JP2000200553A - Plasma display panel - Google Patents

Abstract

(57) [Problem] A main problem of a plasma display panel (PDP) used for image display of a computer, a television, and the like is to improve a lighting failure due to a discharge delay during high-speed driving accompanying high definition. thing. SOLUTION: By providing a ferroelectric layer on at least one kind of electrode of a discharge cell constituting a PDP, a priming effect due to electron emission at the time of polarization reversal lowers a firing voltage and reduces an address defect due to a discharge delay. Significant improvement.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel (hereinafter, simply referred to as "PDP") used for displaying images on a computer, a television, and the like, and a method for manufacturing the same.

[0002]

2. Description of the Related Art A conventional PDP generally has a configuration as shown in FIG. This PDP has a front panel 1
00 and the back panel 200. Front panel 100
The scanning electrodes 102a and the sustaining electrodes 102b are alternately formed in a stripe shape on a front glass substrate 101, and are further formed of a dielectric glass layer 103 and a magnesium oxide (Mg).
gO) It is formed by being covered with the dielectric protection layer 104.

[0003] The rear panel 200 includes a rear glass substrate 20.
1, an address electrode 202 is formed in a stripe shape, an electrode protection layer 203 is formed so as to cover the address electrode 202, and a partition wall 204 is formed in a stripe shape on the electrode protection layer 203 so as to sandwich the address electrode 202. Furthermore, the partition wall 20
It is formed by providing a phosphor layer 205 between the four. The front panel 100 and the rear panel 200 are bonded together, and a discharge space is formed by filling a discharge gas into a space 210 partitioned by the partition wall 204. The phosphor layer is usually red for color display.
Phosphor layers of three colors of green and blue are arranged in order.

[0004] In the discharge space 210, for example, a discharge gas obtained by mixing neon and xenon is usually 0.6.
It is sealed at a pressure of about 7 × 10 ⁵ Pa. Next, a driving method of the PDP will be described. FIG.
FIG. 3 is a block diagram illustrating a configuration of a DP driving circuit. The drive circuit includes an address electrode drive unit 220, a scan electrode drive unit 230, and a sustain electrode drive unit 240.

[0005] The address electrode drive section 220 is connected to the address electrode 202 of the PDP, the scan electrode drive section 230 is connected to the scan electrode 102a, and the sustain electrode drive section 240 is connected to the sustain electrode 102b. Generally AC type PD
In P, a method of expressing a gradation by dividing an image of one frame into a plurality of subfields (hereinafter, referred to as “SF”) is used. In this method, 1S. Is applied to control the discharge of gas in the cell. F. Is further divided into four periods. The four periods will be described with reference to FIG. FIG. 14 shows a driving waveform during 1SF.

In FIG. 1, in a set-up period 250, wall charges are uniformly accumulated in all cells in a PDP in order to facilitate discharge. In the address period 260, writing discharge of the cell to be turned on is performed. Sustain period 27
At 0, the cells written in the address period 260 are turned on and the lighting is maintained. In the erase period 280, the lighting of the cell is stopped by erasing the wall charges.

In the setup period 250, the scan electrodes 10
A voltage higher than that of the address electrode 202 and the sustain electrode 102b is applied to 2a to discharge gas in the cell. The electric charge generated by this is applied to the address electrode 202 and the scanning electrode 1.
Negative charges are accumulated as wall charges on the surface of the protective film in the vicinity of the scan electrode 102a because the potential difference between the scan electrode 102a and the sustain electrode 102b is accumulated on the cell wall so as to cancel out the potential difference
Positive charges are accumulated as wall charges on the surface of the phosphor layer near the address electrodes and on the surface of the protective film near the sustain electrodes. The wall charges generate a predetermined value of wall potential between the scan electrode and the address electrode and between the scan electrode and the sustain electrode.

In the address period 260, when the cell is turned on, a voltage lower than that of the address electrode 202 and the sustain electrode 102b is applied to the scan electrode 102a, that is, the voltage between the scan electrode and the address electrode is in the same direction as the wall potential. And a voltage is applied between the scan electrode and the sustain electrode in the same direction as the wall potential to generate a write discharge. As a result, negative charges are accumulated on the phosphor layer surface and the protective layer surface, and positive charges are accumulated as wall charges on the protective layer surface near the scanning side electrode. As a result, a predetermined value of the wall potential is generated between the sustain electrode and the scan electrode.

In the sustain period 270, the scan electrode 102
A sustain discharge is generated by applying a higher voltage to a than in the sustain electrode 102b, that is, by applying a voltage between the sustain electrode and the scan electrode in the same direction as the wall potential. Thereby, cell lighting can be started. Then, by applying a pulse so that the polarity is alternately switched between the sustain electrode and the scan electrode, the pulse can be emitted intermittently.

In the erase period 280, an incomplete discharge is generated by applying a narrow erase pulse to the sustain electrode 102b, and the wall charges disappear, so that the erase operation is performed.

[0011]

By the way, when a television image is displayed because the number of scanning lines increases as the cell structure becomes higher definition, all the sequences within one field = 1/60 [s] are required. Must be terminated. In order to respond to this, it is necessary to perform high-speed driving by narrowing the pulse width of the address pulse applied during the writing period.However, there is a “discharge delay” that discharge occurs considerably later than the rise of the pulse. In addition, since the probability that the discharge ends within the applied pulse width is reduced, a writing error is likely to occur. For this reason, there is a problem that the image is roughened or flickered when displaying the image, and the image quality is extremely deteriorated.

In the address period, when a "discharge delay" occurs, a lighting failure occurs in that the cells to be lighted do not light. Further, in the conventional configuration, when the first sustain pulse is applied during the sustain period, the charge in the cell is attenuated and reduced, so that the "discharge delay" is large, so that the discharge ends within the applied pulse width. Since the probability is low, the flickering of the outline of the image when displaying a moving image is large, and there is a problem that the image quality is greatly reduced.

When a "discharge delay" occurs during the sustain period, a lighting failure occurs such that a cell to be turned on does not turn on and a desired gradation cannot be displayed. The present invention has been made in view of the above problems, and has been described in terms of "discharge delay".
The main object of the present invention is to provide a PDP having a structure effective for preventing the occurrence of a PDP and a method for manufacturing the same.

[0014]

First, it is considered that the main cause of the discharge delay is that initial electrons serving as a trigger when the discharge is started are hardly released from the substrate surface into the discharge space. Therefore, if it is possible to create a situation in which the initial electrons are easily emitted, it is considered that a discharge delay can be effectively prevented.

As a method for this purpose, a method of increasing the drive pulse voltage at the time of addressing / sustaining discharge or reducing the distance between the electrodes can be considered. However, the increase in the pulse voltage is such that the withstand voltage of the switching element of the drive circuit and the slew rate are in a contradictory relationship. Therefore, in the high withstand voltage element, the rise of the pulse is slowed down, and there is a limit in suppressing the discharge delay time. Reducing the distance between the electrodes also decreases the height of the partition walls at the same time. However, if the height of the partition walls is reduced in this way, the discharge space itself is reduced, and the volume per unit volume surrounding the plasma is reduced. Since the area of the wall surrounding the discharge space increases, the efficiency is reduced due to the so-called wall loss that the plasma disappears when the plasma collides with the wall.

Accordingly, the present inventors have sought a panel structure that can prevent a discharge delay even if the configuration of the drive circuit and the distance between the electrodes follow the conventional one without any change. Was. On the other hand, in recent years, an electron emission phenomenon at the time of polarization inversion of a ferroelectric has attracted attention. Reported by Shur et al. (App. Phys. Lett., Vo.
l. 70, no. 5,3 February 1997
pp. 574-576).

