JP2012247207A - Electron beam irradiation system and conveyance system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely convey objects to be irradiated while bringing them into tight contact with each other in an area to be irradiated with electron beams without pressing complicated work on a user.SOLUTION: An electron beam irradiation system 100 comprises an electron beam irradiation device 200, a first conveyance device 310, a second conveyance device 320, a feed-out section 370 and a control device 390. The electron beam irradiation device 200 irradiates an object W to be irradiated with electron beams. The first conveyance device 310 passes the object to be irradiated through an irradiation region R in which the object to be irradiated is irradiated with electron beams by the electron beam irradiation device. The second conveyance device 320 is provided at an upstream side of the first conveyance device in a conveyance direction of the object to be irradiated, conveys the object to be irradiated at a conveyance velocity V2 higher than a conveyance velocity V1 of the first conveyance device, and carries out the object to be irradiated to the first conveyance device. The feed-out section 370 feeds out the object to be irradiated to the second conveyance device. The control device 390 controls the conveyance speed V1, the conveyance speed V2 and a feed interval PT in accordance with the object to be irradiated.

Description

  The present invention relates to an electron beam irradiation system and a transport system for irradiating an object with an electron beam.

  Conventionally, electron beam irradiation apparatuses (for example, Patent Documents 1 and 2) used in various fields such as sterilization of medical instruments and foods, cross-linking and curing of resins, and removal of lesions such as malignant tumors are known. Yes. Such an electron beam irradiation apparatus is equipped with a cathode electrode and an accelerator. By supplying electric power to the cathode electrode, the electron beam is emitted from the cathode electrode, and the electron beam is accelerated by the accelerator to irradiate the irradiated object. To do. When irradiating an irradiation object with an electron beam using an electron beam irradiation apparatus, the irradiation object is continuously conveyed to an area (irradiation area) where the irradiation object is irradiated with an electron beam by a transport device such as a conveyor. Often transported to

  FIG. 8 is an explanatory diagram for explaining a conventional transport device 20. The electron beam irradiation apparatus 10 accelerates and emits the electron beam, and irradiates the irradiated object W with the electron beam in the irradiation region R. Here, the irradiated object W is placed on the conveyor 22 or the like constituting the transport device 20 and transported to the irradiation region R. At this time, the irradiated object W is placed on the conveyor 22 while being separated from the preceding and following irradiated objects W by a predetermined interval S. Then, between the irradiated object W and the irradiated object W, the irradiated object W is not irradiated with the electron beam, and the conveyor 22 is irradiated with the electron beam, so that the electron beam is wasted.

  Therefore, the first transport device that transports the irradiated object W to the irradiation region R and the upstream side of the first transport device in the transport direction of the irradiated object W transport the irradiated object W and the first transport device. The apparatus is provided with a second transport device that carries the irradiated object W out, and the transport speed of the first transport device is slower than the transport speed of the second transport device, so that the first transport device is irradiated A technique for closely conveying an object W is disclosed (for example, Patent Document 3).

JP 2001-349998 A JP 2003-139898 A JP 2002-6098 A

  In the technique of Patent Document 3 described above, since the irradiated object W is conveyed in close contact with the preceding and following irradiated objects W in the irradiation region R, it is possible to reduce unnecessary irradiation of electron beams. However, the length of the irradiation object W and the irradiation time necessary for sterilization of the irradiation object W are different for each irradiation object W. Therefore, in order to appropriately bring the irradiated objects W into close contact with each other in the irradiation region R using the technique of Patent Document 3, the transfer speeds of the first transfer device and the second transfer device according to the irradiated object W. Therefore, the user has to change manually as necessary, and the user is forced to perform complicated work.

  Here, it is also conceivable that the objects to be irradiated W are brought into close contact with each other when the objects to be irradiated W are placed on the transport device. However, in order to prevent leakage of radiation emitted by electron beam irradiation, the transport device that transports the object to be irradiated W has to take a complicated transport path in the building, and also transports the object to be irradiated W. The distance will be longer. For this reason, the irradiated object W may be clogged in the middle of conveyance, and normal conveyance may not be performed, or the number of irradiated objects W may not be accurately counted, and the number management may not be performed.

  Therefore, in view of such a problem, the present invention devised a first transport device, a second transport device, and a delivery unit that sends the irradiated material to the second transport device according to the irradiated object, An object of the present invention is to provide an electron beam irradiation system and a conveyance system that can reliably convey objects to be irradiated in close contact with each other in an electron beam irradiation region without forcing a user to perform complicated operations.

