JP2008510075A5 - - Google Patents

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Publication number: JP2008510075A5
Authority: JP; Japan
Prior art keywords: substrate; alternating; titanium; aluminum; density
Prior art date: 2005-08-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP2007527909A

Other languages

English (en)

Japanese (ja)

Other versions

JP2008510075A (ja

JP4987717B2 (ja

Filing date

2005-08-12

Publication date

2008-09-25

2005-08-12 Application filed filed Critical

2005-08-12 Priority claimed from PCT/US2005/028956 external-priority patent/WO2007001337A2/en

2008-04-03 Publication of JP2008510075A publication Critical patent/JP2008510075A/ja

2008-09-25 Publication of JP2008510075A5 publication Critical patent/JP2008510075A5/ja

2012-07-25 Application granted granted Critical

2012-07-25 Publication of JP4987717B2 publication Critical patent/JP4987717B2/ja

2025-08-12 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

230000004888 barrier function Effects 0.000 claims 18
239000000758 substrate Substances 0.000 claims 16
239000011248 coating agent Substances 0.000 claims 12
238000000576 coating method Methods 0.000 claims 12
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 10
229910052710 silicon Inorganic materials 0.000 claims 10
239000010703 silicon Substances 0.000 claims 10
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 8
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 8
229910052782 aluminium Inorganic materials 0.000 claims 8
229910052719 titanium Inorganic materials 0.000 claims 8
239000010936 titanium Substances 0.000 claims 8
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 4
NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 4
PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 4
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 4
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 4
150000003376 silicon Chemical class 0.000 claims 1

JP2007527909A 2004-08-18 2005-08-12 コーティングを有する基板及びその調製方法 Expired - Fee Related JP4987717B2 (ja)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US60239404P	2004-08-18	2004-08-18
US60/602,394		2004-08-18
PCT/US2005/028956 WO2007001337A2 (en)	2004-08-18	2005-08-12	Coated substrates and methods for their preparation

Publications (3)

Publication Number	Publication Date
JP2008510075A JP2008510075A (ja)	2008-04-03
JP2008510075A5 true JP2008510075A5 (2)	2008-09-25
JP4987717B2 JP4987717B2 (ja)	2012-07-25

Family

ID=37595557

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2007527909A Expired - Fee Related JP4987717B2 (ja)	2004-08-18	2005-08-12	コーティングを有する基板及びその調製方法

Country Status (6)

Country	Link
US (1)	US7736728B2 (2)
EP (2)	EP1799883A2 (2)
JP (1)	JP4987717B2 (2)
KR (1)	KR101210859B1 (2)
CN (1)	CN100558940C (2)
WO (1)	WO2007001337A2 (2)

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2005
- 2005-08-12 EP EP05858066A patent/EP1799883A2/en not_active Withdrawn
- 2005-08-12 CN CNB2005800259424A patent/CN100558940C/zh not_active Expired - Fee Related
- 2005-08-12 US US11/629,065 patent/US7736728B2/en not_active Expired - Fee Related
- 2005-08-12 EP EP12187679A patent/EP2546388A1/en not_active Withdrawn
- 2005-08-12 JP JP2007527909A patent/JP4987717B2/ja not_active Expired - Fee Related
- 2005-08-12 WO PCT/US2005/028956 patent/WO2007001337A2/en not_active Ceased
- 2005-08-12 KR KR1020077003724A patent/KR101210859B1/ko not_active Expired - Fee Related

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