JP2012192544A - Imprint mold, imprint method, and imprint device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an imprint mold, an imprint method and an imprint device capable of preparing a molded product having 10 μm or less of thickness and less than four minutes of parallelism of a residual film.SOLUTION: The imprint mold includes: an imprint forming face on which a print pattern is formed; and extending faces extending from the imprint forming face. The imprint forming face is formed in a recessed part relative to the extending faces.

Description

  The present invention relates to an imprint mold for imprinting a fine pattern formed on a mold surface onto a molding target, an imprint method, and an imprint apparatus equipped with the imprint mold.

  In recent years, an imprint technique capable of forming a fine pattern has attracted attention.

  The imprint technique is a technique in which an uneven fine pattern formed on the surface of a mold is transferred by being pressed against a resin material, or the fine pattern is transferred to an energy curable resin.

  The imprint technology has a feature that a fine pattern having a high aspect ratio in an imprint region of a mold can be transferred with high accuracy and a large area at a low cost.

  According to such imprint technology, a fine pattern on the order of nanometers on the surface of the mold can be transferred to the surface of the molded object, while the overall shape of the molded product, particularly the thickness of the molded product, is determined by the overall shape of the mold. The

  Therefore, a technique for arbitrarily controlling the thickness of a molded product while adopting an imprint technique has been proposed (see, for example, Patent Document 1).

  Patent Document 1 discloses an imprint apparatus in which a spacer is attached to a mold and the thickness of a molded product is arbitrarily defined by the spacer. The height of the spacer is 2 to 1000 μm, and a molded product having a thickness equivalent to the height of the spacer can be produced.

JP-T-2006-519711

  In recent years, the imprint technology is required to have high accuracy so that the thickness of the molded product including the residual film of the imprint is 10 μm or less and the parallelism of the residual film of the molded product is less than 4 ′. . In order to satisfy such accuracy, in the case of an optical element having one side of 1 mm, it is necessary to achieve a thickness variation (parallelism) of 1 μm or less.

  On the other hand, according to the imprint mold described in Patent Document 1, since the spacer is used, the thickness of the molded product and the parallelism of the remaining film are improved as the size of the spacer is smaller.

  Therefore, the limit of the thickness of the molded product and the parallelism of the remaining film coincide with the limit of miniaturization of the spacer.

  However, according to the description in Patent Document 1, the thickness of the spacer is large, so there is a limit to reducing the thickness of the molded product and securing the parallelism.

  It is an object of the present invention to provide an imprint mold, an imprint method, and an imprint apparatus capable of producing a molded product having a thickness of 10 μm or less and a remaining film having a parallelism of less than 4 ′. To do.

  The above object is achieved by the invention described below.

1. An imprint forming surface on which a printed pattern is formed, and an extending surface extending to the imprint forming surface,
The imprint mold is characterized in that the imprint forming surface is formed in a recess with respect to the extending surface.

2. The cross section of the print pattern is exposed,
2. The imprint mold according to 1, wherein the imprint mold includes a guide that covers a cross section of the print pattern and has one surface in the same plane as the extending surface.

3. An imprint method for forming an object to be molded into the shape of the print pattern by bringing an imprint mold having an imprint forming surface on which a print pattern is formed into contact with a deformable object to be molded. And
The imprint mold includes an extending surface that extends to the imprint forming surface;
The imprint forming surface is formed in a concave portion with respect to the extending surface.

4). The cross section of the print pattern is exposed,
4. The imprinting method according to 3 above, wherein the imprinting method includes a guide that covers a cross section of the print pattern and has one surface in the same plane as the extended surface.

5. The molded body is an energy curable resin,
5. The imprinting method according to 3 or 4 above, further comprising a step of applying the object to be molded onto the print pattern by an ink jet method.

  6). 3. An imprint apparatus comprising the imprint mold as described in 1 or 2 above.

  It is possible to provide an imprint mold and an imprint apparatus capable of producing a molded product having a thickness of 10 μm or less and a remaining film having a parallelism of less than 4 ′.

