JP2003190882A - Apparatus for inspecting granular substance - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for inspecting granular substance with which granular substance are sorted reliably by detecting the features of a shape of each of the granular substances with high precision with a general-purpose method regardless of the size or the weight of the granular substance. <P>SOLUTION: This apparatus has a dispersing/conveying means for adsorbing, dispersing, and conveying the granular substance by electrostatic force and a detecting means for detecting the features of the shape of the granular substance adsorbed/held by the dispersing/conveying means. The dispersing/ conveying means is provided with an insulating rail consisting of a first insulator having a flat or curved main surface on which the granular substance is placed and an electrode body arranged to be connected closely with the surface reverse to the main surface of the insulating rail. The electrode body is provided with a second insulator and a plurality of electrodes arranged almost parallel to the second insulator so that the granular substance can be adsorbed, conveyed, and dispersed on the main surface of the insulating rail. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a particle shape inspection apparatus, and more particularly to an apparatus suitable for detecting continuous balls from a large number of spheres.

[0002]

There are various methods for producing granules from a melt such as metal, resin or glass, and the obtained granules are used in various fields. For example, in the case of metal particles such as solder balls, a molten molten metal is discharged into the air or a solvent and cooled to obtain spherical particles. In this manufacturing method, irregular shaped particles called continuous balls in which a plurality of monocytes are connected may be generated in addition to a single particle (monocyte). A continuous ball in which monocytes of approximately the same diameter are combined can be removed with considerable accuracy by a classification process using a sieve. However, for example, some continuous balls that combine monocytes of different diameters (hereinafter referred to as different diameter continuous balls) pass through the sieve, so after performing classification using a sieve A separation process is provided.

As a method for separating continuous balls, a method called slope rolling using a strip-shaped slope (known example 1) is known. This is because while monocytes roll straight down along the slopes, continuous balls use the phenomenon of falling while swinging the slopes to the left and right, adjusting the width of the slopes and dropping the monocytes to the bottom of the slopes. , It divides the continuous ball to the left and right of the slope. Japanese Patent Laid-Open No. 11-319722 (known example 2) proposes a device capable of separating continuous balls of different diameters. This is composed of a supply device for supplying mixed particles of monocytes and continuous balls to an inclined surface, an inclined surface for dropping particles, and a recovery unit for collecting monocytes rolling down from the inclined surface. In addition, a structure having a groove parallel to the particle falling direction is provided between the supply unit and the inclined surface or in the middle of the inclined surface. That is, the central axis of the continuous ball formed by connecting the centers of the combined single balls when the different-sized continuous balls pass through the groove is aligned with the falling direction, and the small ball is between the groove and the large ball. It acts as a wedge and utilizes the fact that the rotary fall stops.

[0004]

The method of the known example 1 is advantageous in terms of manufacturing cost because the separation is carried out by a simple facility utilizing a flat slope, but there is a problem that the accuracy of the separation is low. . In other words, even if it is a continuous ball, if a continuous ball of monocytes of almost the same diameter is rotated so that the central axis is orthogonal to the tilt direction, or if one of the continuous balls is extremely small and close to a monocyte. Like a monocyte, it rolls down along the slope, so that it will enter the monocyte storage portion arranged below the slope. Also, when a large amount of particles are supplied to the slope, the number of continuous balls that are pushed by the monocytes to reach the lower part of the slope and enter the monocyte storage portion increases. On the contrary, the number of monocytes that collide with each other and fall to the left and right and are regarded as continuous balls increases, and the ratio thereof may reach about 10% of the supply amount.

