITTO20010705A1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT2001TO000705A ITTO20010705A1 (it) 2001-07-18 2001-07-18 Modulatore elettromeccanico a sovracampionamento autocalibrante e relativo metodo di autocalibrazione.
US10/198,720 US7155979B2 (en) 2001-07-18 2002-07-16 Self-calibrating oversampling electromechanical modulator and self-calibration method
US11/567,159 US7461553B2 (en) 2001-07-18 2006-12-05 Self-calibrating oversampling electromechanical modulator and self-calibration method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2001TO000705A ITTO20010705A1 (it) 2001-07-18 2001-07-18 Modulatore elettromeccanico a sovracampionamento autocalibrante e relativo metodo di autocalibrazione.

Publications (2)

Publication Number Publication Date
ITTO20010705A0 true ITTO20010705A0 (it) 2001-07-18
ITTO20010705A1 ITTO20010705A1 (it) 2003-01-18

Family

ID=11459062

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2001TO000705A ITTO20010705A1 (it) 2001-07-18 2001-07-18 Modulatore elettromeccanico a sovracampionamento autocalibrante e relativo metodo di autocalibrazione.

Country Status (2)

Country Link
US (2) US7155979B2 (it)
IT (1) ITTO20010705A1 (it)

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US7654129B2 (en) * 2005-05-17 2010-02-02 Honeywell International Inc. Sensor with an analyte modulator
JP4550143B2 (ja) * 2005-07-08 2010-09-22 アナログ デバイシス， インコーポレイテッド Ｍｅｍｓスイッチングデバイスの保護
US7308830B2 (en) * 2006-01-26 2007-12-18 Rosemount Inc. Pressure sensor fault detection
US7454967B2 (en) * 2006-07-10 2008-11-25 Lv Sensors, Inc. Signal conditioning methods and circuits for a capacitive sensing integrated tire pressure sensor
US7665361B2 (en) * 2007-01-25 2010-02-23 Freescale Semiconductor, Inc. Method and apparatus for closed loop offset cancellation
WO2008121954A1 (en) * 2007-03-29 2008-10-09 Lighting Packs Llc Backpack based system for human electricity generation and use when off the electric grid
US7786738B2 (en) * 2007-09-19 2010-08-31 Robert Bosch Gmbh Cancelling low frequency errors in MEMS systems
US7830157B2 (en) * 2007-12-28 2010-11-09 3M Innovative Properties Company Pulsed capacitance measuring circuits and methods
GB2459862B (en) * 2008-05-07 2010-06-30 Wolfson Microelectronics Plc Capacitive transducer circuit and method
DE102008023535B4 (de) * 2008-05-14 2011-05-12 Texas Instruments Deutschland Gmbh Elektronische Vorrichtung und Verfahren zur Auswertung einer variablen Kapazität
IT1392553B1 (it) * 2008-12-11 2012-03-09 St Microelectronics Rousset Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico
TWI407700B (zh) * 2009-11-04 2013-09-01 Ind Tech Res Inst 電容式感測元件的校正裝置與方法
US8714012B2 (en) * 2010-02-16 2014-05-06 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
JP2011256957A (ja) * 2010-06-10 2011-12-22 Sony Corp 二軸ヒンジ機構及び電子機器
EP2421281A3 (en) * 2010-08-17 2012-04-04 Nxp B.V. Circuit and method for monitoring a capacitive signal source
US8599054B2 (en) * 2011-03-10 2013-12-03 Pgs Geophysical As Method for using a sensor system having a single-bit quantizer and a multi-bit feedback loop
CN102591008B (zh) * 2012-02-14 2014-05-14 无锡微奥科技有限公司 一种电热式微镜的开环控制系统及其控制方法
EP2653845B1 (en) * 2012-04-18 2015-07-15 Nxp B.V. Sensor circuit and calibration method
US9046547B2 (en) * 2012-08-13 2015-06-02 Pgs Geophysical As Accelerometer having multiple feedback systems operating on a given proof mass
US9304155B2 (en) * 2012-12-19 2016-04-05 Invensense, Inc. Mode-tuning sense interface
ITTO20121116A1 (it) * 2012-12-20 2014-06-21 St Microelectronics Srl Circuito e metodo di compensazione dinamica dell'offset per un dispositivo sensore mems
US9414165B2 (en) 2014-01-27 2016-08-09 Invensense, Inc. Acoustic sensor resonant peak reduction
US9645029B2 (en) * 2014-04-07 2017-05-09 Infineon Technology Ag Force feedback loop for pressure sensors
US10033179B2 (en) 2014-07-02 2018-07-24 Analog Devices Global Unlimited Company Method of and apparatus for protecting a switch, such as a MEMS switch, and to a MEMS switch including such a protection apparatus
EP3059868B1 (en) * 2015-02-19 2020-06-03 Stichting IMEC Nederland Circuit and method for comparator offset error detection and correction in an adc
CN105759075B (zh) * 2016-02-25 2017-09-19 中国科学院地质与地球物理研究所 一种高精度挠性加速度计
CN105759077B (zh) * 2016-02-25 2017-12-15 中国科学院地质与地球物理研究所 一种新型高精度mems加速度计
DE102018214156A1 (de) * 2018-08-22 2020-02-27 Robert Bosch Gmbh Verfahren zur Kalibrierung eines Sensors eines Geräts und Sensorsystem
US11255670B2 (en) 2019-06-26 2022-02-22 Stmicroelectronics, Inc. MEMS gyroscope self-test using a technique for deflection of the sensing mobile mass
US11175138B2 (en) 2019-06-26 2021-11-16 Stmicroelectronics, Inc. MEMS gyroscope control circuit
US11320452B2 (en) 2019-06-26 2022-05-03 Stmicroelectronics, Inc. MEMS accelerometer self-test using an active mobile mass deflection technique
US11162790B2 (en) * 2019-06-26 2021-11-02 Stmicroelectronics, Inc. MEMS gyroscope start-up process and circuit
DE102024204230B3 (de) * 2024-05-06 2025-07-24 Volkswagen Aktiengesellschaft Vorrichtung und Verfahren zur Erfassung und Überwachung einer analogen Messgröße

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EP1243930A1 (de) * 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
SE0101183D0 (sv) * 2001-04-02 2001-04-02 Ericsson Telefon Ab L M Micro electromechanical switches
ITTO20010699A1 (it) * 2001-07-17 2003-01-17 St Microelectronics Srl Metodo e circuito di rilevamento di spostamenti tramite sensori micro-elettro-meccanici con compensazione di capacita' parassite e di movime
KR100501201B1 (ko) * 2003-12-23 2005-07-18 삼성전기주식회사 Ｍｅｍｓ 구조의 정전 용량 보정기를 갖는 차동형커패시티브 타입 ｍｅｍｓ 센서 장치

Also Published As

Publication number Publication date
ITTO20010705A1 (it) 2003-01-18
US7461553B2 (en) 2008-12-09
US20070107492A1 (en) 2007-05-17
US7155979B2 (en) 2007-01-02
US20030025983A1 (en) 2003-02-06

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