  In order to solve the above problems, an electron beam irradiation system according to the present invention includes an electron beam irradiation device that irradiates an irradiation object with an electron beam, and an object to be irradiated by the electron beam irradiation device. A first transport device that passes an irradiated object through an irradiation region that is an area irradiated with a line, and an upstream side of the first transport device in the transport direction of the irradiated object, the transport speed of the first transport device Depending on the object to be irradiated, the second conveying apparatus that conveys the object to be irradiated to the first conveying apparatus, the sending unit that sends the object to the second conveying apparatus, And a control device for controlling the transport speed of the first transport device, the transport speed of the second transport device, and the delivery interval of the delivery section.

  The control device may maintain the transport speed of the first transport device and the transport speed of the second transport device at a predetermined ratio.

  The first transport device includes a first transport body that transports the object to be irradiated, and the second transport device includes a second transport body that transports the object to be irradiated, and includes the first transport body and the first transport body. The two transport bodies are connected to one motor whose rotational speed is controlled by the control device, and the control device rotates one motor to thereby transport the first transport device, the second transport device, and the second transport device. May be different.

  In order to solve the above problems, the transport system of the present invention is a transport system that transports an object to be irradiated to an electron beam irradiation apparatus that irradiates the object with an electron beam, and transports the object to be irradiated, A first transport device that passes the irradiated object through an irradiation region that is an area where the electron beam is irradiated onto the irradiated object by the electron beam irradiation device; and an upstream side of the first transport device in the transport direction of the irradiated object. The object to be irradiated is transported at a transport speed faster than the transport speed of the first transport apparatus, the second transport apparatus for unloading the object to be transported to the first transport apparatus, and the object to be irradiated to the second transport apparatus. A delivery unit and a control device for controlling the delivery speed of the first delivery device, the delivery speed of the second delivery device, and the delivery interval of the delivery unit according to the object to be irradiated are provided.

  According to the present invention, depending on the object to be irradiated, the first transfer device, the second transfer device, and the sending unit for sending the irradiation object to the second transfer device can be devised, so that the user can perform complicated work. Without being forced, the irradiated objects can be reliably transported in the electron beam irradiation region. Thus, useless irradiation of electron beams can be reduced.

It is an external view of an electron beam irradiation system. It is the figure which looked at the electron beam irradiation system from the Z-axis direction in FIG. It is explanatory drawing for demonstrating a conveyance system. It is explanatory drawing for demonstrating the calculation process of the transmission interval by a control apparatus. It is a perspective view of the 1st conveyance device, the 2nd conveyance device, and the 3rd conveyance device. It is a perspective view for demonstrating the 1st conveyance body in a 1st conveying apparatus. It is explanatory drawing for demonstrating the raising / lowering mechanism of a 1st conveying apparatus. It is explanatory drawing for demonstrating the conventional conveying apparatus.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for facilitating the understanding of the invention, and do not limit the present invention unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted, and elements not directly related to the present invention are not illustrated. To do.

(Electron beam irradiation system 100)
1 is an external perspective view of the electron beam irradiation system 100, and FIG. 2 is a view of the electron beam irradiation system 100 viewed from the Z-axis direction in FIG. In FIG. 1, a support mechanism for supporting the electron beam irradiation apparatus 200 is omitted for easy understanding.

  As shown in FIGS. 1 and 2, the electron beam irradiation system 100 includes an electron beam irradiation apparatus 200 and a transfer system 300.

(Electron beam irradiation apparatus 200)
The electron beam irradiation apparatus 200 includes a cathode power source 104, an electron gun 110, a high frequency unit 112, a waveguide 114, a prebuncher 116, an accelerator 118, and a scan horn 120. The electron gun 110, the prebuncher 116, the accelerator 118, and the scan horn 120 are continuous in an internal space (vacuum chamber). The internal space is changed from a high vacuum state to an ultrahigh vacuum state by a vacuum pump 102 such as an ion pump. (For example, 10E-5 Pa or less).

  In the electron beam irradiation apparatus 200, the thermoelectrons emitted from the electron gun 110 are accelerated by the prebuncher 116 and the accelerator 118, pass through the scan horn 120, and travel toward the irradiation object W transported by the transport system 300. 1 is irradiated in the Y-axis direction. Hereinafter, each functional unit of the electron beam irradiation apparatus 200 will be described in detail.

