JP2000294698A - Thermal conductive spacer - Google Patents

Thermal conductive spacer

Info

Publication number
JP2000294698A
JP2000294698A JP11096001A JP9600199A JP2000294698A JP 2000294698 A JP2000294698 A JP 2000294698A JP 11096001 A JP11096001 A JP 11096001A JP 9600199 A JP9600199 A JP 9600199A JP 2000294698 A JP2000294698 A JP 2000294698A
Authority
JP
Japan
Prior art keywords
spacer
powder
thermal conductivity
volume
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11096001A
Other languages
Japanese (ja)
Other versions
JP3933341B2 (en
Inventor
Tetsumi Otsuka
哲美 大塚
Yasuhiko Itabashi
康彦 板橋
Hiroaki Sawa
博昭 澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP09600199A priority Critical patent/JP3933341B2/en
Publication of JP2000294698A publication Critical patent/JP2000294698A/en
Application granted granted Critical
Publication of JP3933341B2 publication Critical patent/JP3933341B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/38—Boron-containing compounds

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

(57)【要約】 【課題】高柔軟性かつ高熱伝導性の電子部品のスペーサ
ーを提供すること。 【解決手段】樹脂に熱伝導性フィラーを含有させてなる
熱伝導性スペーサーにおいて、上記熱伝導性フィラーと
して、六方晶窒化ホウ素で被覆されたマグネシウム及び
/又はカルシウムのホウ酸塩粉末を25〜50体積%、
扁平度10以上のBN粉末を5〜25体積%を樹脂に含
有させたものであることを特徴とする熱伝導性スペーサ
ー。
(57) [Summary] To provide a spacer for an electronic component having high flexibility and high thermal conductivity. A thermally conductive spacer comprising a resin containing a thermally conductive filler, wherein the thermally conductive filler comprises magnesium and / or calcium borate powder coated with hexagonal boron nitride as a heat conductive filler. volume%,
A thermally conductive spacer comprising a resin containing BN powder having a flatness of 10 or more and 5 to 25% by volume.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、コンピューター、
ワードプロセッサーなどの情報処理機器におけるIC、
LSI、CPU、MPU等の半導体素子より発生する熱
を効率よく放出するのに有用な熱伝導性スペーサーに関
する。
The present invention relates to a computer,
ICs in information processing equipment such as word processors,
The present invention relates to a heat conductive spacer useful for efficiently releasing heat generated from a semiconductor element such as an LSI, a CPU, and an MPU.

【0002】[0002]

【従来の技術】近年、コンピューターやワードプロセッ
サー等の情報処理機器は、携帯用使用の薄型サイズのも
のが好まれるようになっている。それに伴い、半導体素
子も高密度化・小型化され、そこから発生する熱も増加
の一途をたどり、それを効率良く除去することが重要な
課題となっている。
2. Description of the Related Art In recent years, portable information processing apparatuses such as computers and word processors have become thinner. Along with this, semiconductor elements have been increased in density and reduced in size, and the heat generated therefrom has steadily increased, and it has become an important issue to efficiently remove it.

【0003】従来より、半導体素子より発生した熱の除
去は、半導体素子を熱伝導性シート介して放熱フィンや
金属板に取り付けることによって行われている。しかし
ながら、情報処理機器の小型化、薄型化により、放熱フ
ィン等を取り付けるスペースがない場合も多くなり、そ
の場合には情報処理機器のケース等に直接伝熱して放熱
する方式が取られている。
Conventionally, removal of heat generated from a semiconductor element has been performed by attaching the semiconductor element to a radiating fin or a metal plate via a heat conductive sheet. However, as information processing devices have become smaller and thinner, there are many cases where there is no space for mounting a radiation fin or the like. In such a case, a method of directly transferring heat to a case or the like of the information processing device and dissipating heat is adopted.

【0004】このような方式においては、半導体素子と
ケースの間に、そのスペースを埋める厚みを有した、シ
リコーン等の樹脂硬化物に熱伝導性フィラーの充填され
た柔らかな熱伝導性スペーサーが用いられており、更な
る高熱伝導性を付与したものが要求されている。
In such a method, a soft heat conductive spacer filled with a heat conductive filler in a cured resin such as silicone having a thickness to fill the space is used between a semiconductor element and a case. Therefore, a material having a higher thermal conductivity is required.

