ITTO20040883A1 - Sensore di gas a film sottile sottile semiconduttore, con migliorata selettivita' - Google Patents

Sensore di gas a film sottile sottile semiconduttore, con migliorata selettivita'

Info

Publication number
ITTO20040883A1
ITTO20040883A1 ITTO20040883A ITTO20040883A1 IT TO20040883 A1 ITTO20040883 A1 IT TO20040883A1 IT TO20040883 A ITTO20040883 A IT TO20040883A IT TO20040883 A1 ITTO20040883 A1 IT TO20040883A1
Authority
IT
Italy
Prior art keywords
thin
film sensor
semiconductor gas
gas film
improved selectivity
Prior art date
Application number
Other languages
English (en)
Inventor
Elisabetta Comini
Nicola Poli
Giorgio Sberveglieri
Original Assignee
Infm Istituto Naz Per La Fisi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infm Istituto Naz Per La Fisi filed Critical Infm Istituto Naz Per La Fisi
Priority to ITTO20040883 priority Critical patent/ITTO20040883A1/it
Publication of ITTO20040883A1 publication Critical patent/ITTO20040883A1/it
Priority to PCT/EP2005/056798 priority patent/WO2006064029A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/10—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using catalysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
ITTO20040883 2004-12-17 2004-12-17 Sensore di gas a film sottile sottile semiconduttore, con migliorata selettivita' ITTO20040883A1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITTO20040883 ITTO20040883A1 (it) 2004-12-17 2004-12-17 Sensore di gas a film sottile sottile semiconduttore, con migliorata selettivita'
PCT/EP2005/056798 WO2006064029A1 (en) 2004-12-17 2005-12-14 Thin film semiconductor gas sensor with improved selectivity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO20040883 ITTO20040883A1 (it) 2004-12-17 2004-12-17 Sensore di gas a film sottile sottile semiconduttore, con migliorata selettivita'

Publications (1)

Publication Number Publication Date
ITTO20040883A1 true ITTO20040883A1 (it) 2005-03-17

Family

ID=35929599

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO20040883 ITTO20040883A1 (it) 2004-12-17 2004-12-17 Sensore di gas a film sottile sottile semiconduttore, con migliorata selettivita'

Country Status (2)

Country Link
IT (1) ITTO20040883A1 (it)
WO (1) WO2006064029A1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4325213A1 (en) * 2022-08-18 2024-02-21 Infineon Technologies AG A chemo-resistive gas sensing device comprising a catalytic gas filter arrangement

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0517366B1 (en) * 1991-06-07 1996-04-03 Ford Motor Company Limited Method and apparatus for sensing oxides of Nitrogen
DE19708770C1 (de) * 1997-03-04 1998-08-27 Siemens Ag Gassensor
DE19829916B4 (de) * 1998-07-06 2005-03-24 Envica Gmbh Verfahren zur Regeneration von Katalysatoren und regenerierte Katalysatoren
GB9903021D0 (en) * 1999-02-10 1999-03-31 Capteur Sensors & Analysers Gas sensors with improved specificity and poison resistance
DE19916798C2 (de) * 1999-04-14 2001-10-18 Daimler Chrysler Ag Dünnschicht-Halbleiter-Gassensor und Verfahren zum Nachweis von Gasen

Also Published As

Publication number Publication date
WO2006064029A1 (en) 2006-06-22

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