Further, in the case of sorting with the device of the known example 2, in order to surely stop the continuous balls in the middle of the groove for sorting, the groove inclination angle, shape, size, surface roughness, etc. are simply selected. It must be set in advance according to the specifications of the sphere. However, it is extremely difficult to be applicable to continuous balls of different sizes that occur in an actual manufacturing line. In other words, even if it is called a different diameter continuous ball, there are various kinds of continuous balls such that small balls and large balls have the same diameter to small balls that are extremely small and cannot be distinguished from monocytes. The form of fall is different. For this reason, some continuous spheres with almost the same diameter do not have a wedge action even if the central axis coincides with the falling direction, and some continuous spheres that can be regarded as single spheres have large wedges. Some continuous balls, such as those that rotate only a ball, do not stop in the middle of the groove and fall as they are, so there is a problem in the accuracy of separation. In addition, in order to eliminate the continuous ball that has stopped in the middle of the groove, the sorting device must be stopped when the continuous ball stops, but it is not possible to detect that the continuous ball has stopped, so a short interval There is also a problem in terms of processing capacity, because it is necessary to periodically suspend operation and check whether the continuous ball is stopped. Furthermore, if the sphere becomes very small and light, due to factors such as uneven surface roughness of the inclined surface where the sphere rotates and falls, and the self-weight of the sphere itself and water adsorption to the sphere, which can be ignored when the weight is heavy. There is a problem that the accuracy of separation is lowered because the spheres are attracted to the inclined surface or the spheres are adhered to each other to prevent the spheres from rotating and falling so that some spheres do not fall.

As described above, the method of separating continuous balls by utilizing the inclination cannot be applied to the inspection of strict specifications such that the continuous balls are almost completely mixed because the accuracy of the separation is low, and It is also difficult to increase processing capacity. Therefore, an object of the present invention is to provide a granular particle inspection apparatus for universally detecting the shape characteristic amount of a granular particle with high accuracy regardless of the size and weight of the granular particle and classifying the granular particle with high accuracy.

[0007]

[Means for Solving the Problems] To solve the above problems
To 1) The particle inspection device according to the present invention absorbs particles by electrostatic force.
Dispersing and carrying means for carrying on, dispersing and carrying
And a detection means for detecting the shape feature amount of the adsorbed and held particles
The dispersing and conveying means has a flat main surface on which the particles are placed.
Insulated rail consisting of a first insulator with a curved or curved surface
And an electrode closely attached to the opposite surface of the insulating rail from the main surface.
And a second insulating body and a second insulating body.
A plurality of electrodes provided substantially parallel to the edge,
Special feature is that particles are adsorbed on the main surface of the edge rail, transported and dispersed.
It is a sign. Further, the first insulator has a dielectric constant of 4 or more.
Electrical resistivity below 10¹⁴Made of insulating material of Ωcm or more
It is preferable. 2) The particle inspection device of the present invention absorbs particles by electrostatic force.
Dispersing and carrying means for carrying on, dispersing and carrying
And a detection means for detecting the shape feature amount of the adsorbed and held particles
And the dispersing and conveying means has a main surface on which the particles are placed.
Insulation layer consisting of flat or curved first insulator
Cable and an electric wire provided close to the main surface of the insulated rail.
And a second insulator and a second insulator.
A plurality of electrodes provided substantially parallel to the edge body and a second insulator
Is the insulating material with a dielectric constant of 4 or more on the surface facing the insulating rail?
And a third insulator, which is formed on the main surface of the insulating rail.
The feature is that particles are adsorbed, conveyed, and dispersed. Well
In addition, the first insulator has a dielectric constant of 4 or less and an electrical resistivity of
10¹⁴It is preferably made of an insulating material of Ωcm or more.
The third insulator has a dielectric constant of 4 to 12 and an electrical resistance of
Resistance rate is 10⁸-10 ¹²Ωcm of insulating material
preferable. 3) The particle inspection apparatus according to the present invention comprises: the insulating rail;
Each polar body is characterized by being able to move relative to each other.
It 4) In the particle inspection device of the present invention, the detection means is in the inspection section.
A camera that captures images of particles from above the surface and from the tangential direction
And the image taken from above the grain and the tangential direction.
Image processing of the imaged image, based on a predetermined logic
It can be judged. 5) The particle inspection apparatus of the present invention is a sphere in which monocytes and continuous balls are mixed.
From the inside of the body, the diameter of the small sphere is more than 0.2 times the diameter of the large diameter.
It is characterized by the ability to detect different diameter continuous balls.
Therefore, it is suitable for detecting irregular shaped continuous balls of solder balls.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the accompanying drawings. Although the embodiment described below separates monocytes and continuous balls in a solder ball, the present invention is not limited to this, and is not a spherical body as clear as a solder ball or is mainly configured. Even if the material to be used is a particle that is a metal such as iron, aluminum or copper, or a non-metal of an organic compound such as plastic or paper or an inorganic compound such as ceramics or glass, it is applicable if it is a particle that generates a charge by polarization. It is possible to