【0005】熱伝導性スペーサー(以下、単に「スペー
サー」ともいう。)の高熱伝導化を達成するには、スペ
ーサー内に存在する熱伝導性フィラーを連続的に接触さ
せればよく、その一法として熱伝導性フィラーの充填量
を多くすることが行われているものの、この方法では、
スペーサーの柔らかさが低下し、情報処理機器のケース
等との接触が悪くなって、熱伝導性が著しく低下する
等、この方法では限界があった。
[0005] In order to achieve high thermal conductivity of a thermally conductive spacer (hereinafter, also simply referred to as a "spacer"), a thermally conductive filler existing in the spacer may be continuously contacted. Although it has been performed to increase the amount of the heat conductive filler, in this method,
This method has limitations, for example, the softness of the spacer is reduced, the contact with the case of the information processing equipment is deteriorated, and the thermal conductivity is significantly reduced.

【0006】また、熱伝導性フィラーとして、六方晶窒
化ホウ素(hBN)粉末を用いられることが多い。しか
し、hBN粉末は、混合、混練、成形時に剪断応力を受
けてスペーサーにしたときに粒子は横に配向した状態に
なる。この状態では、hBN粒子の面方向(a軸方向)
の熱伝導率が110W/m・Kあるにも関わらず、粒子
の厚み方向(c軸方向)の熱伝導率2W/m・Kしか利
用することができず、十分に満足された放熱特性を有す
るスペーサーを得ることが困難であった。
[0006] Hexagonal boron nitride (hBN) powder is often used as the heat conductive filler. However, when hBN powder is subjected to shear stress during mixing, kneading and molding to form a spacer, the particles are in a horizontally oriented state. In this state, the surface direction of the hBN particles (a-axis direction)
Despite having a thermal conductivity of 110 W / m · K, only a thermal conductivity of 2 W / m · K in the thickness direction of the particles (c-axis direction) can be used, and a sufficiently satisfactory heat radiation characteristic is obtained. It was difficult to obtain a spacer having the same.

【0007】例えば特公平6−12643号公報等にあ
るように、窒化ホウ素粒子をランダムに並ばせることに
よって、熱伝導性がかなり高められているが、まだまだ
不十分であり改善の余地がある。
For example, as disclosed in Japanese Patent Publication No. 6-12643, the thermal conductivity is considerably increased by randomly arranging boron nitride particles, but it is still insufficient and has room for improvement.

【0008】[0008]

【発明が解決しようとする課題】そこで、本発明者ら
は、スペーサーの熱伝導性と柔軟性を更に高めることを
目的として、種々検討した結果、六方晶窒化ホウ素で被
覆されたマグネシウム及び/又はカルシウムのホウ酸塩
粉末(以下、「BN被覆ホウ酸塩粉末」という。)と、
扁平度が10以上のhBN粉末(以下、「扁平BN粉
末」という。)を併用すれば、扁平BN粒子の一部がB
N被覆ホウ酸塩粒子間に挟まり、粒子の接触点ないしは
接触面が多くなり、スペーサーの熱伝導性がかなり向上
することを見いだし、そして、スペーサーの柔軟性を高
めるために、BN充填量を低減しても著しく高い熱伝導
性を発現することをあわせ見いだし、本発明を完成させ
るに至った。
The inventors of the present invention have conducted various studies with the aim of further increasing the thermal conductivity and flexibility of the spacer, and as a result, have found that magnesium and / or magnesium coated with hexagonal boron nitride can be used. Calcium borate powder (hereinafter referred to as “BN-coated borate powder”);
When hBN powder having a flatness of 10 or more (hereinafter referred to as “flat BN powder”) is used in combination, a part of the flat BN particles becomes B
Between the N-coated borate particles, we found that the number of contact points or surfaces of the particles increased, the thermal conductivity of the spacer was considerably improved, and the BN loading was reduced to increase the flexibility of the spacer. They have also found that they exhibit extremely high thermal conductivity, and have completed the present invention.

【0009】[0009]

【課題を解決するための手段】すなわち、本発明は、樹
脂に熱伝導性フィラーを含有させてなる熱伝導性スペー
サーにおいて、上記熱伝導性フィラーとして、BN被覆
ホウ酸塩粉末25〜50体積%、扁平BN粉末5〜25
体積%を樹脂に含有させたものであることを特徴とする
熱伝導性スペーサーである。
That is, according to the present invention, there is provided a heat conductive spacer comprising a resin containing a heat conductive filler, wherein the heat conductive filler is BN-coated borate powder in an amount of 25 to 50% by volume. , Flat BN powder 5-25
It is a heat conductive spacer characterized in that a volume% is contained in a resin.

