JP2000308905A - Covering tool - Google Patents

Covering tool

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Publication number
JP2000308905A
JP2000308905A JP11115759A JP11575999A JP2000308905A JP 2000308905 A JP2000308905 A JP 2000308905A JP 11115759 A JP11115759 A JP 11115759A JP 11575999 A JP11575999 A JP 11575999A JP 2000308905 A JP2000308905 A JP 2000308905A
Authority
JP
Japan
Prior art keywords
coating
cutting
density
improve
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11115759A
Other languages
Japanese (ja)
Inventor
Nobuhiko Shima
順彦 島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to JP11115759A priority Critical patent/JP2000308905A/en
Publication of JP2000308905A publication Critical patent/JP2000308905A/en
Pending legal-status Critical Current

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  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve oxidation resistance even in the case where knife edge temperature becomes high, to improve peeling resistance and chipping resistance even in the case where the knife edge temperature is comparatively low and to improve cutting performance by specifying logical density of a coating. SOLUTION: Logical density of a coating of a covering tool is made more than 75%. Consequently, when applied voltage is made 400 V and voltage is applied in frequency of 20 kHz per second at a ratio of voltage application 50% and no application (0 V) 50%, it becomes possible to improve ion energy without temperature rise of a covering article. It becomes possible to move atoms to transgranular defect and intergranular defect, to extensively reduce defect in the coating and to extensively improve density of the coating as moving distance of ions and atoms due to improvement of ion energy. Consequently, defect in the coating is reduced, density of the coating is improved, diffusion speed of oxygen is extensively lowered, oxidation resistance of the coating is extensively improved, and consequently, extremely long cutting longevity is performed by high speed cutting and high hardness steel cutting for which cutting temperature rises.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は乾式切削や高硬度鋼の高
速切削など、切削温度が極めて高くなる切削において優
れた耐摩耗性を発揮する被覆工具に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coated tool exhibiting excellent wear resistance in cutting at an extremely high cutting temperature, such as dry cutting and high-speed cutting of high-hardness steel.

【0002】[0002]

【従来の技術】近年、Alを含有させたTiAlN系の
皮膜が耐酸化性に優れるため従来のTiN、TiCN系
に代わり普及しつつある。Alの添加効果に基づく応用
例として、特公平4−53642、特公平5−6770
5等がある。しかしながら、これらの事例はAlを添加
することにより皮膜そのものの耐酸化性が幾分改善がさ
れたにすぎず、現状では特殊な高速高能率切削、高硬度
鋼切削、乾式切削において十分に満足のいく工具寿命を
得るには至っていない。
2. Description of the Related Art In recent years, TiAlN-based films containing Al have been widely used in place of conventional TiN and TiCN-based films because of their excellent oxidation resistance. Examples of applications based on the effect of the addition of Al include Japanese Patent Publication No. 4-53642 and Japanese Patent Publication No. 5-6770.
There are 5 magnitudes. However, in these cases, the oxidation resistance of the film itself was only slightly improved by adding Al, and at present, it is satisfactory enough for special high-speed, high-efficiency cutting, hardened steel cutting, and dry cutting. No long tool life has been achieved.

【0003】[0003]

【発明が解決しようとする課題】上述のような切削にお
いては、刃先の切削温度が著しく高くなり、本発明者ら
の詳細な観察の結果、Alを添加したといえども皮膜の
酸化が発生し、酸化皮膜の摩滅、剥離により摩耗が進行
することが明らかになった。従ってさらに皮膜の耐酸化
性を改善しなければ、上述のような切削条件下では、十
分に満足のいく切削寿命は達成されない。
In the above-mentioned cutting, the cutting temperature of the cutting edge becomes extremely high, and as a result of detailed observation by the present inventors, even though Al is added, oxidation of the film occurs. It was clarified that abrasion progressed due to abrasion and peeling of the oxide film. Therefore, a satisfactory cutting life cannot be achieved under the above-mentioned cutting conditions unless the oxidation resistance of the coating is further improved.

