ITTO20030347A1 - Micro-attuatore a film sottile a memoria di forma, e procedimento per la sua produzione - Google Patents

Micro-attuatore a film sottile a memoria di forma, e procedimento per la sua produzione

Info

Publication number
ITTO20030347A1
ITTO20030347A1 IT000347A ITTO20030347A ITTO20030347A1 IT TO20030347 A1 ITTO20030347 A1 IT TO20030347A1 IT 000347 A IT000347 A IT 000347A IT TO20030347 A ITTO20030347 A IT TO20030347A IT TO20030347 A1 ITTO20030347 A1 IT TO20030347A1
Authority
IT
Italy
Prior art keywords
actuator
procedure
production
thin film
shape memory
Prior art date
Application number
IT000347A
Other languages
English (en)
Inventor
Valerian Koniachkine
Marco Pizzi
Original Assignee
Fiat Ricerche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fiat Ricerche filed Critical Fiat Ricerche
Priority to IT000347A priority Critical patent/ITTO20030347A1/it
Priority to EP04010274A priority patent/EP1479905A3/en
Priority to US10/842,549 priority patent/US6983594B2/en
Publication of ITTO20030347A1 publication Critical patent/ITTO20030347A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • F03G7/061—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element
    • F03G7/0614—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element using shape memory elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • F03G7/061—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element
    • F03G7/0616—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by the actuating element characterised by the material or the manufacturing process, e.g. the assembly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • F03G7/064—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like characterised by its use
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/08—Shape memory

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)
  • Micromachines (AREA)
IT000347A 2003-05-13 2003-05-13 Micro-attuatore a film sottile a memoria di forma, e procedimento per la sua produzione ITTO20030347A1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT000347A ITTO20030347A1 (it) 2003-05-13 2003-05-13 Micro-attuatore a film sottile a memoria di forma, e procedimento per la sua produzione
EP04010274A EP1479905A3 (en) 2003-05-13 2004-04-30 Shape memory thin film micro-actuator, and method for producing the same
US10/842,549 US6983594B2 (en) 2003-05-13 2004-05-11 Shape memory thin micro-actuator, and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000347A ITTO20030347A1 (it) 2003-05-13 2003-05-13 Micro-attuatore a film sottile a memoria di forma, e procedimento per la sua produzione

Publications (1)

Publication Number Publication Date
ITTO20030347A1 true ITTO20030347A1 (it) 2004-11-14

Family

ID=33042726

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000347A ITTO20030347A1 (it) 2003-05-13 2003-05-13 Micro-attuatore a film sottile a memoria di forma, e procedimento per la sua produzione

Country Status (3)

Country Link
US (1) US6983594B2 (it)
EP (1) EP1479905A3 (it)
IT (1) ITTO20030347A1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006029831A1 (de) * 2006-06-27 2008-01-03 Acandis Gmbh & Co. Kg Verfahren zur Herstellung strukturierter Schichten aus Titan und Nickel

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4864824A (en) * 1988-10-31 1989-09-12 American Telephone And Telegraph Company, At&T Bell Laboratories Thin film shape memory alloy and method for producing
US5325880A (en) * 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
US5771902A (en) * 1995-09-25 1998-06-30 Regents Of The University Of California Micromachined actuators/sensors for intratubular positioning/steering
US5671322A (en) * 1996-01-17 1997-09-23 Advanced Ceramics Corporation Lateral flash evaporator
IT1303597B1 (it) * 1998-12-09 2000-11-14 Fiat Ricerche Dispositivo ottico e stato di funzionamento variabile, in particolareotturatore o specchio, a controllo elettrostatico.
US6343849B1 (en) * 1999-07-06 2002-02-05 Samsung Electro-Mechanics Co., Ltd. Microactuator for ink jet printer head using a shape memory alloy and manufacturing method thereof
US6481821B1 (en) * 1999-07-13 2002-11-19 Samsung Electronics Co., Ltd. Actuator for ink jet printer head using shape memory alloy
US20020104990A1 (en) * 2000-12-19 2002-08-08 Dereus Dana Richard Across-wafer optical MEMS device and protective lid having across-wafer light-transmissive portions

Also Published As

Publication number Publication date
US6983594B2 (en) 2006-01-10
EP1479905A3 (en) 2006-06-14
EP1479905A2 (en) 2004-11-24
US20040227427A1 (en) 2004-11-18

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