JP2000512780A - マイクロガスレオスタット - Google Patents

マイクロガスレオスタット

Info

Publication number
JP2000512780A
JP2000512780A JP10500913A JP50091398A JP2000512780A JP 2000512780 A JP2000512780 A JP 2000512780A JP 10500913 A JP10500913 A JP 10500913A JP 50091398 A JP50091398 A JP 50091398A JP 2000512780 A JP2000512780 A JP 2000512780A
Authority
JP
Japan
Prior art keywords
gas
rheostat
housing
flow
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10500913A
Other languages
English (en)
Japanese (ja)
Inventor
エイチ． ライニッケ，ロバート
ディー． ブルネウ，ステファン
Original Assignee
マロッタ サイエンティフィック コントロールズ，インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by マロッタ サイエンティフィック コントロールズ，インコーポレイテッド filed Critical マロッタ サイエンティフィック コントロールズ，インコーポレイテッド
Publication of JP2000512780A publication Critical patent/JP2000512780A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
    • B64G1/00—Cosmonautic vehicles
    • B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
    • B64G1/40—Arrangements or adaptations of propulsion systems
    • B64G1/402—Propellant tanks; Feeding propellants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
    • B64G1/00—Cosmonautic vehicles
    • B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
    • B64G1/24—Guiding or controlling apparatus, e.g. for attitude control
    • B64G1/26—Guiding or controlling apparatus, e.g. for attitude control using jets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02K—JET-PROPULSION PLANTS
    • F02K9/00—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof
    • F02K9/80—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof characterised by thrust or thrust vector control
    • F02K9/805—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof characterised by thrust or thrust vector control servo-mechanisms or control devices therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/80—Size or power range of the machines
    • F05D2250/82—Micromachines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/80—Size or power range of the machines
    • F05D2250/84—Nanomachines

Landscapes

  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
JP10500913A 1996-06-07 1997-06-06 マイクロガスレオスタット Pending JP2000512780A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US65996596A 1996-06-07 1996-06-07
US08/659,965 1996-06-07
PCT/US1997/009962 WO1997047013A1 (en) 1996-06-07 1997-06-06 Micro gas rheostat

Publications (1)

Publication Number Publication Date
JP2000512780A true JP2000512780A (ja) 2000-09-26

Family

ID=24647557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10500913A Pending JP2000512780A (ja) 1996-06-07 1997-06-06 マイクロガスレオスタット

Country Status (4)

Country Link
EP (1) EP1008146A4 (de)
JP (1) JP2000512780A (de)
CA (1) CA2257341A1 (de)
WO (1) WO1997047013A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005003200A (ja) * 2003-06-11 2005-01-06 Lg Electron Inc マイクロアクチュエータ及びその製造方法並びにマイクロ作動バルブ
JP2023520894A (ja) * 2020-04-02 2023-05-22 オーロラ プロパルション テクノロジーズ オサケユキチュア スラスタ組立体

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19847952C2 (de) 1998-09-01 2000-10-05 Inst Physikalische Hochtech Ev Fluidstromschalter
US6334301B1 (en) * 1999-02-25 2002-01-01 Vacco Industries, Inc. Assembly of etched sheets forming a fluidic module
US6382254B1 (en) * 2000-12-12 2002-05-07 Eastman Kodak Company Microfluidic valve and method for controlling the flow of a liquid
DE20115733U1 (de) 2001-09-25 2001-12-20 FESTO AG & Co., 73734 Esslingen Ventileinrichtung

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1069597A (en) 1912-12-07 1913-08-05 Wyatt Boyd Molding-machine.
US3279177A (en) * 1963-06-10 1966-10-18 Giannini Scient Corp Apparatus and method for propelling vehicles in space
GB1241867A (en) * 1968-12-31 1971-08-04 James Ephraim Lovelock An improved method and apparatus for controlling the flow of gases
US4474889A (en) * 1982-04-26 1984-10-02 Microsensor Technology Inc. Miniature gas chromatograph apparatus
US4604090A (en) 1983-11-22 1986-08-05 Consolidated Controls Corporation Compact implantable medication infusion device
US4656828A (en) * 1984-09-28 1987-04-14 Rca Corporation Augmentation heater temperature control system
JPS62108156A (ja) * 1985-11-07 1987-05-19 Sord Comput Corp シリコン・ウエハ−キヤピラリイ・カラム
US4715852A (en) 1986-07-21 1987-12-29 Eaton Corporation Implanted medication infusion device
DE3824160A1 (de) * 1988-07-16 1990-01-18 Erno Raumfahrttechnik Gmbh Hochleistungstriebwerk
US4935040A (en) * 1989-03-29 1990-06-19 The Perkin-Elmer Corporation Miniature devices useful for gas chromatography
US5267584A (en) * 1990-10-16 1993-12-07 Smith Richard D Method of fluid flow control using a porous media
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
WO1995009987A1 (en) * 1993-10-04 1995-04-13 Research International, Inc. Micromachined fluid flow regulators
US5544276A (en) * 1993-11-30 1996-08-06 Microsensors Technology, Inc. Miniature gas chromatograph with heated gas inlet fitting, heated tubing, and heated microvalve assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005003200A (ja) * 2003-06-11 2005-01-06 Lg Electron Inc マイクロアクチュエータ及びその製造方法並びにマイクロ作動バルブ
JP2023520894A (ja) * 2020-04-02 2023-05-22 オーロラ プロパルション テクノロジーズ オサケユキチュア スラスタ組立体
JP7425895B2 (ja) 2020-04-02 2024-01-31 オーロラ プロパルション テクノロジーズ オサケユキチュア スラスタ組立体

Also Published As

Publication number Publication date
CA2257341A1 (en) 1997-12-11
WO1997047013A1 (en) 1997-12-11
EP1008146A1 (de) 2000-06-14
EP1008146A4 (de) 2000-06-14

Similar Documents

Publication Publication Date Title
US6129331A (en) Low-power thermopneumatic microvalve
US6141497A (en) Multilayer micro-gas rheostat with electrical-heater control of gas flow
CN100363717C (zh) 具有多传感器的流量仪器
KR100523970B1 (ko) 초고순도 및 고부식성 환경에서 사용 가능한 센서
EP2082205B1 (de) Wandler zur verwendung in rauen umgebungen
JP5033421B2 (ja) 超純粋環境および高腐食環境において使用可能なセンサーとその製造方法
US6508129B1 (en) Pressure sensor capsule with improved isolation
JP3051089B2 (ja) 熱膨張物質を利用した流量調節バルブ
KR20000048700A (ko) 일체로 된, 전기적으로 작동 가능한 마이크로-밸브
US4538466A (en) Capacitance pressure transducer and method of fabrication therefor
WO1995019502A1 (fr) Micropompe
JPH0342616B2 (de)
JP2000512780A (ja) マイクロガスレオスタット
US6325886B1 (en) Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby
CN112204366B (zh) 压力换能器、系统和方法
WO1997047013A9 (en) Micro gas rheostat
JP2009532857A (ja) 流体及び電気的機能を有するデバイスの構築方法
EP4105627B1 (de) Sensorvorrichtung zur bestimmung von differenzdruck in flüssigen oder gasförmigen medien
RU2777015C1 (ru) Кварцевый резонатор с частичным внутренним размещением элементов термостата генератора
JP2000292293A (ja) 圧力センサ装置および製造方法
NL2028203B1 (en) Device for controlling or measuring a fluid