(Embodiment 1) FIG. 1 shows a side view of an example of the particle inspection apparatus of the present invention. The particle inspection device is a solder ball 6
Dispersing and conveying means 1 for adsorbing, conveying, and dispersing, a detecting means 3 arranged in the inspection section A set immediately above the outer periphery of the dispersion conveying means 1, and a supply provided in a supply section B upstream of the inspection section A. The means 2 is provided with a continuous ball removing means 4 provided in the removing section C downstream of the detecting section A, and a collecting container 5 provided in the collecting section D downstream of the removing section C. The solder balls 6 are supplied by the supply means 2 to the dispersion conveyance means 1 at the supply section B, and the supplied solder balls 6 are suction-conveyed from the supply section B to the recovery section D. Further, as will be described in detail below, the solder balls 6 are dispersed in such a state that they can be individually detected during the transportation process from the supply unit B to the inspection unit A. The dispersed solder balls 6 are inspected by the detection unit 3 for presence or absence of continuous balls by the inspection unit A, the detected continuous balls are removed by the removal unit 4 by the removal unit C, and only the remaining monocytes are collected by the recovery unit D. It is collected in the collection container 5.

The above-mentioned constituent means will be described in detail below. The distributed transport means 1 includes an insulating rail 11, an electrode body 10, and a support member 12. The electrode body 10 is provided in close contact with the entire outer circumference of the support member 12 in a direction whose longitudinal direction is perpendicular to the central axis of the support member 12. The support member 12 is a drum body supported by bearings so that the central axis thereof is horizontal, and is configured to be rotatable by a motor or the like. Therefore, the electrode body 10 provided on the outer periphery of the support member 12 has a horizontal axis. Can be rotated in the direction of the arrow. The insulating rail 11 is attached to a fixing member (not shown) in a range from the solder ball supplying portion B to the collecting portion D so that the lower surface thereof is in close contact with the outer periphery of the electrode body 10 and the insulating rail 11 itself does not move. There is.

FIG. 2 (a) shows a dispersion conveying means 1 according to the first embodiment.
A detailed configuration of (hereinafter, referred to as a first dispersion conveying unit) will be shown. In the first dispersing and conveying means 1, the insulating rail 11
Is formed by the strip-shaped first insulator 111, and the electrode body 1
0 is arranged in the strip-shaped second insulator 101 and the second insulator 101 substantially orthogonal to each other in the longitudinal direction and substantially parallel to the width of the second insulator 101 and arranged substantially parallel to each other at a predetermined pitch. It is formed by a plurality of formed electrodes 102.

It is preferable that the first insulator 111 forming the insulating rail 11 has a low dielectric constant of 4 or less and an electric resistivity of 10 ¹⁴ Ωcm or more.
Furthermore, in order to make it easy to incorporate the present dispersion conveying means as a part of manufacturing equipment, it is preferable to use a material such as epoxy resin, polyethylene, or polypropylene as the insulating material. Also, the electrode body 10
The cross-sectional shape of the electrode 102 in the longitudinal direction is a substantially rectangular shape in FIG. 2A, but in consideration of the material and size of the target granular material, the processing efficiency, the detection accuracy, etc., any linear shape or circular shape can be used. The shape of the electrode 102 can be changed, and an electrode material such as copper or silver can be appropriately selected as the material of the electrode 102.

