JP2003148903A - 磁気位置センサを有する装置 - Google Patents
磁気位置センサを有する装置Info
- Publication number
- JP2003148903A JP2003148903A JP2002048410A JP2002048410A JP2003148903A JP 2003148903 A JP2003148903 A JP 2003148903A JP 2002048410 A JP2002048410 A JP 2002048410A JP 2002048410 A JP2002048410 A JP 2002048410A JP 2003148903 A JP2003148903 A JP 2003148903A
- Authority
- JP
- Japan
- Prior art keywords
- casing
- magnetic field
- rod
- sensor
- shaped component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/28—Means for indicating the position, e.g. end of stroke
- F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
- F15B15/2861—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using magnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/0401—Valve members; Fluid interconnections therefor
- F15B2013/0409—Position sensing or feedback of the valve member
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8225—Position or extent of motion indicator
- Y10T137/8242—Electrical
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
を目的とする。 【解決手段】 本発明は、磁界センサ(5)と、ロッド
状構成要素(3)、特に磁界(4)を発生する要素
(M)およびこの磁界の磁界強度角度を測定する位置セ
ンサを有するアクチュエータの軸の線形変位のための解
析電子装置(7)を備えている磁気位置センサを有する
装置に関し、このセンサによって決定された電界角度信
号は変位経路決定のために使用される。磁界(4)を発
生する要素は、アクチュエータそれ自体のロッド状構成
要素(3)を囲む軸方向に磁化される磁石ケーシング
(M)であり、それに固定して接続され、かつその変位
軸(z)の周りにそれとともに回転できる。
Description
ッド状構成要素、特に磁界を発生する要素およびこの磁
界の磁界強度角度を測定する位置センサを有するアクチ
ュエータの軸の線形変位のための解析電子装置を備えて
いる磁気位置センサを有する装置に関し、このセンサに
よって決定された電界角度信号が変位経路決定のために
使用される。
は、ロッド状構成要素、例えば、バルブシャフトの線形
変位を測定できる磁気位置測定装置を開示している。測
定目的だけのために使用されるシャフトおよび位置セン
サからなる特定の測定装置は、その変位が測定されるべ
きであるロッド状構成要素上に配置される。測定装置の
シャフトの中に入れるのは、このシャフトの縦方向に磁
界を発生するロッド状磁石である。位置センサは、磁界
の領域に固定して配置されている。シャフトの位置に対
するシャフトの相対変位で、位置センサは、解析電子装
置を使用して変位経路にほぼ比例して磁界強度角度を決
定する磁界センサによって測定する。しかしながら、経
路比例は所定の範囲内だけに存在する。
間とは別に、この装置の欠点は、シャフトが回転しては
いけないことである。遮蔽が使用される場合、この装置
は、もはや十分直線的に作動しないので、もはや十分精
密でない。
小さいが、特にアクチュエータのロッド状構成要素上で
無接触に、直接にその測定を実行する磁気位置センサを
有する装置を提供することにある。
