JP2000213941A - Piezoelectric vibration gyroscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric vibration gyroscope capable of restraining the deterioration of a vibration characteristic by support and dispersions of various characteristics, and having structure capable of poralization processing easily and surely. SOLUTION: A drive electrode 2, a pair of detecting electrodes 3, 4 and a common earthing electrode 5 arranged in a side face of a cylindrical piezoelectric ceramic extended in a unidirection in a piezoelectric vibrator 1 have conductive external connection parts 2a, 3a, 4a, 5a arranged in the very close vicinity of vibration nodal points on vibration node proximity position lines 6A, 6B which are two lines consistent with a driving direction and are extended substantially perpendicularly with respect to the unidirection, and which includes vibration node proximity points in portions with distances equal to distances with respect to the vibration nodal points from the ceramic. When the piezoelectric vibrator 1 is connection-fixed electrically and mechanically to a frame body using conductive supporting members to manufacture a piezoelectric vibration gyroscope, a voltage is impressed between the supporting members to conduct poralization processing as the connecting parts 2a, 3a, 4a, 5a are connected to the supporting members.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to a gyroscope mainly used for an automobile navigation system or a camera shake correcting device of a camera-integrated VTR, and uses a cylindrical bending oscillator made of a piezoelectric material. Related to the piezoelectric vibrating gyroscope.

[0002]

2. Description of the Related Art Conventionally, a piezoelectric vibrating gyroscope of this kind is a gyroscope utilizing a mechanical phenomenon that generates a Coriolis force in a direction perpendicular to the direction of vibration when a rotating angular velocity is applied to a vibrating object. Are known.

In general, a piezoelectric vibrating gyroscope is provided with driving, detecting and common ground electrodes arranged so as to be able to excite and detect two different directions orthogonal to each other, and to excite the piezoelectric vibrating gyroscope with the driving electrodes. When a rotational angular velocity is applied to the piezoelectric vibrator, a force acts in a direction perpendicular to the vibration by the action of the Coriolis force described above, and a new vibration is excited in that direction. Since the magnitude of this vibration is proportional to the amplitude of the drive vibration generated by the drive voltage applied to the drive electrode and the rotational angular velocity applied to the piezoelectric vibrator, when the drive voltage is constant, it is obtained from the detection electrode. The magnitude of the applied angular velocity can be obtained from the magnitude of the detection voltage.

FIG. 6 shows a basic structure of a piezoelectric vibrator 1 'for a piezoelectric vibrating gyroscope according to an example of the related art. FIG. 6A is a perspective view, and FIG. It is related to a cross-sectional view in one plane.

The piezoelectric vibrator 1 'is made of a columnar piezoelectric ceramic extending in a uniaxial direction, and a driving electrode 2 extending in a uniaxial direction on a side surface thereof and a pair of detecting electrodes 3 facing in a circumferential direction. 4 and a common earth electrode 5 extending in the uniaxial direction and also extending in the circumferential direction, an electrode pattern is provided, and the drive electrode 2, the detection electrodes 3 and 4, and the common earth electrode 5 are arranged between the drive electrode 2 and the detection electrodes 3 and 4. Polarization processing is performed with positive (+) and negative (-) polarities shown in the figure.

Among them, the common ground electrode 5 is shown in FIG.
FIG. 6 shows two local portions along the one axis direction shown in FIG.
As shown in FIG. 2A, an external connection portion 5a is provided in a local portion extending in the direction of the drive electrode 2 from the connection portion in an arch shape by being connected in the circumferential direction. An external connection portion 2a is provided at an end of the drive electrode 2 facing the external connection portion 5a, and external connection portions 3a and 4a are provided at opposite ends of the detection electrodes 3 and 4, respectively. I have. Further, the external connection portions 2a, 3a, 4a are provided substantially along the tangent line of the piezoelectric vibrator 1 'and very close to a node of vibration.

In the case of the piezoelectric vibrator 1 ', two symmetrical lines which are coincident with the driving direction of the columnar piezoelectric ceramic and extend substantially perpendicular to the uniaxial direction are provided.
In addition, the driving electrodes are supported on the vibrating node near position lines 6A and 6B which exist at two positions in the circumferential direction including the vibrating node near points at a distance equal to the distance from the both end surfaces of the columnar piezoelectric ceramic to the vibrating nodes. Bending vibration is caused in the direction of the solid arrow in FIG. 6B according to the driving voltage applied between the second electrode 2 and the common electrode 5. At this time, when a rotational angular velocity is applied to the vibrating piezoelectric vibrator 1 ′, FIG.
Vibration having an amplitude proportional to the rotational angular velocity is excited in the direction of the dotted arrow in (b).

FIG. 7 is a perspective view showing an external configuration of a piezoelectric vibrating gyroscope manufactured by mounting the piezoelectric vibrator 1 'on the drive detection circuit board 11. As shown in FIG. In this piezoelectric vibrating gyroscope, the piezoelectric vibrator 1 ′ has a rubber-like soft elastic support part 13 a, which has adhesiveness at a position very close to the vibration node (on the above-described vibration node vicinity position lines 6 A, 6 B). It is arranged and supported on a pair of insulating holders 12 via 13b.