【0004】[0004]

【課題を解決するための手段】酸化は皮膜の結晶粒子そ
のものの酸化と結晶粒子の粒界での酸素拡散により進行
する。結晶粒界は格子欠陥が多数あり、ここでの酸素の
拡散速度は結晶内部での酸素拡散速度の数十倍となり、
皮膜の酸化は結晶粒界の欠陥密度に比例して速くなる。
従って皮膜の結晶粒界の格子欠陥をなくせば、理論的に
は酸化速度は十数分の一となることになる。このような
格子欠陥は結晶粒界だけでなく、結晶粒内にも多数存在
し、皮膜密度を理論値より低いものとするものである。
従って皮膜の密度を向上すれば、確実に皮膜の耐酸化性
は向上すると考えられる。
The oxidation proceeds by the oxidation of the crystal grains of the film itself and the diffusion of oxygen at the grain boundaries of the crystal grains. The crystal grain boundary has many lattice defects, and the diffusion rate of oxygen here is several tens times the oxygen diffusion rate inside the crystal,
Oxidation of the film becomes faster in proportion to the defect density at the grain boundaries.
Therefore, if the lattice defects at the crystal grain boundaries of the film are eliminated, the oxidation rate is theoretically reduced to one-tenth. Such lattice defects are present not only at the crystal grain boundaries but also within the crystal grains, and make the film density lower than the theoretical value.
Therefore, it is considered that if the density of the film is improved, the oxidation resistance of the film is surely improved.

【0005】一方、現状の物理蒸着法によるコーティン
グはイオンプレーティングと呼ばれるようにエレクトロ
ンビーム法(ホロカソード法)、スパッタリング法、マ
グネトロンスパッタリンぐ法、カソードアーク法いずれ
においても、被覆物にマイナスのバイアスを印加し、イ
オン化した金属イオンや窒素イオンを電気的に加速し物
質を堆積させるものである。いずれも共通して被覆物に
印加するバイアスには直流の電圧を使用するものであ
る。高圧の直流電圧を連続的に印加すると被覆物の温度
が上昇するため、直流電圧は現状では20V〜200V
であるのが一般的である。このような印加電圧範囲では
被覆物表面に堆積するイオンは表面移動に十分なエネル
ギーがなく表面上の移動可能距離が限定され格子欠陥を
うめることに限界が存在する。結晶粒界の格子欠陥密度
は皮膜の密度を支配すると思われる。通常のマイナスの
バイアスを印加した場合のコーティング皮膜の密度は実
際のところ、組成から計算される理論値に対し、60%
〜70%程度である。
[0005] On the other hand, the coating by the current physical vapor deposition method has a negative bias on the coating in any of an electron beam method (holo-cathode method), a sputtering method, a magnetron sputtering method, and a cathode arc method as called ion plating. Is applied to electrically accelerate ionized metal ions and nitrogen ions to deposit a substance. In both cases, a DC voltage is used as a bias applied to the coating in common. When a high DC voltage is continuously applied, the temperature of the coating increases, so that the DC voltage is 20 V to 200 V at present.
In general, In such an applied voltage range, the ions deposited on the surface of the coating do not have sufficient energy for surface movement, the movable distance on the surface is limited, and there is a limit in filling the lattice defect. The density of lattice defects at the grain boundaries seems to dominate the density of the coating. When a normal negative bias is applied, the density of the coating film is actually 60% of the theoretical value calculated from the composition.
About 70%.

