JP2008166830A5 - - Google Patents

Claims (4)

A plurality of process processing apparatuses for vacuum processing a wafer, a cassette mounting means for mounting a plurality of cassettes capable of storing wafers, and a transfer means provided between the plurality of process processing apparatuses and the cassette mounting means And a wafer is carried into each of the process processing apparatuses from an arbitrary cassette mounted on the cassette mounting means using the transfer means, and a processed wafer that has been vacuum-processed by each of the process processing apparatuses is unloaded. In a vacuum processing apparatus configured with a control means for performing transport control,
A process of sequentially transferring a plurality of wafers stored in the cassette to a plurality of process processing apparatuses that perform a common process via the transfer means, and applying a common recipe to the transferred wafer, And transferring a plurality of wafers stored in the plurality of cassettes to different process processing apparatuses for each cassette via the transfer means, and applying different recipes to the transferred wafers for each process processing apparatus. A vacuum processing apparatus characterized by selectively performing any of the processing to be performed and returning the processed wafer to the original cassette via the transfer means. The vacuum processing apparatus according to claim 1, wherein
When any one of the process processing apparatuses needs to be stopped, the carrying out of the wafer from the cassette to the process processing apparatus where the apparatus needs to be stopped is interrupted, and the inside of the process processing apparatus where the need to stop the apparatus occurs. A vacuum processing apparatus characterized in that after the wafer is returned to the original cassette, the wafer is unloaded from the cassette to the process processing apparatus which does not need to be stopped, and the processing is resumed. In a vacuum processing method in which a wafer is transferred from a cassette placed on a cassette mounting means to a plurality of process processing apparatuses via a transfer means, and vacuum processing of the wafer is performed.
A process of sequentially transferring a plurality of wafers stored in the cassette to a plurality of process processing apparatuses that perform a common process via the transfer means, and applying a common recipe to the transferred wafer, And a plurality of wafers stored in the plurality of cassettes are transferred to different process processing apparatuses for each cassette via the transfer means, and different processes are applied to the transferred wafers by applying different recipes for each process processing apparatus. A vacuum processing method characterized by selectively performing any one of the processes for performing the process and returning the wafer after the process to the original cassette via the transfer means. In the vacuum processing method of Claim 3,
When any one of the process processing apparatuses needs to be stopped, the carrying out of the wafer from the cassette to the process processing apparatus where the apparatus needs to be stopped is interrupted, and the inside of the process processing apparatus where the need to stop the apparatus occurs. A vacuum processing method characterized in that after the wafer is returned to the original cassette, the wafer is unloaded from the cassette to the process processing apparatus which does not need to be stopped, and processing is resumed.