It is a perspective view of the metal mold 1 for imprinting of a diffraction grating. It is sectional drawing of the metal mold | die 1 for imprinting of a diffraction grating. FIG. 2 is a perspective view of an imprint mold 1 having an extended surface 3 having a curved surface. It is a perspective view of the imprint metal mold | die 100,110 of an optical element provided with a cylindrical surface. It is a perspective view of the flat plate 11 formed in predetermined size and predetermined thickness. It is a figure which shows the mode of cutting of a diffraction grating. It is a figure which shows a mode that the diamond cutting tool 21 is linearly driven in the y-axis direction. It is a figure explaining the cutting method of the metal mold | die 100 for imprint. It is a figure which shows the relationship between the tangent T of a cylindrical surface, and the diamond bit 21. FIG. It is a flowchart of an imprint process. It is a figure which shows a mode that 2P resin 32 is apply | coated by the dispenser 31. FIG. It is a figure which shows a mode that 2P resin 32 is apply | coated by an inkjet system. It is a figure which shows the state which made the transparent glass substrate 36 contact the 2P resin 32 on the metal mold | die 1 for imprint. It is a figure which shows the state which irradiates UV light to 2P resin 32 from the back surface of the transparent glass substrate. It is a figure which shows a mode that the molded object 37 is peeled from the metal mold | die 1 for imprint. It is explanatory drawing which cut | disconnects the molded object 37 using a dicing saw. It is a perspective view of the molded object 39 separated into pieces. It is a perspective view of the molded object 40 obtained through the imprint process similarly to the above using the imprint metal mold | die 100 shown to Fig.4 (a). It is a perspective view of the cylindrical lens CL1 cut into pieces by cutting the molded body 40. FIG. It is a perspective view of the molded object 42 obtained through the imprint process similarly to the above using the imprint metal mold | die 110 shown in FIG.4 (b). It is a perspective view of cylindrical lens CL2 provided with cylindrical surface 44 which cut molded object 42 and was separated into pieces. It is a perspective view of the mirror 45 provided with the concave cylindrical reflective surface 46. FIG. It is a figure which shows the line L which cut | disconnects the cylindrical lens CL2. It is a figure which shows the state which the board | substrate 50 faces only a part of imprint formation surface 2. FIG. It is a perspective view of the imprint mold 1 provided with guides 52a and 52b on the side surfaces. It is a figure which shows a mode that the board | substrate 50 is made to face and arrange | position all over the imprint formation surface. It is a figure which shows a mode that the board | substrate 50 is arrange | positioned on the gravity direction lower side. It is a figure which shows a mode that the transparent glass substrate 36 was used for the board | substrate 50. FIG.

(First embodiment)
Hereinafter, a first embodiment will be described with reference to the drawings.

  FIG. 1 is a perspective view of a diffraction grating imprint mold 1.

  FIG. 2 is a cross-sectional view of the diffraction grating imprint mold 1.

  The imprint mold 1 includes an imprint forming surface 2 on which a print pattern is formed, and an extending surface 3 extending to the imprint forming surface 2, and the imprint forming surface 2 is an extending surface 3. Is formed in the recess of the imprint mold 1.

  The imprint forming surface 2 is a surface that contacts a molding target (not shown) and transfers a print pattern to the molding target. On the imprint forming surface 2 shown in FIG. 1, a blazed diffraction grating is formed as a print pattern. The shape of the diffraction grating is not limited to the blaze type, and may be a diffraction grating having a target shape (for example, a rectangular shape). Further, the pitch and depth of the diffraction grating may vary depending on the location, and the diffracted light may have characteristics such as a lens function.

  Each dimension abc of the imprint mold 1 shown in FIG. 1 is preferably 5 to 20 mm.

  The imprint formation surface 2 has a cross section of the print pattern of the imprint formation surface 2 exposed on the side surface 6 of the imprint mold 1.