Among them, the supporting parts 13a and 13b include:
As the rubber-like soft elastic body, a resin having fluidity before curing and having adhesive properties after curing, such as a silicone resin, is used. The insulating holder 12 is connected to and fixed to connection terminals (not shown) on the drive detection circuit board 11 via four conductive terminals 16 penetratingly embedded in the main body. Also, the external connection portions 2a, 3 of the drive electrode 2, the detection electrodes 3, 4, and the common electrode 5 provided on the piezoelectric vibrator 1 '.
a, 4a and 5a are connected to another four conductive terminals 17 penetratingly embedded in the insulating holder 12 through very thin input / output leads 14. Further, the drive detection circuit board 1
An electronic component 15 such as a capacitor is mounted on 1.

FIG. 8 is a schematic view for explaining the vibration of the piezoelectric vibrator 1 '(rod-shaped bending vibrator) in the piezoelectric vibrating gyroscope having such a configuration. Here, the amplitude of the bending vibration is emphasized for ease of explanation, but the actual bending vibration is extremely small.

In FIG. 8, a rectangle indicated by a solid line indicates a piezoelectric vibrator 1 'in a stationary state (when not deformed), and an arc shaped by a chain line indicates a piezoelectric vibration in a bending vibration state in an upward and downward direction (during deformation). The child 1 'is shown. Also, in FIG.
α ′ and 6β ′ indicate the locations of true nodes of vibration on the center line of the piezoelectric vibrator 1 ′ at rest or during vibration, and points 6α and 6β near the vibrating nodes on the axes α and β are On the surface of ′, the distance is equal to the distance from the end faces to the vibration nodes 6α ′ and 6β ′. That is, the nodes 6α and 6β near the oscillation node
Are included in the above-described vibrating node vicinity position lines 6A and 6B.
It has become equivalent to.

In this case, if the piezoelectric vibrator 1 'is infinitely thin, the vibrating nodes 6α and 6β coincide with the vibrating nodes 6α' and 6β 'on the axes α and β. (Or thickness), when bending vibration is caused in the upward or downward direction, the vibrating node vicinity points 6α and 6β are shifted to the first vibrating node nearby moving point 6α on the axes α1 and β1, respectively.
1, 6β1, or the second vibrating node near point 6α2, 6β2 on axes α2, β2.

Therefore, when the piezoelectric vibrator 1 'is supported on its surface, ideally, the vibration node near point 6α, the first vibration node near moving point 6α1, and the second vibration node near moving point 6α2
And the position including the vibrating node near point 6β, the first vibrating node near moving point 6β1, and the second vibrating node near moving point 6β2 are required to be supported.

[0014]

In the case of the above-mentioned piezoelectric vibrating gyroscope, the influence of the movement of the point near the vibration node during the bending vibration is absorbed by the elasticity of the rubber-like soft elastic body used as the supporting member, thereby causing the piezoelectric vibrating gyroscope. The rubber-like soft elastic body has fluidity before curing and has adhesiveness after curing, so it supports the piezoelectric vibrator in the longitudinal and circumferential directions. The position and the support width are large, which tends to be uneven, and the relaxation function for absorbing the influence of the movement of the point near the vibration node becomes unstable, so that the mechanical load on the vibration of the piezoelectric vibrator is also likely to change. By doing
In addition to the problem that the sharpness (Q) of the vibration is reduced, the supporting state of the rubber-like elastic member is easily changed by aging or the like. And gyro characteristics are adversely affected, and there is a problem that these various characteristics are a major factor causing variations.

In the case of a support structure using a support member made of a rubber-like elastic body, each electrode provided on the piezoelectric vibrator is allowed to allow movement of the piezoelectric vibrator due to external mechanical shock. The input / output lead wires used for electrical connection between the external connection part and the conductor terminals buried in the insulating holder are arranged in an arc, but the size and path of this arc correspond to automation. In addition, since the load is not uniform with respect to the vibration of the piezoelectric vibrator, such connection of the input / output lead wires also causes variations in the vibration characteristics and gyro characteristics.

Further, in order to obtain the function of the piezoelectric vibrator as a bending vibrator, after forming electrodes on the side surfaces of the piezoelectric vibrator,
Before assembling as a piezoelectric vibrating gyroscope, it is necessary to apply a high voltage between the drive electrode, the detection electrode, and the common ground electrode to perform polarization processing on the piezoelectric vibrator alone. In order to suppress the discharge, contact pieces made of a spring material in insulating oil such as silicon are brought into contact with each electrode, and the contact pieces are maintained under a high temperature condition of, for example, about 180 ° C. When a cylindrical piezoelectric vibrator is immersed in high-temperature insulating oil, if the contact piece slips from each electrode, conduction between the contact piece and each electrode becomes unstable, and the polarization process is incomplete. Sometimes it becomes. Since such an imperfectly polarized electrode is difficult to identify in appearance, if a piezoelectric vibrator gyro is erroneously assembled using a piezoelectric vibrator having such an imperfectly polarized electrode, the basic gyro can be used. Therefore, it is a very important problem how the structure can be surely polarized.

