JP2009032984A5 - - Google Patents
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- Publication number
- JP2009032984A5 JP2009032984A5 JP2007196596A JP2007196596A JP2009032984A5 JP 2009032984 A5 JP2009032984 A5 JP 2009032984A5 JP 2007196596 A JP2007196596 A JP 2007196596A JP 2007196596 A JP2007196596 A JP 2007196596A JP 2009032984 A5 JP2009032984 A5 JP 2009032984A5
- Authority
- JP
- Japan
- Prior art keywords
- unit according
- resin
- protective film
- transport unit
- levitation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims 7
- 230000001681 protective effect Effects 0.000 claims 5
- 239000002184 metal Substances 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 150000002736 metal compounds Chemical class 0.000 claims 3
- 239000011347 resin Substances 0.000 claims 3
- 229920005989 resin Polymers 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 238000007747 plating Methods 0.000 claims 2
- 239000004677 Nylon Substances 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000003822 epoxy resin Substances 0.000 claims 1
- 239000007849 furan resin Substances 0.000 claims 1
- 229910021397 glassy carbon Inorganic materials 0.000 claims 1
- 229910002804 graphite Inorganic materials 0.000 claims 1
- 239000010439 graphite Substances 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 229910052749 magnesium Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229920001778 nylon Polymers 0.000 claims 1
- 239000005011 phenolic resin Substances 0.000 claims 1
- 229920000647 polyepoxide Polymers 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
- 239000011800 void material Substances 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007196596A JP2009032984A (ja) | 2007-07-27 | 2007-07-27 | 浮上搬送ユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007196596A JP2009032984A (ja) | 2007-07-27 | 2007-07-27 | 浮上搬送ユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009032984A JP2009032984A (ja) | 2009-02-12 |
| JP2009032984A5 true JP2009032984A5 (th) | 2010-09-16 |
Family
ID=40403161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007196596A Pending JP2009032984A (ja) | 2007-07-27 | 2007-07-27 | 浮上搬送ユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009032984A (th) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103035556B (zh) * | 2012-12-29 | 2015-09-02 | 山东凯胜电子股份有限公司 | 接触式智能卡模块载带气动悬浮装置 |
| CN108639758A (zh) * | 2018-07-04 | 2018-10-12 | 江苏东旭亿泰智能装备有限公司 | 一种气浮过渡装置及液晶屏输送装置 |
| CN116344419B (zh) * | 2023-02-28 | 2025-09-16 | 广东利元亨智能装备股份有限公司 | 一种硅片输送装置及输送方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4186112B2 (ja) * | 2003-09-18 | 2008-11-26 | 株式会社ダイフク | 搬送システム |
| JP4405857B2 (ja) * | 2004-06-07 | 2010-01-27 | 株式会社タンケンシールセーコウ | 吸着体 |
| JP4700430B2 (ja) * | 2005-07-26 | 2011-06-15 | シーケーディ株式会社 | 非接触支持装置の検査方法 |
-
2007
- 2007-07-27 JP JP2007196596A patent/JP2009032984A/ja active Pending
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