JP2012132811A - Apparatus and method for observing and evaluating end part of sheet material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To observe an end face of a sheet material in a width direction and a thickness direction always in a focused state so that an image to be observed is not deviated from a visual field in any direction.SOLUTION: In an apparatus 1 or a method for observing an end part of a sheet material, an observation part 3 includes first observation means 31 including a width-direction end part of a sheet material 10 in a visual field and second observation means 32 including a thickness-direction end part of the sheet material 10 in the visual field. An end part position detection part includes a width-direction end part position deviation amount detection part for detecting a width-direction position deviation amount between a reference point in an observation visual field of the first observation means and the width-direction end part of the sheet material, and a thickness-direction end part position deviation amount detection part for detecting a thickness-direction position deviation amount between a reference point in an observation field of the second observation means and the thickness-direction end part of the sheet material. A movement part includes a width-direction movement mechanism 42 capable of moving relatively in the width direction of the sheet material and a thickness-direction movement mechanism 41 capable of moving relatively in the thickness direction. A control part 9 controls the width-direction and thickness-direction movement mechanisms based on the detected position deviation amount of the end part of the sheet material.

Description

  The present invention relates to an apparatus and a method for observing and evaluating thin sheet materials used in, for example, printed wiring circuits and secondary batteries, and sheet material edge portions such as thinned semiconductor wafers and glass substrates for liquid crystals.

In recent years, with the miniaturization and weight reduction of electronic devices such as notebook computers, mobile phones, and digital cameras, thin semiconductor wafers and FPD glass substrates have been used. Semiconductor wafers and glass substrates for FPD are hard but brittle materials, so if there are scratches or chips at the edges, the strength decreases and cracks and chips are likely to occur, so the edges are chamfered. The chamfered surface may be cracked or chipped during the thinning process or the subsequent process.
Therefore, by observing the shape of the end portion, it is appropriately inspected whether there is any crack or chipping and whether the polishing process is properly performed.

  In addition, as electronic devices such as notebook computers, mobile phones, and digital cameras become smaller, lighter, and cordless, the secondary power source is compact, lightweight, high energy density, and can be repeatedly charged and discharged. Batteries are prevalent. In addition, a large-sized secondary battery is also becoming popular as a driving power source for automobiles in consideration of the environment. In these secondary batteries, a sheet material made of a metal foil serving as an electrode for a positive electrode and a negative electrode is used, and what is called an active material is coated on the surface thereof. Among the secondary batteries, particularly lithium ion batteries are inspected as appropriate because there is a risk of short circuit if there is a burr at the end of the electrode.

  As a device for inspecting the outer peripheral edge of a semiconductor wafer, a technique is disclosed that includes a sensor for detecting the edge position of a wafer and a plurality of observation cameras, and relatively moves the wafer and the camera in the radial direction of the wafer. (For example, patent document 1).

JP 2009-52966 A

  When observing the edge of the above-mentioned sheet material, it is generally observed by observation means using a camera and a lens. In order to observe minute scratches and chips, the observation magnification is increased and the observation magnification is increased. ing. However, if the lens magnification is increased in order to increase the observation magnification, the observation field of view becomes narrow and the depth of field becomes shallow. For this reason, there is a problem that when the edge of the sheet material is shifted in the width direction or the thickness direction, the possibility that the sheet material protrudes from the observation field of view or the focal position shifts increases.

  Therefore, the present invention has been made in view of the above problems, and when observing the end face of the sheet material from the width direction and the thickness direction, the image to be observed does not deviate from the field of view in any direction. An object of the present invention is to provide an observation apparatus and method capable of observing in a focused state.

In order to solve the above problems, the invention described in claim 1
A support for supporting the sheet material;
An observation section for observing an end of the sheet material;
An end position detection unit for detecting the position of the end of the sheet material observed by the observation unit;
A moving unit that relatively moves the sheet material and the observation unit;
In the sheet material end observation device, comprising a control unit that controls the moving unit so that the observation unit can observe the end of the sheet material during the relative movement,
The observation unit is
First observation means including a width direction end of the sheet material in a visual field;
Second observation means including a thickness direction end of the sheet material in the field of view,
The end position detector is
A width direction end position shift amount detection unit for detecting a width direction position shift amount between a reference point in the observation field of view of the first observation means and the width direction end portion of the sheet material;
A thickness direction end position deviation amount detection unit for detecting a thickness direction position deviation amount between a reference point in the observation field of view of the second observation means and a thickness direction end part of the sheet material;
The moving unit is
A width direction moving mechanism capable of relatively moving the sheet material and the observation portion in the width direction of the sheet material;
A thickness direction moving mechanism capable of relatively moving the sheet material and the observation portion in the thickness direction of the sheet material;
The controller is
Control the width direction movement mechanism based on the detected width direction end position displacement amount,
An observation apparatus for an end portion of a sheet material, having a function of controlling the moving mechanism in the thickness direction based on the detected displacement amount in the thickness direction end portion.

The invention described in claim 2
The first observing means and the second observing means are each connected via a connecting member,
It is an observation apparatus of the sheet | seat material edge part of Claim 1.

The invention according to claim 3
A support for supporting the sheet material;
An observation section for observing an end of the sheet material;
An end position detection unit for detecting the position of the end of the sheet material observed by the observation unit;
A moving unit that relatively moves the sheet material and the observation unit;
A control unit for controlling the moving unit so that the observation unit can observe an end of the sheet material during the relative movement;
In the evaluation device for the sheet material end, comprising an evaluation unit for evaluating the state of the sheet material end based on the respective observation information,
The observation unit is
First observation means including a width direction end of the sheet material in a visual field;
Second observation means including a thickness direction end of the sheet material in the field of view,
The end position detector is
A width direction end position shift amount detection unit for detecting a width direction position shift amount between a reference point in the observation field of view of the first observation means and the width direction end portion of the sheet material;
A thickness direction end position deviation amount detection unit for detecting a thickness direction position deviation amount between a reference point in the observation field of view of the second observation means and a thickness direction end part of the sheet material;
The moving unit is
A width direction moving mechanism capable of relatively moving the sheet material and the observation portion in the width direction of the sheet material;
A thickness direction moving mechanism capable of relatively moving the sheet material and the observation portion in the thickness direction of the sheet material;
The controller is
Control the width direction movement mechanism based on the detected width direction end position displacement amount,
The sheet material end portion evaluation apparatus has a function of controlling the thickness direction moving mechanism based on the detected thickness direction end portion position shift amount.