的は、磁界を発生する要素が、アクチュエータそのもの
のロッド状構成要素を囲む軸方向に磁化された磁石ケー
シングであり、それに固定して接続され、その変位軸の
周りにそれとともに回転できることにより、達成され
る。
に直接取り付けられる場合、測定装置の別個のシャフト
に対する要求が全くない。他の長所は、この軸がこれが
測定に影響を及ぼさないでこのシャフト自体の軸の周り
に回転できることである。この場合、丸いアクチュエー
タシャフトが測定のための耐ねじりガイドを必要としな
いために、このことは非常に重要である。無故障動作の
場合、アクチュエータシャフトが非強磁性材料又は弱い
強磁性材料だけからなる場合、有利である。位置センサ
は、近接不可能なシャフト端の場合にも応用できる。
囲がある。これは、非感温測定原理によるコンパクトな
構造を可能にする。位置と測定信号との間の相関の高い
直線性もある。精度を増加させるためにセンサ曲線を使
用する付加解析装置は、この場合省くことができる。
は、磁気抵抗素子、ホール効果センサ又は界磁コイルを
含む。
形状に関してだが、単一磁石ケーシングの形状に関して
磁界を変えることは望ましい。本発明の他の実施形態で
は、磁石ケーシングは、好ましくは軸方向に接合された
環状円板の磁性材料からなる。
ある。本発明の他の実施形態では、円状円板は異なる残
留磁気を持つ材料からなる。
明の他の実施形態の磁石ケーシングは、均質の磁性材料
からなる場合、軸方向に異なって磁化される。磁石ケー
シングのこれらの形式では、測定精度はかなり改良され
る。
なるか又は環状円板から組み立てられるかのいずれかの
磁石ケーシングは、最小磁界強度を形成するように2/
3〜3/2の範囲、好ましくは1に近い直径対長さの比
を有する。
は、ケーシング状スクリーンの内側上に配置される。こ
のスクリーンは、丸い又は正方形の断面を有してもよ
い。
サ、すなわち磁界センサおよび解析電子装置の両方はス
クリーン内にある。この組み合わせは極端に簡単であ
り、柔軟性がある。
グは、ロッド状構成要素の環状凹部の中に入れられ、か
つはめ込み磁石ケーシングは、前記磁石ケーシングの長
さよりも大きい長さの非強磁性シャフトケーシングによ
って囲まれる。このシャフトケーシングは、ロッド状構
成要素の中にも入れることができる。
要素は、そのケーシング開口において磁石ケーシングと
ともに摺動できる非強磁性線形ガイドケーシングによっ
て囲まれ、かつこの非強磁性線形ガイドケーシングは、
その内部に磁界センサがあるケーシング状スクリーンに
よって囲まれる。
は、スクリーンの外側上に配置され、かつこのスクリー
ンを通って案内されたキャリアによって線形ガイドケー
シング内に磁気センサを搭載する。
域のロッド状構成要素は、中央ピン装置によって一緒に
接続された2つの部分からなり、かつ磁石ケーシングお
よびシャフトケーシングは、ピン装置の領域のロッド状
構成要素に押し進められる。
使用できる非常に簡単で、適しているコンパクトな測定
装置が得られる。
実施形態に基づいて詳細に説明する。図1は、軸変位を
実行するロッド状構成要素、例えばバルブ(図示せず)
のシャフト3を示している。磁力線4aを通して見える
ようにされる磁界4を発生する磁石ケーシングMは、バ
ルブシャフト3にあり、それに固定して結合されてい
る。この磁力線4aは等しいベクトルポテンシャルの力
線である。磁界センサの周りに広がっている磁界4aを
測定する磁界センサ5は、磁界4に配置されている。シ
ャフト軸zに沿って、シャフトはz線形変位を行い、ま
たシャフト軸zの周りを回転可能である。磁石ケーシン
グMは長さLを持つ。磁石ケーシングの外径はDとして
示される。r0はシャフト軸zからの磁界センサ5の距
離である。磁石ケーシングの磁化方向は、zと示された
軸方向にある。磁界センサ5および解析電子装置7は一
緒に位置センサを形成する。
は、z軸に対する磁界強度Hの角度である。磁界センサ
5は、今度は理想的には変位経路に相当する磁界角度を
決定する解析電子装置(図示せず)に磁界強度信号を出
力する。
実線曲線6で示している。この曲線の下の破線は理想線
である。この曲線は、磁石長の約80%に相当する、選
択範囲zmesの変位経路の関数として本来直線である
ことに注目すべきである。図2(b)は、範囲zmes
の測定エラーが約−0.4〜+0.4(磁石長の約80
