JP2004266221A5 - - Google Patents
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- Publication number
- JP2004266221A5 JP2004266221A5 JP2003057417A JP2003057417A JP2004266221A5 JP 2004266221 A5 JP2004266221 A5 JP 2004266221A5 JP 2003057417 A JP2003057417 A JP 2003057417A JP 2003057417 A JP2003057417 A JP 2003057417A JP 2004266221 A5 JP2004266221 A5 JP 2004266221A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003057417A JP4383071B2 (ja) | 2003-03-04 | 2003-03-04 | ウエハ収納カセットの検査装置及び方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003057417A JP4383071B2 (ja) | 2003-03-04 | 2003-03-04 | ウエハ収納カセットの検査装置及び方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004266221A JP2004266221A (ja) | 2004-09-24 |
| JP2004266221A5 true JP2004266221A5 (ja) | 2006-04-20 |
| JP4383071B2 JP4383071B2 (ja) | 2009-12-16 |
Family
ID=33120854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003057417A Expired - Lifetime JP4383071B2 (ja) | 2003-03-04 | 2003-03-04 | ウエハ収納カセットの検査装置及び方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4383071B2 (ja) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008069191A1 (ja) * | 2006-12-07 | 2008-06-12 | Shibaura Mechatronics Corporation | ウエーハ収納カセット検査装置及び方法 |
| KR101445911B1 (ko) | 2009-04-13 | 2014-09-29 | 히라따기꼬오 가부시키가이샤 | 기판캐리어 측정 지그, 충돌방지 지그 및 그것을 이용한 충돌방지 방법 |
| JP6124405B2 (ja) * | 2013-06-25 | 2017-05-10 | 芝浦メカトロニクス株式会社 | ウェーハ収納カセットの検査装置及び検査方法 |
| WO2015037032A1 (ja) * | 2013-09-11 | 2015-03-19 | 平田機工株式会社 | 検査方法及び検査装置 |
| CN107408520B (zh) * | 2015-03-03 | 2022-02-25 | 卢茨·瑞布斯道克 | 检查系统 |
| EP3413340B1 (en) * | 2017-06-08 | 2021-11-17 | Brooks Automation (Germany) GmbH | Method for inspecting a container and inspection system |
| EP3413339B1 (en) * | 2017-06-08 | 2023-05-24 | Brooks Automation (Germany) GmbH | Inspection system and method of inspection for substrate containers |
| TWI771753B (zh) * | 2020-09-14 | 2022-07-21 | 鴻績工業股份有限公司 | 晶圓盒檢測裝置及晶圓盒檢測方法 |
| JP7218340B2 (ja) | 2020-11-18 | 2023-02-06 | 信越半導体株式会社 | 検査装置及び検査方法 |
| EP4002008A1 (en) * | 2020-11-23 | 2022-05-25 | Brooks Automation (Germany) GmbH | Method and system for inspection of an inner pod or an outer pod of an euv pod |
| JP7614709B2 (ja) * | 2021-03-19 | 2025-01-16 | 株式会社ディスコ | 搬送装置 |
| CN114400190B (zh) * | 2022-03-25 | 2022-06-10 | 南京伟测半导体科技有限公司 | 一种全方位检测晶舟盒内晶圆的装置 |
| JP7682831B2 (ja) * | 2022-04-27 | 2025-05-26 | 川崎重工業株式会社 | 半導体製造装置システム |
| JP2025174689A (ja) * | 2024-05-17 | 2025-11-28 | オムロン株式会社 | 検出システム及び検出方法 |
| WO2026017882A1 (en) * | 2024-07-19 | 2026-01-22 | Brooks Automation (Germany) Gmbh | Method for monitoring a state of a container or container component, and inspection system |
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2003
- 2003-03-04 JP JP2003057417A patent/JP4383071B2/ja not_active Expired - Lifetime