Therefore, the inventors of the present invention have paid attention to the fact that the above-mentioned driving method is a method in which a discharge is generated by inverting the polarity of an electrode, a cell to be lit is specified, and the lit cell is maintained. When a ferroelectric substance was arranged in the present invention, it was found that discharge delay was effectively prevented, and the present invention was reached. That is, in the present invention, by arranging the ferroelectric material so as to cover the vicinity of the electrode or almost the entire outer surface of the discharge cell facing the electrode, discharge of electrons emitted at the time of polarization inversion of the ferroelectric material is started. A source of initial electrons that can be used as a trigger. Therefore, it is considered that a discharge delay due to the initial electron deficiency is prevented.

Specifically, by disposing a ferroelectric substance near an electrode to which a voltage for selecting a discharge cell for generating a discharge at the time of driving is applied, it is possible to effectively prevent a discharge delay in an address period. it can. In addition, by disposing a ferroelectric substance near an electrode to which a voltage for maintaining light emission during driving is applied, a discharge delay in a sustain period can be effectively prevented. The effect of preventing the discharge delay is considered to be more effective because the larger the surface area of the ferroelectric substance disposed in the discharge space, the larger the area of the surface from which electrons are emitted.

As described above, in order to achieve the above object, the present invention provides a plasma display panel using a method of generating a potential difference between a pair of electrodes and discharging a gas sealed in a discharger. A ferroelectric substance is provided near at least one of the electrodes. Here, the plasma display panel has a first substrate in which a plurality of electrode pairs of a first electrode and a second electrode arranged in a stripe shape are arranged in parallel, and a third electrode formed in a stripe shape. The second substrate arranged side by side and the third electrode is disposed facing the first electrode and the second electrode with a partition wall interposed therebetween, and the discharger has a third electrode. Corresponds to the space formed between the two substrates intersecting the first electrode and the second electrode, the ferroelectric, the first electrode, the second electrode and the third electrode May be arranged in the vicinity of at least one of the electrodes on the discharger side.

Thus, it is possible to prevent a discharge delay in any of the address period and the sustain period. Here, the ferroelectric substance may be laminated on at least one of the first electrode, the second electrode, and the third electrode on the surface of the discharger. Here, assuming that the length Wa of the short side of the electrode on which the ferroelectric is laminated and the length Wb of the short side of the ferroelectric are 0.1 Wa ≦ Wb ≦ W
a can be satisfied.

Here, the length of the short side of the ferroelectric layer can be reduced from the electrode on which the ferroelectric layer is stacked toward the discharger. As a result, the current density is increased at the end of the ferroelectric on the discharge space side, so that the electric field strength between the scan electrode and the sustain electrode is locally increased. As a result, it becomes possible to further lower the discharge starting voltage of the cell and further widen the voltage margin as compared with the case where the shape of the ferroelectric layer is not specified as described above.

Here, the first electrode and the second electrode are composed of a transparent electrode and a metal electrode disposed on the surface of the transparent electrode on the discharger side. A ferroelectric substance may be provided on the inside of the transparent electrode opposite to the position where the metal electrode is provided. Generally, when the scanning electrode and the sustaining electrode are composed of the transparent electrode and the metal electrode as described above, the facing distance between the transparent electrodes is set as large as possible, so that the discharge area is made as large as possible and the voltage margin is reduced. We plan expansion. Then, the metal electrode is formed to have a smaller width than the transparent electrode on the outer side opposite to the transparent electrode so as to enhance the efficiency of extracting visible light generated in the cell. In this electrode configuration, the discharge area can be increased and the voltage margin can be increased by setting the distance between the transparent electrodes wide, but the distance between the electrodes is increased, so that the discharge starting voltage increases. I will. Therefore, in order to reduce the discharge starting voltage, it is generally considered to use a dielectric having a high relative dielectric constant instead of a ferroelectric as a dielectric layer. Even if a dielectric having a high dielectric constant is used as the dielectric layer, the effect of increasing the discharge area and the effect of reducing the discharge starting voltage are obtained, but the voltage margin is reduced. On the other hand, when the ferroelectric layer is formed on the inner side of the transparent electrode, the effect of increasing the discharge area, the effect of increasing the voltage margin, and the effect of reducing the discharge starting voltage can be achieved at the same time. this is,
Possible reasons include electron emission at the time of polarization reversal and a sudden change in the potential of the substrate surface at the time of polarization reversal.

Here, a buffer layer for matching the lattice constant with the ferroelectric layer may be interposed between the ferroelectric and the transparent electrode. As a result, a ferroelectric layer having good crystallinity, which is strongly oriented in the (001) plane with respect to the substrate surface and whose polarization axis is nearly parallel to the direction of the electric field applied to the ferroelectric layer. As a result, an electron is more efficiently emitted at the time of polarization inversion, and an excellent PDP having a low driving voltage and high efficiency can be realized.

Here, magnesium oxide can be used for the buffer layer. In addition, in order to achieve the above object, in a plasma display panel using a method of generating a potential difference between a pair of electrodes and discharging a gas sealed in a plurality of dischargers, at least one of the pair of electrodes has A ferroelectric material is provided so as to cover almost the entire outside of the discharge vessel facing the discharge vessel.

Here, an ABO ₃ type oxide ferroelectric containing lead titanate as a main component can be used as the ferroelectric. Here, as the ferroelectric, an ABO ₃ type oxide ferroelectric containing at least one of lead, titanium, and zirconium as a main component can be used.
Here, as the ferroelectric, an ABO ₃ type oxide ferroelectric containing at least one of lead, lanthanum, and titanium as a main component can be used.

Here, the ferroelectric includes at least one of a first group consisting of lead, lanthanum and samarium and at least one of a second group consisting of titanium, zirconium and manganese. An ABO ₃ type oxide ferroelectric containing at least one type as a main component can be used. Here, the ferroelectric material includes at least one of a group consisting of calcium, strontium, and barium, and an ABO ₃ -type oxide ferromagnetic material mainly containing at least one of titanium and manganese. A dielectric can be used.

Here, the ferroelectric material is at least one of a group consisting of barium, strontium, and lanthanum, and ABi ₂ B ₂ containing at least one of titanium and tantalum as a main component. O ₉ -type layered perovskite oxide ferroelectric can be used. Here, the ferroelectric is Ba _x Sr _(1-x) TiO ₃ or Pb.
It can be used _{TiO 3 -PZT-Pb (Nb 2/3} Mg 1/2) O 3 based ferroelectric composites.

Here, the ferroelectric is made of PZT mainly containing lead, titanium and zirconium and Pb (Nb _2/3 Mg _1/2 ) O ₃ oxide mainly containing lead, niobium and magnesium. Can be used. Here, the ferroelectric is at least one of a first group consisting of lead, lanthanum, and samarium;
Titanium, zirconium, niobium, tantalum, manganese,
ABO ₃ perovskite-A comprising at least any one of a second group consisting of magnesium and nickel, zinc, iron and cobalt, and at least one kind of a third group consisting of magnesium, nickel, zinc, iron and cobalt. (B _2/3 C
_1/3 ) O ₃ composite perovskite solid solution or a ferroelectric composite material composed of a mixed phase can be used.

Here, the electrode on which the ferroelectric is laminated may be formed of a metal mainly containing at least one of platinum, ruthenium and iridium. In order to orient the ferroelectric thin film, it is important to match the crystal lattice constant of the underlying portion of the ferroelectric layer. If platinum or the like having a lattice constant close to that of a ferroelectric crystal is used, it is possible to directly grow a crystal of a ferroelectric thin film thereon. As a result, the crystallinity of the ferroelectric layer is high and the polarization axis approaches perpendicular to the substrate, so that the discharge delay can be more effectively prevented.

