JP2000258377A - Chip element with sensor - Google Patents

Chip element with sensor

Info

Publication number
JP2000258377A
JP2000258377A JP2000000606A JP2000000606A JP2000258377A JP 2000258377 A JP2000258377 A JP 2000258377A JP 2000000606 A JP2000000606 A JP 2000000606A JP 2000000606 A JP2000000606 A JP 2000000606A JP 2000258377 A JP2000258377 A JP 2000258377A
Authority
JP
Japan
Prior art keywords
sensor
chip
conductor pattern
base material
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000000606A
Other languages
Japanese (ja)
Inventor
Yozo Obara
陽三 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hokuriku Electric Industry Co Ltd
Original Assignee
Hokuriku Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokuriku Electric Industry Co Ltd filed Critical Hokuriku Electric Industry Co Ltd
Priority to JP2000000606A priority Critical patent/JP2000258377A/en
Publication of JP2000258377A publication Critical patent/JP2000258377A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a chip element with sensor that has various kinds of sensors, is in a simple configuration and can reduce volume, and can be surface- mounted to a circuit substrate. SOLUTION: A chip element with sensor is provided with a chip base 12 made of such insulation material as ceramics, a conductor pattern 18 on its outer surface, and a plurality of sensors 22 connected to the conductor pattern 18 on the surface of the base 12. The sensor 22 is a moisture sensor where a hygroscopic material 20 such as a hygroscopic polymer is provided at end parts that oppose each other while being separated slightly each other at the surface center part of the base 12 in the conductor pattern 18.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、絶縁性の基材の
表面に、湿度センサや温度センサ等のセンサを設けたセ
ンサ付きチップ素子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor-equipped chip device in which sensors such as a humidity sensor and a temperature sensor are provided on the surface of an insulating base material.

【0002】[0002]

【従来の技術】従来、電子素子を小型化するために回路
基板へ表面実装する素子が種々提供されており、例えば
チップ抵抗器の場合、特開平5−144602号公報等
に示すように、絶縁性基板表面に抵抗体を形成し、その
両端部に電極を設けて回路基板への表面実装を可能にし
ていた。また、より複雑な電子素子であるセンサ等は、
ハイブリッドICのように周辺回路素子ともにチップ基
板に形成しそのチップ基板を表面実装化したものもあっ
た。
2. Description of the Related Art Conventionally, there have been provided various elements which are surface-mounted on a circuit board in order to reduce the size of an electronic element. A resistor is formed on the surface of a conductive substrate, and electrodes are provided on both ends thereof to enable surface mounting on a circuit board. In addition, sensors and the like, which are more complicated electronic elements,
Some peripheral circuit elements are formed on a chip substrate and the chip substrate is surface-mounted, such as a hybrid IC.

【0003】[0003]

【発明が解決しようとする課題】上記従来の技術の場
合、チップ抵抗器のように素子自体が比較的簡単なもの
は、チップを小型化することが容易であるが、センサ等
の複雑な電気素子はセンサ自体の小型化が難しいもので
あり、一定の表面積や体積を必要とする場合があった。
In the case of the above-mentioned conventional technology, a device having a relatively simple element itself, such as a chip resistor, can easily reduce the size of a chip, but has a complicated electric power such as a sensor. Since it is difficult to reduce the size of the sensor itself, the element may require a certain surface area or volume.

【0004】この発明は上記従来の技術の問題点に鑑み
てなされたもので、センサを備え、簡単な構成で体積も
小さくすることができ、回路基板への表面実装効が可能
なセンサ付きチップ素子を提供することを目的とする。
The present invention has been made in view of the above-mentioned problems of the prior art, and has a sensor, a sensor-equipped chip which can be reduced in volume with a simple structure, and which can be surface-mounted on a circuit board. It is intended to provide an element.

【0005】[0005]

【課題を解決するための手段】この発明のセンサ付きチ
ップ素子は、セラミックス等の絶縁性材料のチップ状基
材を備え、表面に導電体パターンを形成するとともに、
この導電体パターンに接続して上記基材外側面にセンサ
を複数形成したものである。このセンサは、上記導電体
パターンの少なくとも一つが、上記基材外側面中央部で
互いにわずかに離間して対向した端部に、吸水性ポリマ
等の吸湿性の材料を設けた湿度センサである。また、温
度によって抵抗値が変わる材料を設けた温度センサでも
よい。上記基材は、矩形または円筒状に形成され、その
両端部に電極を備え、表面実装可能に設けられている。
A sensor-equipped chip element according to the present invention includes a chip-shaped base made of an insulating material such as ceramics, and has a conductor pattern formed on a surface thereof.
A plurality of sensors are formed on the outer surface of the base material by connecting to the conductor pattern. This sensor is a humidity sensor in which at least one of the conductor patterns is provided with a hygroscopic material such as a water-absorbing polymer at an end portion which is slightly separated from and opposed to each other at the center of the outer surface of the base material. Further, a temperature sensor provided with a material whose resistance value changes with temperature may be used. The base material is formed in a rectangular or cylindrical shape, has electrodes at both ends thereof, and is provided so as to be surface mountable.