【0010】[0010]

【発明の実施の形態】以下、本発明を更に詳細に説明す
る。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in more detail.

【0011】本発明の高熱伝導性スペーサーのマトリッ
クスとして用いられる樹脂としては、エポキシ樹脂、フ
ェノール樹脂、シリコーン樹脂、ポリイミド樹脂、ビス
マレイミドトリアジン等を不都合なく用いることができ
るが、通常の使用に対してはシリコーン樹脂が好適であ
る。
As the resin used as the matrix of the high thermal conductive spacer of the present invention, epoxy resin, phenol resin, silicone resin, polyimide resin, bismaleimide triazine, etc. can be used without any problem. Is preferably a silicone resin.

【0012】本発明で使用されるBN被覆ホウ酸塩粉末
は、マグネシウム又はカルシウムのホウ酸塩粒子のコア
部と、その表面の全部又は一部を覆っている鱗片状hB
Nからなるシェル部とで構成されている。マグネシウム
又はカルシウムのホウ酸塩とhBNの確認は、エネルギ
ー分散型蛍光X線測定器を用いて行うことができる。コ
ア部の割合は、粒子断面の面積占有率で10〜80%で
あることが好ましく、またシェル部の厚みは数〜十数μ
mであることが好ましい。
The BN-coated borate powder used in the present invention comprises a core of magnesium or calcium borate particles and a scale-like hB covering all or a part of the surface thereof.
And a shell portion made of N. Confirmation of magnesium or calcium borate and hBN can be performed using an energy dispersive X-ray fluorescence spectrometer. The ratio of the core portion is preferably 10 to 80% in terms of the area occupation ratio of the particle cross section, and the thickness of the shell portion is several to several tens of μm.
m is preferable.

【0013】BN被覆ホウ酸塩粉末は、例えば次のよう
にして製造することができる。すなわち、メラミン、ホ
ウ酸、並びにマグネシウム、カルシウムの水酸化物及び
炭酸塩から選ばれた少なくとも一種の無機化合物のモル
百分率の三元組成図(メラミン,ホウ酸,無機化合物)
において、点A(35,60,5)、B(25,70,
5)、C(5,80,15)、D(5,5,90)を結
ぶ線で囲まれた範囲内にある混合物を、そのままもしく
は300kgf/cm2以下、好ましくは100kgf
/cm2以下の圧力で成型した後、窒素、アンモニア等
の非酸化性雰囲気下、温度1700〜2200℃で0.
5〜24時間、好ましくは2〜10時間焼成すると、B
N被覆ホウ酸塩粒子とhBNとが含まれた混合粉末を製
造することができるので、この混合粉末を水等の溶剤中
に超音波分散させ、24μmJIS篩いで篩い上残分を
選別することによって、BN被覆ホウ酸塩粒子の割合を
高めた混合粉末を製造することができる。(特願平10
−352519号参照)。
The BN-coated borate powder can be produced, for example, as follows. That is, a ternary composition diagram of the molar percentage of at least one inorganic compound selected from melamine, boric acid, and hydroxides and carbonates of magnesium and calcium (melamine, boric acid, inorganic compound)
At points A (35, 60, 5), B (25, 70,
5) The mixture within the range surrounded by the line connecting C (5, 80, 15) and D (5, 5, 90) is used as it is or 300 kgf / cm 2 or less, preferably 100 kgf.
/ Cm 2 at a pressure of not more than 1 / cm 2 at a temperature of 1700-2200 ° C. in a non-oxidizing atmosphere such as nitrogen or ammonia.
When calcined for 5 to 24 hours, preferably 2 to 10 hours, B
Since it is possible to produce a mixed powder containing N-coated borate particles and hBN, this mixed powder is ultrasonically dispersed in a solvent such as water, and the residue on the sieve is screened by a 24 μm JIS sieve. , A mixed powder having an increased proportion of BN-coated borate particles can be produced. (Japanese Patent Application No. 10
-352519).

【0014】扁平BN粉末における扁平度とは、1個の
粒子の平均粒子径(Da)[(長径+短径)/2]をその
粒子の最大粒子厚み(Dc)で割ることによって求めら
れた値であり、200個の平均値である。本発明におい
ては、扁平度が10以上あることが必要であり、扁平度
が10未満では、BN被覆ホウ酸塩粒子との接触が十分
でなくなり、熱伝導の向上は少ない。
The flatness of the flat BN powder is determined by dividing the average particle diameter (Da) of one particle [(long axis + minor axis) / 2] by the maximum particle thickness (Dc) of the particle. The value is an average of 200 values. In the present invention, the flatness needs to be 10 or more. If the flatness is less than 10, the contact with the BN-coated borate particles is not sufficient, and the improvement in heat conduction is small.