Here, the pressure of the gas sealed in the discharger is 1.01 × 10 ^{5 to} 5.33 × 10 ⁵ Pa (7
60 Torr to 4000 Torr). Here, a mixture of a rare gas containing at least one of helium, neon, xenon, and argon can be used as the sealed gas. Here, a gas containing 5% by volume or less of xenon, 0.5% by volume or less of argon, and less than 55% by volume of helium can be used as the sealed gas.

According to another aspect of the present invention, there is provided a method of manufacturing a plasma display panel using a method in which a potential difference is generated between a pair of electrodes of a plasma to discharge a gas sealed in a discharger. A transparent electrode forming step of forming a transparent electrode on a substrate, a buffer layer forming step of forming a buffer layer for matching a lattice constant with a ferroelectric layer on the transparent electrode, A ferroelectric layer forming step of forming a ferroelectric layer by ECR sputtering is provided.

Here, the ferroelectric layer forming step includes:
The method may include a sub-step of performing patterning by a laser ablation method. Further, in order to achieve the above object, the present invention provides a method for manufacturing a plasma display panel using a method of generating a potential difference between a pair of electrodes and discharging a gas sealed in a discharger, wherein the transparent electrode is formed. A transparent electrode forming step on the substrate, a buffer layer forming step of forming a buffer layer on the transparent electrode for matching a lattice constant with a ferroelectric layer, and a ferroelectric layer on the buffer layer Is formed by a MOCVD method.

Here, the ferroelectric material forming step may include a sub-step of performing an annealing process by a rapid thermal annealing method. here,
The ferroelectric forming step may include a sub-step of performing an annealing process by a laser annealing method.

[0034]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A PDP according to an embodiment of the present invention will be described below with reference to the drawings. <First Embodiment> FIG. 1 is a perspective view of an AC surface discharge type PDP 1 (hereinafter simply referred to as PDP 1) according to an embodiment of the present invention.

The PDP 1 generates a discharge inside the panel by applying a pulsed voltage to each electrode, and emits visible light of each color generated on the rear panel PA2 side by the discharge from the main surface of the front panel PA1. This is an AC surface discharge type PDP that allows transmission. In the front panel PA1, a dielectric glass layer 13 is formed on a front glass substrate 11 in which a plurality of pairs of scan electrodes 12a and sustain electrodes 12b are arranged in a stripe pattern so as to cover the surface of a portion other than the sustain electrodes 12b. And
Further, a protective layer 14 is formed so as to cover the dielectric glass layer 13.
Is formed.

On the surface of the scanning electrode 12a, the ferroelectric layer 1
5 are formed. The ferroelectric layer 15 is provided in contact with the surface of the scanning electrode 12a so as to have the same width as the length of the short side of the scanning electrode 12a along the extending direction of the scanning electrode 12a. Since the dielectric glass layer 13 and the protective layer 14 do not cover the surface of the ferroelectric layer 15, as shown in FIG. 2 (FIG. 2 is a vertical sectional view including the line XX in FIG. 1). ) The surface of the ferroelectric layer 15 is
It is exposed to.

On the other hand, the rear panel PA2 is arranged on a rear glass substrate 16 in which the address electrodes 17 are arranged in stripes so as to be orthogonal to the scanning electrodes 12a and the sustain electrodes 12b so as to cover the address electrodes 17. An electrode protection layer 18 that protects the electrodes and reflects visible light to the front panel side is formed, and extends on the electrode protection layer 18 in the same direction as the address electrodes 17.
Partition walls 19 are erected so as to sandwich the address electrode 17, and a phosphor layer 20 is arranged between the partition walls 19.

The driving of the PDP having the above-mentioned structure is performed by the above-described FIG.
Is driven using the driving circuit shown in FIG. Note that the address electrode 220 is connected to the address electrode 17, the scan electrode driver 230 is connected to the scan electrode 12 a, and the sustain electrode driver 240 is connected to the sustain electrode 12 b. Fabrication of front panel PA1: First, scan electrodes 12a and sustain electrodes 12b are formed on front glass substrate 11 so as to be alternately arranged.

The scan electrode 12a and the sustain electrode 12b are metal electrodes, and are formed by depositing platinum by electron beam evaporation and then patterning by lift-off. Next, BaTi is placed on the scanning electrode 12a.
A ferroelectric layer 15 is formed by forming an O ₃ (BT) thin film by RF magnetron sputtering and patterning by chemical etching.

Next, a dielectric glass layer is formed so as to cover portions other than the ferroelectric layer 15. Specifically, without peeling the resist used for protecting the ferroelectric during the chemical etching, a low melting point lead glass-based paste is printed as the dielectric glass 13 and then dried, the resist is peeled, and then baked. As a result, the dielectric glass 37 is formed in a portion other than the ferroelectric layer 15.

Next, a protective layer 14 is formed on the surface of the dielectric glass layer 13.
To form More specifically, a resist is patterned on the ferroelectric layer 15 to cover it, and a protective film 14
After forming the gO thin film by the electron beam evaporation method, the resist is peeled off, and a protective film 14 is formed on the surface of the dielectric glass layer 13. Fabrication of back panel PA2: The back panel PA2 has an address electrode 17 formed on a back glass substrate 16, covered thereon with an electrode protection layer 18, and a partition wall 19 formed on the surface of the electrode protection layer 18. It is manufactured by forming the phosphor layer 20 on the substrate.

The address electrodes 17 are formed on the rear glass substrate 16.
It is manufactured by the same method as that of the scanning electrode 12a and the sustain electrode 12b. The electrode protection layer 18 is formed by printing on the address electrode 17 using a printing method such as a screen printing method and then firing the same, and is made of a glass composition similar to that of the dielectric glass layer 13. ,
This is a thin film containing titanium oxide (TiO ₂ ) particles.

The partition wall 19 is formed by applying a partition wall forming raw material by a method such as a screen printing method, a lift-off method, or a sand blast method, baking it, and then processing the top of the partition wall. . The phosphor layer 20 is formed by a method such as a screen printing method and a nozzle spraying method.

As the phosphor, those generally used can be mentioned. For example, the following can be used. Red phosphor: Y ₂ O _3: Eu ³⁺ Green phosphor: Zn ₂ SiO _4: Mn Blue phosphor: BaMgAl ₁₀ O _17: Eu ²⁺ panel bonding PDP finished by: Next, the front and rear panel PA1 The panel PA2 is positioned such that the scanning electrodes 12a, the sustain electrodes 12b, and the address electrodes 17 are orthogonal to each other, and both panels are bonded to each other. Then, the partition 19
Discharge gas (for example, He)
-Xe-based or Ne-Xe-based inert gas) is sealed at a predetermined pressure to complete the PDP.

The above is the description of the PDP manufacturing method. Next, functions and effects unique to the PDP will be described. First, in the PDP 1, since the ferroelectric layer 15 is provided on the surface on the discharge space side of the scan electrode 12a, the discharge delay can be prevented in the address period and the sustain period as described above. In other words, in the address period, the discharge is started by inverting the polarity of the address electrode-scanning electrode, so that the electrons are emitted from the surface of the ferroelectric layer 15 into the discharge space at the time of the polarization inversion. Thus, it is considered that the discharge delay is improved by the priming effect. In the sustain period, the discharge is started by inverting the polarity of the scan electrode and the sustain electrode, so that the discharge delay is considered to be improved for the same reason.

It has been found that the effect of preventing the discharge delay is improved as the crystallinity of the formed ferroelectric layer is high and the polarization axis is closer to the vertical to the substrate. In order to orient the ferroelectric thin film, it is important to match the lattice constant of the crystal to be the base of the ferroelectric layer. Since platinum having a lattice constant close to that of the crystal is used, it is possible to directly grow a crystal of a ferroelectric thin film on this.