【0006】種々検討した結果、被覆物に印加するバイ
アスをパルス化しより高バイアスで被覆すれば、より高
密度の皮膜が形成されることがわかった。そしてこのよ
うにして形成した皮膜は、その高密度故に皮膜結晶粒内
の欠陥や結晶粒界の欠陥が大幅に減少していることが推
測される。つまりバイアス電圧を間欠的に付与すること
により、被覆物の温度上昇を抑制しながら、表面に堆積
するイオンのエネルギーを格段に高め、表面での移動可
能距離を高めることにより、イオンが格子欠陥をうめる
位置までの移動を可能にする。即ち本発明者は、この結
晶内部及び結晶粒界の格子欠陥を低減し皮膜密度を向上
せしめるには被覆物に印加するバイアスを間欠的パルス
化することにより可能であり、そのようにした被覆工具
は刃先温度が高温となる場合での耐酸化性に優れるばか
りでなく、刃先温度が比較的低い場合でも耐剥離性、耐
チッピング性に優れ、よりいっそう優れた切削性能と、
より広い適用範囲を示すことを見いだし本発明に至っ
た。
As a result of various studies, it has been found that a higher density coating can be formed by pulsing the bias applied to the coating and coating with a higher bias. It is presumed that in the film formed in this way, defects in the film crystal grains and defects at crystal grain boundaries are greatly reduced due to the high density. In other words, by applying the bias voltage intermittently, while suppressing the temperature rise of the coating, the energy of the ions deposited on the surface is significantly increased, and the ions can cause lattice defects by increasing the movable distance on the surface. Enables movement to the fill position. That is, the present inventor can reduce the lattice defects inside the crystal and at the crystal grain boundaries and improve the film density by intermittently pulsing the bias applied to the coating material. Is not only excellent in oxidation resistance when the cutting edge temperature is high, but also excellent in peeling resistance and chipping resistance even when the cutting edge temperature is relatively low, and even more excellent cutting performance,
The present inventors have found that they show a wider range of application, and have led to the present invention.

【0007】本発明は基体表面にTiとAlの窒化物、
炭窒化物、炭窒酸化物、窒硼化物、炭窒硼化物のいずれ
か一種以上の皮膜をイオンプレーティング法で被覆した
被覆工具において、該皮膜の密度はは理論密度75%以
上であることを特徴とする被覆工具、または皮膜のTi
の一部または全部を1〜30原子%の範囲でSi、C
r、Mn、Zr、Hf、Nd、Nb、Yの一種以上で置
換したことを特徴とする被覆工具である。
According to the present invention, a nitride of Ti and Al
For a coated tool in which one or more coatings of carbonitride, carbonitride, boride, and carbonitride are coated by ion plating, the density of the coating should be 75% or more of theoretical density Coated tool, or coated Ti
Part or all of Si and C in the range of 1 to 30 atomic%.
A coated tool characterized by being replaced with at least one of r, Mn, Zr, Hf, Nd, Nb, and Y.

【0008】[0008]

【作用】印加電圧を400Vとし、電圧印加50%、無
印加(0V)50%の比率で一秒間に20kHzの周波
数で電圧を印加すると、被覆物の温度上昇なくイオンエ
ネルギーを向上させることが可能となる。イオンエネル
ギーの向上によりイオン、原子の移動距離が長くなり粒
内欠陥、粒界欠陥まで原子が移動可能となり、皮膜内の
欠陥を大幅に低減し、皮膜の密度を大幅に向上すること
が可能となる。このように、皮膜内の欠陥を少なめ、皮
膜密度を向上させることにより酸素の拡散速度は大幅に
低下し、皮膜の耐酸化性を大幅に高める結果となり切削
温度が上昇する高速切削、高硬度鋼切削で極めて長い切
削寿命を達成することが可能となる。また皮膜結晶内部
に存在する格子欠陥は、格子歪を発生し皮膜に残留する
圧縮応力を増加せしめる。圧縮応力が増加すると皮膜の
密着性が劣化し剥離を生じやすくなり安定した切削がで
きず、皮膜の微少剥離に起因するチッピング等が発生し
易くなる。バイアスのパルス化は残留圧縮応力の低減に
も大きく寄与する。
When the voltage is applied at 400 V and the voltage is applied at a rate of 20 kHz per second at a rate of 50% applied and 50% not applied (0 V), the ion energy can be improved without increasing the temperature of the coating. Becomes By improving the ion energy, the movement distance of ions and atoms becomes longer, atoms can move to intragranular defects and grain boundary defects, and the defects in the film can be greatly reduced and the density of the film can be greatly improved. Become. As described above, by reducing the defects in the coating and increasing the coating density, the diffusion rate of oxygen is greatly reduced, and the oxidation resistance of the coating is greatly increased, resulting in a high cutting temperature and high hardness steel, which increases the cutting temperature. Extremely long cutting life can be achieved in cutting. Lattice defects existing inside the film crystal generate lattice strain and increase the compressive stress remaining in the film. When the compressive stress is increased, the adhesion of the film is deteriorated, and peeling is apt to occur, so that stable cutting cannot be performed and chipping or the like due to minute peeling of the film easily occurs. The pulsing of the bias greatly contributes to the reduction of the residual compressive stress.

