ITTO920734A1 - PROCEDURE AND EQUIPMENT FOR THE ABATEMENT OF GAS CONTENT NF3 - Google Patents

PROCEDURE AND EQUIPMENT FOR THE ABATEMENT OF GAS CONTENT NF3

Info

Publication number
ITTO920734A1
ITTO920734A1 IT000734A ITTO920734A ITTO920734A1 IT TO920734 A1 ITTO920734 A1 IT TO920734A1 IT 000734 A IT000734 A IT 000734A IT TO920734 A ITTO920734 A IT TO920734A IT TO920734 A1 ITTO920734 A1 IT TO920734A1
Authority
IT
Italy
Prior art keywords
abatement
procedure
equipment
gas content
gas
Prior art date
Application number
IT000734A
Other languages
Italian (it)
Inventor
Marco Braglia
Francesco Negrisolo
Original Assignee
Pirelli Cavi Spa
Sip
Sirti Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pirelli Cavi Spa, Sip, Sirti Spa filed Critical Pirelli Cavi Spa
Priority to ITTO920734A priority Critical patent/IT1263301B/en
Publication of ITTO920734A0 publication Critical patent/ITTO920734A0/en
Publication of ITTO920734A1 publication Critical patent/ITTO920734A1/en
Application granted granted Critical
Publication of IT1263301B publication Critical patent/IT1263301B/en

Links

ITTO920734A 1992-09-04 1992-09-04 Process and equipment for removing gas containing NF3 IT1263301B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ITTO920734A IT1263301B (en) 1992-09-04 1992-09-04 Process and equipment for removing gas containing NF3

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO920734A IT1263301B (en) 1992-09-04 1992-09-04 Process and equipment for removing gas containing NF3

Publications (3)

Publication Number Publication Date
ITTO920734A0 ITTO920734A0 (en) 1992-09-04
ITTO920734A1 true ITTO920734A1 (en) 1994-03-04
IT1263301B IT1263301B (en) 1996-08-05

Family

ID=11410706

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO920734A IT1263301B (en) 1992-09-04 1992-09-04 Process and equipment for removing gas containing NF3

Country Status (1)

Country Link
IT (1) IT1263301B (en)

Also Published As

Publication number Publication date
IT1263301B (en) 1996-08-05
ITTO920734A0 (en) 1992-09-04

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19971031