【0006】この発明のはセンサ付きチップ素子は、チ
ップ状の基材の外側面を立体的に利用してセンサを形成
することができ、回路基板の表面に表面実装することが
できる。また、回路基板の厚みを利用して内部に設ける
こともできる。
According to the present invention, a chip device with a sensor can form a sensor by three-dimensionally utilizing the outer surface of a chip-shaped base material, and can be surface-mounted on a surface of a circuit board. Further, it can be provided inside using the thickness of the circuit board.

【0007】[0007]

【発明の実施の形態】以下、この発明の実施形態につい
て図面に基づいて説明する。図1、図2は、この発明の
第一実施形態のセンサ付きチップ素子10を示し、絶縁
性のセラミックスからなる円柱状の基材12を備える。
基材12の両端部には、矩形の電極14,16が取り付
けられている。
Embodiments of the present invention will be described below with reference to the drawings. FIGS. 1 and 2 show a sensor-equipped chip element 10 according to a first embodiment of the present invention, which includes a columnar base material 12 made of insulating ceramics.
Rectangular electrodes 14 and 16 are attached to both ends of the base material 12.

【0008】基材12の外側面には、導電体パターン1
8が銅箔等で形成され、この導電体パターン18の先端
部18aは、二股状に分かれ互いに対向している。この
先端部18aの表面には吸水性ポリマ皮膜20が形成さ
れ、湿度センサ22を構成している。
[0008] The conductor pattern 1
8 is formed of a copper foil or the like, and the tip 18a of the conductor pattern 18 is bifurcated and faces each other. A water-absorbing polymer film 20 is formed on the surface of the tip portion 18a, and constitutes a humidity sensor 22.

【0009】また基材12の両端部の電極14,16
は、金属製のキャップを基材12に嵌合させたもので、
この電極14,16は、各々導電体パターン18に接続
している。
The electrodes 14, 16 at both ends of the substrate 12
Is a metal cap fitted to the base material 12,
The electrodes 14 and 16 are connected to the conductor pattern 18, respectively.

【0010】この実施形態のセンサ付きチップ素子の製
造方法は、まずセラミックス材料等を成形して焼成し、
円柱形状の基材12を形成する。そして、基材12の表
面にメッキや蒸着、スパッタリング等により導電体によ
る導電体パターン18を形成する。この形成は導電体パ
ターン18の形状のマスクを用いて印刷や蒸着を行う。
次に、導電体パターン18の端部18aの表面に吸水性
ポリマ皮膜20を印刷や塗布により形成する。
In the method of manufacturing a chip device with a sensor according to this embodiment, first, a ceramic material or the like is formed and fired,
A columnar base material 12 is formed. Then, a conductor pattern 18 of a conductor is formed on the surface of the substrate 12 by plating, vapor deposition, sputtering, or the like. This formation is performed by printing or vapor deposition using a mask having the shape of the conductor pattern 18.
Next, a water-absorbing polymer film 20 is formed on the surface of the end portion 18a of the conductor pattern 18 by printing or coating.

【0011】このセンサ付きチップ素子10の使用方法
は、通常の表面実装型素子と同様に,回路基板の表面の
電極ランドに、電極14,16を半田付けしてもよい
が、例えば、図2に示すように、回路基板30の厚みを
利用して、回路基板30の収納孔32に装着してもよ
い。この場合、回路基板30に形成された回路パターン
34の、電極ランド部36の裏面側に電極14,16が
位置して半田38により半田付けされる。
In the method of using the chip device 10 with a sensor, the electrodes 14 and 16 may be soldered to the electrode lands on the surface of the circuit board in the same manner as in a normal surface mount type device. As shown in (5), the circuit board 30 may be mounted in the storage hole 32 by utilizing the thickness of the circuit board 30. In this case, the electrodes 14 and 16 are located on the back side of the electrode land portions 36 of the circuit pattern 34 formed on the circuit board 30 and are soldered by the solder 38.

【0012】次にこの発明のセンサ付きチップ素子の第
二実施形態について図3、図4を基にして説明する。こ
こで、上記実施形態と同様の構成は、同一の符号を付し
て説明を省略する。この実施形態のセンサ付きチップ素
子40は、矩形に形成されたもので、全体の厚さがより
薄いものに形成されている。
Next, a second embodiment of the sensor-equipped chip element according to the present invention will be described with reference to FIGS. Here, the same components as those in the above-described embodiment are denoted by the same reference numerals, and description thereof is omitted. The sensor-equipped chip element 40 of this embodiment is formed in a rectangular shape, and has a smaller overall thickness.