The present invention has been made in order to solve such problems, and the technical problem thereof is that deterioration of vibration characteristics due to support and variation in various characteristics can be suppressed, and polarization processing can be facilitated and ensured. An object of the present invention is to provide a piezoelectric vibrating gyro having a gyro characteristic excellent in practicable and suitable for automatic mass production.

[0018]

According to the present invention, a plurality of electrode patterns including a drive electrode, a pair of detection electrodes, and a common ground electrode are provided on the side surface of a columnar piezoelectric ceramic extending in a uniaxial direction. In the piezoelectric vibrator for a piezoelectric vibrating gyroscope, the drive electrode, the pair of detection electrodes, and the common ground electrode respectively correspond to the driving direction of the columnar piezoelectric ceramic and extend substantially perpendicular to the uniaxial direction. Two lines symmetrical to each other and very close to the vibration node on a vibration node vicinity position line including a vibration node vicinity point at a distance equal to the distance from the both end surfaces of the columnar piezoelectric ceramic to the vibration node. A piezoelectric vibrator for a piezoelectric vibrating gyroscope having a conductive external connection portion provided is obtained.

Further, according to the present invention, in the piezoelectric vibrator for a piezoelectric vibrating gyroscope, the external connection portion is arranged so that a point near the vibrating node includes a moving point near the vibrating node that moves during bending vibration. A piezoelectric vibrator for the vibrating gyroscope is obtained.

Further, according to the present invention, in any one of the above piezoelectric vibrators for a piezoelectric vibrating gyroscope, at least one of the external connection portions includes a drive electrode, a pair of detection electrodes, and a common ground electrode. The piezoelectric vibrator for the piezoelectric vibrating gyroscope formed as at least one local part is obtained.

On the other hand, according to the present invention, there is provided a piezoelectric vibrating gyroscope in which these piezoelectric vibrating gyroscope piezoelectric vibrators are electrically and mechanically connected and fixed to a frame using four support members, The four support members are made of a conductive thin linear member, have a substantially U-shaped bent portion at the center, and have both ends extending from the bent portion, and have a cylindrical shape. The piezoelectric ceramic is mechanically clamped from one side and the other side of the frame body by a pair of four support members so that the driving direction coincides with the clamping direction. The frame is electrically connected to a substantially central portion of the bent portion of the support member, and the frame body has conductors provided at predetermined positions on one surface side and the other surface side, which are electrically and mechanically connected to both ends of the support member. , And further, the bent portion of the support member, The connecting portion between the curved portion and the external connecting portion and the connecting portion between the conductor portion and both ends of the support member are obtained by a piezoelectric vibrating gyroscope formed on substantially the same plane on one side and the other side of the frame body. Can be

On the other hand, according to the present invention, there is provided a piezoelectric vibrating gyroscope in which these piezoelectric vibrating gyroscope piezoelectric vibrators are electrically and mechanically connected and fixed to a frame using four support members, The four support members are made of a conductive thin linear member, have a substantially U-shaped bent portion at the center, and have both ends extending from the bent portion, and have a cylindrical shape. The piezoelectric ceramic is formed as a pair of four supporting members so that the driving direction coincides with the clamping direction, and one pair of the frame members from one surface side to the other surface side and one surface from the other surface side. The external connection is electrically connected to the center of the bent portion of the support member, and the frame is formed on one side and the other side. Conductors provided at predetermined locations are electrically connected to both ends of the support member. And it is mechanically connected and fixed,
Further, a piezoelectric vibrating gyroscope is obtained in which a connecting portion between the bent portion of the support member and the external connection portion and a connecting portion between the conductor portion and both ends of the support member are formed on different planes.

In these piezoelectric vibrating gyroscopes, it is preferable that the columnar piezoelectric ceramic is polarized by applying a high voltage between the four support members.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A piezoelectric vibrating gyroscope according to the present invention will be described in detail with reference to the drawings.

FIG. 1 shows the basic structure of a piezoelectric vibrator 1 for a piezoelectric vibrating gyroscope according to an embodiment of the present invention. FIG. 1A relates to an external perspective view from one direction. (B) relates to an external perspective view from another direction, and (c) relates to a cross-sectional view in one plane parallel to the end face.

The piezoelectric vibrator 1 is made of a columnar piezoelectric ceramic extending in a uniaxial direction, and a driving electrode 2 is provided on a side surface of the columnar piezoelectric ceramic in a uniaxial direction, and a pair of detecting electrodes opposing in a uniaxial direction. A plurality of electrode patterns including electrodes 3 and 4 and an arch-shaped common ground electrode 5 in which local portions extending in parallel along the uniaxial direction are connected by local portions extending in the circumferential direction are arranged.

However, the driving electrode 2, the pair of detecting electrodes 3 and 4, and the common grounding electrode 5 respectively correspond to the driving direction of the columnar piezoelectric ceramic and extend in a direction substantially perpendicular to the uniaxial direction. A vibrating node near point (a point in FIG. 8) which is a symmetrical two line and at a distance equal to the distance from the end faces of the columnar piezoelectric ceramic to the vibrating nodes (6α ′, 6β ′ in FIG. 8). 6α, 6β), the conductive external connection portions 2a, 3a, 4a, 5a disposed in the vicinity of the vibration nodes on the vibration node vicinity position lines 6A, 6B.
Having.