The invention according to claim 4
The first observing means and the second observing means are each connected via a connecting member,
It is an evaluation apparatus of the sheet | seat material edge part of Claim 3.

The invention described in claim 5
Support the sheet material at the support part,
An observation step of observing an end of the sheet material with an observation unit;
A moving step of relatively moving the sheet material and the observation unit;
In the method for observing the end of the sheet material, observing the end of the sheet material at the observation unit while relatively moving the sheet material and the observation unit,
The observation step includes
A width direction end observation step for observing the width direction end portion of the sheet material and a thickness direction end portion observation step for observing the thickness direction end portion of the sheet material;
The moving step includes
A width direction moving step of relatively moving the sheet material and the observation unit in the width direction of the sheet material;
A thickness direction moving step of relatively moving the sheet material and the observation part in the thickness direction of the sheet material,
A width direction end position detecting step for detecting a position of a width direction end of the sheet material based on observation information in an observation field of view of the first observation means;
A thickness direction end position detecting step for detecting the position of the thickness direction end of the sheet material based on observation information in the observation field of view of the second observation means;
A width for controlling the width-direction moving mechanism, using a displacement amount based on the detection result obtained in the width direction end position detecting step as a displacement amount for moving the first observation means and the second observation means in the width direction. A direction moving step;
Thickness for controlling the thickness direction moving mechanism using the displacement amount based on the detection result obtained in the thickness direction end position detection step as the displacement amount for moving the second observation means and the first observation means in the thickness direction. A method of observing the end portion of the sheet material.

The invention described in claim 6
The first observation means and the second observation means are each connected via a connecting member,
The sheet material end observation method according to claim 5, wherein the sheet material is moved in a connected state in the width direction moving step and the thickness direction moving step.

The invention described in claim 7
Support the sheet material at the support part,
An observation step of observing an end of the sheet material with an observation unit;
A moving step of relatively moving the sheet material and the observation unit;
An observation step of observing an end of the sheet material in the observation unit while relatively moving the sheet material and the observation unit;
In the evaluation method of the sheet material end portion, including an evaluation step of evaluating the state of the sheet material end portion using an evaluation unit based on each observation information obtained in the observation step,
The observation step includes
A width direction end observation step for observing the width direction end portion of the sheet material and a thickness direction end portion observation step for observing the thickness direction end portion of the sheet material;
The moving step includes
A width direction moving step of relatively moving the sheet material and the observation unit in the width direction of the sheet material;
A thickness direction moving step of relatively moving the sheet material and the observation part in the thickness direction of the sheet material,
A width direction end position detecting step for detecting a position of a width direction end of the sheet material based on observation information in an observation field of view of the first observation means;
A thickness direction end position detecting step for detecting the position of the thickness direction end of the sheet material based on observation information in the observation field of view of the second observation means;
A width for controlling the width-direction moving mechanism, using a displacement amount based on the detection result obtained in the width direction end position detecting step as a displacement amount for moving the first observation means and the second observation means in the width direction. A direction moving step;
Thickness for controlling the thickness direction moving mechanism using the displacement amount based on the detection result obtained in the thickness direction end position detection step as the displacement amount for moving the second observation means and the first observation means in the thickness direction. And a direction moving step. An evaluation method for an end portion of a sheet material.

The invention according to claim 8 provides:
The first observation means and the second observation means are each connected via a connecting member,
In the width direction moving step and the thickness direction moving step, it is moved in a connected state,
The sheet material edge evaluation method according to claim 7.

  Since the observation apparatus and method according to claim 1 and claim 3 are used, the observation image does not deviate from the field of view by mutually using information obtained by the mutual observation means without installing an expensive position sensor. The distance between the sheet material and the observation means can always be kept constant and in a focused state.

  Since the evaluation apparatus and method according to claim 5 and claim 7 are used, the observation image is not deviated from the field of view by mutually using information obtained by the observation means without installing an expensive position sensor. The distance between the sheet material and the observation means can always be kept constant, and the evaluation can be performed based on the image obtained in the focused state.

  If the observation apparatus and method according to claim 2 and claim 4 and the evaluation apparatus and method according to claim 6 and claim 8 are used, since the first and second observation means are connected, a common movement The position can be adjusted in the width direction and thickness direction of the sheet by the mechanism.

  A good observation image can be obtained even if the sheet material to be moved and conveyed is displaced or fluttered in two directions orthogonal to the conveying direction, that is, in the width direction or the thickness direction. Furthermore, evaluation with high reproducibility can be performed based on a good observation image.

It is a perspective view which shows an example of the form which embodies this invention. It is a system configuration figure showing an example of the form which embodies the present invention. It is a flowchart which shows an example of the form which embodies this invention. It is the observation image of the width direction obtained in the initial position based on this invention. It is the observation image of the thickness direction obtained in the initial position based on this invention. It is the observation image of the width direction obtained at a certain time based on this invention. It is the observation image of the thickness direction obtained at a certain time based on this invention. It is the observation image of the width direction obtained in the observation process based on this invention. It is the image of the width direction obtained in the evaluation process based on this invention. It is a burr | flash extraction image of the width direction obtained in the evaluation process based on this invention. It is a chip | tip extraction image of the width direction obtained in the evaluation process based on this invention. It is the observation image of the thickness direction obtained in the observation process based on this invention. It is the image of the thickness direction obtained in the evaluation process based on this invention. It is a burr | flash extraction image of the thickness direction obtained in the evaluation process based on this invention. It is a chip | tip extraction image of the thickness direction obtained in the evaluation process based on this invention. It is a perspective view which shows the 2nd example of the form which embodies this invention. It is a system configuration figure showing the 2nd example of the form which embodies the present invention. It is a perspective view which shows the 3rd example of the form which embodies this invention. It is a system block diagram which shows the 3rd example of the form which embodies this invention.