The operating state of the first dispersion conveying means will be described with reference to FIGS. 5 (a) to 5 (c). The solder balls 6 are supplied onto the main surface of the insulating rail 11 by a supply means (not shown) on the right side of the drawing. A two-phase rectangular wave alternating voltage is applied to each electrode 102 from a power supply device (not shown), and the electrodes are sequentially arranged from the supply side to the discharge side as shown in FIG. Electrodes 102a, 102b, 10
Two-phase rectangular wave alternating voltage is applied to 2c · 102d ··· by alternately changing polarities such as +, −, +, − ,.

FIG. 3 shows the state of charges appearing on the insulating rails near the electrodes, the electrode body and the solder balls when a voltage is applied.
It is schematically shown in (a). Insulation rail 1 near the electrode 102
1 and the insulator of the electrode body 10 are dielectrically polarized, and the insulating rail 11
On the surface, electric charges having the same polarity (+) as the polarity of the electrode (for example, +) appear. Therefore, the solder balls 6 supplied on the insulating rails 11 are charged by electrostatic induction due to the charges appearing on the surface of the insulating rails 11. When the polarity of the charge appearing on the surface of the insulating rail 11 is +, the lower surface of the solder ball 6 is charged to a different polarity (−), and when the polarity is −, the lower surface of the solder ball 6 is charged to + and the solder ball 6 is It is attracted to the surface of the insulating rail 11 by electrostatic force.

However, as shown on the right side in FIG.
The solder balls 6 immediately after being supplied by the supply means are attracted to the surface of the insulating rail 11 by electrostatic force, but the solder balls 6 are in a random state such that they are in contact with each other or overlap each other. After that, when the support member (not shown) is rotationally driven while the voltage is still applied, the electrode body 102 moves from the supply side to the carry-out side as shown in FIGS. 5B and 5C. At this time, the polarized state of the insulating rail 11 also moves in the direction of the arrow following the movement of the electrode 102, and the solder balls 6 on the insulating rail 11 are attracted to the polarized region of the insulating rail and move together with the electrode 102 to the carry-out side. Be transported. Further, since all the solder balls on the electrodes of the same polarity have the same polarity, the individual solder balls are dispersed at a certain distance from each other as the conveyance proceeds, as shown on the left side in FIG.

The supply means 2 of FIG. 1 can utilize, for example, a vibration type parts feeder. The tip portion of the chute connected to the parts feeder is provided so as to include the width range of the insulating rail 11 and almost contact the surface of the insulating rail 11, and the solder ball 6 is stored between the insulating rail 11 and the solder ball 6.
The solder balls 6 are supplied to the insulating rails 11.

The detecting means 3 is arranged so as to image the top portion A, which is the inspection area of the dispersion conveying means 1, from above.
It has an image pickup means of a CD camera 31 and a CCD camera 32 arranged so as to take an image from a tangential direction of the circumferential direction,
It is provided with a CCD camera 31 and a judging means (not shown) to which signals from the CCD camera 32 are input. The CCD camera 31 captures a plane image of the solder ball 6 by epi-illumination using a ring illumination (not shown), and the CCD camera 32 captures a front image of the solder ball 6 with parallel light emitted facing each other in the tangential direction. Then, the obtained planar image and front image are processed to determine whether or not the solder ball 6 is a continuous ball based on a predetermined logic.

A picked-up image of a typical property of the solder ball 6 and a continuous-ball decision logic for the picked-up image will be described below with reference to FIGS. FIG. 9 is a schematic diagram of a plane image obtained by the CCD camera 31, and FIG. 10 is a schematic diagram of a front image obtained by the CCD camera 32. It is confirmed that the same identifier code is for the same solder ball. Shows. 9 and 10 (a), both images have a circular shape,
It shows that it is a monocyte 60.