These external connection parts 2a, 3a, 4a, 5
a is a moving point near the vibrating node (6α1, 6β1 or 6α2, 6β in FIG. 8) at which the vibrating node point moves during bending vibration.
2), and are formed as local portions of the drive electrode 2, the pair of detection electrodes 3 and 4, and the common ground electrode 5, respectively. However, the external connection parts 2a, 3
a, 4a and 5a are provided, for example, with the external connection portions 3a and 4a of the detection electrodes 3 and 4 provided as special terminals, the external connection portion 2a of the drive electrode 2 provided as a local electrode portion thereof, and the connection portion of the common ground electrode 5 provided. In the case where 5a is formed by an external conductive connection pattern, at least one of the external connection portions 2a, 3a, 4a, 5a is provided with the drive electrode 2, the pair of detection electrodes 3,
4 and the common ground electrode 5 may be arranged in another form so as to be formed as a local part of at least one of them.

In any case, as shown in FIG. 1A, the external connection portion 2a of the drive electrode 2 and the connection portion 5a of the common ground electrode 5 are paired, and as shown in FIG. The external connection portions 3a and 4a of the pair of detection electrodes 3 and 4 are grouped so that up to two external connection portions 2a, 3a, 4a and 5a are arranged on the vibrating node position lines 6A and 6B. Good.

When the piezoelectric vibrator 1 is manufactured as a piezoelectric vibrating gyroscope by being electrically and mechanically connected and fixed to a frame using a conductive support member as described later, the external connecting portions 2a, 3a, Since the electrodes 4a and 5a are electrically and mechanically connected and supported and connected to the support member, the polarization process can be performed by applying a voltage between the support members, and the polarization process can be performed between the drive electrode 2 and the common ground electrode 5. A configuration in which bending vibration is performed in accordance with the applied driving voltage is provided.

FIG. 2 shows that the piezoelectric vibrator 1 is supported by a support member 9a.
It is the perspective view which showed the external appearance structure of the piezoelectric vibrating gyroscope which concerns on an example produced by mounting to the frame 7 using 9d.

The piezoelectric vibrating gyroscope here is constructed by electrically and mechanically connecting and fixing the piezoelectric vibrator 1 to the frame 7 using four support members 9a to 9d. Four support members 9a-
9d is made of a conductive thin linear member, has a substantially U-shaped bent portion at the center, and has both ends extending from the bent portion.

Of these four support members 9a to 9d, one of the support members 9a and 9b has a columnar piezoelectric shape so that the driving direction coincides with the holding direction from one surface (upper surface) of the frame 7. The ceramic piezoelectric vibrator 1 is mechanically clamped, and the other pair of support members 9a and 9b are similarly cylindrically shaped so that the driving direction coincides with the clamping direction from the other surface (lower surface) of the frame 7. The ceramic piezoelectric vibrator 1 is mechanically clamped, and in this state, the external connection portions 2a, 3a, 4 are respectively provided substantially at the center of the bent portions of the support members 9a to 9d.
a and 5a are electrically and mechanically connected by means such as soldering or welding. Also, both ends of the support members 9a to 9d are provided with a total of eight conductor portions 8a to 8 provided at predetermined positions on one surface (upper surface) side and the other surface (lower surface) side of the frame 7, respectively.
8d, 8a 'to 8d' (the conductors 8b 'and 8d' are not shown in FIG. 2 and the conductors 8b and 8d are not shown) by means of soldering or welding. And it is mechanically connected and fixed.

In the case of this piezoelectric vibrating gyroscope, the support member 9
a to 9d and external connection portions 2a, 3a,
4a, 5a, and conductors 8a to 8d, 8a 'to
A connecting portion between 8d 'and both ends of the supporting members 9a to 9d and a conductor portion provided on the drive detection circuit board are each formed by a frame 7
Are formed so as to be substantially coplanar on one surface (upper surface) side and the other surface (lower surface) side of the piezoelectric vibrator 1.
Polarization can be performed by applying a high voltage between a to 9d. The frame 7 has means for connecting to the drive detection circuit board of the piezoelectric vibrating gyroscope, but is omitted here.

FIG. 3 is a diagram for explaining the operation of the main part of the piezoelectric vibrating gyroscope when the excitation vibration is generated with or without the application of the rotational angular velocity in one vibration state of the piezoelectric vibrator 1. FIG. 4A shows a state in which the rotational angular velocity is not applied, and FIG. 4B shows a state in which the bending vibration is applied when the rotational angular velocity is applied.
FIG. 9C relates to another state of the bending vibration when the rotational angular velocity is applied. Here, it is assumed that the piezoelectric vibrator 1 is driven in the front and back directions on the paper surface.
a to 9d of the conductor portions 8a to 8d, 8a 'to 8d'
Conductor portions 8a, 8 electrically and mechanically connected to both ends of support members 9a, 9c on one surface (upper surface) side of frame 7
Only a ', 8c and 8c' are shown.