DESCRIPTION OF EMBODIMENTS Embodiments for carrying out the present invention will be described with reference to the drawings. In the following description, as an example of observation of the present invention, description will be given focusing on observing one side of a sheet material.
FIG. 1 is a perspective view showing an example of a form embodying the present invention.
In each figure, the three axes of the orthogonal coordinate system are X, Y, and Z, the XY plane is the horizontal plane, and the Z direction is the vertical direction. In particular, in the Z direction, the direction of the arrow is represented as the top, and the opposite direction is represented as the bottom.

  The observation apparatus 1 includes a support unit 2, an observation unit 3, an observation unit position changing mechanism 4, an observation illumination unit 5, and a control unit 9. Each component is attached via a device frame (not shown), a fixing bracket, or the like so as to be arranged at a position as shown in FIG.

  The support unit 2 includes transport rollers 21 to 24. The conveying rollers 21 to 24 are attached to the frame of the observation apparatus 1 so as to be rotatable about the longitudinal direction as a rotation axis, and can convey the sheet material 10 to be observed in the direction of the arrow 11. Driving motors 21m to 24m (not shown) are attached to the conveying rollers 21 to 24.

The observation unit 3 includes a first observation unit 31 and a second observation unit 32. Lenses 33 and 34 are attached to the observation means of the first observation means 31 and the second observation means 32, and the directions of the arrows 35 and 36 can be observed.
The range observed by the first observation means 31 is the portion indicated by the broken line 37 at the end of the sheet material 10 and is the xz plane.
The range observed by the second observation means 32 is a portion indicated by a broken line 38 at the end of the sheet material 10 and is a yz plane.

The first observation means 31 is mounted on the X-axis stage 41x and the Y-axis stage 41y and can move in the X direction and the Y direction. The second observation means 32 is mounted on the X-axis stage 42x and the Y-axis stage 42y, and can move in the X direction and the Y direction.
The X-axis stages 41x and 42x and the Y-axis stages 41y and 42y constitute the observation means position changing mechanism 4 in the present invention, and two directions (X direction and Y direction perpendicular to the Z direction as the transport direction). Direction).

  The observation illumination unit 5 is attached so as to face the observation unit 3 with the sheet material 10 interposed therebetween. Specifically, the second observation illumination 52 is the second observation illumination so that the first observation illumination 51 faces the first observation means 31 with the light 53 emitted from the first observation illumination 51. Light 54 emitted from 52 is attached so as to face the second observation means 32.

  As the first and second observation means 31 and 32, an imaging camera using a CCD, CMOS, or other imaging element can be exemplified, and the captured image can be output to the control unit 9 as a video signal. I just need it.

  Examples of the lenses 33 and 34 include those using optical elements such as lenses and mirrors, and any lenses that can form images in the observation visual fields 37 and 38 on the imaging elements of the observation means 31 and 32 may be used. .

  The X-axis stages 41x and 42x and the Y-axis stages 41y and 42y are a combination of a guide rail and a slide mechanism combined with a ball screw and a servo motor, a combination of a guide rail and a slide mechanism with a linear motor, a piezo actuator, etc. Any mechanism may be used as long as it has a mechanism capable of positioning and moving in the X and Y directions based on a control signal from the control unit 9.

  Examples of the first and second observation illuminations 51 and 52 include LEDs, halogens, incandescent lamps, fluorescent lamps, and other light emitting means. The observation means 31 and 32 can observe the end surface of the sheet material 10. As long as it can emit light including a predetermined wavelength in accordance with the sensitivity wavelength and sensitivity characteristics of the first and second observation means 31 and 32, it is sufficient.

  As will be described in detail later, the control unit 9 includes an information input unit 91, an information output unit 92, a notification unit 93, and other control devices.

  FIG. 2 is a system configuration diagram showing an example of a form embodying the present invention. As shown in FIG. 2, each device of the transport unit 2, the observation unit 3, the observation unit position changing mechanism 4, and the observation illumination unit 5 described above is connected to each device of the control unit 9.

  The control unit 9 includes a control computer 90, an information input unit 91, an information output unit 92, a notification unit 93, an information recording unit 94, and a device control unit 95 connected to each other.

Examples of the control computer 90 include a computer equipped with a numerical operation unit such as a microcomputer, a personal computer, or a workstation.
Examples of the information input unit 91 include a keyboard, a mouse, and a switch.
Examples of the information output unit 92 include an image display display and a lamp.

Examples of the reporting means 93 include a buzzer, a speaker, and a lamp that can alert the worker.
Examples of the information recording means 94 include a semiconductor recording medium, a magnetic recording medium, a magneto-optical recording medium, such as a memory card and a data disk.
Examples of the device control unit 95 include devices called programmable controllers and motion controllers.

  Video signals output from the first and second observation means 31 and 32 are input to the control computer 90 via the image processing unit 96. The image processing unit 96 is generally called a GPU (graphic processing unit), and is installed outside the control computer 90, connected to the housing of the control computer 90, or the control computer 90. The one using the image processing unit can be exemplified.

  As will be described in detail later, the observation image input to the image processing unit 96 is compared with a reference image for pass / fail judgment by a control computer 90 and is judged and evaluated whether it is within a specified value range or not. Can do.

  Connected to the device control unit 95 are drive motors 21m to 24m, X-axis stages 41x and 42x, and Y-axis stages 41y and 42y. Further, the device control unit 95 is connected with light amount adjustment units 55 and 56 for individually adjusting the light amounts of the observation lights 51 and 52. Examples of the method of adjusting the amount of illumination light in the light amount adjustment unit include a method of adjusting an applied voltage or current, or adjusting a voltage or current application time.