Further, the larger the area of the portion of the ferroelectric layer exposed to the discharge space, the greater the amount of electrons emitted during polarization reversal, so that the effect of preventing the discharge delay is remarkable. Further, by providing the ferroelectric layer, the voltage margin during the sustaining operation can be widened. This is considered to be due to a sudden change in the potential of the substrate surface at the time of polarization reversal, and a decrease in the discharge sustaining operation voltage due to a higher dielectric constant of the ferroelectric layer than that of the lead-based low-melting glass. Can be

Further, since the ferroelectric substance itself is polarized, it is considered that a larger electric field is generated in the discharge space below the ferroelectric substance than in the case where no ferroelectric substance is used. Therefore, assuming that the amount of ions does not increase because the speed of electrons increases, the luminous efficiency improves. FIG. 3 shows the relationship between the thickness of the dielectric glass layer of the PDP having the conventional configuration and the discharge starting voltage Vf of the cell. As is clear from the graph of FIG. 3, Vf decreases as the thickness of the dielectric glass layer decreases. However, in a PDP having a conventional configuration, if the film thickness is reduced to 20 μm or less, the withstand voltage is reduced due to defects inherent to the thick film process such as bubbles and foreign substances in the dielectric glass layer, and dielectric breakdown of the dielectric glass layer is reduced. For this reason, the film thickness could be reduced only to about 25 μm. For this reason, in an actual PDP, the drive voltage could only be reduced to about 180V.

In the PDP 1, the relative dielectric constant is much higher than that of the dielectric glass layer in the vicinity of the sustaining electrode, and the ferroelectric layer that emits electrons at the time of polarization inversion is provided. In other words, the discharge starting voltage of the cell can be reduced without lowering the discharge efficiency. Also, even when the thickness of the dielectric glass layer is set to be slightly thicker, electrons emitted by polarization reversal of the ferroelectric layer become initial electrons of the discharge and have a priming effect, so that the discharge starting voltage of the cell is Does not increase much.

An electric field concentrates on the ferroelectric layer.
As a result, discharge occurs only in the same cell, and
Stokes are less likely to occur. In this embodiment,
Uses platinum (Pt) as the lower electrode of the ferroelectric layer.
However, the present invention is not limited to this configuration, and Pt / T
i, Ru, RuO _Two, Ir, IrO_Two, SrRuO_ThreeAnd
The same effect can be obtained by using
You.

<Experimental Example> PDP based on the first embodiment
And a discharge starting voltage of the cell was measured. As a comparative example, a PDP having a conventional configuration was manufactured, and the cell discharge start voltage was measured in the same manner. Table 1 shows the results.

[0052]

[Table 1]

The relative dielectric constants shown in the drawings in the examples are specific dielectric constants of the ferroelectric (the same applies to the following tables). As can be seen from this result, the PDP according to the example had a lower cell firing voltage than the comparative example. This is considered to be because the primary electrons emitted by the polarization reversal of the ferroelectric layer have a priming effect as initial electrons of the discharge as described above.

Second Embodiment FIG. 4 is a perspective view showing one configuration of a PDP according to a second embodiment of the present invention. The difference from the first embodiment is that a strong voltage is applied near an address electrode to which a pulse voltage is applied during an address discharge operation for selecting a discharge cell to be lit, and near a sustain electrode to which a pulse voltage is applied to maintain a discharge operation. That is, a dielectric layer is provided.

That is, as shown in FIG.
A ferroelectric layer 23 was provided on the surface on the side of the discharge space to cover the ferroelectric layer 22 and the address electrode 17. The ferroelectric layer 22 is laminated on the surface of the stripe-shaped sustain electrode 12b similarly to the ferroelectric layer 15. The dielectric glass layer 13 and the protective layer 14 are formed so as to cover the panel substrate portion other than the ferroelectric layer 22, and the surface of the ferroelectric layer 22 is exposed to the discharge space.

The electrode protection layer 19 is formed so as to cover portions other than the ferroelectric layer 22. The phosphor layer 20 is provided so as to cover the upper part of the ferroelectric layer 22. With such a configuration, basically, the operation and effect as described in the section of the first embodiment can be obtained. <Experimental Example> A PDP was prototyped based on the second embodiment, and a write pulse voltage and a voltage margin at the time of address were measured. As a comparative example, a PDP having a conventional configuration was manufactured, and similar values were measured.

Table 2 shows the results.

[0058]

[Table 2]

As can be seen from this result, the conventional PDP
It can be seen that, in comparison with the panel of the second embodiment, the data write voltage required for the address operation is lower and the margin is wider. The data write voltage has dropped
This is probably because the primary electrons emitted by the polarization reversal of the ferroelectric layer had a priming effect as initial electrons of the discharge, thereby lowering the firing voltage. The voltage margin was widened because the potential of the substrate surface changed rapidly during polarization reversal, and the discharge sustaining operation voltage decreased because the relative dielectric constant of the ferroelectric layer was higher than that of lead-based low-melting glass. Conceivable.

Third Embodiment FIG. 5 is a perspective view showing one configuration of a PDP according to a third embodiment of the present invention. The configuration of the PDP according to the present embodiment is basically the same as the configuration of the PDP according to the first embodiment, except that a ferroelectric layer is also provided near the sustain electrode. That is, FIG.
As shown in FIG. 7, a ferroelectric layer 24 is formed not only on the scan electrode 12a but also on the sustain electrode 12b along the surface of the sustain electrode 12b in the same manner as the ferroelectric layer 15. Note that the surface of the ferroelectric layer 24 is also exposed to the discharge space similarly to the ferroelectric layer 15.

With such a configuration, basically the same operation and effect as those of the PDP according to the first embodiment can be obtained, but a ferroelectric layer is provided both in the vicinity of the scanning electrode and the sustain electrode. Therefore, the electric field strength between the scanning electrode and the sustain electrode is larger than that in the case where the electric field is provided in the vicinity of either one of them, and it is considered that the luminous efficiency is further improved.

<Experimental Example> PDP based on Embodiment 3
And a sustain pulse voltage and a voltage margin during the sustain were measured. As a comparative example, a PDP having a conventional configuration was manufactured, and similar values were measured. Table 3 shows the results.

[0063]

[Table 3]

As can be seen from this result, the conventional PDP
In comparison with the panel of the third embodiment, the sustain pulse voltage required for the sustain operation is lower and the margin is wider. This is because the primary electrons emitted by the polarization reversal of the ferroelectric layer have a priming effect as the initial electrons of the discharge, so that the firing voltage is lowered, and the relative dielectric constant of the ferroelectric layer is lower than that of the lead-based low-melting glass. Therefore, it is considered that the sustain operation voltage was lowered.

<Embodiment 4> FIG. 6 is a perspective view showing one configuration of a PDP according to an embodiment of the present invention.
FIG. 2 is a vertical sectional view taken on a plane including the line YY in FIG. 1. The PDP according to the present embodiment is basically the same as the PDP according to the third embodiment, except that the scanning electrodes 12a and the sustaining electrodes 12b on the front glass substrate 11 are
The difference is that the transparent electrodes 12a1 and 12b1 made of a thin film of O or tin oxide are formed on the transparent electrode and the metal electrodes 12a2 and 12b2 are formed on the transparent electrode and have a smaller width.

That is, as shown in FIG.
a1 and 12b1, metal electrodes 12a2,
By providing 12b2, a scanning electrode and a sustain electrode were formed. Then, ferroelectric layers 25 and 26 were provided on the inner sides facing the transparent electrodes 12a1 and 12b1. The surfaces of the ferroelectric layers 25 and 26 are exposed to the discharge space 21.