  The imprint forming surface 2 is formed in the recessed portion of the imprint mold 1 with respect to the extending surface 3. The imprint forming surface 2 is formed in the recessed portion of the imprint mold 1 with respect to the extending surface 3. The outermost portion of the imprint forming surface 2 is imprinted on the extending surface 3. That is, it is on the mold 1 side. In FIGS. 1 and 2, the peak 5 of the peak portion of the diffraction grating is located on the imprint mold 1 side with respect to the extended surface 3. The distance e between the extended surface 3 and the vertex 5 has a positive value, and is preferably 5 μm or less.

  The pitch p and height h of the diffraction grating are 50 to 1000 nm, respectively, and the aspect ratio (p: h) is preferably about (0.5: 1) to (3: 1). The smaller the pitch p of the diffraction grating, the higher the diffraction efficiency, which is desirable. It is desirable to optimize the height h of the diffraction grating with respect to the wavelength used so that a desired diffraction efficiency can be obtained depending on the application and whether the molded product is a transmission diffraction grating or a reflection diffraction grating. .

  In addition, the size of the area of the extending surface 3 is not particularly limited. The width s of the extending surface 3 may be small. The extending surface 3 is preferably a flat surface, but may be a curved surface as shown in FIG.

  The print pattern is not limited to the diffraction grating. FIG. 4 is a perspective view of an imprint mold 100, 110 for an optical element having a cylindrical surface. 4A is a perspective view of an optical element imprint mold 100 having a concave cylindrical surface, and FIG. 4B is an optical element imprint metal mold having a convex cylindrical surface. 2 is a perspective view of a mold 110. FIG.

  If such imprint molds 100 and 110 are used, an optical element having a cylindrical surface can be molded. The optical element having a cylindrical surface is, for example, a cylindrical lens or a mirror having a cylindrical reflecting surface.

  Next, a method for manufacturing an imprint mold will be described.

  A flat plate 11 having a predetermined size and a predetermined thickness is prepared for an imprint mold (see FIG. 5), and a print pattern is formed by a cutting method.

As a material used for the imprint mold, for example, Si, SiO ₂ , SiC, Ni, NiP, Al alloy, stainless steel, or the like can be used.

  The cutting of the print pattern will be described. First, the imprint mold 1 will be described.

  When the imprint mold 1 is manufactured, a diamond tool 21 that matches the shape of the diffraction grating to be manufactured is prepared. For the production of a diffraction grating having an apex angle of θ1, as shown in FIG. 6, a diamond cutting tool 21 having an edge angle 20 of θ1 is prepared. The diamond bit 21 is rotated about the y-axis direction of the coordinate system in the drawing using a rotation driving unit (not shown). In this way, by rotating the diamond cutting tool 21 whose blade edge 20 has an angle θ1 about the y-axis direction as a rotation axis, the groove portion 22 having the same cross-sectional shape as the cutting edge 20 of the diamond cutting tool 21 is formed on the flat plate 11. It is formed. Then, when the diamond bit 21 is rotated as described above and the flat plate 11 and the diamond bit 21 are relatively moved linearly in the x-axis direction by using a linear drive unit (not shown), the groove portion 22 becomes the x-axis. It is extended in the direction and cut to the length from end to end of the flat plate 11.

  When the cutting edge 20 of the diamond cutting tool 21 moves away to a position where the flat plate 11 is not cut, the diamond cutting tool 21 is moved in the y-axis direction by a diffraction drive pitch p as shown in FIG. Similarly, while rotating the diamond cutting tool 21, the flat plate 11 and the diamond cutting tool 21 are moved relatively straight in the x-axis direction by using the linear drive unit. By performing such an operation for the number of grooves of the diffraction grating, a printed pattern of the diffraction grating can be completed.

  Next, the imprint mold 100 will be described. FIG. 8 is a diagram for explaining a method of cutting the imprint mold 100.

  To cut the cylindrical surface 101, a cutting edge having the shape of the cylindrical surface 101 can be used. However, in order to obtain high shape accuracy, a diamond cutting tool having a sharp cutting edge as shown in FIG. It is desirable to form the cylindrical surface 101 by moving the blade edge at a pitch.

