ITTO920613A1 - Supporto rivestito con diamante. - Google Patents

Supporto rivestito con diamante.

Info

Publication number: ITTO920613A1
Authority: IT; Italy
Prior art keywords: diamond; support coated; coated; support
Prior art date: 1991-07-23

Application number

IT000613A

Other languages

English (en)

Inventor

John B Goodman

Kirk J Mikkelsen

Original Assignee

Fluoroware Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-07-23

Filing date

1992-07-17

Publication date

1994-01-17

1992-07-17 Application filed by Fluoroware Inc filed Critical Fluoroware Inc

1992-07-17 Publication of ITTO920613A0 publication Critical patent/ITTO920613A0/it

1994-01-17 Publication of ITTO920613A1 publication Critical patent/ITTO920613A1/it

1996-01-15 Application granted granted Critical

1996-01-15 Publication of IT1257386B publication Critical patent/IT1257386B/it

Links

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
- H10P72/155—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls characterised by a material, a roughness, a coating or the like
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1911—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like

ITTO920613A 1991-07-23 1992-07-17 Supporto rivestito con diamante. IT1257386B (it)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US73479491A	1991-07-23	1991-07-23

Publications (3)

Publication Number	Publication Date
ITTO920613A0 ITTO920613A0 (it)	1992-07-17
ITTO920613A1 true ITTO920613A1 (it)	1994-01-17
IT1257386B IT1257386B (it)	1996-01-15

Family

ID=24953096

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
ITTO920613A IT1257386B (it)	1991-07-23	1992-07-17	Supporto rivestito con diamante.

Country Status (6)

Country	Link
JP (1)	JPH05198664A (it)
KR (1)	KR930003300A (it)
DE (1)	DE4223326A1 (it)
FR (1)	FR2679524A1 (it)
GB (1)	GB2257986A (it)
IT (1)	IT1257386B (it)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE4300205A1 (de) *	1993-01-07	1994-07-14	Deutsche Bundespost Telekom	Probenhalterung in Kassettenform
US6039186A (en) *	1997-04-16	2000-03-21	Fluoroware, Inc.	Composite transport carrier
JP3282584B2 (ja) *	1998-06-02	2002-05-13	信越ポリマー株式会社	精密部材用収納容器
JP2002046793A (ja) *	2000-04-26	2002-02-12	Asahi Glass Co Ltd	光学部材用収納ケース
DE10149037A1 (de) *	2001-10-05	2003-04-24	Infineon Technologies Ag	Waferhorde und Verfahren
DE10215283B4 (de) *	2002-04-05	2004-06-03	Astec Halbleitertechnologie Gmbh	Vorrichtung zur Aufnahme von Substraten
JP4616086B2 (ja) *	2005-06-14	2011-01-19	東芝物流株式会社	パネル状物品の収納トレイ
DE102010041230A1 (de) *	2010-09-23	2012-03-29	Evonik Degussa Gmbh	Verwendung von Diamond Like Carbon Schichten bei der Aufbringung metallionenfreier Halbleitertinten
CN111270218B (zh) *	2020-01-23	2021-07-06	电子科技大学	化学气相沉积碳修饰片状FeSiAl合金的制备方法
EP3929969B1 (de) *	2020-06-22	2023-12-06	Siltronic AG	Verfahren zum herstellen eines prozessbehälters für halbleiterwerkstücke und prozessbehälter
EP4068343A1 (de) *	2021-04-01	2022-10-05	Siltronic AG	Vorrichtung zum transport von halbleiterscheiben

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2514743B1 (fr) *	1981-10-21	1986-05-09	Rca Corp	Pellicule amorphe a base de carbone, du type diamant, et son procede de fabrication
US4872554A (en) *	1987-07-02	1989-10-10	Fluoroware, Inc.	Reinforced carrier with embedded rigid insert
JPH01201095A (ja) *	1988-02-04	1989-08-14	Idemitsu Petrochem Co Ltd	ダイヤモンド状炭素膜とその製造方法
JPH01259172A (ja) *	1988-04-09	1989-10-16	Idemitsu Petrochem Co Ltd	粉砕機
JPH02186656A (ja) *	1989-01-13	1990-07-20	Hitachi Ltd	低発塵装置
JP2816864B2 (ja) *	1989-07-07	1998-10-27	大塚化学株式会社	搬送用ウエーハバスケット及び収納ケース

1992
- 1992-07-09 KR KR1019920012200A patent/KR930003300A/ko not_active Withdrawn
- 1992-07-10 GB GB9214697A patent/GB2257986A/en not_active Withdrawn
- 1992-07-16 DE DE4223326A patent/DE4223326A1/de not_active Withdrawn
- 1992-07-17 IT ITTO920613A patent/IT1257386B/it active IP Right Grant
- 1992-07-22 JP JP21642692A patent/JPH05198664A/ja active Pending
- 1992-07-22 FR FR9209037A patent/FR2679524A1/fr active Pending

Also Published As

Publication number	Publication date
KR930003300A (ko)	1993-02-24
GB9214697D0 (en)	1992-08-19
DE4223326A1 (de)	1993-01-28
JPH05198664A (ja)	1993-08-06
FR2679524A1 (fr)	1993-01-29
IT1257386B (it)	1996-01-15
ITTO920613A0 (it)	1992-07-17
GB2257986A (en)	1993-01-27

Legal Events

Date	Code	Title	Description
1996-01-15	0001	Granted

Publication	Publication Date	Title
DE68900602D1 (de)	1992-02-06	Stuetzverband.
FR2697980B1 (fr)	1997-12-12	Oreiller support.
FI920399L (fi)	1992-07-31	Fluorescerande belaeggning.
ITMI922727A0 (it)	1992-11-27	Disposizione di supporto
NO905176L (no)	1990-11-29	Belagte tekstilmaterialer.
DE69111809D1 (de)	1995-09-07	Stütze.
FI895677A0 (fi)	1989-11-28	Dispenser.
ITTO920613A1 (it)	1994-01-17	Supporto rivestito con diamante.
IT232010Y1 (it)	1999-08-10	Supporto per sfera.
DE59201599D1 (de)	1995-04-13	Stützscheibe.
FR2675038B3 (fr)	1993-07-16	Support de mesoprothese.
FI892337L (fi)	1989-11-19	Dispenser foer gashaltiga drycker.
DE69203483D1 (de)	1995-08-24	Markisenstütze.
DE69103078D1 (de)	1994-09-01	Trägerelemente.
IT8983425A0 (it)	1989-06-09	Supporto su rotelle perfezionato.
DE59200204D1 (de)	1994-07-07	Teilzirkel.
NO892157D0 (no)	1989-05-29	Baereanordning.
IT8905209A0 (it)	1989-09-13	Sfera di supporto.
ES1003629Y (es)	1990-10-16	Portajeringas.
BR9204666A (pt)	1994-06-14	Suporte.
ITUD920152A0 (it)	1992-10-06	Supporto automassaggiante
FI884542A7 (fi)	1990-04-04	Stoedanordning.
IT9067065A1 (it)	1991-07-27	Supporto pneumostatico
ES1017545Y (es)	1992-07-01	Soporte publicitario.
ES1018845Y (es)	1992-10-01	Soporte expositor.