9 (b), the plane image is the same circle as a monocyte, but the monocyte 60 and the large diameter sphere 62 are observed to project in the front image. It can be determined that it is the continuous ball 63 to which the ball is attached and that it is upright on the insulating rail 11. Similar to (b), (c) shows a state in which the sphere 60 stands upright on the insulating rail 11, but since the projection amount observed in the front image is smaller than that of the single sphere 60, it is the continuous sphere with the small diameter spheres 61 attached. It can be judged as a ball. In (d) and (e), although the amount of protrusion measured in the front image is small,
From the result of the plane image, the continuous ball 62 is determined to be the continuous ball overlaid on the insulating rail 11. (F) is a continuous ball 63 having a small-diameter sphere 61 having a diameter less than or equal to 0.17 times that of the monocyte 60, but it is a ball that is difficult to discriminate even if the results of the planar image and the front image are combined. Detection limit. Needless to say, it is desirable that all of the solder balls 6 are monospheres 60, but a continuous ball to which a surplus ball of this size adheres has a problem in function since the volume change during solder reflow can be ignored. Therefore, it can be seen that the present invention can be applied. In the continuous ball determination process described above, extraction of the contour line from the captured image, its curvature,
The center coordinates, the top coordinates, etc. are calculated, which can be dealt with by a known image processing technique. In addition, in FIG.
Although the state of the solder ball is imaged from two directions, the number of the image pickup means may be one as long as the detection means is capable of recognizing the three-dimensional shape by measuring the gradation image of the solder ball or the like.

When the determining means determines that the continuous ball 63 is present, a defective product detection signal is output from the detecting means 3 and the continuous ball 63 is removed from the insulating rail 11 by the removing means 4 at the removing section C. The monocytes 60 are further transported and collected in the collection container 5 at the collection section D. For removal by a person, the rotation of the dispersing and conveying means 1 may be stopped, and for automatic removal, a robot equipped with a suction hand may be used. It is possible to operate so as to remove only the defective product based on the position information of the defective product in the width direction of the main surface of the dispersion conveying means 1.

In FIG. 1, the particles are adsorbed, conveyed and dispersed by the first dispersion conveying means, but the dispersion conveying means shown in FIG. 2B (hereinafter referred to as the second dispersion conveying means). However, the same operation can be performed. In the second dispersing and conveying means, the electrode body 10 is composed of a strip-shaped second insulator 101 and a second strip-shaped insulator 101.
A plurality of electrodes 102 substantially orthogonal to the longitudinal direction inside the insulator 101 and arranged substantially parallel to each other at a predetermined pitch with a length substantially equal to the width of the second insulator 101; It is formed of a third insulator 103 having a dielectric constant of 4 or more, which is provided on the surface of 101 facing the insulating rail 11.

The third insulator 103 has a dielectric constant of 4-12.
Has a relatively high dielectric constant and an electrical resistivity of 10 ⁸ to 10 ¹²
An insulating material having conductivity of about Ωcm is preferable. The insulating material is preferably an organic material having good workability and moldability, and examples thereof include phenol resin, silicon resin, vinyl chloride resin, ABS resin, acetyl cellulose, acetyl butyl cellulose, urethane elastomer, chloroprene rubber, nitrile rubber, and It is possible to use a mixture of these and the like, and by appropriately blending carbon black, it is possible to obtain any preferable electric resistivity and dielectric constant within the above-mentioned ranges.

The operating condition of the second distributed transfer means is the same as that of the first distributed transfer means, but as shown in FIG. 3 (b), when a voltage is applied to the electrodes, an insulator near the electrodes is applied. The states of the charges that appear are different. In FIG. 3B, the electrode 102, the insulating rail 11 main surface, and the solder ball 6 which are shown by polarization are shown.
Has the same polarity relationship as that of the first distributed transport means, but since the third insulator 103 is an insulating material having a higher dielectric constant than the upper insulating rail 11, Polarization occurs in a wider range, and the charge that appears on the main surface of the insulating rail 11 due to polarization is almost equal to that of the third insulator 1.
The range is equal to or less than the electric charge appearing in 03. Therefore, the occupancy rate of the solder balls 6 that can be adsorbed on the insulating rails 11 is increased in the second distributed transfer means as compared with the first distributed transfer means, so that the transfer efficiency is improved and the particles are formed like solder balls. Even when the material used is a metal having a low dielectric constant, a stable adsorption state can be maintained.