(Electron gun 110)
The electron gun 110 is, for example, a triode electron gun, and heats the cathode electrode with electric power supplied from a cathode power supply (AC power supply) 104, and the high voltage grid voltage (extraction voltage) applied in a pulsed manner causes electrons to be emitted. Release the line.

(High-frequency unit 112, waveguide 114)
The high-frequency unit 112 includes a high-frequency amplifier 112a configured by a klystron or the like and a high-frequency power source (power supply unit) 112b that supplies power to the high-frequency amplifier 112a. For example, 3 GHz pulsed high frequency power corresponding to the S band is supplied. The waveguide 114 supplies a high-frequency voltage amplified and supplied from the high-frequency amplifier 112a to the accelerator 118 through RF windows 114a and 114b made of ceramic or the like. An insulating gas such as sulfur hexafluoride (SF ₆ ) is filled between the RF window 114a and the RF window 114b in the waveguide 114, and the waveguide is amplified by the voltage amplified and output by the high-frequency amplifier 112a. The situation where 114 is discharged is avoided. The RF windows 114a and 114b serve as boundaries that separate the SF ₆ and the vacuum.

(Prebuncha 116)
The prebuncher 116 is provided between the electron gun 110 and the accelerator 118 and connected to the high frequency unit 112 through the waveguide 114. The prebuncher 116 bunches the electron beam incident from the electron gun 110 (density compression (velocity modulation)) and sends the electron beam to the accelerator 118. More specifically, a high-frequency electric field is formed in the prebuncher 116 by a high-frequency voltage supplied from the high-frequency amplifier 112a, and the electron beam that has passed through the prebuncher 116 is bunched and enters the accelerator 118. By bunching the electron beam with the prebuncher 116, the dispersion of the energy of the electron beam accelerated by the accelerator 118 can be reduced, and the uniformity of the energy of the electron beam can be improved.

  Here, the electron beam is efficiently accelerated by the accelerator 118 only when the incident timing of the electron beam compressed by the prebuncher 116 to the accelerator 118 is synchronized with the high-frequency positive phase in the accelerator 118. Therefore, in order to adjust the incident timing of the electron beam from the prebuncher 116 to the accelerator 118, the high frequency introduction unit 116a of the prebuncher 116 is provided with a phase adjusting unit (not shown). In addition, since the compression rate of the electron beam (the length of the bunched electron beam) also affects the acceleration efficiency by the accelerator 118, that is, the shorter the electron beam length, the higher the acceleration efficiency. Therefore, in order to adjust the length of the electron beam by adjusting the strength of the high frequency to be supplied, the high frequency introducing section 116a of the prebuncher 116 is provided with an attenuation (attenuator) means (not shown).

(Accelerator 118)
The accelerator 118 is made of stainless steel (for example, SUS) or the like, and has a plurality of acceleration spaces inside. When a high-frequency voltage (for example, 3 GHz) is supplied from the high-frequency amplifier 112a, the plurality of acceleration spaces of the accelerator 118 function as a spatial resonator, and an electric field that changes with time is generated in the spatial resonator. Then, the electron beam compressed by the prebuncher 116 is accelerated by this time-varying electric field.

  Here, the frequency of the voltage supplied from the high-frequency amplifier 112a and the distance of the acceleration space are designed so that the speed of the electron beam and the positive charging timing (become a positive phase) in the acceleration space are synchronized. The electron beam is gradually accelerated in the accelerator 118, and finally accelerated to, for example, about 10 MeV and is incident on the scan horn 120.

  In this case, a standing wave type linear accelerator is used as the accelerator 118. However, a traveling wave type linear accelerator or a circular accelerator such as a synchrotron or a cyclotron is used as long as electrons can be accelerated. You can also

(Scan horn 120)
The scan horn 120 is formed of stainless steel (for example, SUS) or the like, and its internal space is connected to the accelerator 118. The scan electromagnet 122 provided near the exit of the accelerator 118 and the end facing the end connected to the accelerator 118 And an electron beam extraction unit 124 provided in the unit.

  The scanning electromagnet 122 scans (scans) the electron beam incident from the accelerator 118 in the horizontal direction (X-axis direction in FIG. 1). Since the traveling direction of the electron beam is the vertical direction (Y-axis direction in FIG. 1), the scanning electromagnet 122 scans the electron beam traveling in the vertical direction in the horizontal direction, so that the irradiated object W having a width in the horizontal direction. It is possible to reliably irradiate an electron beam.

  The electron beam extraction portion 124 is made of, for example, a titanium (Ti) foil having a thickness of about 50 μm, and serves as a boundary that separates the internal space from the atmosphere. The electron beam emitted from the electron beam extraction unit 124 to the atmosphere is irradiated to the irradiation object W.