  The device control unit 95 is connected to other control devices (not shown), and by giving control signals to them, each device can be operated or stopped. Yes.

[End face observation flow by observation means]
FIG. 3 is a flowchart showing an example of a form embodying the present invention. In FIG. 3, a series of flows for observing the end portion of the sheet material 10 is shown for each step.

First, the sheet material 10 is placed on the transport unit 2 of the observation apparatus 1 (s101). In the apparatus configuration of the form shown in FIG.
Next, in a state where the sheet material 10 is stationary, the width direction end portion 10a of the sheet material 10 overlaps the visual field center 37c of the observation visual field 37, and the intermediate position between the thickness direction end portions 10b and 10c of the sheet material 10 is the observation visual field 38. The positions of the X-axis tables 41x and 42x and the Y-axis tables 41y and 42y are adjusted so that the first and second observation means 31 and 32 are both in focus with the visual field center 38c (s102). This position is set as the initial position of the X-axis tables 41x and 42x and the Y-axis tables 41y and 42y (FIGS. 4A and 4B).

Next, the sheet material 10 is continuously conveyed at a predetermined speed (s103).
In this state, the first observation means 31 observes the end portion including the width direction end portion 10a of the sheet material 10 (s111).
It is detected where in the width direction end portion 10a of the sheet material 10 and the observation visual field 37 and how much it is displaced in the X direction from the initial position (s112).
Based on the detected amount of deviation information, the X-axis stage 41x to which the first observation means 31 is attached and the X-axis stage 42x to which the second observation means 32 is attached are controlled (s113). The positions of the first observation means 31 and the second observation means 32 are adjusted. By doing so, the width direction end portion 10a of the sheet material 10 can be observed at the visual field center 37c of the first observation means 31, and the distance between the second observation means 32 and the width direction end portion 10a of the sheet material 10 is also appropriate. To be kept.

In parallel, the second observation means 32 observes the end portion including the thickness direction end portions 10b and 10c of the sheet material 10 (s121).
It is detected where the thickness direction ends 10b and 10c of the sheet material 10 are in the observation visual field 38 and how much they are shifted in the Y direction with respect to the initial position (s122).
Based on the detected displacement information, the Y-axis stage 41y to which the first observation means 31 is attached and the Y-axis stage 42y to which the second observation means 32 is attached are controlled (s123). The positions of the first observation means 31 and the second observation means 32 are adjusted. By doing so, an intermediate portion of the thickness direction end portions 10b, 10c of the sheet material 10 can be observed at the visual field center 38c of the second observation means 32, and the thickness direction end portions 10b of the first observation means 31 and the sheet material 10 can be observed. The distance from 10c is also kept appropriate.

  Then, evaluation is performed based on the observation image as necessary (s131).

Thereafter, it is determined whether or not the observation of the end portion of the sheet material 10 is continued (s132). If the observation is finished, the sheet material 10 is taken out (s135).
When the observation is continued, the above steps s111 to s123 are repeated.

FIG. 4A is an observation image in the width direction obtained at the initial position according to the present invention.
FIG. 4A shows a state where the sheet material 10 observed by the first observation means 31 in the above-described step s102 is reflected in the visual field 37. The visual field center 37c and the width direction end portion 10a of the sheet material 10 overlap.

FIG. 4B is an observation image in the thickness direction obtained at the initial position according to the present invention.
FIG. 4B shows a state where the sheet material 10 observed by the second observation unit 32 in the above-described step s102 is reflected in the visual field 38. The visual field center 38c and the straight line 60d indicating the intermediate position between the thickness direction end portions 10b, 10c of the sheet material 10 overlap.
4A and 4B, since the illuminations 51 and 52 are arranged so as to illuminate the sheet material 10 so as to face the first and second observation means 31 and 32, the sheet material 10 is black in the observation image. The background 10z appears white.

FIG. 4C is an observation image in the width direction obtained at a certain time according to the present invention.
FIG. 4C shows a state in which the sheet material 10 observed by the first observation means 31 in the above-described step s111 is reflected in the visual field 37. The width direction end portion 10a of the sheet material 10 is at a position shifted by Dx in the X direction with respect to the visual field center 37c.
Based on the distance information corresponding to Dx, as shown in step s123, the X-axis stage 41x to which the first observation means 31 is attached and the X-axis stage 42x to which the second observation means 32 is attached. To control.

FIG. 4D is an observation image in the thickness direction obtained at a certain time according to the present invention.
FIG. 4D shows a state in which the sheet material 10 observed by the second observation means 32 in the above-described step s121 is reflected in the visual field 38. The straight line 60d indicating the center position of the sheet material 10 is at a position shifted by Dy in the Y direction with respect to the visual field center 38c.
Based on the distance information corresponding to Dy, as shown in step s113, the Y-axis stage 41y to which the first observation means 31 is attached and the Y-axis stage 42y to which the second observation means 32 is attached To control.

[End position detection based on observation image, burr / chip extraction, evaluation flow]
The procedure for detecting the end position using the image processing unit 96 based on the image acquired in the above-described step 131 in the above-described step 131, and the burr and chip extraction and evaluation flow will be described. In this description, one image will be described for each of the images obtained from the first observation means 31 and the second observation means 32 at a certain time. Here, an example of a procedure in which the control computer 90 automatically determines whether or not the size of the burr or chip is larger than the reference value by performing image processing by binarization.

FIG. 5A is an observation image in the width direction obtained in the observation process based on the present invention.
The first observation means 31 is attached so that the horizontal direction of the visual field 37 is aligned with the width direction (that is, the X direction) of the sheet material 10 and the vertical direction of the visual field 37 is aligned with the flow direction of the sheet material 10 (that is, the Z direction). FIG. 5A shows the sheet material 10 including the width direction end portion 10a and the background 10z, which are observed in the visual field 37 of the first observation means 31. Furthermore, it is shown that the width direction end portion 10a of the sheet material 10 includes burrs 15a and chips 17a that are desired to be detected. At this time, since the illumination 51 is arranged so as to oppose the first observation means 31 and illuminate the sheet material 10, the sheet material 10 is black and the background 10z is white in the observation image.