  However, since there is a portion where the angle of the blade edge defines the shape, as shown in FIG. 9, the tangent T of the cylindrical surface where the flat surface 102 of the imprint forming surface 2 and the cylindrical surface 101 intersect, and the flat surface 102 A diamond cutting tool 21 having a cutting edge at the same angle as each θ2 formed by the above is adopted.

  The diamond cutting tool 21 is adopted, and the flat plate 11 and the diamond cutting tool 21 are moved relative to each other so that the tip of the diamond cutting tool 21 traces the cylindrical surface 101 and the flat portion 102 of the imprint forming surface 2. By using such a method, a print pattern of a cylindrical surface can be completed.

  The imprint mold 110 can also be produced in the same manner.

  Next, the imprint process will be described using the imprint mold 1 as an example.

  A diffraction grating is produced by imprinting using the imprint mold 1 produced above.

  FIG. 10 is a flowchart of the imprint process. FIG. 11 is a diagram illustrating a state in which the 2P resin 32 is applied by the dispenser 31.

  The object to be molded in the imprint process is an object to be formed by transferring and molding the print pattern on the imprint forming surface 2. In other words, if the print pattern has a positive shape, the molded body corresponds to the negative shape of the print pattern.

  For example, a liquid and deformable energy curable resin can be used as the molded body, or a thermoplastic resin that can be deformed by heating can be used as the molded body. The energy curable resin refers to a 2P resin (photopolymer resin) that is cured by light energy or a thermosetting resin that is cured by thermal energy.

  For example, when an energy curable resin is used, the energy curable resin is dropped on the imprint forming surface 2, the energy curable resin is brought into contact with the imprint forming surface 2, the print pattern is filled with the energy curable resin, By supplying and solidifying the energy curable resin, and peeling the energy curable resin from the imprint forming surface 2, it is possible to obtain a molded body that is an object of printing.

  When the energy curable resin is cured, if a plastic or glass substrate is stacked on the energy curable resin, a molded body that is an object of printing can be obtained in a state of being loaded on the substrate.

  When a thermoplastic resin is used for the object to be molded, the heated thermoplastic resin is brought into contact with the imprint formation surface 2 to fill the print pattern with the thermoplastic resin, and the thermoplastic resin is heated from the imprint formation surface 2 after heating. By peeling off, it is possible to obtain a molded body that is an object of printing.

  In this embodiment, 2P resin is employ | adopted for a to-be-molded body as an example, and is demonstrated.

  First, in step S1, 2P resin 32 is dropped on the imprint forming surface 2 of the imprint mold 1. UV light is generally used as the irradiation light, but visible light can also be used depending on the resin. A thermosetting resin may be used instead of the photocurable resin. As described above, as long as it is an energy curable resin, either a photocurable resin or a thermosetting resin may be used.

  A dispenser 31 is used to drop the 2P resin 32. The dripping amount of the 2P resin 32 is determined based on the volume of the molded product with reference to the shrinkage rate at the time of curing. The dropped 2P resin has a shape as shown in FIG. 11 due to surface tension.

  Further, instead of the dispenser 31, the 2P resin 32 may be applied on the imprint forming surface 2 by an ink jet method, or a micropipette (not shown) may be used.

  FIG. 12 is a diagram illustrating a state in which the 2P resin 32 is applied by an inkjet method.

  The inkjet head H includes an ink tank filled with 2P resin, an ink nozzle, and a pressure unit that generates pressure so as to eject ink from the ink nozzle. A piezoelectric system and a bubble jet (registered trademark) system can be adopted for the pressure part. The piezoelectric method is a method using a piezoelectric element, and the bubble jet (registered trademark) method is a method using an expansion pressure of gas. The ink nozzle is preferably a plurality of openings.

  By using the inkjet head H in this way, the application position and application amount of the energy curable resin can be controlled more precisely.

  Further, by using a plurality of openings in the ink nozzle, a 2P resin row P is formed as shown in FIG. 12, and a large amount of 2P resin can be applied on the imprint forming surface 2 in a short time, thereby shortening the process. Leads to Further, it is desirable to use a plurality of inkjet heads H because the energy curable resin can be applied in a shorter time.