With reference to FIG. 3, an explanation will be given of an experimental example in which the transfer efficiencies of the first distributed transfer means and the second distributed transfer means are compared. FIG. 3B is an experimental example of the second dispersing and conveying means, in which the strip electrodes 102 having a width of 5 mm are provided at intervals of 10 mm, and a solder ball 6 having a diameter of 0.6 mm when a voltage of 3 kV is applied. FIG. The solder balls 6 were dispersed on the insulating rails 11 within a range of 8 to 12 mm with almost no contact with each other, and were sucked to be in a stable state. FIG. 3A is an experimental example of the first distributed transfer means, in which the third insulator 103 is removed from the experimental device of the second distributed transfer means, and the first distributed transfer means is configured. And the sphere was sucked only in a narrow range of 3 to 4 mm. This is because the dielectric constant of the insulating rail 11 is low, so that the polarization occurs only in a narrow range, but the first dispersive transfer means is, for example, a dispersive transfer means of particles having a relatively high dielectric constant such as plastic or ceramics. Is useful as In addition, the insulating rail 11 of FIG.
When the same material as that of the third insulator 103 in (b) was used, the solder balls moved between the electrode positions and were unstable. This is because the electric current flows in the insulating rail, so the charged solder balls on the surface are supplied with electrons from the insulating rail or discharge electrons to the insulating rail and become the same polarity as the surface of the insulating rail. This is because a repulsive force is generated between and.

The above electrode body is, as shown in FIG.
A plurality of electrodes 102 may be provided on the upper surface of the second insulator 101 substantially orthogonal to the longitudinal direction and substantially parallel to the width of the second insulator 101 so as to have a predetermined pitch and substantially parallel to each other. , A plurality of electrodes 102 as shown in FIG.
Are arranged substantially orthogonal to the surface of the second insulator 101 facing the insulating rail 11 in the longitudinal direction and substantially parallel to the width of the insulator 101 at a predetermined pitch, and have a dielectric constant of 4 Even if the above-described third insulator 103 is provided on the electrode 102, the same operation as that of the above-mentioned dispersion conveying means can be performed.

(Embodiment 2) In Embodiment 1, the insulating rail 11 is used.
Although the electrode body 10 is fixed so that the electrode body 10 can be moved, the electrode body 10 may be fixed by making the insulating rail 11 movable as shown in FIG. The basic configuration of the present embodiment is the same as that of the first embodiment, but the dispersing and conveying means 1 includes an insulating rail 11 arranged like a belt conveyor, an electrode body 10, and an insulating rail 11 arranged like the belt conveyor. It has pulleys 131 and 132 arranged so that the outer peripheral surfaces thereof closely contact the inner peripheral surface of the arc portions at both ends. The electrode body 10
Is the electrode body 1 on the lower surface of the upper side of the area corresponding to the collecting section from the supply section of the insulating rail 11 arranged like a belt conveyor.
The upper surface of 0 is fixed by a fixing member (not shown) so as to be in close contact. Further, the pulleys 131 and 132 have their central axes supported by bearings, and the pulley 131 is configured to be rotatable by a motor or the like. When the pulley 131 rotates in the direction of the arrow, the insulating rail 11 moves accordingly. In this embodiment, the image pickup means CCD camera 32 in the detection means 3 is installed so that the optical axis is orthogonal to the conveying direction of the solder balls 6, and whether there is a continuous ball in the group of solder balls or not. It will be a judgment. The solder balls 6 supplied on the main surface of the insulating rail 11 by the supply unit are separated by the same operation as in the first embodiment.