  The vertical and horizontal dimensions of the visual field 37 of the first observation means 31 are measured in advance. At this time, for example, if the field of view 37 in the horizontal direction (X direction) is 1.024 mm and the number of pixels of the camera is 1024 pixels, the pixel resolution in the horizontal direction (X direction) is 1 μm. Further, if the field of view in the vertical direction (Z direction) is 1.024 mm and the number of pixels of the camera is 1024 pixels, the pixel resolution in the vertical direction (Z direction) is also 1 μm.

FIG. 5B is an image in the width direction obtained in the evaluation process according to the present invention.
In order to detect the position of the width direction end portion 10a of the sheet material 10, a straight line 60a that defines the width direction end portion of the sheet material is defined. The straight line 60a is subjected to correction processing such as brightness correction and contour correction on the acquired observation image, and is defined so as to approximately fit the width direction end portion 10a based on the brightness and contrast information of the image. And the said straight line 60a is made into the width direction edge part of the sheet | seat material 10, and the area | region 61A inside the said linear part is handled as a sheet | seat material part.

  The detected position information in the width direction (X direction) of the straight line 60a is handled as the width direction end position of the sheet material in the present invention, and the X direction position adjustment of the first observation means 31 and the second observation means 32 is performed. Used for. For example, in the initial state, it is assumed that the end position 10a of the sheet material observed by the first observation unit 31 overlaps the visual field center 37c of the visual field 37 and is the optimum focal position of the second observation unit 32. . Then, at a certain time, it is assumed that the straight line 60a handled as the end portion of the sheet material observed by the first observation means 31 is shifted from the visual field center 37c of the visual field 37 by the length Dx in the X direction.

If the shift amount Dx in the width direction is 100 pixels by the first observation means, Dx is 100 μm. Therefore, the control computer 90 and the control unit 95 are used to control the X-axis stage 41x to which the first observation means 31 is attached so that the first observation means 31 moves 100 μm in the X direction. The X-axis stage 42x to which the second observation means 32 is attached is controlled so that the second observation means 32 moves 100 μm in the X direction.
By doing so, even if the sheet material is displaced by 100 μm in the width direction (X direction), the first and second observation means can be controlled to move 100 μm in the width direction (X direction), The position is adjusted so that the width direction end of the sheet material can be observed at the center of the visual field of the first observation means 31, and the optimum focal position between the second observation means 32 and the width direction end of the sheet material can be maintained. .

  When detecting the burr, a portion protruding outside the region 61A in the visual field 37 is extracted as a burr protruding from the end of the sheet material.

FIG. 5C is a burr extraction image in the width direction obtained in the evaluation process based on the present invention.
The calculation is performed so that the area 61A in the field of view 37 becomes a white image, and the portion remaining as a black image is handled as a burr.

  Then, the number of pixels of the portion treated as the burr portion is calculated and obtained, and the apparent area of the burr is obtained from the pixel resolution. Then, according to the apparent area of the burr, the control computer 90 determines whether the portion is within the allowable range or outside the allowable range. Those having an area larger than the reference value are extracted large burrs 65a and are determined to be burrs. On the other hand, if the area is smaller than the reference value, the extracted small burr 65b is determined to be not a burr.

  When detecting the chipping, the recessed portion inside the area 61A in the visual field 37 is extracted as a chipping lurking at the end of the sheet material.

FIG. 5D is a chipped extracted image in the width direction obtained in the evaluation process according to the present invention.
The calculation is performed so that the region 61B outside the region 61A in the visual field 37 becomes a black image, and the portion remaining as a white image in the visual field 37 is handled as a chip.

  Then, the number of pixels of the portion treated as the missing portion is calculated and obtained, and the apparent area of the missing portion is obtained from the pixel resolution. Then, according to the apparent area of the chip, the control computer 90 determines whether the portion is within the allowable range or out of the allowable range. If the area is larger than the reference value, the extracted large chip 67a is determined to be a chip. On the other hand, the one having an area smaller than the reference value is the extracted small chip 67b, and is determined not to be a chip.

FIG. 6A is an observation image in the thickness direction obtained in the observation process based on the present invention.
The second observation means 32 is attached so that the lateral direction of the visual field 38 is aligned with the thickness direction (that is, the Y direction) of the sheet material 10 and the vertical direction of the visual field 38 is aligned with the flow direction of the sheet material 10 (that is, the Z direction). 6A shows the sheet material 10 including the thickness direction end portions 10b and 10c and the background 10z, which are observed in the visual field 38 of the second observation means 32. FIG. Further, it is shown that the thickness width direction end portions 10b and 10c of the sheet material 10 include burrs 15a and chips 17a to be detected. At this time, since the illumination 52 is arranged so as to oppose the second observation means 32 and illuminate the sheet material 10, the sheet material 10 is black and the background 10z is white in the observation image.

  The vertical and horizontal dimensions of the visual field 38 of the second observation means 32 are measured in advance. At this time, for example, if the field of view 38 in the horizontal direction (Y direction) is 1.024 mm and the number of pixels of the camera is 1024 pixels, the pixel resolution in the horizontal direction (Y direction) is 1 μm. Further, if the field of view in the vertical direction (Z direction) is 1.024 mm and the number of pixels of the camera is 1024 pixels, the pixel resolution in the vertical direction (Z direction) is also 1 μm.

FIG. 6B is an image in the thickness direction obtained in the evaluation process based on the present invention.
In order to detect the positions of the thickness direction end portions 10b and 10c of the sheet material 10, straight lines 60b and 60c are defined as the thickness direction end portions of the sheet material. The straight lines 60b and 60c are subjected to correction processing such as brightness correction and contour correction on the acquired observation image so as to be approximately fitted to the thickness direction end portions 10b and 10c based on the brightness and contrast information of the image. Stipulate. Then, the straight lines 60b and 60c are used as the end portions in the thickness direction of the sheet material 10, and a region 62A sandwiched between the straight portions is handled as a sheet material cross section. Further, the center between the straight lines 60b and 60c is the center 60d in the thickness direction of the sheet material 10.