With this configuration, the same functions and effects as those of the PDP according to the third embodiment can be obtained, but specific functions and effects can be obtained in the following points.
Generally, when the scanning electrode and the sustaining electrode are composed of the transparent electrode and the metal electrode as described above, the facing distance between the transparent electrodes is set as large as possible, so that the discharge area is made as large as possible and the voltage margin is reduced. We plan expansion. And
In order to enhance the efficiency of extracting visible light generated in the cell, the metal electrode is formed to have a narrower width than the transparent electrode on the outer side opposite to the transparent electrode. In this electrode configuration, it is possible to increase the discharge area and the voltage margin by setting the distance between the transparent electrodes wide,
Since the distance between the electrodes is increased, the firing voltage is increased. Therefore, in order to reduce the firing voltage,
Although it is generally considered that a dielectric having a high relative permittivity rather than a ferroelectric is used as a dielectric layer, a dielectric having a high relative permittivity instead of a ferroelectric is simply used as a dielectric layer. Even if it does, the effect of increasing the discharge area and the effect of reducing the discharge starting voltage can be obtained, but the voltage margin is reduced. On the other hand, when the ferroelectric layer is formed on the inner side facing the transparent electrode, the effect of increasing the discharge area, the effect of increasing the voltage margin, and the effect of reducing the discharge starting voltage can be achieved at the same time. This may be due to electron emission at the time of polarization inversion, or a sudden change in the potential of the substrate surface at the time of polarization inversion.

<Experimental Example> PDP based on Embodiment 4
And a sustain pulse voltage during sustain, a voltage margin, and a relative luminous efficiency were measured. As a comparative example, a PDP having a conventional configuration was manufactured, and similar values were measured. Table 4 shows the results.

[0069]

[Table 4]

The luminous efficiency of each panel was measured as follows. The output of the arbitrary waveform generator was voltage-amplified by a high-speed high-voltage amplifier and applied to the discharge cells of the PDP to drive with various waveforms. Further, using the same principle as that of the Sawyer tower circuit used for evaluating the characteristics of ferroelectrics and the like, the change ΔQ of the electric charge Q accumulated in the discharge cell due to the voltage V applied to the discharge cell is expressed by V−Q
By observing the Lissajous figure, a relative comparison of the power consumed in the discharge cells by the discharge was performed. At the same time, a light emission peak waveform was observed using the photodiode PD, a relative comparison of the light emission luminance was performed from the integrated value of the light emission peak, and a relative comparison of the light emission efficiency of the PDP was performed. The measurement of ΔQ is based on the change ΔVc of the potential difference Vcs between both ends of the reference capacitor Cs connected in series to the discharge cell before and after the discharge.
s [V] was measured using an oscilloscope, multiplied by the capacitance Cs [F] of the reference capacitor, and calculated from the formula: ΔQ [C] = Cs [F] × ΔVcs [V].

As can be seen from the results shown in Table 4, in the panel of the fourth embodiment, the sustain pulse voltage required for the sustain operation is almost the same, the margin is widened, and the efficiency is higher than that of the conventional PDP. It can be seen that is improved about 1.3 times.
This is because the primary electrons emitted by the polarization reversal of the ferroelectric layer have a priming effect as the initial electrons of the discharge, so that the firing voltage is lowered, and the relative dielectric constant of the ferroelectric layer is lower than that of the lead-based low-melting glass. Higher, because the electric field strength was concentrated inside the discharge cell by being disposed inside the transparent electrode, and furthermore, the discharge starting voltage was lowered due to a sudden change in the potential of the substrate surface during polarization reversal. it is conceivable that.

In this case, the length (width) Wb of the short side of the striped ferroelectric layer and the length (width) of the short side of the transparent electrode are set.
Similar results were obtained when Wa was in the range of 0.1 Wa ≦ Wb ≦ Wa. <Fifth Embodiment> FIG. 8 is a cross-sectional view showing one configuration of a PDP according to the present embodiment, and is a cross-sectional view of a panel corresponding to FIG. The configuration of the PDP according to the present embodiment is basically the same as that of the PDP according to the first embodiment, except that the width on the discharge space side in the cross section of the ferroelectric layer is made smaller than the width on the electrode side. The difference is the trapezoid.

That is, as shown in FIG.
In the ferroelectric layer 15, the length of the short side is gradually reduced from the electrode side to the discharge space side. Such a trapezoidal ferroelectric layer 27 is formed by first forming a ferroelectric thin film by RF magnetron sputtering, patterning the ferroelectric thin film to a width of w2 by a chemical etching method, and then forming w1 (w1) thereon. <W
A resist having a width of 2) is formed and formed by chemical etching. As a result, a ferroelectric layer having a trapezoidal cross section in which the length (width) of the short side of the end on the electrode side is w2 and the length (width) of the short side of the end on the discharge space side is w1 is obtained.

With this configuration, the current density is increased at the end 27a of the ferroelectric on the discharge space side, so that the electric field strength between the scan electrode and the sustain electrode is locally increased. As a result, it becomes possible to further lower the discharge starting voltage of the cell and to further widen the voltage margin, as compared with the case where the cross-sectional shape of the ferroelectric layer is not specified to be trapezoidal.

<Experimental Example> PDP based on Embodiment 5
Were fabricated, and the write pulse voltage and the voltage margin at the address were measured. As a comparative example, a PDP having a conventional configuration was manufactured, and similar values were measured. Table 5 shows the results.

[0076]

[Table 5]

As can be seen from this result, the conventional PDP
In comparison with the panel of the fifth embodiment, the data write voltage required for the address operation is lower and the margin is wider. This is because the primary electrons emitted by the polarization reversal of the ferroelectric layer have a priming effect as the initial electrons of the discharge, so that the firing voltage is lowered, and the relative dielectric constant of the ferroelectric layer is lower than that of the lead-based low-melting glass. It is thought that the writing voltage was lowered because the electric field strength was further concentrated in the discharge cells by making the cross-sectional shape a trapezoidal shape whose width on the discharge space side was narrower than the width on the electrode side. Can be

<Embodiment 6> PD according to this embodiment
The structure of P is basically the same as that of the PDP according to the first embodiment, but the ferroelectric layer 15 is a perovskite-type lead-based oxide ferroelectric Pb _(1-x) La _x Ti _{( 1-x / 4)}
The difference is that O ₃ (PLT) is used. This ferroelectric is
Since the relative dielectric constant is higher than the BT, the luminous efficiency can be further improved, and the discharge starting voltage can be further reduced.

X = 0.00 to 0.25 as the ferroelectric layer
PLT can be used. In addition to the PLT as the ferroelectric layer, at least one of the group A consisting of lead, lanthanum and samarium as the ferroelectric and at least any one of the group B consisting of titanium, zirconium and manganese. An ABO3 perovskite-type oxide ferroelectric containing at least one of them as a main component, a composite solid solution thereof, and a mixed phase can also be used.

<Experimental Example> PDP based on the sixth embodiment
And a discharge starting voltage of the cell was measured. As a comparative example, a PDP having a conventional configuration was manufactured, and similar values were measured. As the ferroelectric, a ferroelectric with x = 0.05 and 0.15 in PLT was used. Table 6 shows the results.

[0081]

[Table 6]

As can be seen from this result, Vf is reduced to about 160 V by providing a ferroelectric layer of x = 0.05. Further, by providing a ferroelectric layer of x = 0.15, Vf is reduced to about 150V. This is considered to be because primary electrons were emitted due to polarization reversal of the ferroelectric layer, and the electrons had a priming effect as initial electrons of discharge, so that the firing voltage was lowered. Therefore, it can be seen that the effect of primary electron emission at the time of polarization inversion is higher in the ferroelectric substance of x = 0.15 than in the ferroelectric substance of x = 0.05.