  In this way, the electron beam emitted by the electron gun 110 is accelerated by the accelerator 118 and is irradiated to the irradiation object W through the electron beam extraction unit 124.

  By the way, in the irradiation region R, when the irradiated object W is transported away from the preceding and following irradiated objects W, an electron beam is irradiated between the irradiated object W and the irradiated object W, and the electron beam is generated. It was supposed to be consumed in vain.

  Hereinafter, the conveyance system 300 capable of avoiding a situation in which an electron beam is wasted by transporting the irradiated objects W in close contact with each other in the irradiation region R will be described in detail.

(Conveyance system 300)
FIG. 3 is an explanatory diagram for explaining the transport system 300, and is a view of the transport system 300 viewed from the Y-axis direction in FIG. As shown in FIG. 3, the transport system 300 includes a first transport device 310, a second transport device 320, a third transport device 330, a fourth transport device 340, a fifth transport device 350, and a sixth transport device. The apparatus 360, the sending unit 370, the irradiated object determination unit 380, the counter 382, the passage sensor 384, and the control device 390 are configured to convey the irradiated object W to the irradiation region R or perform irradiation. The irradiated object W is passed through the irradiation region R by unloading the irradiated object W from the region R. Here, the 1st conveyance apparatus 310, the 2nd conveyance apparatus 320, the 3rd conveyance apparatus 330, the 4th conveyance apparatus 340, the 5th conveyance apparatus 350, the 6th conveyance apparatus 360 is comprised with a conveyor, for example, and is irradiated It transports with W mounted.

  For example, the first transport device 310 transports the irradiated object W at a transport speed V1 of 10 to 200 mm / sec and allows the irradiated object W to pass through the irradiation region R. The second transport device 320 is provided on the upstream side of the first transport device 310 in the transport direction of the irradiated object W, transports the irradiated object W, and unloads the irradiated material W to the first transport device 310. In the present embodiment, the transport speed V2 of the second transport device 320 is controlled by a control device 390 described later so as to be faster than the transport speed V1 of the first transport device 310. Further, the control device 390 maintains the transport speed V1 and the transport speed V2 at a predetermined ratio. For example, the control device 390 performs control so that the transport speed V2 is 1.2 times the transport speed V1. A mechanism for maintaining the transport speed V1 and the transport speed V2 at a predetermined ratio by the control device 390 will be described in detail later.

  The third transport device 330 is provided downstream of the first transport device 310 in the transport direction of the irradiated object W, and transports the irradiated object W carried out of the first transport device 310. The 4th conveyance apparatus 340 conveys the to-be-irradiated object W carried in from the carrying-in entrance, and carries the to-be-irradiated object W to the sending part 370 mentioned later. The fifth transport device 350 transports the irradiated object W unloaded from the third transport device 330 and unloads the irradiated object W to the sixth transport device 360. The sixth transport device 360 transports the irradiated object W carried out of the fifth transport device 350 and unloads the irradiated object W to the carry-out port. In the present embodiment, the transport speed V3 of the third transport device 330, the transport speed V4 of the fourth transport device 340, the transport speed V5 of the fifth transport device 350, and the transport speed V6 of the sixth transport device 360 are: It is fixed at a speed substantially equal to or sufficiently higher than the transport speed V1. Moreover, the 4th conveying apparatus 340 is controlled by the control apparatus 390 so that it may stop or operate | work according to the presence or absence of the to-be-irradiated object W detected by the passage sensor 384.

  The sending unit 370 is configured by a pusher, for example, and sends (extrudes) the irradiated object W carried out from the fourth carrying device 340 to the second carrying device 320. The irradiated object determination unit 380 detects the length L0 of the irradiated object W in the transport direction. The counter 382 counts the irradiated object W that is transported to the third transport device 330. That is, the counter 382 counts the number of irradiated objects W that pass through the irradiation region R and are sterilized with an electron beam in the irradiation region R.

  The control device 390 manages and controls the entire transport system 300 by a semiconductor integrated circuit including a central processing unit (CPU), a ROM storing programs, a RAM as a work area, and the like. Here, the control device 390 controls the transport speed V1 of the first transport device 310, the transport speed V2 of the second transport device 320, and the sending interval PT of the sending unit 370.