In the case of FIG. 3A, even when the piezoelectric vibrator 1 is driven in the front and back directions on the paper, no rotational angular velocity is applied and no bending vibration is excited, so that the piezoelectric vibrator 1 and the supporting member 9a are not excited. , 9c are not deformed and support members 9a,
The connection points 10a and 10c between the common ground electrode 5 and the external connection portions 5a and 2a of the drive electrode 2 in the piezoelectric vibrator 1 as the original shape are located at substantially the center of the bent portion 9c.

In the case of FIG. 3B, the piezoelectric vibrator 1 is driven in the front and back direction of the paper to apply a rotational angular velocity, and the bending vibration in the direction parallel to the paper is excited. And the supporting members 9a, 9c are deformed, and the supporting members 9a, 9c are deformed.
The connection points 10a ', 1 of the common ground electrode 5 and the external connection parts 5a, 2a of the drive electrode 2 in the piezoelectric vibrator 1 deformed upwardly in the drawing at substantially the center of the bent part 9c.
0c 'is located differently from the positions of the connection points 10a and 10c.

In the case of FIG. 3C, the piezoelectric vibrator 1 is driven in the front and back directions of the paper to apply a rotational angular velocity, and the bending vibration in the direction parallel to the paper is excited. And the supporting members 9a, 9c are deformed, and the supporting members 9a, 9c are deformed.
The connection points 10a ″, 1 of the common ground electrode 5 and the external connection portions 5a, 2a of the drive electrode 2 in the piezoelectric vibrator 1 deformed in a downwardly bent manner in the center of the bent portion 9c.
0c "is the connection point 10a, 10c and the connection point 10a ', 10
The position is different from the position with c '.

In the case of this piezoelectric vibrating gyroscope, the connection point 10
a ′, 10c ′ and the connection points 10a ″, 10c ″ are fixed points with respect to the piezoelectric vibrator 1, and the support members 9a, 9c
The conductors 8a, 8a ', 8c, 8c' of the frame 7 are also fixed points which are not affected by vibration. Support members 9a and 9c and piezoelectric vibrator 1 when rotational angular velocity is applied
The mechanical effect on the piezoelectric vibrator 1 due to the change of the connection points of the external connection portions 5a and 2a of the common earth electrode 5 and the drive electrode 2 is determined by the conductor 8a of the frame 7, the connection point 10a 'and the frame 7 The conductor 8a ', the conductor 8c of the frame 7, the connection point 10
c 'and the bent portion between the three fixed points of the conductor portion 8c' of the frame 7 are absorbed by the deformation as shown in FIGS. 3B and 3C, and the influence on the vibration is reduced. Can be avoided.

That is, in this piezoelectric vibrating gyroscope, as described above, the bent portions of the support members 9a to 9d, the connection portions of the bent portions with the external connection portions 2a, 3a, 4a, 5a, and the conductor portion 8
Connections between a to 8d, 8a 'to 8d' and both ends of the support members 9a to 9d, and conductors provided on the drive detection circuit board are formed on one surface (upper surface) side and the other surface of the frame 7 respectively. By configuring the support structure so that it is formed substantially on the same plane (substantially horizontal) on the (lower surface) side,
A substantially U-shaped bent portion is formed by changing the position of the connecting portion between the piezoelectric vibrator 1 and the supporting members 9a to 9d in the horizontal plane caused by vibration excited in the direction perpendicular to the driving direction when the rotational angular velocity is applied. Can be absorbed by deforming the corners and the legs (both ends), so that the sharpness (Q) of the vibration with respect to the excited vibration is suppressed and the gyro characteristics such as detection sensitivity are stabilized. Can be achieved.

FIG. 4 shows that the piezoelectric vibrator 1 is supported by supporting members 9a to 9a.
It is the perspective view which showed the external structure of the piezoelectric vibrating gyroscope which concerns on the other example produced by mounting to the frame 7 using d.

The piezoelectric vibrating gyroscope here also has the piezoelectric vibrator 1 electrically and mechanically connected and fixed to the frame 7 using four support members 9a to 9d. Four support members 9a-
9d is made of a conductive thin linear member, has a substantially U-shaped bent portion at the center, and has both ends extending from the bent portion.

However, these four support members 9a to 9d
One of the support members 9a and 9b is a piezoelectric vibrator made of a columnar piezoelectric ceramic such that the driving direction is aligned with the clamping direction from one surface (upper surface) to the other surface (lower surface) of the frame 7. 1 is mechanically clamped, and the other set of support members 9
Reference numerals a and 9b mechanically clamp the piezoelectric vibrator 1 made of a columnar piezoelectric ceramic so that the driving direction coincides with the clamping direction from the other surface (lower surface) to the one surface (upper surface) of the frame 7. The external connection portions 2a, 3a, and 4 are respectively provided substantially at the centers of the bent portions of the support members 9a to 9d slightly inclined in the state.
a and 5a are electrically and mechanically connected by means such as soldering or welding.