【0009】さらに、TiAl系の皮膜にSi、Yとい
った第三成分を添加することにより、皮膜の耐酸化性が
向上しさらに切削特性を向上させることが可能である。
これら第三成分はTiAl系皮膜の結晶粒界に偏析し、
粒界の格子欠陥をさらにうめ、粒界での酸素の拡散をさ
らに抑制することにより皮膜の耐酸化性を向上せしめ
る。このような効果をもたらす成分としてSi、Cr、
Mn、Zr、Hf、Y、Nb、Ndが確認された。
Further, by adding a third component such as Si or Y to the TiAl-based film, it is possible to improve the oxidation resistance of the film and further improve the cutting characteristics.
These third components segregate at the grain boundaries of the TiAl-based coating,
Oxidation resistance of the film is improved by further increasing lattice defects at the grain boundaries and further suppressing diffusion of oxygen at the grain boundaries. Si, Cr,
Mn, Zr, Hf, Y, Nb, and Nd were confirmed.

【0010】皮膜の密度測定はここでは超音スペクトロ
マイクロスコピーを用いた。測定方法は周波数域40M
Hz〜140MHzの超音波センサーを用い、入射角を
種々変更し、超音波反射率の測定を行った。各周波数に
おける反射率の位相曲線における最急峻となる位置をレ
ーリー臨界角とみなして、各周波数における臨界角を決
定し、スネルの法則よりレーリー波速度を決定する。各
周波数とレーリ波速度の分散曲線から逆解析を用いて、
皮膜の弾性特性を算出する。具体的には計算される分散
曲線と実験より求めた分散曲線との残差の自乗和を最小
にする最適化法により求めた。
The density of the film was measured by using a supersonic spectromicroscopy. Measurement method is frequency range 40M
Using an ultrasonic sensor of Hz to 140 MHz, the incident angle was variously changed, and the ultrasonic reflectance was measured. The steepest position in the phase curve of the reflectance at each frequency is regarded as the Rayleigh critical angle, the critical angle at each frequency is determined, and the Rayleigh wave velocity is determined according to Snell's law. Using inverse analysis from the dispersion curve of each frequency and Rayleigh wave velocity,
Calculate the elastic properties of the coating. Specifically, it was obtained by an optimization method that minimizes the sum of squares of the residuals between the calculated dispersion curve and the dispersion curve obtained from experiments.

【0011】[0011]

【実施例】実施例に基づき本発明を説明する。 実施例1 市販の平均粒径0.2ミクロンから1.5ミクロンのW
C粉末と同1ミクロンのCo粉末を用いCo含有量が7
wt%になるようアトライターでアルコール中6時間調
合、混合しφ10mmの本発明ボールエンドミルを製作
した。これらエンドミルをTi(50)Al(50)の
ターゲットを用いアークイオンプレーティング法によ
り、コーティング膜厚 2ミクロンの条件下でTiAl
Nをコーティングし表1に示す本発明エンドミル、比較
エンドミルを製作した。
EXAMPLES The present invention will be described based on examples. Example 1 Commercially available W with an average particle size of 0.2 to 1.5 microns
The same 1 micron Co powder as the C powder is used and the Co content is 7
The ball end mill of the present invention having a diameter of 10 mm was prepared by mixing in an alcohol for 6 hours with an attritor so as to obtain a wt% and mixing. These end mills were subjected to arc ion plating using a target of Ti (50) Al (50) to form TiAl under a coating film thickness of 2 μm.
N was coated to produce end mills of the present invention and comparative end mills shown in Table 1.