【0015】本発明のスペーサーを構成する熱伝導性フ
ィラーとしては、BN被覆ホウ酸塩粉末と扁平BN粉末
が必須成分となる。その比率を樹脂への混入率で示す
と、BN被覆ホウ酸塩粉末が25〜50体積%、扁平B
N粉末が5〜25体積%である。BN被覆ホウ酸塩粉末
が50体積%をこえると、熱伝導率は向上するものの柔
軟性の低下が著しく、逆に25体積%未満では熱伝導性
が向上しない。一方、扁平BN粉末が25体積%をこえ
ると、横に向くBNが多くなって熱伝導性が逆に低下
し、また5体積%未満では、BN被覆ホウ酸塩粉末との
接触が不十分となり熱伝導性が低下する。
As the heat conductive filler constituting the spacer of the present invention, BN-coated borate powder and flat BN powder are essential components. When the ratio is shown by the mixing ratio to the resin, the BN-coated borate powder has a volume of 25 to 50% by volume,
N powder is 5 to 25% by volume. When the BN-coated borate powder exceeds 50% by volume, the thermal conductivity is improved, but the flexibility is remarkably reduced. Conversely, if it is less than 25% by volume, the thermal conductivity does not improve. On the other hand, when the flat BN powder exceeds 25% by volume, the BN which is directed sideways increases and the thermal conductivity decreases, and when it is less than 5% by volume, the contact with the BN-coated borate powder becomes insufficient. Thermal conductivity decreases.

【0016】平均粒子径については、BN被覆ホウ酸塩
粉末、扁平BN粉末共に、限定されるものではないが、
BN被覆ホウ酸塩粉末については5〜25μm、扁平B
N粉末については5〜15μmの範囲にあることが望ま
しい。
The average particle size is not limited for both the BN-coated borate powder and the flat BN powder,
5 to 25 μm for BN-coated borate powder, flat B
It is desirable for the N powder to be in the range of 5 to 15 μm.

【0017】本発明のスペーサーの平面形状は、発熱素
子を埋没できる形状であれば、制限されるものではな
く、例えば三角形、四角形、五角形などの多角形、円
形、楕円形等が挙げられる。更には、発熱素子が埋没し
やすいように凹凸を設けてもかまわない。スペーサーの
厚みとしては、0.05〜5mm、特に0.2〜2mm
が一般的である。
The planar shape of the spacer of the present invention is not limited as long as it is a shape capable of burying the heating element, and examples thereof include a polygon such as a triangle, a quadrangle and a pentagon, a circle and an ellipse. Further, irregularities may be provided so that the heating element is easily buried. The thickness of the spacer is 0.05 to 5 mm, particularly 0.2 to 2 mm
Is common.

【0018】本発明のスペーサーを製造するに際して
は、扁平BN粉末とシリコーン樹脂を、BN被覆ホウ酸
塩粉末とシリコーン樹脂を、それぞれ予め混合した後、
それぞれの混合物を所定の割合で再度混合する方法が、
最も良好な熱伝導性と柔軟性を付与されたスペーサーが
得られる点で最適である。
In manufacturing the spacer of the present invention, the flat BN powder and the silicone resin, and the BN-coated borate powder and the silicone resin are mixed in advance, respectively.
A method of mixing each mixture again at a predetermined ratio,
It is optimal in that a spacer having the best thermal conductivity and flexibility can be obtained.

【0019】混合には、ロールミル、ニーダー、バンバ
リーミキサー等の公知の混合機を用いることができる。
また、成形は、押出し成形法が好ましい。プレス法で
は、扁平度の高い扁平BN粉末が横に配向し易くなる。
また、ドクターブレード法では、使用可能な粘度となる
まで有機溶剤を添加しなければならず、成形後有機溶剤
を除去する工程が必要となり、生産性に劣る。
For the mixing, a known mixer such as a roll mill, a kneader or a Banbury mixer can be used.
The extrusion is preferably performed by an extrusion molding method. In the pressing method, flat BN powder having a high degree of flatness is easily oriented horizontally.
In addition, in the doctor blade method, an organic solvent must be added until the viscosity becomes usable, and a step of removing the organic solvent after molding is required, resulting in poor productivity.