Both ends of the support members 9a to 9d are provided with a total of eight conductors 8a to 8d, 8 provided at predetermined positions on one surface (upper surface) and the other surface (lower surface) of the frame 7, respectively.
a 'to 8d' (the conductor portions 8b 'and 8d' are not shown in FIG. 2 and the conductor portions 8b and 8d are not shown in FIG. 2). ) Side, from the other surface (lower surface) side to one surface (upper surface) side. That is, both ends of the support members 9a and 9c on one surface (upper surface) are connected to the conductor portions 8b and 8b 'and the conductor portions 8d and 8d' on the other surface (lower surface) by means of soldering or welding. , Support member 9 on the other surface (lower surface) side
b and 9d are the conductor portions 8 on one surface (upper surface), respectively.
a, 8a 'and the conductors 8c, 8c' are connected by means of soldering or welding, etc., and are electrically and mechanically connected.

In the case of this piezoelectric vibrating gyroscope, the support member 9
a to 9d are arranged obliquely with respect to the frame 7 so that the external connection portions 2a and 3 of the bent portions of the support members 9a to 9d are provided.
a, 4a, 5a, and conductors 8a to 8d, 8
a 'to 8d' and connecting portions to both ends of the supporting members 9a to 9d are formed on different planes, respectively, and the columnar piezoelectric ceramic piezoelectric vibrator 1 is provided with four supporting members. Polarization can be performed by applying a high voltage between 9a and 9d. Here, means for connecting the piezoelectric vibrating gyroscope to the drive detection circuit board of the frame 7 is also omitted.

FIG. 5 is a view for explaining the operation of the main part of the piezoelectric vibrating gyroscope according to the presence or absence of the application of the driving vibration in the one vibration state of the piezoelectric vibrator 1. ) Relates to a plan view in a state where drive vibration is not applied, FIG. 13B relates to a side view from one direction in a state where drive vibration is not applied, and FIG. FIG. 4 (d) relates to a side view from another direction in a state where drive vibration is applied, and FIG. 6 (e) relates to a side view from another direction in a state where drive vibration is applied. 1 is a side view from one direction. Here, however, it is assumed that the piezoelectric vibrator 1 is also driven in the front and back directions on the paper surface, and the frame 7 is schematically illustrated for simplification of description, and each of the support members 9a to 9a is also illustrated.
Among the conductor portions 8a to 8d, 8a 'to 8d' of 9d, conductor portions 8b, 8 electrically and mechanically connected to both ends of the support members 9a, 9c on one surface (upper surface) side of the frame 7.
Only b ', 8d and 8d' are shown.

5A to 5C, the piezoelectric vibrator 1
Is driven in the front and back directions of the drawing sheet, no driving vibration is applied, and no bending vibration is excited. Therefore, the piezoelectric vibrator 1 and the supporting members 9a and 9c are not deformed, and the supporting members 9a and 9c are not deformed. The connection points 10a and 10c between the common ground electrode 5 and the external connection portions 5a and 2a of the drive electrode 2 in the original piezoelectric vibrator 1 are located at substantially the center of the bent portion.

In the case of FIGS. 5D and 5E, the piezoelectric vibrator 1 is driven in the front and back directions of the drawing to apply the driving vibration, and the bending vibration in the direction parallel to the drawing is excited. Therefore, the piezoelectric vibrator 1 and the supporting members 9a and 9c are deformed, and the common grounding electrode 5 and the driving electrode 2 of the piezoelectric vibrator 1 are deformed in a substantially upwardly bent portion of the supporting member 9a and 9c. The connection points 10a 'and 10c' with the external connection parts 5a and 2a are located differently from the positions of the connection points 10a and 10c. Note that, when the rotational angular velocity is actually applied under the condition where the drive vibration is applied, the vibration orthogonal to the drive vibration is further excited to generate a vibration in which both vibrations are superimposed. Therefore, the operation under these conditions is omitted.

Also in the case of this piezoelectric vibrating gyroscope, the connection point 1
Reference numerals 0a 'and 10c' denote fixing points with respect to the piezoelectric vibrator 1, and support members 9a and 9c and conductor portions 8b and
8b ', 8d and 8d' are fixed points which are not affected by vibration. Support member 9 when drive vibration is applied
a, 9c and the common ground electrode 5 of the piezoelectric vibrator 1 and the mechanical influence on the piezoelectric vibrator 1 due to the change of the connection points of the external connection portions 5a, 2a in the drive electrode 2 are, for example, the conductor portions 8b, FIG. 8 at a corner of a bent portion between three fixed points of the connection point 10a ', the conductor 8b' of the frame 7, the conductor 8d of the frame 7, the connection 10c ', and the conductor 8d' of the frame 7.
It is absorbed by the deformation as shown in (e) and the influence on the vibration can be avoided. In addition, this piezoelectric vibrating gyroscope has the same effect not only on the driving vibration but also on the vibration orthogonal to the driving vibration excited when the above-mentioned rotational angular velocity is applied.