【0013】この場合、図4に示すように、例えば、フ
レキシブル基板42の厚み程度に形成して、フレキシブ
ル基板42内に収納することもできる。また、収納に際
しては、フレキシブル基板42のフィルムを張り合わせ
る際にこのセンサ付きチップ素子40を装着してもよ
く、フレキシブル基板の形成後に実装してもよい。
In this case, as shown in FIG. 4, for example, the flexible substrate 42 may be formed to have a thickness of about the thickness of the flexible substrate 42 and housed in the flexible substrate 42. Further, at the time of storage, the chip device with sensor 40 may be mounted when the film of the flexible substrate 42 is bonded, or may be mounted after the flexible substrate is formed.

【0014】なお、この発明は、上記実施形態に限定さ
れるものではなく、基材の表面に形成するセンサは、湿
度センサ以外に温度センサでもよく、基材表面に形成可
能なセンサであればよい。たとえば、基材の一方の面に
炭酸ガス等のガスセンサを形成し、他方の面に湿度セン
サを形成しても良い。この場合、表裏の電極を各々別々
の回路に接続しても良く、また一方の側の表裏の電極の
みを接続することによって、表裏のセンサの直列回路が
形成され、アンド条件の検知が可能となる。また、セン
サの両側の電極を端面電極で各々表裏を接続することに
よりオア条件の検出が可能となる。さらに、同種のセン
サを複数設けて感度を上げることもできる。ここで用い
るセンサやその構造は適宜選択可能なものである。例え
ば、センサ部分の上面に保護膜や、透湿膜、ガス透過性
の膜を設けても良い。
The present invention is not limited to the above embodiment, and the sensor formed on the surface of the substrate may be a temperature sensor other than the humidity sensor, as long as the sensor can be formed on the surface of the substrate. Good. For example, a gas sensor such as carbon dioxide may be formed on one surface of the base material, and a humidity sensor may be formed on the other surface. In this case, the front and back electrodes may be connected to separate circuits, respectively.By connecting only the front and back electrodes on one side, a series circuit of front and back sensors is formed, and it is possible to detect the AND condition. Become. Further, by connecting the electrodes on both sides of the sensor to the front and back with end face electrodes, the OR condition can be detected. Further, the sensitivity can be increased by providing a plurality of sensors of the same type. The sensor and its structure used here can be appropriately selected. For example, a protective film, a moisture permeable film, or a gas permeable film may be provided on the upper surface of the sensor portion.

【0015】さらに、基材の形状も適宜選択可能なもの
であり、通常のチップ部品形状の基材の、長手方向両端
面の角を落としたりRを形成したりして、端面電極の樹
脂銀等の材料の付着性を良くしたものでも良い。また、
このセンサ付きチップが取り付けられる回路基板のセン
サチップ取付部には、凹部または透孔が形成されていて
も良い。これにより、通気性が確保され回路基板に邪魔
されることなく湿度等の正確な検知が可能となる。また
このセンサ付きチップの形状自体を裏面側に電極による
段部を形成して、センサ部分と回路基板との間に空間が
形成されるようにしても良い。また、端面電極は、はん
だ付け等を行う電極の他、回路基板上での配線として用
いても良い。
Further, the shape of the base material can be appropriately selected. For example, the corners of both end faces in the longitudinal direction of the base material having the shape of a normal chip part are reduced or R is formed, so that the resin silver of the end face electrode is formed. It is also possible to use a material having improved adhesion of a material such as Also,
A concave portion or a through hole may be formed in the sensor chip mounting portion of the circuit board to which the chip with the sensor is mounted. Thereby, air permeability is ensured, and accurate detection of humidity and the like can be performed without being obstructed by the circuit board. Alternatively, the shape of the sensor-equipped chip itself may be formed on the back side with a step formed by electrodes, so that a space is formed between the sensor part and the circuit board. In addition, the end face electrode may be used as a wiring on a circuit board in addition to an electrode for performing soldering or the like.

【0016】また、このセンサ付きチップの組み立てに
際して各電気的接続部は、はんだ接続以外にAg含有導
電性塗料等を用いることもできる。例えば、金属キャッ
プと基材との接合部も、金属キャップの凹部に基材を嵌
合させるようにし、その際にこの凹部に導電性塗料を塗
布しておいて嵌合し、硬化させて組み立ててもよい。こ
れにより、はんだの使用を削減することができ、鉛等の
害をなくし、より環境に優しい電子機器を製造すること
ができる。
In assembling the sensor-equipped chip, the electrical connection portions may be made of an Ag-containing conductive paint or the like in addition to the solder connection. For example, the joint between the metal cap and the base material is also fitted with the base material in the concave portion of the metal cap, and at this time, the conductive paint is applied to the concave portion, fitted, cured, and assembled. You may. Thus, the use of solder can be reduced, and the harm of lead and the like can be eliminated, and a more environmentally friendly electronic device can be manufactured.