<Seventh Embodiment> The P according to the seventh embodiment
The configuration of the DP is basically the same as that of the PDP according to the first embodiment, but the ferroelectric layer 15 is a bismuth-based layered perovskite-type oxide ferroelectric SrBi ₂ Ta _2.
The point using O ₉ is different. Table 7 shows PLT and Sr
₉ shows switching fatigue characteristics due to polarization reversal of Bi ₂ Ta ₂ O ₉ .

[0084]

[Table 7]

The PLT, which is a lead-based perovskite oxide ferroelectric, has a switching life of 1011 times due to a decrease in fatigue in which remanent polarization is reduced by about 1011 times of switching. On the other hand, SrBi ₂ Ta ₂ O ₉ retains remanent polarization up to about 1012 times, indicating that it is a ferroelectric material having excellent fatigue characteristics. FIG. 9 shows a result obtained by driving the PDP having the configuration according to the seventh embodiment using the drive waveforms shown in FIG. 14 and measuring the change with time of the optimum drive voltage. In the case of using the PLT, it can be inferred that the drive voltage starts to increase from the time when about 1000 hours have elapsed and the effect of electron emission due to polarization reversal is almost eliminated in 10,000 hours. On the other hand, when SrBi ₂ Ta ₂ O ₉ was used, the driving voltage did not increase even after 10,000 hours,
It can be inferred that the effect of electron emission by polarization reversal is maintained up to about 30,000 hours.

As apparent from this, the PDP according to the present embodiment has a low driving voltage and a low driving voltage by using a bismuth-based layered perovskite oxide ferroelectric material having excellent switching fatigue characteristics as the ferroelectric layer. PDP that displays very good image quality in terms of long life
Can be realized. Further, in the present embodiment, SrBi ₂ Ta ₂ O ₉ is used as the ferroelectric layer, but the present invention is not limited to this configuration, and bismuth such as SrBi ₂ Ti ₂ O _{9 is used} as the ferroelectric layer. Similar effects can be obtained by using a system layered perovskite oxide ferroelectric.

<Eighth Embodiment> FIG. 10 is a sectional view showing a configuration of a PDP according to the present embodiment. The PDP has basically the same configuration as that of the fourth embodiment, except that a striped buffer layer 28 having a width smaller than that of a transparent electrode made of an MgO thin film is provided on the surface of the transparent electrode on the discharge space side. And ferroelectric layers 29 and 30 are provided on the surface thereof. The difference is that PLT is used as the ferroelectric.

In order to orient the ferroelectric thin film, it is important to match the crystal lattice constant of the underlying portion of the ferroelectric layer. However, ITO and tin oxide thin films used as transparent electrodes are generally used. The degree of crystallinity is low, and it is difficult to directly grow crystals of a ferroelectric thin film in an oriented manner. Therefore, in the PDP according to the present embodiment, before forming the ferroelectric layer, a base layer (buffer layer) having a lattice constant close to the lattice constant of the ferroelectric substance is formed. The body crystal was grown by orientation.

Specifically, a ferroelectric layer and a buffer layer serving as a base thereof are formed in the same chamber by using a multi-target ECR sputtering method using a metal target. That is, an acceleration voltage is applied only to the magnesium metal target, oxygen gas is blown onto the substrate maintained at 450 ° C., and the underlying layer made of MgO is first formed in a multi-target ECR sputtering apparatus using the principle of the reactive sputtering method. Form. Subsequently, an acceleration voltage is applied only to the lead, lanthanum, and titanium metal targets, an oxygen gas is blown onto the substrate to form a PLT thin film, and patterning is performed together with the underlying layer by a chemical etching method.

According to this film forming method, the screen size becomes 42
Even in the case of a panel of about the shape (the diagonal length is about 1 m), the substrate heated to about 450 ° C. is not heated as described above, so that the in-plane distribution of the crystal can be made uniform. By providing a base on the portion where the ferroelectric is provided as described above and forming a ferroelectric layer on the base,
A ferroelectric layer having good crystallinity, which is strongly oriented in the (001) plane with respect to the substrate surface and whose polarization axis is nearly parallel to the direction of the electric field applied to the ferroelectric layer. As a result, an electron is more efficiently emitted at the time of polarization inversion, and an excellent PDP having a low driving voltage and high efficiency can be realized.

In the method of manufacturing a PDP of the present embodiment, a chemical etching method was used as a patterning method when forming a buffer layer and a ferroelectric layer.
The present invention is not limited to this, and a method of manufacturing a PDP having excellent performance can also be realized by a laser ablation method. In the method of manufacturing a PDP of the present embodiment, ECR sputtering is used as a method of forming a buffer layer and a ferroelectric layer. However, the method is not limited to this, and a film is formed by MOCVD. Even a method of accelerating crystallization by rapid thermal annealing (RTA) can realize an excellent PDP manufacturing method.

In the method of manufacturing the PDP of the present embodiment, ECR sputtering is used as a method for forming the buffer layer and the ferroelectric layer. However, the present invention is not limited to this. It is needless to say that an excellent method of manufacturing a PDP can also be realized by a method of promoting crystallization by a rapid thermal annealing (RTA) method.

In the method of manufacturing the PDP of the present embodiment, ECR sputtering is used as a method for forming the underlayer and the ferroelectric layer. However, the present invention is not limited to this. Even after the film is formed, a method of accelerating crystallization by laser annealing can realize a similarly excellent PDP manufacturing method. Further, the reason why the buffer layer is provided as described above is that the ferroelectric layer is provided on the transparent electrode, and not Pt, Pt / Ti as used in the first embodiment but the transparent electrode. , Ru,
If it is formed on a metal electrode such as RuO ₂ , Ir, IrO ₂ , SrRuO ₃ , it itself plays a role corresponding to a buffer layer. This is because they have a lattice constant close to the lattice constant of the ferroelectric.

<Experimental Example> PDP based on Embodiment 8
And a sustain pulse voltage during sustain, a voltage margin, and a relative luminous efficiency were measured. As a comparative example, a PDP having a conventional configuration was manufactured, and similar values were measured. Table 8 shows the results.

[0095]

[Table 8]

As can be seen from the results, the panel of the example has a lower sustain pulse voltage required for the sustain operation and a wider margin than the panel of the comparative example, and the efficiency is improved by about 1.5 times. Was. This is because the panel of the example had good crystallinity and was strongly oriented in the (001) plane with respect to the substrate surface, so that the direction of the electric field applied to the ferroelectric layer and the polarization axis were nearly parallel. This is probably because electrons were efficiently emitted.

<Embodiment 9> PD according to Embodiment 9
The configuration of P is basically the same as that of the first embodiment,
A point that a ferroelectric layer is provided near the address electrode in addition to the ferroelectric layer 15 as in the PDP of the second embodiment, and a quaternary mixed gas of He-Ne-Xe-Ar is used as a discharge gas. 1.01 × 10 ^{5 to} 5.33 × 1 which is higher
0 ⁵ Pa inclusion of x = 0.15 as a ferroelectric layer PLT
Embodiment 2 differs from Embodiment 2 in that a thin film is used.

First, the relationship between the Pd product at a specific gas composition and the discharge starting voltage of the cell will be described. First, in a PDP having the same configuration as that of the related art (the distance d between the scanning electrode and the address electrode is set to 40 μm),
(50%)-Ne (48%)-Xe (2%), He (5
0%)-Ne (48%)-Xe (2%)-Ar (0.1
%), He (30%)-Ne (68%)-Xe (2%
%), He (30%)-Ne (67.9%)-Xe (2
%)-Ar (0.1%) as a discharge gas, a PDP was produced, and the relationship between the Pd product and the discharge starting voltage in each produced PDP was examined. FIG. 11 (a) shows p
FIG. 11B shows the relationship between the d product and the discharge starting voltage. FIG.
V).