(Embodiment 3) The operations of adsorbing, conveying and dispersing the particles in the dispersing and conveying means of the above-mentioned Embodiments 1 and 2 were carried out by moving the insulating rail or the electrode body. As shown, the same operation can be performed without moving the insulating rail 11 or the electrode body 10. The basic configuration and operation of the particle inspection apparatus of FIG. 8 are the same as those of the above-described second embodiment, but the dispersion conveying means 1 has an insulating rail 11 and an electrode body 10 below the insulating rail 11, and the insulating rail 11 and the electrode body 10 are It is integrated and fixed to a fixing member (not shown).

The operating condition of the dispersion conveying means 1 of FIG. 8 will be described with reference to FIG. The means for supplying the solder balls 6 to the distributed transfer means 1, the means for applying a voltage to the electrodes, and the operation for attracting the solder balls 6 onto the main surface of the insulating rail 11 are the same as in the first and second embodiments. After the solder balls 6 are adsorbed, the voltage is turned off (0 volt), and then the polarity of the voltage is changed and applied. At this time, the electrodes on the destination side are applied slightly faster. As a result, as shown in FIG. 6B, for example, by the electrode 102c, a − charge appears on the surface of the insulating rail 11 where a + charge has been displayed until then, and the + charge that is attracted by the electrode 102b is charged. The solder ball 6b being moved is attracted and moves in the direction of the electrode 102c. Since this phenomenon occurs from the destination side, the solder balls can be sequentially moved forward. By repeating the same operation, the solder balls are conveyed by the electrode pitch as shown in FIG. 6C. 2 (b), 2 (c) or 2 (d), the same operation as described above can be performed by integrating the insulating rail 11 and the electrode body 10.
In the third embodiment, the operation of the dispersing and conveying means can be performed by changing the polarities of the electrodes, so that the conveyance and the dispersion can be electrically controlled arbitrarily.
Since a mechanism for moving the electrode body is not required as described above, the structure of the device can be simplified.

The polarity arrangement pattern of the electrodes in the particle inspection apparatus of the present invention is not limited to the explanation of the operation of the dispersing and conveying means in the above-mentioned embodiment, and is appropriately set according to the material and size of the solder balls and the conveying amount. do it. For example, by applying the polarity arrangement pattern of the electrodes as +, +,-,-, ..., solder balls of different polarities from the electrodes are attracted between electrodes of the same polarity, increasing the occupancy rate of the solder balls on the insulating rail. Therefore, the transport efficiency can be improved.

The detection means in the particle inspection apparatus of the present invention is a machine such as an optical sensor such as a laser sensor or a laser interferometer, a dial gauge or an air micrometer depending on the shape, material, detection purpose or detection accuracy of the particles. Type measuring devices such as electromagnetic sensors, electromagnetic sensors such as eddy current displacement gauges and electrostatic capacitance type displacement gauges can be appropriately selected, and the detection direction can also be appropriately selected.

[0031]

As described above, the particle inspection device of the present invention has the following effects. (1) Since the particle inspection apparatus of the invention has the dispersion and conveyance means based on the electrostatic force, if the particles are made of a polarizable material, the particles are adsorbed and conveyed regardless of the size or weight of the particles. The dispersion can be carried out in a versatile manner, and even small and lightweight particles can be surely dispersed and tested. (2) Even when the specifications of the granules are changed, the number of adjustments of the apparatus is reduced, and the irregular-shaped granules can be removed and the granules can be continuously collected, so that the inspection can be efficiently performed. (3) Since the particles are dispersed individually by the dispersing and conveying means and the normal particles can be prevented from agglomerating and becoming irregular shaped particles, the detecting means can change the normal particles into irregular shaped particles. There is little risk of making a mistake. (4) The shape feature amount of each granular material can be detected with high accuracy by the detecting means, and the granular material adsorbed to the dispersion and conveying means by electrostatic force does not easily move. It can be surely removed by the removing means. (5) Since the shape feature amount of a granular body is detected from a plurality of directions and is determined from a plurality of data, it is possible to accurately determine a deformed granular body.

