JP2000241281A5 - - Google Patents
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- Publication number
- JP2000241281A5 JP2000241281A5 JP1999048032A JP4803299A JP2000241281A5 JP 2000241281 A5 JP2000241281 A5 JP 2000241281A5 JP 1999048032 A JP1999048032 A JP 1999048032A JP 4803299 A JP4803299 A JP 4803299A JP 2000241281 A5 JP2000241281 A5 JP 2000241281A5
- Authority
- JP
- Japan
- Prior art keywords
- grid
- vacuum gauge
- cathode ionization
- hot cathode
- ionization vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04803299A JP4339948B2 (ja) | 1999-02-25 | 1999-02-25 | 熱陰極電離真空計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04803299A JP4339948B2 (ja) | 1999-02-25 | 1999-02-25 | 熱陰極電離真空計 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000241281A JP2000241281A (ja) | 2000-09-08 |
| JP2000241281A5 true JP2000241281A5 (fr) | 2006-05-18 |
| JP4339948B2 JP4339948B2 (ja) | 2009-10-07 |
Family
ID=12791985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04803299A Expired - Lifetime JP4339948B2 (ja) | 1999-02-25 | 1999-02-25 | 熱陰極電離真空計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4339948B2 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0213611D0 (en) | 2002-06-13 | 2002-07-24 | Boc Group Plc | Vacuum Gauge |
| CN101990630B (zh) | 2008-02-21 | 2013-08-14 | 布鲁克机械公司 | 具有设计用于高压操作的操作参数和几何形状的电离计 |
| US9927317B2 (en) | 2015-07-09 | 2018-03-27 | Mks Instruments, Inc. | Ionization pressure gauge with bias voltage and emission current control and measurement |
| KR102139933B1 (ko) * | 2020-05-04 | 2020-07-31 | 홍승수 | 서미스터 센서를 이용한 진공게이지 및 가스 리크 검출기 일체형 검출장치 |
| CN112629747A (zh) * | 2020-12-29 | 2021-04-09 | 尚越光电科技股份有限公司 | 一种用于高腐蚀性蒸汽压监测的离子真空计 |
-
1999
- 1999-02-25 JP JP04803299A patent/JP4339948B2/ja not_active Expired - Lifetime
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