【0020】加硫温度は、80〜200℃の範囲にある
ことが望ましい。80℃未満ではシートが十分に加硫さ
れず、逆に200℃をこえるとスペーサーの一部が劣化
する。また、加硫には、一般的な熱風乾燥機、遠赤外乾
燥機、マイクロ波乾燥機等を用いることができる。
[0020] The vulcanization temperature is desirably in the range of 80 to 200 ° C. If the temperature is lower than 80 ° C., the sheet is not sufficiently vulcanized, and if it exceeds 200 ° C., a part of the spacer deteriorates. For vulcanization, a general hot air dryer, far-infrared dryer, microwave dryer, or the like can be used.

【0021】[0021]

【実施例】以下、実施例、比較例をあげて更に具体的に
本発明を説明する。
The present invention will be described below more specifically with reference to examples and comparative examples.

【0022】実施例1〜5 比較例1〜3 付加反応型型シリコーン樹脂(東芝シリコーン社製 商
品名「SE1885」)と表1に示されるBN被覆ホウ
酸塩粉末とを、また上記シリコーン樹脂と扁平BN粉末
である市販のhBN粉末(電気化学工業社製 商品名
「デンカボロンナイトライド GPグレード」)とを、
個別に混合した後、それらを表1に示した所定の割合と
なるよう配合して更に混合を行った。
Examples 1 to 5 Comparative Examples 1 to 3 An addition reaction type silicone resin (trade name "SE1885" manufactured by Toshiba Silicone Co., Ltd.) and a BN-coated borate powder shown in Table 1 were used. A commercially available hBN powder which is a flat BN powder (trade name “DENCABORON NITRIDE GP Grade” manufactured by Denki Kagaku Kogyo Co., Ltd.)
After being individually mixed, they were blended so as to have a predetermined ratio shown in Table 1, and further mixed.

【0023】得られた混合物を、真空押出機にて厚さ1
mmとなるように押出し成形した後、140℃の乾燥機
中に15時間静置して加硫・硬化させ、スペーサーを作
製した。得られたスペーサーの、熱伝導率と圧縮率を以
下に従い測定した。その結果を表1に示す。
[0023] The obtained mixture was applied to a thickness of 1 with a vacuum extruder.
After extrusion molding to a thickness of 0.1 mm, the mixture was allowed to stand in a dryer at 140 ° C. for 15 hours for vulcanization and curing to produce a spacer. The thermal conductivity and the compressibility of the obtained spacer were measured as follows. Table 1 shows the results.

【0024】参考値として、扁平BN粉末単独で作製し
たスペーサーの物性を表1に記す。
As reference values, Table 1 shows the physical properties of spacers made of flat BN powder alone.

【0025】(1)熱伝導率:スペーサーをTO−3型
銅製ヒーターケースと銅板との間に挟み、スペーサー厚
みの10%を圧縮した後、銅製ヒーターケースに電力5
Wかけて4分間保持し、銅製ヒーターケースと銅板との
温度差を測定し、熱伝導率(W/m・K)={電力
(W)×厚み(m)}/{温度差(K)×測定面積(m
2 )}、にて熱伝導率を算出した。 (2)圧縮率:スペーサーを1cm2角に打ち抜いた
後、精密万能試験機(島津製作所製商品名「オートグラ
フ」)により、厚さ方向に1kgfの荷重をかけたとき
の圧縮変形量を計測し、圧縮率(%)={圧縮変形量
(mm)×100}/元の厚さ(mm)にて、圧縮率を
算出した。 (3)扁平BN粉末の扁平度:液体窒素により冷却した
状態でスペーサーを切断し、破断面を露出させ、その破
断面をSEM観察により扁平BN粉の平均粒子径(D
a)及び最大粒子厚み(Dc)を測定し、扁平度を求め
た。
(1) Thermal conductivity: A spacer is sandwiched between a TO-3 type copper heater case and a copper plate, and 10% of the spacer thickness is compressed.
W was held for 4 minutes, the temperature difference between the copper heater case and the copper plate was measured, and the thermal conductivity (W / m · K) = {power (W) × thickness (m)} /} temperature difference (K) × measurement area (m
2 ) The thermal conductivity was calculated in ①. (2) Compression ratio: After punching a spacer into 1 cm 2 square, measure the amount of compressive deformation when a 1 kgf load is applied in the thickness direction by a precision universal testing machine (trade name “Autograph” manufactured by Shimadzu Corporation). Then, the compression ratio was calculated by the following equation: compression ratio (%) = {compression deformation (mm) × 100} / original thickness (mm). (3) Flatness of flat BN powder: The spacer is cut in a state of cooling with liquid nitrogen to expose a fractured surface, and the fractured surface is observed by SEM to observe the average particle diameter (D) of the flattened BN powder.
a) and the maximum particle thickness (Dc) were measured to determine the flatness.

