JP2000214085A5 - - Google Patents
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- Publication number
- JP2000214085A5 JP2000214085A5 JP1999053086A JP5308699A JP2000214085A5 JP 2000214085 A5 JP2000214085 A5 JP 2000214085A5 JP 1999053086 A JP1999053086 A JP 1999053086A JP 5308699 A JP5308699 A JP 5308699A JP 2000214085 A5 JP2000214085 A5 JP 2000214085A5
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- cell
- infrared
- detection
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 description 46
- 238000001514 detection method Methods 0.000 description 23
- 238000012545 processing Methods 0.000 description 20
- 238000010926 purge Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5308699A JP2000214085A (ja) | 1999-01-22 | 1999-01-22 | 赤外線を使用した液体評価装置及びこれを用いた評価方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5308699A JP2000214085A (ja) | 1999-01-22 | 1999-01-22 | 赤外線を使用した液体評価装置及びこれを用いた評価方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000214085A JP2000214085A (ja) | 2000-08-04 |
| JP2000214085A5 true JP2000214085A5 (fr) | 2006-03-02 |
Family
ID=12932984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5308699A Pending JP2000214085A (ja) | 1999-01-22 | 1999-01-22 | 赤外線を使用した液体評価装置及びこれを用いた評価方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000214085A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5813417B2 (ja) * | 2011-08-25 | 2015-11-17 | Ｊｆｅスチール株式会社 | 酸洗液の管理方法及び装置 |
-
1999
- 1999-01-22 JP JP5308699A patent/JP2000214085A/ja active Pending
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