  Next, in step 2, a transparent glass substrate 36 is prepared, and the transparent glass substrate 36 is brought into contact with the 2P resin 32. FIG. 13 is a view showing a state in which the transparent glass substrate 36 is brought into contact with the 2P resin 32 on the imprint mold 1.

  In addition, a plastic substrate may be adopted as the transparent glass substrate 36. Further, when a fine pattern is directly formed on the surface of the lens, the lens itself may be used instead of the transparent glass substrate 36.

  When the transparent glass substrate 36 is brought into contact with the 2P resin 32, the transparent glass substrate 36 may be brought into contact with its own weight, or pressure may be applied between the transparent glass substrate 36 and the imprint mold 1. good. If the viscosity of the 2P resin 32 is small, the 2P resin 32 is easily filled into the groove portion 22 of the diffraction grating by its own weight. However, when the 2P resin 32 having a high viscosity is used, an air layer may remain in the groove portion 22. . Therefore, when the 2P resin 32 having a high viscosity is used, the 2P resin 32 can be filled in the groove portion 22 of the diffraction grating by applying pressure between the transparent glass substrate 36 and the imprint mold 1. .

  Next, in step 3, the 2P resin 32 is irradiated with UV light for a predetermined time, and curing energy is supplied to the 2P resin 32 to be cured.

  FIG. 14 is a diagram illustrating a state in which the 2P resin 32 is irradiated with UV light from the back surface of the transparent glass substrate 36.

  When the 2P resin 32 is irradiated with UV light, the resin component is polymerized and solidified with the help of the function of the polymerization initiator. The 2P resin 32 is bonded to the surface of the transparent glass substrate 36. The 2P resin 32 on which the print pattern is formed forms the molded body 37.

  The light intensity of the UV light may be constant or may be changed as a function of time such as pre-cure and post-cure. The 2P resin 32 is cured from a location near the UV light source, and the UV light is continuously irradiated to a location near the cured UV light source before the location far from the UV light source is completely cured. Therefore, the molded product may be deformed or yellow turbidity may occur near the cured UV light source. Therefore, the thickness of the 2P resin 32 is preferably as thin as possible. In addition, it is preferable to reduce the thickness of the 2P resin 32 because the possibility that the 2P resin 32 is partially peeled in the peeling process of the next step is reduced.

  The imprint residual film thickness t is preferably 10 μm or less.

  Next, in step 4, the molded body 37 is peeled off. FIG. 15 is a diagram illustrating a state where the molded body 37 is peeled from the imprint mold 1.

  When the molded body 37 is peeled from the imprint mold 1, a peeling device (not shown) may be used to apply a uniform tensile pressure to the back surface of the transparent glass substrate 36. A tensile pressure may be applied to the end. Further, even if a tensile pressure is applied to the front side (or the back side) of the peripheral edge of the transparent glass substrate 36 so that the diffraction grating is gradually peeled off along the vertical direction of the grating vector of the diffraction grating. Good. By doing so, the diffraction grating is not tilted, and the negative pattern of the print pattern can be faithfully reproduced.

  Next, in step 5, the molded body 37 is cut. FIG. 16 is an explanatory diagram of cutting the molded body 37 using a dicing saw.

  The molded body 37 is fixed on a work holding table (not shown) of the dicing saw using a double-sided tape. Then, the compact 37 is moved on the y-axis while flowing a polishing liquid (not shown), and cut along the dotted line by the blade 38 rotating at high speed. After cutting, the molded body 37 is rotated 90 degrees using a rotation mechanism (not shown) provided with a work holding table, and similarly cut using a blade. FIG. 17 is a perspective view of an individual molded body 39 obtained by such a method. This is the end of the imprint process.

  As described above, the process of producing a diffraction grating by the imprint technique using the imprint mold 1 has been shown. However, the transparent glass substrate 36 and the imprint mold 1 are positioned on the opposite sides in the direction of gravity. May be. In this way, when the transparent glass substrate 36 and the imprint mold 1 are positioned on the opposite sides in the direction of gravity, the 2P resin 32 is dropped on the transparent glass substrate 36 and further imprinted thereon. The mold 1 is arranged, and the relative position between the transparent glass substrate 36 and the imprint mold 1 is changed to bring both into contact.