【0017】また、基材に形成されるセンサは、印刷や
蒸着のほか、転写により形成することも可能である。こ
の場合、基材に金属キャップを嵌合させた後に基材表面
にセンサを転写することも可能である。転写により形成
されるセンサは、薄いフィルム上にあらかじめ各種のセ
ンサを形成するため、より複雑なセンサの形成も可能で
ある。
Further, the sensor formed on the base material can be formed by transfer, in addition to printing and vapor deposition. In this case, it is also possible to transfer the sensor to the surface of the base material after fitting the metal cap to the base material. In the sensor formed by transfer, various sensors are formed in advance on a thin film, so that a more complicated sensor can be formed.

【0018】[0018]

【発明の効果】この発明のセンサ付きチップ素子は、チ
ップ状の基材外側面にセンサを複数設けて回路基板表面
に実装可能にしたので、センサの取り付けが容易であ
り、小型で、性能がよいセンサを提供することができ
る。更に、チップ状にしたことにより、取り扱いが容易
であり、実装も既存の設備を用いて簡単に行うことがで
きる。
According to the chip element with sensor of the present invention, a plurality of sensors are provided on the outer surface of the chip-shaped base material and can be mounted on the surface of the circuit board. A good sensor can be provided. Further, the use of a chip makes handling easy, and mounting can be easily performed using existing equipment.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の第一実施形態のセンサ付きチップ素
子を示す斜視図である。
FIG. 1 is a perspective view showing a chip device with a sensor according to a first embodiment of the present invention.

【図2】この発明の第一実施形態のセンサ付きチップ素
子の実装状態の縦断面図である。
FIG. 2 is a longitudinal sectional view of a mounted state of the chip element with a sensor according to the first embodiment of the present invention.

【図3】この発明の第二実施形態のセンサ付きチップ素
子を示す斜視図である。
FIG. 3 is a perspective view showing a chip device with a sensor according to a second embodiment of the present invention.

【図4】この発明の第二実施形態のセンサ付きチップ素
子の実装状態の縦断面図である。
FIG. 4 is a longitudinal sectional view of a mounted state of a chip device with a sensor according to a second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

10,40 センサ付きチップ素子 12 基材 14,16 電極 18 導体パターン 20 吸水性ポリマ皮膜 22 センサ 10, 40 Chip element with sensor 12 Base material 14, 16 Electrode 18 Conductor pattern 20 Water-absorbing polymer film 22 Sensor

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 絶縁性材料のチップ状の基材を備え、こ
の基材外側面に導電体パターンを形成するとともに、こ
の導電体パターンに接続して上記基材外側面に膜状のセ
ンサを複数形成したセンサ付きチップ素子。
1. A semiconductor device comprising a chip-shaped substrate made of an insulating material, a conductor pattern formed on the outer surface of the substrate, and a film-shaped sensor connected to the conductor pattern on the outer surface of the substrate. A plurality of chip elements with sensors.
【請求項2】 上記導電体パターンの少なくとも一つ
は、上記基材外側面中央部で互いにわずかに離間して対
向し、この導電性パターンの端部に吸湿性の材料を塗布
して湿度センサを設けた請求項1記載のセンサ付きチッ
プ素子。
2. A humidity sensor, wherein at least one of the conductor patterns faces slightly apart from each other at the center of the outer surface of the base material, and a hygroscopic material is applied to an end of the conductive pattern. The chip device with a sensor according to claim 1, further comprising:
JP2000000606A 1999-01-06 2000-01-06 Chip element with sensor Pending JP2000258377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000000606A JP2000258377A (en) 1999-01-06 2000-01-06 Chip element with sensor

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-1324 1999-01-06
JP132499 1999-01-06
JP2000000606A JP2000258377A (en) 1999-01-06 2000-01-06 Chip element with sensor

Publications (1)

Publication Number Publication Date
JP2000258377A true JP2000258377A (en) 2000-09-22

Family

ID=26334538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000000606A Pending JP2000258377A (en) 1999-01-06 2000-01-06 Chip element with sensor

Country Status (1)

Country Link
JP (1) JP2000258377A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007519931A (en) * 2004-01-27 2007-07-19 エイチツースキャン コーポレイション Method and apparatus for thermal separation of gas sensors
GB2453145A (en) * 2007-09-27 2009-04-01 Timothy Howard Russell Self-wetting electrochemical sensor using a doped substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007519931A (en) * 2004-01-27 2007-07-19 エイチツースキャン コーポレイション Method and apparatus for thermal separation of gas sensors
GB2453145A (en) * 2007-09-27 2009-04-01 Timothy Howard Russell Self-wetting electrochemical sensor using a doped substrate

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