In particular, He (30%)-Ne (67.9)
%)-Xe (2%)-Ar (0.1%) gas, the brightness is relatively good, and the Pd product = 8 (Pa · m) (the distance between the electrodes d = 60 μm). Pressure 1.33
It can be seen that the discharge start voltage can be put into a practically usable discharge start voltage region (220 V or less) even under the condition of (× 10 ⁵ Pa).

Also, with this gas composition, the discharge starting voltage shows a minimum value near the Pd product = 5, which indicates that the Pd product = 5 (for example, when the sealing pressure is 2.67 × 10 ⁵ P
In the case of a, it is understood that it is preferable to set the distance in the vicinity of the electrode distance d = 20 μm). Note that these absolute values (particularly the discharge starting voltage) change by changing the amount of Xe, but the relative relationship hardly changes.

However, when an image is actually displayed using the above-described drive waveforms shown in FIG. 14, at the time of the writing operation, any one of the scanning electrodes and sustain electrodes on the front panel and the address electrodes on the rear panel are connected. Discharge must be performed, and the distance between the electrodes on the front panel and the electrodes on the rear panel is 20 μm
If it is shortened to the extent, the conventional discharge cell structure of the PDP in which the phosphor layer is applied inside the partition of the back panel cannot secure a sufficient discharge space.

[0102]

[Table 9]

Table 9 shows a PDP of the conventional configuration and a PDP of the present embodiment in which the height of the partition walls = 60 μm and the sealing pressure of 2.67 × 10 ⁵ Pa, using the driving waveforms in FIG. The evaluation results of luminance, efficiency, and image quality in the case of performing the test are shown. In the PDP having the conventional configuration, an address defect occurs, and the image quality is hardly improved even when the voltage of the initialization pulse and the write pulse is increased. This is because the discharge start voltage increases due to the large distance between the electrodes between the front panel and the rear panel, and the wall charge is not sufficiently accumulated.

On the other hand, in the PDP according to the present embodiment, no defective address was observed and good image display was possible. This is because, by providing a ferroelectric layer near the address electrode of the back panel used in the writing operation, the amount of wall charges at the time of writing discharge increases, and
This is considered to be because the firing voltage was lowered by the priming effect due to the electron emission at the time of polarization inversion of the ferroelectric layer, and the discharge delay time was shortened. The efficiency is the same as that of the conventional configuration.
The efficiency was about 1.5 times higher than that when 67 × 10 ⁵ Pa was sealed.

As described above, the PDP according to the ninth embodiment uses a ferroelectric layer for both the electrodes of the front panel and the rear panel, thereby achieving high image quality with no address failure even under a high discharge gas filling pressure. , High efficiency and excellent PDP
Can be realized. In the ninth embodiment, a ferroelectric layer with x = 0.15 is used as the ferroelectric layer. However, the present invention is not limited to this configuration. The same effect can be obtained by using a PLT of 0.00 to 0.25.

Further, as the ferroelectric layer, BaTiO ₃ , P
It goes without saying that the same effect can be obtained even if a perovskite oxide ferroelectric such as ZT or PLZT is used.
In the ninth embodiment, the ferroelectric layer is made of A
Although using BO ₃ type oxide high dielectric member is not limited to this configuration, resulting the same effect be used primarily bismuth-based layered perovskite oxide ferroelectric as the ferroelectric layer Can be

Further, the same effect can be obtained even if the ferroelectric layer is not provided in the vicinity of both the address electrode and the scanning electrode, but is provided in any one of them. Although thing can be said in common to all embodiments, in addition to those described above as a _{ferroelectric, Ba x Sr (1-x} ) TiO 3, PbTiO 3
-PZT-Pb (Nb _2/3 Mg _1/2 ) O ₃ -based ferroelectric composite material can also be used.

The ferroelectric is composed of PZT containing lead, titanium and zirconium as main components and Pb (Nb _2/3 Mg _1/2 ) O ₃ oxide containing lead, niobium and magnesium as main components. A ferroelectric composite material can also be used. Further, the ferroelectric is at least one of a first group consisting of lead, lanthanum, and samarium, and a second group consisting of titanium, zirconium, niobium, tantalum, manganese, and hafnium. at least of any one, consisting of magnesium, nickel, zinc, iron, and the third at least any one kind selected from the group consisting of cobalt, ABO ₃ perovskite -A (B _2/3 C of
_1/3 ) O ₃ composite perovskite solid solution or a mixed phase can be used.

Further, the ferroelectric material includes a scanning electrode, a discharge electrode,
It is more desirable to provide them in the vicinity of all the address electrodes because the effect of providing them in the vicinity of a single electrode is added. Further, in the above embodiment, the surface of the ferroelectric is exposed to the discharge space. However, if electrons are emitted from the surface of the ferroelectric to the discharge space at the time of polarization reversal, dielectric glass or MgO may be used. The ferroelectric surface may be covered with a protective film.

Instead of providing the ferroelectrics in stripes along each electrode as described above, the ferroelectrics may be provided in so-called stripes only at portions facing the discharge space. Also, as described above, the effect of electron emission at the time of polarization reversal improves as the area facing the discharge space increases, as described above.
Instead of being provided only near the electrodes, it may be provided on the entire front panel or rear panel.

[0111]

As described above, according to the plasma display panel of the present invention, since the ferroelectric substance is provided near at least one of the pair of electrodes, the electron emission at the time of polarization reversal is performed. Due to the above phenomenon, a discharge delay can be prevented. Therefore, problems such as flickering of images can be improved. This effect is particularly effective for a high-definition panel.

[Brief description of the drawings]

FIG. 1 is a perspective view of a plasma display panel according to a first embodiment.

FIG. 2 is a vertical sectional view including a line XX in FIG. 1;

FIG. 3 is a characteristic diagram showing a relationship between a film thickness of a dielectric glass layer and a discharge starting voltage of a cell.

FIG. 4 is a perspective view of a plasma display panel according to a second embodiment.

FIG. 5 is a perspective view of a plasma display panel according to a third embodiment.

FIG. 6 is a perspective view of a plasma display panel according to a fourth embodiment.

FIG. 7 is a vertical sectional view including a line YY in FIG. 6;

FIG. 8 is a sectional view of a plasma display panel according to a fifth embodiment.

FIG. 9 is a characteristic diagram showing a relationship between drive time and drive voltage of PLT and SrBi ₂ Ta ₂ O ₉ .

FIG. 10 is a sectional view of a plasma display panel according to an eighth embodiment.

11A is a characteristic diagram showing a relationship between a Pd product and a discharge starting voltage, and FIG. 11B is a table showing a correspondence between a gas composition and luminance when a specific gas composition is set. is there.

FIG. 12 is a perspective view showing a configuration of a conventional plasma display panel.

FIG. 13 is a block diagram showing a driving circuit of the plasma display panel.