  The detected position information in the thickness direction (Y direction) of the straight lines 60b, 60c, and 60d is handled as the end position in the width direction of the sheet material in the present invention, and the first observation means 31 and the second observation means 32 are used. Used for position adjustment in the Y direction. For example, in the initial state, the center 60d in the thickness direction of the sheet material observed by the second observation unit 32 is in a state where it overlaps the visual field center 38c of the visual field 38, and is the optimum focal position of the first observation unit 31. To do. At a certain time, it is assumed that the center 60d in the thickness direction of the sheet material observed by the second observation means 32 is located at a position shifted from the visual field center 38c of the visual field 38 by the length Dy in the Y direction.

If the displacement amount Dy in the thickness direction is 100 pixels by the second observation means, Dy is 100 μm. Therefore, the control computer 90 and the control unit 95 are used to control the Y-axis stage 41y to which the first observation means 31 is attached so that the first observation means 31 moves 100 μm in the Y direction. The Y-axis stage 42y to which the second observation means 32 is attached is controlled so that the second observation means 32 moves 100 μm in the Y direction.
By doing so, even if the sheet material is displaced by 100 μm in the thickness direction (Y direction), the first and second observation means can be controlled to move 100 μm in the thickness direction (Y direction), The position is adjusted so that the thickness direction end of the sheet material can be observed at the center of the visual field of the second observation means 32, and the optimum focal position between the first observation means 31 and the thickness direction end of the sheet material can be maintained. .

  In the case of detecting burrs, a portion protruding outside the region 62A in the visual field 38 is extracted as a burr protruding from the end of the sheet material.

FIG. 6C is a burr extraction image in the thickness direction obtained in the evaluation process based on the present invention.
Calculation is performed so that the region 62A in the field of view 38 becomes a white image, and the portion remaining as a black image is handled as a burr.

  Then, the number of pixels of the portion treated as the burr portion is calculated and obtained, and the apparent area of the burr is obtained from the pixel resolution. Then, according to the apparent area of the burr, the control computer 90 determines whether the portion is within the allowable range or outside the allowable range. Those having an area larger than the reference value are extracted large burrs 65a and are determined to be burrs. On the other hand, if the area is smaller than the reference value, the extracted small burr 65b is determined to be not a burr.

  In the case of detecting a chip, a recessed portion inside the region 62A in the visual field 38 is extracted as a chip lurking at the end of the sheet material.

FIG. 6D is a chipped extracted image in the width direction obtained in the evaluation process based on the present invention.
The calculation is performed so that the regions 62B and 62C outside the region 62A in the field of view 38 become black images, and the portion remaining as a white image in the field of view 38 is handled as a chip.

  Then, the number of pixels of the portion treated as the missing portion is calculated and obtained, and the apparent area of the missing portion is obtained from the pixel resolution. Then, according to the apparent area of the chip, the control computer 90 determines whether the portion is within the allowable range or out of the allowable range. If the area is larger than the reference value, the extracted large chip 67a is determined to be a chip. On the other hand, the one having an area smaller than the reference value is the extracted small chip 67b, and is determined not to be a chip.

  If the apparent area of the burr or chip is outside the predetermined tolerance, the production is stopped, only that part is instructed to be discarded later, or the part is later re-evaluated.

  The allowable range can be set using a limit sample based on a test result performed in advance. The limit sample is observed under the same observation conditions as described above, and an apparent area of burrs or chips that are limit samples included in the obtained observation image is obtained. The apparent area of burrs and chips extracted by the above procedure is an acceptable area reference value.

  Accordingly, the burr and chipping area extracted by observing the actual sheet edge is compared with the reference value, so that the control computer 90 can automatically determine the burr and chipping.

In the above description, the case where the area is determined and determined based on one image processing of an image observed from two directions has been described. However, a common end portion is observed from two directions, and an image of burrs or chips of corresponding parts is obtained. Can be determined by calculating the volume. Then, small burrs and chips can be extracted with high accuracy.
Moreover, although one side in the width direction of the sheet material has been described, the present invention can be similarly applied to the opposite side.

[Application example]
As shown in FIG. 1, the observation visual field 37 of the first observation means 31 and the observation visual field 38 of the second observation means 32 are attached to separate X-axis stages and Y-axis stages. In this case, since the weight of the member mounted on the X-axis stage and the Y-axis stage is lighter than that of an integrated type as shown in a second example described later, a high-speed response for position adjustment can be expected. Separately from the above embodiment, the first observation unit 31 and the second observation unit 32 may be connected to each other by a common connection member 45 and attached to the common Y-axis stage 43 and the X-axis stage 44. good.

[Second example]
FIG. 7 is a perspective view showing a second example of the embodiment embodying the present invention.
FIG. 8 is a system configuration diagram showing a second example of the embodiment embodying the present invention.
7 and 8, the individual X-axis stages 41x and 42x shown in FIGS. 1 and 2 are replaced with the X-axis stage 43, and the individual Y-axis stages 41y and 42y are replaced with the Y-axis stage 44. It shows that.
In this way, since only one X-axis stage and one Y-axis stage are required, a simple device configuration can be achieved, and costs can be reduced. In addition, since the positional relationship between the in-focus position of the first observation means 31 and the second observation means and the center of the observation field is always determined, it is likely to occur when two stages are used in the same direction. There is no need to consider the displacement in the same direction due to the difference in accuracy and its correction, and the handling becomes easy.

In the above-described embodiment, the conveyance rollers 21 to 24 are controlled via the control controller 95. However, all of them may be driven to rotate, or some of them may be free rollers. Further, the quantity may be changed depending on the layout of the apparatus, or prevention of flow in the width direction may be taken, and any form that can implement the present invention is acceptable.
The prevention of the flow prevention can be realized by making at least one of the conveying rollers 21 to 24 a stepped roller, a flanged roller, or installing a guide roller between the rollers.