[Brief description of drawings]

FIG. 1 is a side view showing a first embodiment of a particle inspection device of the present invention.

FIG. 2 is a diagram showing a dispersing and conveying means of the particle inspection device of the present invention.

FIG. 3 is a diagram showing a charging state of particles.

FIG. 4 is a diagram showing a dispersion operation of particles.

FIG. 5 is a diagram showing a transporting operation of particles in Examples 1 and 2.

FIG. 6 is a diagram showing the operation of transporting particles according to the third embodiment.

FIG. 7 is a side view showing a second embodiment of the particle inspection device of the present invention.

FIG. 8 is a side view showing a third embodiment of the particle inspection device of the present invention.

FIG. 9 is a diagram showing a planar image of each property of the solder balls sucked and held by the dispersing and conveying means.

FIG. 10 is a diagram showing a front image of each property of the solder balls suction-held by the dispersion / transport means.

[Explanation of symbols]

1: Dispersion conveying means, 2: Supplying means, 3: Detection means, 4:
Removing means, 5: recovery container, 6: solder ball, 10: electrode body, 11: insulating rail, 12, support member, 31: CCD
Camera, 32: CCD camera, 101 second insulator, 1
02: electrode, 103: third insulator, 111: first insulator, 60: monocyte, 61: small diameter sphere, 62: large diameter sphere, 6
3: continuous ball

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Claims (7)

[Claims] 1. A dispersion transport means for attracting, dispersing and transporting particles by electrostatic force, and a detection means for detecting a shape feature amount of the particles suction-held by the dispersion transport means. The means includes an insulating rail made of a first insulator whose main surface on which the particles are placed is a flat surface or a curved surface, and an electrode body provided in close contact with the opposite surface of the main surface of the insulating rail.
The electrode body includes a second insulator and a plurality of electrodes provided substantially parallel to the second insulator, and adsorbs and transports and disperses the particles on the main surface of the insulating rail. Granule inspection device. 2. A dispersion conveying means for adsorbing, dispersing and conveying the particles by electrostatic force, and a detecting means for detecting a shape feature amount of the particles adsorbed and held by the dispersion conveying means. Means, the main surface on which the particles are placed comprises an insulating rail made of a first insulator having a flat surface or a curved surface, and an electrode body provided in close contact with the opposite surface of the main surface of the insulating rail,
The electrode body includes a second insulator, a plurality of electrodes provided substantially parallel to the second insulator, and an insulating material having a dielectric constant of 4 or more on a surface of the second insulator facing the insulating rail. And a third insulator made of, which adsorbs, conveys, and disperses particles on the main surface of the insulating rail. 3. The particle inspection apparatus according to claim 2, wherein the third insulator is made of an insulating material having a dielectric constant of 4 to 12 and an electric resistivity of 10 ⁸ to 10 ¹² Ωcm. Granule inspection device. 4. The particle inspection apparatus according to claim 1, wherein the first insulator is made of an insulating material having a dielectric constant of 4 or less and an electric resistivity of 10 ¹⁴ Ωcm or more. Characteristic particle inspection device. 5. The particle inspection apparatus according to claim 1, wherein the insulating rail and the electrode body are movable relative to each other. 6. The particle inspection apparatus according to any one of claims 1 to 5, wherein the detection unit has a camera that images the particles in the inspection unit from above the main surface of the insulating rail and in a tangential direction. A particle inspection device characterized by performing image processing on an image of a body taken from above and an image taken from a tangential direction, and determining irregular shaped particles based on a predetermined logic. 7. The particle inspection apparatus according to claim 1, wherein the diameter of the small sphere is 0.2 times or more the diameter of the large diameter among the spheres in which the monocytes and the continuous spheres are mixed. A particle inspection device characterized by being able to detect a continuous ball of a different diameter.