JP2006084190A - 真空計 - Google Patents

真空計 Download PDF

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Publication number
JP2006084190A
JP2006084190A JP2004266475A JP2004266475A JP2006084190A JP 2006084190 A JP2006084190 A JP 2006084190A JP 2004266475 A JP2004266475 A JP 2004266475A JP 2004266475 A JP2004266475 A JP 2004266475A JP 2006084190 A JP2006084190 A JP 2006084190A
Authority
JP
Japan
Prior art keywords
vacuum gauge
vacuum
display means
gauge
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004266475A
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English (en)
Japanese (ja)
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JP2006084190A5 (2
Inventor
Eijiro Ochiai
英二郎 落合
Yasushi Nagata
寧 永田
Masahiro Fukuhara
万沙洋 福原
Takeshi Miyashita
剛 宮下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2004266475A priority Critical patent/JP2006084190A/ja
Publication of JP2006084190A publication Critical patent/JP2006084190A/ja
Publication of JP2006084190A5 publication Critical patent/JP2006084190A5/ja
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)
JP2004266475A 2004-09-14 2004-09-14 真空計 Pending JP2006084190A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004266475A JP2006084190A (ja) 2004-09-14 2004-09-14 真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004266475A JP2006084190A (ja) 2004-09-14 2004-09-14 真空計

Publications (2)

Publication Number Publication Date
JP2006084190A true JP2006084190A (ja) 2006-03-30
JP2006084190A5 JP2006084190A5 (2) 2007-09-06

Family

ID=36162831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004266475A Pending JP2006084190A (ja) 2004-09-14 2004-09-14 真空計

Country Status (1)

Country Link
JP (1) JP2006084190A (2)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010096599A (ja) * 2008-10-15 2010-04-30 Nagano Keiki Co Ltd 表示器
JP2012026995A (ja) * 2010-07-28 2012-02-09 Ulvac Japan Ltd トランスデューサ型真空計及びトランスデューサ型真空計を用いた単結晶引き上げ装置
KR20190012665A (ko) * 2017-07-28 2019-02-11 엘지전자 주식회사 디스플레이 냉각장치
JP2024505986A (ja) * 2021-02-03 2024-02-08 エドワーズ リミテッド 光表示付き真空圧力ゲージ組立体

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57128988A (en) * 1981-02-04 1982-08-10 Sumitomo Electric Ind Ltd Warning device for laser oscillator
JPS642132A (en) * 1987-06-24 1989-01-06 Shimizu Corp Data input system
JPH0255146U (2) * 1988-10-14 1990-04-20
JPH04309818A (ja) * 1991-04-05 1992-11-02 Sasaki Denki Seisakusho:Kk レベルメータ
JPH07216834A (ja) * 1994-02-03 1995-08-15 Mk Seiko Co Ltd 標識灯
JP2001014570A (ja) * 1999-04-28 2001-01-19 Nittan Co Ltd 火災感知器
JP2002048666A (ja) * 2000-08-03 2002-02-15 Japan Energy Corp 圧力計、圧力監視装置及び圧力監視方法
JP2003222601A (ja) * 2001-11-26 2003-08-08 Nitta Ind Corp 接触式水分検知器

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57128988A (en) * 1981-02-04 1982-08-10 Sumitomo Electric Ind Ltd Warning device for laser oscillator
JPS642132A (en) * 1987-06-24 1989-01-06 Shimizu Corp Data input system
JPH0255146U (2) * 1988-10-14 1990-04-20
JPH04309818A (ja) * 1991-04-05 1992-11-02 Sasaki Denki Seisakusho:Kk レベルメータ
JPH07216834A (ja) * 1994-02-03 1995-08-15 Mk Seiko Co Ltd 標識灯
JP2001014570A (ja) * 1999-04-28 2001-01-19 Nittan Co Ltd 火災感知器
JP2002048666A (ja) * 2000-08-03 2002-02-15 Japan Energy Corp 圧力計、圧力監視装置及び圧力監視方法
JP2003222601A (ja) * 2001-11-26 2003-08-08 Nitta Ind Corp 接触式水分検知器

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010096599A (ja) * 2008-10-15 2010-04-30 Nagano Keiki Co Ltd 表示器
US8436742B2 (en) 2008-10-15 2013-05-07 Nagano Keiki Co., Ltd. Indicator
JP2012026995A (ja) * 2010-07-28 2012-02-09 Ulvac Japan Ltd トランスデューサ型真空計及びトランスデューサ型真空計を用いた単結晶引き上げ装置
KR20190012665A (ko) * 2017-07-28 2019-02-11 엘지전자 주식회사 디스플레이 냉각장치
JP2024505986A (ja) * 2021-02-03 2024-02-08 エドワーズ リミテッド 光表示付き真空圧力ゲージ組立体

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