【0012】[0012]

【表1】 [Table 1]

【0013】表1より明らかなように、バイアスをパル
ス化した本発明例はいずれも密度が高く、酸化皮膜の形
成量も極めて少ない。また全般に皮膜に残留する圧縮応
力も低いことも明らかである。表1中、皮膜組成はTi
0.5Al0.5Nで一定とし、理論密度は計算で求め
た4.61g/cm3としそれに対する比率を表わし
た。酸化皮膜は大気中、900℃で1hr保持した場合
に形成される酸化皮膜の厚さを測定して併記した。これ
らボールエンドミルを用い直径100mm深さ5mmの
ポケット加工をSKD61硬さHrC50に対して行っ
た。切削条件は主軸回転数 10000rpm(切削速
度 314m/分)、テーブル送り 2000mm/m
in(0.1mm/刃)、切り込み×ピッチ 0.2×
0.5mm、切削油なし、オーバーハング 30mmと
した。加工は等高線加工とし、加工ポケット数に対する
摩耗量と加工面粗さを測定した。その結果を表2に示
す。
As is evident from Table 1, all the examples of the present invention in which the bias is pulsed have a high density and an extremely small amount of oxide film formed. It is also apparent that the compressive stress remaining in the film is generally low. In Table 1, the coating composition is Ti
The theoretical density was set to 4.61 g / cm3 obtained by calculation, and the ratio to the theoretical density was set to 0.5Al0.5N. The thickness of the oxide film formed when the oxide film was held at 900 ° C. for 1 hour in the atmosphere was measured and indicated together. Using these ball end mills, pocket processing with a diameter of 100 mm and a depth of 5 mm was performed on SKD61 hardness HrC50. Cutting conditions are: spindle speed 10,000 rpm (cutting speed 314 m / min), table feed 2000 mm / m
in (0.1 mm / blade), notch x pitch 0.2 x
0.5 mm, no cutting oil, and overhang 30 mm. The processing was contour line processing, and the amount of wear and the surface roughness were measured with respect to the number of processing pockets. Table 2 shows the results.

【0014】[0014]

【表2】 [Table 2]

【0015】表2中、摩耗量はボールエンドミルの先端
において刃先の後退量を測定した。単位はmmである。
面粗さは送り方向において測定し、Rmax値を採用し
た。寿命は刃先の後退量が0.03以上となるか、チッ
ピングが発生するまでの穴加工数とした。表2より明ら
かなようにパルスバイアスを採用した本発明例は摩耗進
行量が少なく安定した切削、仕上げ面がえられているこ
とが明らかである。尚この場合ボールエンドミルの先端
部は常に被削材と接触し高温となり皮膜が酸化により摩
滅して刃先が後退するものである。
In Table 2, the amount of wear was measured by retreating the cutting edge at the tip of a ball end mill. The unit is mm.
The surface roughness was measured in the feed direction, and the Rmax value was adopted. The life was defined as the number of drilled holes until the amount of retreat of the cutting edge was 0.03 or more or chipping occurred. As is clear from Table 2, it is clear that the example of the present invention employing the pulse bias has a small amount of progress of abrasion and a stable cut and finished surface. In this case, the tip of the ball end mill always comes into contact with the work material and becomes high temperature, the coating is worn out by oxidation and the cutting edge retreats.

【0016】尚、ボールエンドミルと同様な加工ができ
るコーナーR付きのエンドミルにおいても結果は同様な
傾向を示した。
Incidentally, the result showed the same tendency also in the end mill with the corner R capable of performing the same processing as the ball end mill.

【0017】実施例 2 実施例1と同様に表3に示す各種3元系の皮膜を2ミク
ロンコーティングし実施例1と同一切削にて同様な評価
をした。その結果を表3に併記する。ここで本発明例は
全てパルスバイアスを用い、その条件は300V付与率
80%とした。一方比較例はDCバイアスを採用しその
バイアスは100Vとした。反応圧力は3Paとした。
Example 2 In the same manner as in Example 1, various ternary coatings shown in Table 3 were coated by 2 μm, and the same evaluation was performed by the same cutting as in Example 1. The results are also shown in Table 3. Here, in all of the examples of the present invention, a pulse bias was used, and the condition was a 300 V application rate of 80%. On the other hand, in the comparative example, a DC bias was adopted and the bias was set to 100V. The reaction pressure was 3 Pa.