  In addition, a molded object can be similarly produced using the imprint molds 100 and 110 shown in FIG.

  FIG. 18 is a perspective view of a molded body 40 obtained through an imprint process using the imprint mold 100 shown in FIG. FIG. 19 is a perspective view of the cylindrical lens CL1 cut into pieces by cutting the molded body 40. FIG.

  FIG. 20 is a perspective view of a molded body 42 obtained through an imprint process using the imprint mold 110 shown in FIG. 4B in the same manner as described above. FIG. 21 is a perspective view of a cylindrical lens CL2 including a cylindrical surface 44 cut into pieces by cutting the molded body 42. FIG.

  It is also possible to produce a mirror 45 having a concave cylindrical reflecting surface based on the cylindrical lens CL2. FIG. 22 is a perspective view of a mirror 45 having a concave cylindrical reflecting surface 46.

  The mirror 45 is formed by forming a reflection film on the cylindrical surface 44 of the cylindrical lens CL <b> 2 and cutting the cylindrical surface 44 so as to be divided.

  The reflective film is preferably a metal such as aluminum or gold or a dielectric multilayer film. Such a reflective film can be easily produced by a vacuum film forming apparatus such as a vapor deposition apparatus or a sputtering apparatus. FIG. 23 is a diagram illustrating a line L for cutting the cylindrical lens CL2. For example, a dicing saw is used for cutting along the line L.

(Second Embodiment)
Next, a second embodiment will be described.

  When trying to obtain a small molded body by the imprint technique, the substrate 50 itself on which the molded body to be the molded body is loaded is small, so that the substrate 50 faces only a part of the imprint forming surface 2. It may be in a state.

  FIG. 24 is a diagram illustrating a state in which the substrate 50 faces only a part of the imprint formation surface 2.

  If the diffraction grating is to be formed so that the peak portion is along the longitudinal direction of the surface to be molded of the substrate 50, there is no place for supporting the substrate 50 on the imprint mold 1. There is a possibility that the imprint forming surface 2 may be damaged due to direct contact with the forming surface 2. Therefore, guides 52 a and 52 b are provided along the cross section of the imprint formation surface 2 on the side surface of the imprint mold 1 so that the substrate 50 does not contact the imprint formation surface 2.

  FIG. 25 is a perspective view of the imprint mold 1 provided with guides 52a and 52b on the side surfaces.

  The guides 52a and 52b are fixed to the two yz planes in the coordinate system in the drawing of the imprint mold 1 using screws 54, for example. The xy planes of the guides are arranged so as to be flush with the extending surface 3. In this way, by arranging the xy surfaces of the guides so as to be flush with the extending surface 3, a desired distance between the extending surface 3 and the imprint forming surface 2 as shown in FIG. 1. e can be set so that the imprint forming surface 2 is not damaged.

  However, when one substrate 50 is loaded on the imprint mold 1 as shown in FIG. 25, a part of the imprint formation surface 2 is exposed. In such a case, after the UV exposure, the 2P resin 32 that is not bonded to the substrate 50 remains on the imprint forming surface 2, so that the remaining 2P resin 32 needs to be removed separately. Therefore, as shown in FIG. 26, it is preferable to arrange the substrate 50 so as to face all of the imprint forming surface 2 and perform imprinting because a plurality of molded bodies can be obtained.

  Further, when the substrate 50 is disposed so as to face all of the imprint formation surface 2, the substrate 50 may be disposed on the lower side in the gravity direction as shown in FIG. Since the extended surface 3 and the xy surfaces of the guides 52a and 52b exist in the same plane, the imprint formation of the substrate 50 in which a plurality of the extended surfaces 3 and the xy surfaces of the guides 52a and 52b are arranged. It is in close contact with the surface facing the surface 2. Therefore, the value of the thickness t of the remaining film of the molded body can be accurately reproduced.