That is, in this piezoelectric vibrating gyroscope, as described above, the support members 9a to 9d are arranged obliquely with respect to the frame 7, so that the external connection portions 2a, 3a, 3b of the bent portions of the support members 9a to 9d are provided. The supporting structure is configured such that connecting portions with 4a, 5a and connecting portions with conductor portions 8a to 8d, 8a 'to 8d' and both end portions of supporting members 9a to 9d are formed on different planes. Thereby, when the driving vibration and the rotational angular velocity are applied, the horizontal portion of the connection portion between the piezoelectric vibrator 1 and the supporting members 9a to 9d generated due to both vibrations including vibration excited in the direction perpendicular to the driving direction. The position change synthesized by the change in the direction and the vertical direction can be absorbed by deforming the corners forming the substantially U-shaped bent portion and the legs (both ends) having the steps, so that the position change is excited. Against vibration It is possible to stabilize the gyro characteristics of the detection sensitivity and the like by suppressing the decrease in the sharpness of the vibration (Q).

In any case, when configured as a piezoelectric vibrating gyroscope, the mechanical effect on the vibration clearly appears as a decrease in the sharpness (Q) of the vibration. The sharpness (Q) is measured between the conventional support structure shown in FIG. 2 and the support structure according to one embodiment shown in FIG. 2 and the support structure according to another embodiment shown in FIG. As a result, 1669 for the non-supported structure and 78 for the conventional support structure shown in FIG.
0, 1 in the case of the support structure according to the embodiment shown in FIG.
620 and 1640 in the case of the support structure according to the other embodiment shown in FIG.

From this result, it can be seen that the sharpness (Q) of the supporting structure according to the embodiment shown in FIG. 2 and the other embodiment shown in FIG. It turns out that it is much more effective than that of the support structure.

In addition, in the case of the piezoelectric vibrating gyroscope having the supporting structure of each embodiment, the polarization treatment of each electrode of the piezoelectric vibrator 1 is not performed by connecting the contact pieces or the like as in the case of the conventional supporting structure. Since the polarization process can be performed by applying a voltage between the support members 9a to 9d, the polarization process can be easily and surely performed while suppressing the deterioration of the vibration characteristics due to the support and the variation in various characteristics. Has become.

[0054]

As described above, according to the present invention, the structure of a piezoelectric vibrator for a piezoelectric vibrating gyroscope is improved, and a driving electrode, a pair of detecting electrodes, And in the common ground electrode, two symmetrical lines that coincide with the driving direction of the cylindrical piezoelectric ceramic and extend in a direction substantially perpendicular to the uniaxial direction, and vibrating nodes from both end surfaces of the cylindrical piezoelectric ceramic. The piezoelectric vibrator has a conductive external connection portion disposed very close to the vibration node on the vibration node vicinity position line including the vibration node vicinity point at a distance equal to the distance to the piezoelectric vibrator. When a piezoelectric vibrating gyroscope is manufactured by electrically and mechanically connecting and fixing to a frame using a conductive support member, a bent portion of the support member, a connection portion of the bent portion with an external connection portion, and a predetermined portion of the frame body Provided in The connecting structure between the conductor and the both ends of the support member, and the conductor disposed on the drive detection circuit board may be formed on substantially the same plane on one side and the other side of the frame. Alternatively, by arranging the support member obliquely with respect to the frame, a connection portion between the bent portion of the support member and the external connection portion, and a connection portion between the conductor portion and both end portions of the support member are formed on different planes. And a polarization process is performed by applying a voltage between the support members electrically and mechanically securely connected to the external connection between the drive electrode, the detection electrode, and the common ground electrode. As a result, a structure suitable for automatic mass production with excellent gyro characteristics that can easily and reliably perform polarization processing while suppressing deterioration of vibration characteristics and variations in various characteristics due to support. So the piezoelectric vibrating gyroscope is implemented.

[Brief description of the drawings]

1A and 1B show a basic configuration of a piezoelectric vibrator for a piezoelectric vibrating gyroscope according to an embodiment of the present invention, wherein FIG. 1A is a perspective view of the external appearance from one direction, and FIG. (C) relates to a cross-sectional view in a plane parallel to an end face.

FIG. 2 is a perspective view showing an external configuration of a piezoelectric vibrating gyroscope according to an example in which the piezoelectric vibrator shown in FIG. 1 is mounted on a frame using a support member.

FIG. 3 is a diagram illustrating an operation of a main part of the piezoelectric vibrating gyroscope in a vibration state of the piezoelectric vibrating gyroscope at the time of generation of excitation vibration with or without application of a rotational angular velocity in one vibration state; (A) relates to a state where the rotational angular velocity is not applied, (b) relates to one state of the bending vibration when the rotational angular velocity is applied, and (c) illustrates the state of the bending vibration when the rotational angular velocity is applied. It is related to another state.

FIG. 4 is a perspective view showing an external configuration of a piezoelectric vibrating gyroscope according to another example in which the piezoelectric vibrator shown in FIG. 1 is mounted on a frame using a support member.

5 is a view illustrating an operation of a main part of the piezoelectric vibrating gyroscope according to one embodiment of the present invention, in which the driving vibration is applied in one vibration state of the piezoelectric vibrator, and FIG.
(A) relates to a plan view in a state where no drive vibration is applied, (b) relates to a side view from one direction in a state where no drive vibration is applied, and (c) relates to a side view in a state where drive vibration is not applied. (D) relates to a side view from another direction with driving vibration applied, and (e) shows a side view from one direction with driving vibration applied. It relates to the figure.