  In the above-described embodiment, the transport unit 2 is configured by the transport rollers 21 to 24 and the drive motors 21m to 24. However, the number of rollers and the number of motors may be changed as appropriate. Moreover, you may employ | adopt forms other than roller conveyance. For example, a grip feed mechanism that grips the sheet material 10 and conveys the sheet 10 in a predetermined direction may be used. Further, the inner side of the end portion in the width direction of the sheet material 10 may be transported by suction holding or air blowing with a flat plate material or the like.

[Third example]
The sheet material is not limited to the case where the long sheet is conveyed in a straight line as described above, but may be a form in which a substantially circular sheet including a straight portion is included in a circular shape or a part of the outer periphery.
FIG. 9 is a perspective view showing a third example of the embodiment embodying the present invention.
FIG. 10 is a system configuration diagram showing a third example of a form embodying the present invention.
An edge observation device 1a for a circular sheet substrate includes a transport unit 2, an observation unit 3, an observation means position changing mechanism 4, an observation illumination unit 5, and a control unit 9.

  The support unit 2 includes a circular table 22a on which the circular sheet substrate 10w is placed and supported. The circular table 22a is attached on the turntable 21a, and the turntable 21a is attached on the apparatus base 20a. Therefore, the circular sheet substrate 10w can be rotated in the direction of the arrow 11w.

  A lens 33a is attached to the observation means 31a, and is attached to the connecting member 45a so that the end in the thickness direction of the circular sheet substrate 10w can be observed from the outside to the inside, that is, in the direction of the arrow 35a. A lens 34a is attached to the observation means 32a, and is attached to the connecting member 45a so that the end of the circular sheet substrate 10w can be observed from the top to the bottom, that is, in the direction of the arrow 36a. A lens 34b is attached to the observation means 32b, and is attached to the connecting member 45a so that the end of the circular sheet substrate 10w can be observed from the bottom to the top, that is, in the direction of the arrow 36b.

Coaxial epi-illuminations 51a, 52a, and 52b are attached to the lenses 33a, 34a, and 34b, and light source units 55a, 56a, and 56b are attached to the coaxial epi-illuminations 51a, 52a, and 52b, and arrows 35a, 36a, and Light is emitted in the direction of 36b, and the light reflected from the end of the circular sheet substrate 10w can be observed.
The light source units 55a, 56a, and 56b are connected to the control controller 95 and are adjusted so that the amount of light obtained by the observation means 31a, 32a, and 32b has a predetermined brightness.

  The connecting member 45a is attached to the Z-axis stage 43a, and is movable in the thickness direction of the circular sheet substrate 10w (that is, the Z direction). Furthermore, the Z-axis stage 43a is attached to the X-axis stage 41a via a connecting member, and is movable in the radial direction (that is, the X direction) of the circular sheet substrate 10w. The X-axis stage 41a is attached on the apparatus base 20a via the attachment base 46a.

  Since the edge observation apparatus 1a of the circular sheet substrate has such an apparatus configuration, as in the second example of the present invention described above, the three observation means 31a, 32a, and 32b are integrated into a circular sheet. It can move in the width direction and the thickness direction of the substrate 10w. Therefore, while rotating a substantially circular sheet material such as a semiconductor wafer once, the XZ direction moving mechanism is moved to move the observation unit so that the visual field center and the focal position of the observation means are aligned with the sheet material end portion. If the part is observed, the present invention can be applied.

Further, as described above, based on the present invention, it is possible to acquire a clear observation image that is always in a focused state and is centered on the observation field. Then, performing observation and measurement of the uneven state from the acquired observation image, comparing the measurement result with a preset standard, the presence and size of a defect consisting of a flash, a chip, a scratch or a foreign object is determined. Can be evaluated. Observation objects to be observed, measured, evaluated, etc. are paper and film sheets, metal foils, electrode sheets for lithium ion batteries coated with active materials on both sides of a metal stay, film substrates for electronic circuits, It can be applied to a thinned semiconductor wafer, a glass substrate, or the like.

DESCRIPTION OF SYMBOLS 1 Observation apparatus 2 Conveyance part 3 Observation part 4 Observation means position adjustment mechanism 5 Illumination part 6 Image processing part 9 Control part 10 Sheet material 10a Width direction edge part 10b Thickness direction edge part 10c Thickness direction edge part 10z Background 11 Arrow 15 Burr 15a Burr of desired size 15b Burr of allowable size 17 Chip 17a Chip of desired size 17b Chip of allowable size 21 Conveying roller 22 Conveying roller 23 Conveying roller 24 Conveying roller 21m Driving Motor 22m Driving motor 23m Driving motor 24m Driving motor 31 First observation means (thickness direction)
32 Second observation means (width direction)
33 Lens 34 Lens 35 Arrow 36 Arrow 37 Thickness direction observation field of view 37c Field of view center 38 Width direction observation field of view 38c Field of view center 41 Y-axis stage (thickness direction)
42 X-axis stage (width direction)
51 First Observation Illumination 52 Second Observation Illumination 53 Light-Emitting Unit 54 Light-Emitting Unit 55 Light-amount Adjusting Unit 56 Light-amount Adjusting Unit 60 Sheet Material Image after Image Processing 60a Straight Line as End in the Width Direction 60b Straight Line as End in the Thickness Direction 60c A straight line as an end in the thickness direction 60d A straight line indicating an intermediate position 61A Image processing area 61B Image processing area 62A Image processing area 62B Image processing area 62C Image processing area 65a Extracted large burr 65b Extracted small burr 67 Missing Portion 67a Extracted large chip 67b Extracted small chip 90 Control computer 91 Information input means 92 Information output means 93 Reporting means 94 Information recording means 95 Control unit 96 Image processing unit Dx Width direction deviation Dy Thickness direction Deviation amount

Claims (8)