  As shown in FIG. 28, the substrate 50 may be the one that faces the entire imprint forming surface 2 like the transparent glass substrate 36 described above.

  The other processes are the same as the imprint process in the first embodiment, and thus the description thereof is omitted.

  As described above, according to the present embodiment, an imprint forming surface on which a print pattern is formed, and an extending surface extending to the imprint forming surface, the imprint forming surface being the extension Since the extension surface and the imprint formation surface are produced by cutting from one flat plate because it is formed in the concave portion with respect to the surface, the extension surface and the imprint formation surface can be produced at a desired small interval. A compact having a small residual film can be produced. Thereby, it is possible to provide an imprint mold capable of producing a molded product having a thickness of 10 μm or less and a remaining film having a parallelism of less than 4 ′.

  Further, according to another embodiment, the cross section of the printed pattern is exposed, covers the cross section of the printed pattern, and has one guide in the same plane as the extending surface. An imprint mold capable of performing an imprint process without damaging the imprint formation surface 2 even when facing only a part of the imprint formation surface can be provided.

  According to another embodiment, an imprint mold having an imprint formation surface on which a print pattern is formed is brought into contact with a deformable mold body, thereby bringing the mold body into contact with the print pattern. The imprint mold includes an extending surface that extends to the imprint forming surface, and the imprint forming surface is formed in a recess with respect to the extending surface. Therefore, since the extended surface and the imprint forming surface are manufactured by cutting from one flat plate, the extended surface and the imprint forming surface can be manufactured at a desired small interval. It is possible to produce a molded body having Thereby, it is possible to provide an imprint method capable of producing a molded product having a thickness of 10 μm or less and a remaining film having a parallelism of less than 4 ′.

  Further, according to another embodiment, the cross section of the printed pattern is exposed, covers the cross section of the printed pattern, and has one guide in the same plane as the extending surface. An imprint method that does not damage the imprint forming surface 2 even when facing only a part of the imprint forming surface can be provided.

  According to another embodiment, since the object to be molded is an energy curable resin and includes a step of applying the object to be molded on the print pattern by an ink jet method, the application position of the energy curable resin And an imprint method capable of controlling the coating amount more precisely.

  According to another embodiment, since the imprint mold is provided, a molded product having a thickness of 10 μm or less and a remaining film parallelism of less than 4 ′ can be produced. An imprint apparatus that does not damage the imprint forming surface 2 can be provided.

DESCRIPTION OF SYMBOLS 1 Imprint mold 2 Imprint formation surface 3 Extension surface 5 Vertex 6 Side surface 11 Flat plate 20 Cutting edge 21 Diamond bit 22 Groove 31 Dispenser 32 2P resin 36 Transparent glass substrate 38 Blade 37, 39, 40, 42 Molded body 44 Cylinder Surface 45 Mirror 46 Cylindrical reflecting surface 50 Substrate 54 Screw 100, 110 Imprint mold 101 Cylindrical surface 102 Plane portion 52a, 52b Guide CL1, CL2 Cylindrical lens e Interval H Inkjet head

Claims (6)

An imprint forming surface on which a printed pattern is formed, and an extending surface extending to the imprint forming surface,
The imprint mold is characterized in that the imprint forming surface is formed in a recess with respect to the extending surface. The cross section of the print pattern is exposed,
The imprint mold according to claim 1, further comprising a guide that covers a cross section of the print pattern and has one surface in the same plane as the extending surface. An imprint method for forming an object to be molded into the shape of the print pattern by bringing an imprint mold having an imprint forming surface on which a print pattern is formed into contact with a deformable object to be molded. And
The imprint mold includes an extending surface that extends to the imprint forming surface;
The imprint forming surface is formed in a concave portion with respect to the extending surface. The cross section of the print pattern is exposed,
The imprint method according to claim 3, further comprising a guide that covers a cross section of the print pattern and has one surface in the same plane as the extending surface. The molded body is an energy curable resin,
The imprint method according to claim 3, further comprising a step of applying the object to be molded onto the print pattern by an inkjet method.   An imprint apparatus comprising the imprint mold according to claim 1.

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