JP2003239070A5 - - Google Patents
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- Publication number
- JP2003239070A5 JP2003239070A5 JP2002041862A JP2002041862A JP2003239070A5 JP 2003239070 A5 JP2003239070 A5 JP 2003239070A5 JP 2002041862 A JP2002041862 A JP 2002041862A JP 2002041862 A JP2002041862 A JP 2002041862A JP 2003239070 A5 JP2003239070 A5 JP 2003239070A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- base
- elastic member
- holder according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 16
- 239000000463 material Substances 0.000 claims 3
- 239000010408 film Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 229920006015 heat resistant resin Polymers 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002041862A JP4441158B2 (ja) | 2002-02-19 | 2002-02-19 | 基板ホルダー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002041862A JP4441158B2 (ja) | 2002-02-19 | 2002-02-19 | 基板ホルダー |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003239070A JP2003239070A (ja) | 2003-08-27 |
| JP2003239070A5 true JP2003239070A5 (2) | 2005-08-11 |
| JP4441158B2 JP4441158B2 (ja) | 2010-03-31 |
Family
ID=27782145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002041862A Expired - Fee Related JP4441158B2 (ja) | 2002-02-19 | 2002-02-19 | 基板ホルダー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4441158B2 (2) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4590315B2 (ja) * | 2005-06-24 | 2010-12-01 | 株式会社ホンダロック | ミラーの表面処理装置 |
| JP6233712B2 (ja) * | 2014-08-27 | 2017-11-22 | 信越半導体株式会社 | 気相成長装置及び被処理基板の支持構造 |
| DE102020109265A1 (de) | 2020-04-02 | 2021-10-07 | Apeva Se | Substrathalter mit einer elastischen Substratauflage |
-
2002
- 2002-02-19 JP JP2002041862A patent/JP4441158B2/ja not_active Expired - Fee Related
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