%である)で非常に低いことを示す曲線7に対する経路
にある測定エラーを示している。この図は、変位経路z
/Lのパーセンテージ測定エラー△ψmesを示してい
る。
く必要なく、この装置が注意深く選択された場合に全く
存在しない状況を示している。磁石ケーシングは、軸方
向に均質の材料からなる。実際には、特にいくつかの測
定装置がすぐ近くで作動される場合、しばしば遮蔽なし
に作動できない。ここで、作動結果は悪化する。この悪
化は、図3を参照して説明された軸方向に構造化された
磁石ケーシングMで補償できる。
M1、M2およびM3を含む磁石ケーシングMを示して
いる。この構造は、対称的であり、すなわち、軸長L
1、L2およびL3は等しい。ここで、異なる寸法も、
もちろん選択されてもよい。環状本体M1、M2、M3
を構造化するいろいろな可能性がある。1つの可能性
は、これらを異なる残留磁気の全磁化材料で作ることに
ある。他の可能性は、個別の環状本体M1、M2、M3
を同じ材料で作り、これらを異なる強度に磁化すること
にある。他の好ましい可能性は、均一の材料の磁石ケー
シングMを使用し、適当な装置を使用してシャフト軸z
に沿って異なる強度にこの環状本体を磁化することにあ
る。他の変形も可能である。3つ未満の環状本体又は4
つ以上の環状本体が可能である。
対して好ましいケーシング長を得るために、軸方向に修
正された磁化を有する均質材料からなるか又は環状円板
(M1、M2、M3)から組み立てられるかのいずれか
の磁石ケーシングは、最小磁界強度を形成するように2
/3から3/2の範囲、好ましくは1に近い直径対長さ
の比を有する。
蔽できるかを示す。図4は、シャフト軸zに対するシャ
フト3を示す。軸方向に均質の材料の磁石ケーシングM
(破線分離線M4は無視されねばならない変形例)がシ
ャフト3上にある場合、図示されてはいるが、本質適に
は望ましくない、図5に示された破線測定エラー曲線を
用いる。しかしながら、図3に示されるような3つの異
なる環状本体M1、M2、M3の軸方向に構造化された
磁石ケーシングMがシャフト3上にある場合、測定エラ
ーは、特にこの要求に応じる図5に示された実線エラー
曲線を補償することができる。
の周りに延びる。シャフト3は、非強磁性材料又は弱い
強磁性材料だけからなる。磁界センサ5がある解析電子
装置7を有する全位置センサは、遮蔽プレート6の内側
6aに配置されている。接続ケーブル8は、位置信号を
制御装置(図示せず)に伝達する。この遮蔽は、隣接セ
ンサ又は隣接部からの干渉磁界が磁界歪みをセンサ領域
に生じることを防止する。
ャフト3の中に入れられる磁石ケーシングMを有する図
6に示された構造も有してもよい。シャフト3は、測定
値変化を生じないでこのセンサに対して自由に回転でき
ることはこの構造から明らかである。
に既に示された図である。図1の遮蔽されていない測定
装置では、破線エラー曲線9が得られる。3つの磁気環
状本体M1、M2、M3又は軸方向に変えられる磁化分
布が使用される図4の遮蔽測定装置では、実線エラー曲
線10が得られる。この図では、パーセンテージ測定エ
ラー△ψmesは、使用される経路がzmesと示され
る変位経路z/L上に示されている。軸方向に材料又は
磁化状態を変えた形状では、測定誤りは図2(a)に示
される測定誤りと比べて明らかに確かにかなり減少され
る。
図である。図7は、線VII‐VIIについての図6に示され
た装置の断面である。磁石ケーシングMは、ロッド状構
成要素3、例えば、バルブシャフト3の環状磁石凹部1
2の中に入れられる。この場合、磁石ケーシングMは、
好ましくは軸方向に磁化される均質の材料からもなって
よいし又は3つの環状円板数が単なる一例である磁気環
状円板M1、M2、M3からなってもよい。他の実施形
態の場合と同様に、2つ又はそれ以上の3個の環状円板
だけが使用されてもよい。磁気環状円板への可能な分割
が図6に示される。磁石ケーシングMは、これが挿入さ
れたより長さの長い非強磁性材料シャフトケーシング1
3によって囲まれる。このシャフトケーシング13は、
磁石ケーシングM上でその磁石凹部12の上にあるカバ
ー凹部14の中に嵌入される。このシャフトケーシング
13の外部壁15は、好ましくはバルブシャフト3の外
部壁16と同一平面である。
開口18で自由に変位可能であり、回転可能である、図
6に示されたバルブシャフト3を囲む。線形ガイドケー