【0026】[0026]

【表1】 [Table 1]

【0027】実施例6 BN被覆ホウ酸塩粉末として、BN被覆ホウ酸カルシウ
ムの代わりにBN被覆ホウ酸マグネシウムを用いたこと
以外は、実施例1に準じてスペーサーを作製したとこ
ろ、実施例1とほぼ同等の好結果が得られた。
Example 6 A spacer was produced in the same manner as in Example 1 except that BN-coated magnesium borate was used instead of BN-coated calcium borate as the BN-coated borate powder. Almost the same good results were obtained.

【0028】[0028]

【発明の効果】本発明のスペーサーは、放熱特性及び柔
軟性に優れたものである。
The spacer of the present invention has excellent heat radiation characteristics and flexibility.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 樹脂に熱伝導性フィラーを含有させてな
る熱伝導性スペーサーにおいて、上記熱伝導性フィラー
として、六方晶窒化ホウ素で被覆されたマグネシウム及
び/又はカルシウムのホウ酸塩粉末を25〜50体積
%、扁平度10以上のBN粉末を5〜25体積%を樹脂
に含有させたものであることを特徴とする熱伝導性スペ
ーサー。
1. A heat conductive spacer comprising a resin containing a heat conductive filler, wherein the heat conductive filler comprises magnesium and / or calcium borate powder coated with hexagonal boron nitride in an amount of 25 to 50%. A thermally conductive spacer comprising 50 to 25% by volume of BN powder having a flatness of 10 or more and a resin content of 5 to 25% by volume.
JP09600199A 1999-04-02 1999-04-02 Thermally conductive spacer Expired - Lifetime JP3933341B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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JP3933341B2 JP3933341B2 (en) 2007-06-20

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1947836A2 (en) 2000-09-27 2008-07-23 Ricoh Company, Ltd. Image-processing apparatus and image-processing method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03151658A (en) * 1989-11-08 1991-06-27 Tokai Rubber Ind Ltd Cooling sheet
JPH05186205A (en) * 1992-01-08 1993-07-27 Kawasaki Steel Corp Hexagonal boron nitride powder and its production
JPH0789780A (en) * 1993-04-09 1995-04-04 Toshiba Tungaloy Co Ltd Cubic boron nitride coated body
JPH09202663A (en) * 1996-01-24 1997-08-05 Denki Kagaku Kogyo Kk Melamine borate particle, its production and use thereof and production of hexagonal boron nitride powder
JPH1036105A (en) * 1996-07-26 1998-02-10 Mitsui Petrochem Ind Ltd Water resistant boron nitride and method for producing the same
JPH1126661A (en) * 1997-07-01 1999-01-29 Denki Kagaku Kogyo Kk Heat radiation spacer
JP3685629B2 (en) * 1998-12-11 2005-08-24 電気化学工業株式会社 Borate particles, method for producing inorganic powder containing the particles, and use thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03151658A (en) * 1989-11-08 1991-06-27 Tokai Rubber Ind Ltd Cooling sheet
JPH05186205A (en) * 1992-01-08 1993-07-27 Kawasaki Steel Corp Hexagonal boron nitride powder and its production
JPH0789780A (en) * 1993-04-09 1995-04-04 Toshiba Tungaloy Co Ltd Cubic boron nitride coated body
JPH09202663A (en) * 1996-01-24 1997-08-05 Denki Kagaku Kogyo Kk Melamine borate particle, its production and use thereof and production of hexagonal boron nitride powder
JPH1036105A (en) * 1996-07-26 1998-02-10 Mitsui Petrochem Ind Ltd Water resistant boron nitride and method for producing the same
JPH1126661A (en) * 1997-07-01 1999-01-29 Denki Kagaku Kogyo Kk Heat radiation spacer
JP3685629B2 (en) * 1998-12-11 2005-08-24 電気化学工業株式会社 Borate particles, method for producing inorganic powder containing the particles, and use thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1947836A2 (en) 2000-09-27 2008-07-23 Ricoh Company, Ltd. Image-processing apparatus and image-processing method

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