A support for supporting the sheet material;
An observation section for observing an end of the sheet material;
An end position detection unit for detecting the position of the end of the sheet material observed by the observation unit;
A moving unit that relatively moves the sheet material and the observation unit;
In the sheet material end observation device, comprising a control unit that controls the moving unit so that the observation unit can observe the end of the sheet material during the relative movement,
The observation unit is
First observation means including a width direction end of the sheet material in a visual field;
Second observation means including a thickness direction end of the sheet material in the field of view,
The end position detector is
A width direction end position shift amount detection unit for detecting a width direction position shift amount between a reference point in the observation field of view of the first observation means and the width direction end portion of the sheet material;
A thickness direction end position deviation amount detection unit for detecting a thickness direction position deviation amount between a reference point in the observation field of view of the second observation means and a thickness direction end part of the sheet material;
The moving unit is
A width direction moving mechanism capable of relatively moving the sheet material and the observation portion in the width direction of the sheet material;
A thickness direction moving mechanism capable of relatively moving the sheet material and the observation portion in the thickness direction of the sheet material;
The controller is
Control the width direction movement mechanism based on the detected width direction end position displacement amount,
An apparatus for observing an end portion of a sheet material, which has a function of controlling the moving mechanism in the thickness direction based on the detected displacement amount in the thickness direction end portion.
The first observing means and the second observing means are each connected via a connecting member,
The observation apparatus of the edge part of a sheet | seat material of Claim 1.

A support for supporting the sheet material;
An observation section for observing an end of the sheet material;
An end position detection unit for detecting the position of the end of the sheet material observed by the observation unit;
A moving unit that relatively moves the sheet material and the observation unit;
A control unit for controlling the moving unit so that the observation unit can observe an end of the sheet material during the relative movement;
In the evaluation device for the sheet material end, comprising an evaluation unit for evaluating the state of the sheet material end based on the respective observation information,
The observation unit is
First observation means including a width direction end of the sheet material in a visual field;
Second observation means including a thickness direction end of the sheet material in the field of view,
The end position detector is
A width direction end position shift amount detection unit for detecting a width direction position shift amount between a reference point in the observation field of view of the first observation means and the width direction end portion of the sheet material;
A thickness direction end position deviation amount detection unit for detecting a thickness direction position deviation amount between a reference point in the observation field of view of the second observation means and a thickness direction end part of the sheet material;
The moving unit is
A width direction moving mechanism capable of relatively moving the sheet material and the observation portion in the width direction of the sheet material;
A thickness direction moving mechanism capable of relatively moving the sheet material and the observation portion in the thickness direction of the sheet material;
The controller is
Control the width direction movement mechanism based on the detected width direction end position displacement amount,
The sheet material end portion evaluation apparatus has a function of controlling the thickness direction movement mechanism based on the detected thickness direction end portion position shift amount.
The first observing means and the second observing means are each connected via a connecting member,
The evaluation apparatus of the edge part of a sheet | seat material of Claim 3.




Support the sheet material at the support part,
An observation step of observing an end of the sheet material with an observation unit;
A moving step of relatively moving the sheet material and the observation unit;
In the method for observing the end of the sheet material, observing the end of the sheet material at the observation unit while relatively moving the sheet material and the observation unit,
The observation step includes
A width direction end observation step for observing the width direction end portion of the sheet material and a thickness direction end portion observation step for observing the thickness direction end portion of the sheet material;
The moving step includes
A width direction moving step of relatively moving the sheet material and the observation unit in the width direction of the sheet material;
A thickness direction moving step of relatively moving the sheet material and the observation part in the thickness direction of the sheet material,
A width direction end position detecting step for detecting a position of a width direction end of the sheet material based on observation information in an observation field of view of the first observation means;
A thickness direction end position detecting step for detecting the position of the thickness direction end of the sheet material based on observation information in the observation field of view of the second observation means;
A width for controlling the width-direction moving mechanism, using a displacement amount based on the detection result obtained in the width direction end position detecting step as a displacement amount for moving the first observation means and the second observation means in the width direction. A direction moving step;
Thickness for controlling the thickness direction moving mechanism using the displacement amount based on the detection result obtained in the thickness direction end position detection step as the displacement amount for moving the second observation means and the first observation means in the thickness direction. A method of observing the end portion of the sheet material.
The first observation means and the second observation means are each connected via a connecting member,
6. The sheet material end observation method according to claim 5, wherein the sheet material is moved in a connected state in the width direction moving step and the thickness direction moving step.

Support the sheet material at the support part,
An observation step of observing an end of the sheet material with an observation unit;
A moving step of relatively moving the sheet material and the observation unit;
An observation step of observing an end of the sheet material in the observation unit while relatively moving the sheet material and the observation unit;
In the evaluation method of the sheet material end portion, including an evaluation step of evaluating the state of the sheet material end portion using an evaluation unit based on each observation information obtained in the observation step,
The observation step includes
A width direction end observation step for observing the width direction end portion of the sheet material and a thickness direction end portion observation step for observing the thickness direction end portion of the sheet material;
The moving step includes
A width direction moving step of relatively moving the sheet material and the observation unit in the width direction of the sheet material;
A thickness direction moving step of relatively moving the sheet material and the observation part in the thickness direction of the sheet material,
A width direction end position detecting step for detecting a position of a width direction end of the sheet material based on observation information in an observation field of view of the first observation means;
A thickness direction end position detecting step for detecting the position of the thickness direction end of the sheet material based on observation information in the observation field of view of the second observation means;
A width for controlling the width-direction moving mechanism, using a displacement amount based on the detection result obtained in the width direction end position detecting step as a displacement amount for moving the first observation means and the second observation means in the width direction. A direction moving step;
Thickness for controlling the thickness direction moving mechanism using the displacement amount based on the detection result obtained in the thickness direction end position detection step as the displacement amount for moving the second observation means and the first observation means in the thickness direction. A method for evaluating an end portion of a sheet material, comprising: a direction moving step.
The first observation means and the second observation means are each connected via a connecting member,
In the width direction moving step and the thickness direction moving step, it is moved in a connected state,
The evaluation method of the edge part of the sheet | seat material of Claim 7.