シング17は、非強磁性材料からなる。線形ガイドケー
シング17は、磁界センサ5の解析電子装置7が配置さ
れたケーシング状スクリーン19によって囲まれる。こ
のスクリーン19は、盲穴22として線形ガイドケーシ
ング17の中に延ばされる開口21を有する。解析電子
装置7上に配置されたのは、線形ガイドケーシング17
の盲穴22に磁界センサ5を保持するキャリア23であ
る。
ト3は、中央ピン24aおよびピン24aが係合する中
央凹部24bからなる中央ピン装置24を有する。バル
ブシャフト3が延ばされる場合、磁石ケーシングMおよ
びシャフトケーシング13は容易に押し進めることがで
きる。
構成されてもよい。対にされた磁気抵抗センサ、ホール
効果センサ又は界磁コイルを使用できる。
の断面である。非強磁性材料又は弱い強磁性材料の中心
のバルブシャフト3は、磁石ケーシングM、シャフトケ
ーシング13および線形ガイドケーシング17によって
囲まれる。この線形ガイドケーシング17はスクリーン
19によって囲まれる。解析電子装置7は、キャリア2
1によって磁界センサ5を搭載する。センサ5までの変
位軸zの距離はr0として示される。Diは磁石ケーシ
ングMの内径である。Dは磁石ケーシングの外径であ
る。Dsはスクリーン19の内径である。Lは磁石ケー
シングの軸長である。L1、L2、L3は、一緒に磁石
ケーシングMの全軸長を形成する個別の環状磁石M1、
M2、M3の長さである。
て、下記の寸法は例として示すことができる。 r0=0.64D L=D Ds=2xD L1=L2=L3
化よりも約10%高くあるべきである。
合される磁石ケーシングおよび磁石ケーシングの磁界の
磁界センサ装置によって決定されるロッド状構成要素を
有する本発明による磁気位置センサを有する装置概略構
成図。
グを示す図。
か又は図3におけるようにいくつかの環状本体から組み
立てられる場合、および磁界センサを有する解析電子装
置がスクリーン内に配置される場合、スクリーンを有す
る測定装置の断面図。
ーの比較に関する図4の装置の角度/経路曲線を示す
図。
および非常にコンパクトに遮蔽された構造を有する測定
装置の縦断面図。
断面図。
Claims (16)
- 【請求項1】磁界センサ(5)と、ロッド状構成要素
(3)、特に磁界(4)を発生する要素(M)およびこ
の磁界の磁界強度角度を測定する位置センサを有するア
クチュエータの軸の線形変位のための解析電子装置
(7)を備えている磁気位置センサ(5)を有する装置
において、位置センサによって決定された電界角度信号
が変位経路決定のために使用され、磁界(4)を発生す
る要素が、アクチュエータそれ自体のロッド状構成要素
(3)を囲む軸方向に磁化された磁石ケーシング(M)
であり、ロッド状構成要素に固定して結合され、かつ、
その変位軸(z)の周りにロッド状構成要素とともに回
転できることを特徴とする装置。 - 【請求項2】前記ロッド状構成要素(3)が、非強磁性
材料又は弱い強磁性材料だけからなることを特徴とする
請求項1に記載の装置。 - 【請求項3】前記位置センサの磁界センサ(5)が、磁
気抵抗素子を含むことを特徴とする請求項1又は2に記
載の装置。 - 【請求項4】前記電界センサ(5)が、ホール効果セン
サを含むことを特徴とする請求項1又は2に記載の装
置。 - 【請求項5】前記電界センサ(5)が、界磁コイルを含
むことを特徴とする請求項1又は2に記載の装置。 - 【請求項6】磁気材料からなる磁石ケーシング(M)
が、一緒に接合された環状円板(M1、M2、M3)か
らなることを特徴とする請求項1乃至5のいずれか1項
に記載の装置。 - 【請求項7】前記環状円板(M1、M2、M3)が、異
なる残留磁気を有する材料からなることを特徴とする請
求項6に記載の装置。 - 【請求項8】前記磁石ケーシング(M)が、均質の磁気
材料からなる場合、軸方向に異なって磁化されることを
特徴とする請求項1又は2に記載の装置。 - 【請求項9】均質の材料からなるか又は環状円板(M
1、M2、M3)から組み立てられるかのいずれかの磁
石ケーシング(M)が、最小の磁界強度を形成するよう
に2/3〜3/2の範囲、好ましくは1に近い直径対長
さの比を有することを特徴とする請求項1乃至8のいず
れか1項に記載の装置。 - 【請求項10】磁界センサ(5)が、ケーシング状スク
リーン(6)の内側(6a)上に配置されていることを