FIG. 14 is a timing chart showing a driving waveform of the driving method of the plasma display panel.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 11 Front glass substrate 12a Scan electrode 12b Sustain electrode 12a1, 12b1 Transparent electrode 12a2, 12b2 Metal electrode 13 Dielectric glass layer 14 MgO protective layer 15 Ferroelectric layer 16 Back glass substrate 17 Address electrode 18 Electrode protective layer 19 Partition 20 Phosphor Layer 21 Discharge space 22, 23, 24, 25, 26, 27, 29, 30 Ferroelectric layer 28 Buffer layer 220 Address electrode driver 230 Scan electrode driver 240 Sustain electrode driver 250 Setup period 260 Address period 270 Sustain period 280 Erase Period

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01B 3/12 318 H01B 3/12 318G H01J 9/02 H01J 9/02 F 11/00 11/00 K

Claims (29)

[Claims] 1. A plasma display panel using a method in which a potential difference is generated between a pair of electrodes to discharge a gas sealed in a discharger, wherein a ferroelectric substance is provided near at least one of the pair of electrodes. A plasma display panel, which is provided. 2. The plasma display panel according to claim 1, wherein the first substrate has a plurality of pairs of first and second electrodes arranged in a stripe pattern, and the third electrode has a stripe pattern. The second substrate and the third electrode are arranged so as to face the first electrode and the second electrode with a partition interposed therebetween, and the discharger includes: A third electrode corresponds to a space formed between the two substrates intersecting the first electrode and the second electrode, and the ferroelectric material includes a first electrode, a second electrode, and a third electrode. 2. The plasma display panel according to claim 1, wherein at least one of the electrodes is disposed near the discharger. 3. The ferroelectric material according to claim 2, wherein the ferroelectric is laminated on at least one of the first electrode, the second electrode, and the third electrode on the surface of the discharger. Plasma display panel. 4. The relationship of 0.1 Wa ≦ Wb ≦ Wa, wherein the length Wa of the short side of the electrode on which the ferroelectric material is laminated and the length Wb of the short side of the ferroelectric material are defined. A plasma display panel characterized by the above-mentioned. 5. The plasma display panel according to claim 3, wherein the length of the short side of the ferroelectric layer decreases from the electrode on which the ferroelectric layer is stacked toward the discharger. 6. The first electrode and the second electrode each include a transparent electrode and a metal electrode disposed on the surface of the transparent electrode on the discharger side. The plasma display panel according to any one of claims 3 to 5, wherein a ferroelectric substance is provided on an inner side of the electrode opposite to a position where the metal electrode is provided. 7. The plasma according to claim 6, wherein a buffer layer for matching a lattice constant with a ferroelectric layer is interposed between the ferroelectric and the transparent electrode. Display panel. 8. A plasma display panel using a system in which a potential difference is generated between a pair of electrodes to discharge a gas sealed in a plurality of dischargers, wherein the outer side of the discharger facing at least one electrode of the pair of electrodes is substantially provided. A plasma display panel, wherein a ferroelectric substance is provided so as to cover the entire surface. 9. A plasma display panel using a method in which a potential difference is generated between a pair of electrodes to discharge gas sealed in a plurality of dischargers, a voltage for selecting a discharger that generates a discharge during driving is applied. A plasma display panel, wherein a ferroelectric substance is provided near an electrode or near an electrode to which a voltage for maintaining light emission during driving is applied. 10. The plasma display panel according to claim 1, wherein the ferroelectric is an ABO ₃ type oxide ferroelectric containing lead titanate as a main component. 11. The ferroelectric substance according to claim 10, wherein the ferroelectric substance is an ABO ₃ type oxide ferroelectric substance containing at least one of lead, titanium, and zirconium as a main component. Plasma display panel. 12. The ferroelectric material according to claim 1, wherein said ferroelectric material comprises at least one of lead, lanthanum and titanium.
2. The ferroelectric material according to claim 1, wherein the ferroelectric material is O ₃ type oxide.
0. The plasma display panel according to 0. 13. The ferroelectric substance according to claim 1, wherein the ferroelectric substance is at least one of a first group consisting of lead, lanthanum and samarium.
AB containing at least one of a species and at least one of a second group consisting of titanium, zirconium and manganese
2. The ferroelectric material according to claim 1, wherein the ferroelectric material is O ₃ type oxide.
0. The plasma display panel according to 0. 14. The ferroelectric substance is an ABO ₃ type oxide containing at least one of calcium, strontium and barium and at least one of titanium and manganese as main components. The plasma display panel according to claim 10, wherein the plasma display panel is a ferroelectric material. 15. The ferroelectric material is ABi ₂ B ₂ O containing at least one of a group consisting of barium, strontium and lanthanum and at least one of titanium and tantalum as main components. _The plasma display panel according to any one of claims 1 to 9, wherein the panel is a _9- type layered perovskite oxide ferroelectric. 16. The ferroelectric material is Ba _x Sr _(1-x) Ti
O ₃ or _{PbTiO 3 -PZT-Pb (Nb 2/3} Mg 1/2)
10. The plasma display panel according to claim 1, wherein the plasma display panel is an O ₃ -based ferroelectric composite material. 17. The ferroelectric substance is composed of PZT containing lead, titanium and zirconium as main components and Pb (Nb _2/3 Mg _1/2 ) O ₃ oxide containing lead, niobium and magnesium as main components. 17. The plasma display panel according to claim 16, wherein the plasma display panel is a ferroelectric composite material. 18. The ferroelectric substance according to claim 1, wherein at least one of a first group consisting of lead, lanthanum, and samarium and a second group consisting of titanium, zirconium, niobium, tantalum, manganese, and hafnium. At least one of the group, magnesium, nickel, zinc,
Iron, and composed of at least any one of the third group consisting of cobalt, ABO ₃ perovskite -A (B
_2/3 C _1/3) O ₃ plasma display panel according to claim 16 which is a ferroelectric composite comprising a composite perovskite solid solution or mixed phase. 19. The electrode according to claim 3, wherein the electrode on which the ferroelectric is laminated is formed of a metal containing at least one of platinum, ruthenium, and iridium as a main component. The plasma display panel according to any one of the above. 20. The plasma display panel according to claim 7, wherein the buffer layer is made of magnesium oxide. 21. The method according to claim 1, wherein the pressure of the gas sealed in the discharger is 1.01 × 10 ^{5 to} 5.33 × 10 ⁵ Pa. Plasma display panel. 22. The gas according to claim 22, wherein the gas is helium, neon,
22. A rare gas mixture containing at least one of xenon and argon.
The plasma display panel according to item 1. 23. The sealed gas contains 5% by volume of xenon.
23. The plasma display panel according to claim 22, wherein argon contains less than 0.5% by volume and helium contains less than 55% by volume. 24. A display device, comprising: the plasma display panel according to claim 1; and a drive circuit for applying a voltage between different electrodes. 25. A method of manufacturing a plasma display panel using a method in which a potential difference is generated between a pair of electrodes to discharge a gas sealed in a discharger, the method comprising: forming a transparent electrode on a substrate. When,
Forming a buffer layer on the transparent electrode to match the lattice constant of the ferroelectric layer with a ferroelectric layer; and forming a ferroelectric layer on the buffer layer by ECR sputtering. A method for manufacturing a plasma display panel, comprising a layer forming step. 26. The method according to claim 25, wherein the forming of the ferroelectric layer includes a sub-step of performing patterning by a laser ablation method. 27. A method for manufacturing a plasma display panel using a method in which a potential difference is generated between a pair of electrodes to discharge a gas sealed in a discharger, comprising: a transparent electrode forming step of forming a transparent electrode on a substrate. When,
Forming a buffer layer on the transparent electrode to match the lattice constant of the ferroelectric layer with a ferroelectric layer; and forming a ferroelectric layer on the buffer layer by MOCVD. A method for manufacturing a plasma display panel, comprising a forming step. 28. The method according to claim 25, wherein the step of forming a ferroelectric includes a sub-step of performing an annealing process by a rapid thermal annealing method. 29. The method according to claim 25, wherein the step of forming a ferroelectric includes a sub-step of performing an annealing process by a laser annealing method.