ITTO910536A0 - Stadio di pompaggio per pompa turbomolecolare - Google Patents

Stadio di pompaggio per pompa turbomolecolare

Info

Publication number
ITTO910536A0
ITTO910536A0 IT91TO536A ITTO910536A ITTO910536A0 IT TO910536 A0 ITTO910536 A0 IT TO910536A0 IT 91TO536 A IT91TO536 A IT 91TO536A IT TO910536 A ITTO910536 A IT TO910536A IT TO910536 A0 ITTO910536 A0 IT TO910536A0
Authority
IT
Italy
Prior art keywords
turbomolecular pump
pumping stage
pumping
stage
turbomolecular
Prior art date
Application number
IT91TO536A
Other languages
English (en)
Inventor
Giampaolo Levi
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to ITTO910536A priority Critical patent/IT1250804B/it
Publication of ITTO910536A0 publication Critical patent/ITTO910536A0/it
Priority to DE199292200472T priority patent/DE522603T1/de
Priority to DE69204121T priority patent/DE69204121T2/de
Priority to EP92200472A priority patent/EP0522603B1/en
Priority to ES199292200472T priority patent/ES2037652T1/es
Publication of ITTO910536A1 publication Critical patent/ITTO910536A1/it
Priority to US08/140,699 priority patent/US5387079A/en
Application granted granted Critical
Publication of IT1250804B publication Critical patent/IT1250804B/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/56—Fluid-guiding means, e.g. diffusers adjustable
    • F04D29/563—Fluid-guiding means, e.g. diffusers adjustable specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
ITTO910536A 1991-07-10 1991-07-10 Stadio di pompaggio per pompa turbomolecolare IT1250804B (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
ITTO910536A IT1250804B (it) 1991-07-10 1991-07-10 Stadio di pompaggio per pompa turbomolecolare
DE199292200472T DE522603T1 (de) 1991-07-10 1992-02-19 Pumpstufe fuer turbomolekularpumpe.
DE69204121T DE69204121T2 (de) 1991-07-10 1992-02-19 Pumpstufe für Turbomolekularpumpe.
EP92200472A EP0522603B1 (en) 1991-07-10 1992-02-19 Pumping stage for turbomolecular pumps
ES199292200472T ES2037652T1 (es) 1991-07-10 1992-02-19 Etapa de bombeo para bombas turbomoleculares.
US08/140,699 US5387079A (en) 1991-07-10 1993-10-21 Pumping state turbomolecular pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO910536A IT1250804B (it) 1991-07-10 1991-07-10 Stadio di pompaggio per pompa turbomolecolare

Publications (3)

Publication Number Publication Date
ITTO910536A0 true ITTO910536A0 (it) 1991-07-10
ITTO910536A1 ITTO910536A1 (it) 1993-01-10
IT1250804B IT1250804B (it) 1995-04-21

Family

ID=11409475

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO910536A IT1250804B (it) 1991-07-10 1991-07-10 Stadio di pompaggio per pompa turbomolecolare

Country Status (5)

Country Link
US (1) US5387079A (it)
EP (1) EP0522603B1 (it)
DE (2) DE69204121T2 (it)
ES (1) ES2037652T1 (it)
IT (1) IT1250804B (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5449270A (en) * 1994-06-24 1995-09-12 Varian Associates, Inc. Tangential flow pumping channel for turbomolecular pumps
JP2000183037A (ja) * 1998-12-11 2000-06-30 Tokyo Electron Ltd 真空処理装置
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE60304870T2 (de) * 2003-11-18 2006-11-30 Varian S.P.A., Leini Vakuumpumpe mit Schwingungsdämpfer
DE102005017418A1 (de) * 2005-04-15 2006-10-19 Leybold Vacuum Gmbh Turbomolekularpumpe
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3291236A (en) * 1961-10-12 1966-12-13 Aerophysics Company Ground effect machine
US3820916A (en) * 1972-05-12 1974-06-28 I Brusilovsky Axial flow reversible fan
DE2250559B2 (de) * 1972-10-14 1977-03-24 Paul Pollrich & Co, 4050 Mönchengladbach Regelblende fuer ventilatoren
DE3364522D1 (en) * 1982-08-27 1986-08-21 Comptech Inc Cryogenic pump having maximum aperture throttled port
US4531372A (en) * 1982-08-27 1985-07-30 Comptech, Incorporated Cryogenic pump having maximum aperture throttled part
JPS59168295A (ja) * 1983-03-16 1984-09-21 Hitachi Ltd タ−ボ分子ポンプ
JP2536512B2 (ja) * 1987-03-25 1996-09-18 株式会社島津製作所 タ−ボ分子ポンプの磁気軸受装置
FR2614369A1 (fr) * 1987-04-23 1988-10-28 Tagnon Luc Stator a pas variable
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.

Also Published As

Publication number Publication date
DE69204121T2 (de) 1996-02-01
EP0522603B1 (en) 1995-08-16
DE522603T1 (de) 1993-04-29
ES2037652T1 (es) 1993-07-01
EP0522603A1 (en) 1993-01-13
ITTO910536A1 (it) 1993-01-10
DE69204121D1 (de) 1995-09-21
US5387079A (en) 1995-02-07
IT1250804B (it) 1995-04-21

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970523