JP2000301086A - 光学部材の洗浄方法及びその装置 - Google Patents

光学部材の洗浄方法及びその装置

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Publication number
JP2000301086A
JP2000301086A JP11064214A JP6421499A JP2000301086A JP 2000301086 A JP2000301086 A JP 2000301086A JP 11064214 A JP11064214 A JP 11064214A JP 6421499 A JP6421499 A JP 6421499A JP 2000301086 A JP2000301086 A JP 2000301086A
Authority
JP
Japan
Prior art keywords
cleaning
optical member
pure water
drying
grinding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11064214A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000301086A5 (2
Inventor
Makoto Seta
誠 瀬田
Manabu Otake
学 大竹
Takaharu Muratomi
敬治 村富
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Priority to JP11064214A priority Critical patent/JP2000301086A/ja
Publication of JP2000301086A publication Critical patent/JP2000301086A/ja
Publication of JP2000301086A5 publication Critical patent/JP2000301086A5/ja
Pending legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)
JP11064214A 1999-02-19 1999-03-11 光学部材の洗浄方法及びその装置 Pending JP2000301086A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11064214A JP2000301086A (ja) 1999-02-19 1999-03-11 光学部材の洗浄方法及びその装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP4117199 1999-02-19
JP11-41171 1999-02-19
JP11064214A JP2000301086A (ja) 1999-02-19 1999-03-11 光学部材の洗浄方法及びその装置

Publications (2)

Publication Number Publication Date
JP2000301086A true JP2000301086A (ja) 2000-10-31
JP2000301086A5 JP2000301086A5 (2) 2005-11-10

Family

ID=26380733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11064214A Pending JP2000301086A (ja) 1999-02-19 1999-03-11 光学部材の洗浄方法及びその装置

Country Status (1)

Country Link
JP (1) JP2000301086A (2)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009248060A (ja) * 2008-04-10 2009-10-29 Olympus Corp 洗浄装置
CN102989715A (zh) * 2012-12-06 2013-03-27 中国科学院长春光学精密机械与物理研究所 一种深紫外光学薄膜基底的处理方法
CN103721971A (zh) * 2012-10-15 2014-04-16 江西盛泰光学有限公司 一种自动清洗摄像模的方法
WO2014109204A1 (ja) * 2013-01-10 2014-07-17 Hoya株式会社 光学素子の製造方法
JP2016131957A (ja) * 2015-01-22 2016-07-25 オリンパス株式会社 洗浄装置および洗浄方法
CN110665927A (zh) * 2019-09-16 2020-01-10 湖北久之洋红外系统股份有限公司 一种激光系统用光学玻璃的无损清洗工艺
CN112857136A (zh) * 2020-11-30 2021-05-28 邯郸钢铁集团有限责任公司 一种板式换热器超声波清洗装置及清洗方法
CN116274128A (zh) * 2022-12-14 2023-06-23 安徽光智科技有限公司 硒化锌镜片表面瑕疵的处理方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009248060A (ja) * 2008-04-10 2009-10-29 Olympus Corp 洗浄装置
CN103721971A (zh) * 2012-10-15 2014-04-16 江西盛泰光学有限公司 一种自动清洗摄像模的方法
CN102989715A (zh) * 2012-12-06 2013-03-27 中国科学院长春光学精密机械与物理研究所 一种深紫外光学薄膜基底的处理方法
WO2014109204A1 (ja) * 2013-01-10 2014-07-17 Hoya株式会社 光学素子の製造方法
CN104903267A (zh) * 2013-01-10 2015-09-09 Hoya株式会社 光学元件的制造方法
JPWO2014109204A1 (ja) * 2013-01-10 2017-01-19 Hoya株式会社 光学素子の製造方法
US9663402B2 (en) 2013-01-10 2017-05-30 Hoya Corporation Method for manufacturing optical element
CN104903267B (zh) * 2013-01-10 2018-03-09 Hoya株式会社 光学元件的制造方法
JP2016131957A (ja) * 2015-01-22 2016-07-25 オリンパス株式会社 洗浄装置および洗浄方法
CN110665927A (zh) * 2019-09-16 2020-01-10 湖北久之洋红外系统股份有限公司 一种激光系统用光学玻璃的无损清洗工艺
CN112857136A (zh) * 2020-11-30 2021-05-28 邯郸钢铁集团有限责任公司 一种板式换热器超声波清洗装置及清洗方法
CN116274128A (zh) * 2022-12-14 2023-06-23 安徽光智科技有限公司 硒化锌镜片表面瑕疵的处理方法

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