【0018】[0018]

【表3】 [Table 3]

【0019】表3より明らかなように3元系にした本発
明エンドミルはより優れた性能を発揮することが明らか
である。これは前述のような耐酸化性の向上に伴う皮膜
自体の耐摩耗性の向上に起因するものと考えられる。ま
た置換量が1%未満では添加効果が認められず本発明例
1とほとんど同じ結果であることも確認される。また、
添加量が30%を越えると皮膜が脆くなり初期にチッピ
ングが発生したり、皮膜硬さが劣化し、著しく耐摩耗性
を損なう結果も確認される。
As is evident from Table 3, it is apparent that the ternary end mill of the present invention exhibits more excellent performance. This is considered to be due to the improvement in wear resistance of the film itself accompanying the improvement in oxidation resistance as described above. When the substitution amount is less than 1%, the effect of addition is not recognized, and it is also confirmed that the result is almost the same as that of Example 1 of the invention. Also,
When the addition amount exceeds 30%, the film becomes brittle and chipping occurs at the initial stage, the film hardness is deteriorated, and the result that the wear resistance is significantly impaired is also confirmed.

【0020】[0020]

【発明の効果】本発明による被覆エンドミルは上述のよ
うに刃先が特に高温となる乾式切削等において著しく工
具特性を向上させるものである。また、刃先の温度が低
い場合においても皮膜の残留応力が小さいこと、等によ
り耐チッピング性、耐剥離性などの著しい改善があり、
よって本発明品は幅広い用途に適用して優れた性能を示
し、生産性を大いに改善しうるものである。実施例のボ
ールエンドミルに限らず、その他の工具においてもその
効果は同様であることは言うまでもない。
As described above, the coated end mill according to the present invention significantly improves tool characteristics in dry cutting or the like in which the cutting edge is particularly high in temperature. In addition, even when the temperature of the cutting edge is low, there is a remarkable improvement in chipping resistance, peeling resistance, etc. due to the small residual stress of the film, etc.
Therefore, the product of the present invention exhibits excellent performance when applied to a wide range of uses, and can greatly improve productivity. It goes without saying that the effect is the same for not only the ball end mill of the embodiment but also other tools.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 基体表面にTiとAlの窒化物、炭窒化
物、炭窒酸化物、窒硼化物、炭窒硼化物のいずれか一種
以上の皮膜をイオンプレーティング法で被覆した被覆工
具において、該皮膜の密度は理論密度の75%以上であ
ることを特徴とする被覆工具。
1. A coated tool in which a substrate surface is coated with at least one coating of a nitride of Ti and Al, a carbonitride, a carbonitride, a boronitride, and a carbonitride by an ion plating method. A coated tool, wherein the density of the coating is 75% or more of the theoretical density.
【請求項2】 請求項1記載の被覆工具において、該皮
膜のTiの一部または全部を1〜30原子%の範囲でS
i、Cr、Mn、Zr、Hf、Nd、Nb、Yの一種以
上で置換したことを特徴とする被覆工具。
2. The coated tool according to claim 1, wherein a part or all of Ti of said coating is in the range of 1 to 30 atomic%.
A coated tool characterized by being replaced with at least one of i, Cr, Mn, Zr, Hf, Nd, Nb, and Y.
JP11115759A 1999-04-23 1999-04-23 Covering tool Pending JP2000308905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11115759A JP2000308905A (en) 1999-04-23 1999-04-23 Covering tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11115759A JP2000308905A (en) 1999-04-23 1999-04-23 Covering tool

Publications (1)

Publication Number Publication Date
JP2000308905A true JP2000308905A (en) 2000-11-07

Family

ID=14670352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11115759A Pending JP2000308905A (en) 1999-04-23 1999-04-23 Covering tool

Country Status (1)

Country Link
JP (1) JP2000308905A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7732066B2 (en) 2001-12-26 2010-06-08 Sumitomo Electric Industries, Ltd. Surface-coated machining tools

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7732066B2 (en) 2001-12-26 2010-06-08 Sumitomo Electric Industries, Ltd. Surface-coated machining tools

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