特徴とする請求項1乃至9のいずれか1項に記載の装
置。 - 【請求項11】磁界センサ(5)を有する解析電子装置
(7)が、前記スクリーン(6)内にあることを特徴と
する請求項1乃至10のいずれか1項に記載の装置。 - 【請求項12】前記磁石ケーシング(M)が、前記ロッ
ド状構成要素(3)の環状凹部(12)の中に入れら
れ、かつ、はめ込み磁石ケーシング(M)が、前記磁石
ケーシング(M)の長さよりも大きい長さの非強磁性シ
ャフトケーシング(13)によって囲まれることを特徴
とする請求項1乃至11のいずれか1項に記載の装置。 - 【請求項13】前記シャフトケーシング(13)が、前
記ロッド状構成要素(3)の中にも入れられることを特
徴とする請求項12に記載の装置。 - 【請求項14】前記ロッド状構成要素(3)が、その前
記ケーシング開口(18)において前記磁石ケーシング
(M)とともに摺動できる非強磁性線形ガイドケーシン
グ(17)によって囲まれ、かつ前記非強磁性線形ガイ
ドケーシング(17)が、その内部に磁界センサ(5)
があるケーシング状スクリーン(19)によって囲まれ
ることを特徴とする請求項1乃至10および12および
13のいずれか1項に記載の装置。 - 【請求項15】前記解析電子装置(7)が、前記スクリ
ーン(19)の外側上に配置され、かつ前記スクリーン
(19)を通って案内されたキャリア(23)によって
前記線形ガイドケーシング(17)内に前記磁気センサ
(5)を搭載することを特徴とする請求項12乃至14
のいずれか1項に記載の装置。 - 【請求項16】測定装置の領域の前記ロッド状構成要素
(3)が、中央ピン装置(24)によって一緒に接続さ
れた2つの部分からなり、かつ前記磁石ケーシング
(M)および前記シャフトケーシング(13)が、前記
ピン装置(24)の領域の前記ロッド状構成要素(3)
に押し進められることを特徴とする請求項12乃至15
のいずれか1項に記載の装置。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10108732.2 | 2001-02-23 | ||
| DE2001108732 DE10108732A1 (de) | 2001-02-23 | 2001-02-23 | Vorrichtung mit einem magnetischen Positionssensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003148903A true JP2003148903A (ja) | 2003-05-21 |
| JP4157916B2 JP4157916B2 (ja) | 2008-10-01 |
Family
ID=7675236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002048410A Expired - Fee Related JP4157916B2 (ja) | 2001-02-23 | 2002-02-25 | 磁気位置センサを有する装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6670806B2 (ja) |
| EP (1) | EP1241437B1 (ja) |
| JP (1) | JP4157916B2 (ja) |
| DE (2) | DE10108732A1 (ja) |
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Also Published As
| Publication number | Publication date |
|---|---|
| DE50204813D1 (de) | 2005-12-15 |
| JP4157916B2 (ja) | 2008-10-01 |
| EP1241437B1 (de) | 2005-11-09 |
| US6670806B2 (en) | 2003-12-30 |
| US20020125884A1 (en) | 2002-09-12 |
| DE10108732A1 (de) | 2002-09-05 |
| EP1241437A1 (de) | 2002-09-18 |
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