6A and 6B show a basic configuration of a piezoelectric vibrator for a piezoelectric vibrating gyroscope according to a conventional example, in which FIG. 6A is a perspective view and FIG. 6B is a cross-sectional view in a plane parallel to an end face. is there.

7 is a perspective view showing an external configuration of a piezoelectric vibrating gyroscope manufactured by mounting the piezoelectric vibrator shown in FIG. 6 on a circuit board.

FIG. 8 is a schematic diagram for explaining vibration of a piezoelectric vibrator (rod-shaped bending vibrator) in the piezoelectric vibrating gyroscope shown in FIG. 7;

[Explanation of symbols]

1, 1 'Piezoelectric vibrator 2 Drive electrode 2a, 3a, 4a, 5a External connection 3, 4 Detection electrode 5 Common ground electrode 6A, 6B Position line near vibration node 6α, 6β Point near vibration node 6α1, 6β1, 6α2 , 6β2 Vibration node vicinity moving point 6α ', 6β' Vibration node 7 Frame 8a-8d, 8a'-8d 'Conductor 9a-9d Conductive support member 10a, 10c, 10a', 10c ', 10a ", 10
c ″ connection portion 11 drive detection circuit board 12 insulating holder 13a, 13b support component 14 input / output lead wire 15 electronic component 16, 17 conductive terminal

Claims (6)

[Claims] 1. A piezoelectric vibrator for a piezoelectric vibrating gyroscope in which a plurality of electrode patterns including a driving electrode, a pair of detecting electrodes, and a common ground electrode are arranged on side surfaces of a cylindrical piezoelectric ceramic extending in a uniaxial direction. The drive electrode, the pair of detection electrodes, and the common ground electrode respectively correspond to the drive direction of the columnar piezoelectric ceramic and extend in a direction substantially perpendicular to the uniaxial direction. And a conductive member disposed very close to the vibration node on a vibration node vicinity position line including a vibration node vicinity point at a distance equal to the distance from the both end surfaces of the columnar piezoelectric ceramic to the vibration node. A piezoelectric vibrator for a piezoelectric vibrating gyroscope, comprising: a piezoelectric external connection portion. 2. The piezoelectric vibrator for a piezoelectric vibrating gyroscope according to claim 1, wherein the external connection portion is disposed such that the point near the vibration node includes a moving point near the vibration node that moves during bending vibration. A piezoelectric vibrator for a piezoelectric vibrating gyroscope, comprising: 3. The piezoelectric vibrator for a piezoelectric vibrating gyroscope according to claim 1, wherein at least one of the external connection portions includes one of the drive electrode, the pair of detection electrodes, and the common ground electrode. A piezoelectric vibrator for a piezoelectric vibrating gyroscope, wherein the piezoelectric vibrator is formed as at least one of the local portions. 4. A piezoelectric vibrator, wherein the piezoelectric vibrator for a piezoelectric vibratory gyroscope according to claim 1 is electrically and mechanically connected and fixed to a frame using four support members. A gyro, wherein the four support members are made of a conductive thin linear member, have a substantially U-shaped bent portion at a central portion, and have both end portions extending from the bent portion. The cylindrical piezoelectric ceramics are mechanically moved from one side and the other side of the frame by a pair of the four support members so that the driving direction coincides with the clamping direction. And the external connection portion is electrically connected to a substantially central portion of the bent portion of the support member, and the frame body is provided with conductors provided at predetermined positions on one side and the other side, respectively. Parts are electrically and mechanically connected to both ends of the support member. Further, a bent portion of the support member, a connection portion of the bent portion with the external connection portion, and a connection portion of the conductor portion and both end portions of the support member are respectively provided on one surface of the frame. A piezoelectric vibrating gyroscope formed substantially on the same plane on both sides. 5. A piezoelectric vibrator, wherein the piezoelectric vibrator for a piezoelectric vibratory gyroscope according to claim 1 is electrically and mechanically connected and fixed to a frame using four support members. A gyro, wherein the four support members are made of a conductive thin linear member, have a substantially U-shaped bent portion at a central portion, and have both end portions extending from the bent portion. The column-shaped piezoelectric ceramics are formed in a pair from the four support members so that the driving direction coincides with the clamping direction. One of the support members is mechanically clamped by the other from the other surface to the one surface, and the external connection portion is electrically connected to a substantially central portion of the bent portion of the support member. The frame body is provided at predetermined positions on one side and the other side, respectively. Conductors are electrically and mechanically connected and fixed to both ends of the support member, and further, a connection portion of the bent portion of the support member with the external connection portion, and the conductor portion and the support member The piezoelectric vibrating gyroscope is characterized in that the connecting portions with the both ends are formed on different planes. 6. The piezoelectric vibrating gyroscope according to claim 4, wherein the columnar piezoelectric ceramic is subjected to a polarization treatment by applying a high voltage between the four support members.