  More specifically, the control device 390 first determines the output (for example, 10 MeV, 500 pps) of the electron beam emitted by the electron beam irradiation device 200, the irradiation amount necessary for the irradiation object W, and the irradiation object determination. The conveyance speed V1 is determined based on the length L0 of the irradiation object W detected by the unit 380. Subsequently, the control device 390 sends the irradiated object W so that the irradiated object W is closely conveyed in the first conveying device 310 according to the length L0 of the irradiated object W detected by the irradiated object determination unit 380. The interval PT is calculated.

  FIG. 4 is an explanatory diagram for explaining the calculation process of the sending interval PT by the control device 390. At time t1 shown in FIG. 4A, the irradiated object W1 starts to be placed on the first transfer apparatus 310 from the second transfer apparatus 320, and then at the time t2 shown in FIG. From the second transport device 320 to the first transport device 310, until the irradiated object W1 is placed on the first transport device 310 from the second transport device 320 at time t3 shown in FIG. It takes L0 / V1sec. That is, L0 / V1sec from time t1 to time t3.

  Then, at time t3, as soon as the irradiated object W1 is placed on the first transfer apparatus 310 from the second transfer apparatus 320, the irradiated object W2 transferred to the irradiation region R next to the irradiated object W1 is. If the second transport device 320 starts to be placed on the first transport device 310, the first transport device 310 can transport the irradiated object W1 and the irradiated object W2 in close contact with each other.

  That is, if the irradiated object W is sent out at a time interval L0 / Vmin obtained by dividing the length L0 of the irradiated object W by the slowest conveying speed Vmin in the conveying system constituted by the conveying system 300, the conveying speed Vmin. In the transport device, the irradiated object W is transported closely. Note that if the irradiated object W is sent out at an interval shorter than L0 / Vmin, the irradiated object W is clogged in the conveying device (here, the first conveying device 310) having the conveying speed Vmin, and a desired conveying speed is obtained. I can't. In addition, when the irradiated objects W are sent out at intervals longer than L0 / Vmin, the intervals between the irradiated objects W are separated in the transfer device having the transfer speed Vmin.

  Accordingly, the control device 390 is configured so that the object to be irradiated W2 sent to the sending unit 370 begins to be placed on the first transport device 310 from the second transport device 320 after L0 / V1 sec. (Sec) is calculated. That is, the irradiated object W is sent out every L0 / V1 sec.

  In addition to the control of the sending process by the sending unit 370, the control device 390 includes the first transport device 310, the second transport device 320, the third transport device 330, the fourth transport device 340, the fifth transport device 350, The conveyance processing by the sixth conveyance device 360 is controlled.

  Subsequently, the conveyance processing of the first conveyance device 310, the second conveyance device 320, the third conveyance device 330, the fourth conveyance device 340, the fifth conveyance device 350, and the sixth conveyance device 360 by the control device 390 will be described.

  FIG. 5 is a perspective view of the first transfer device 310, the second transfer device 320, and the third transfer device 330. FIG. 6 is a perspective view for explaining the first transfer body 312 in the first transfer device 310. FIG.

  As shown in FIG. 5, the first transport device 310 includes a first transport body 312 that transports the irradiated object W, first gears 314 a and 314 b that drive the first transport body 312, a first gear 314 a, It includes a chain belt 316 that meshes with one gear 314b.

  More specifically, as shown in FIG. 6, the first transport body 312 of the first transport device 310 has a width in the transport direction (Z-axis direction in FIG. 6) that is vertical (Y-axis direction in FIG. 6). A plate-shaped slat portion 312a made of stainless steel and a support portion 312b that supports the slat portion 312a are formed. The width in the transport direction of the slat portion 312a is, for example, 3 mm, the width in the vertical direction is, for example, 15 mm, and the length in the X-axis direction in FIG. 6 is, for example, 700 mm. The distance between the slat portions 312a (the distance in the Z-axis direction in FIG. 6) is, for example, 25 mm.

  Thus, in the slat part 312a of the 1st conveyance body 312 which passes the irradiation area | region R, by forming the area of the surface (XZ plane in FIG. 6) irradiated with an electron beam small, by electron beam irradiation The temperature rise of the slat part 312a can be reduced. Therefore, it is possible to avoid a situation where the slat portion 312a is deformed or corroded.

  Note that a chain belt (not shown) that meshes with the first gears 314a and 314b is connected to both ends of the support portion 312b, and the chain belt moves as the first gears 314a and 314b rotate. The slat part 312a and the support part 312b move in the transport direction.

  Returning to FIG. 5, the second conveyance device 320 is configured by a conveyor or the like, and includes a second conveyance body 322 that conveys the irradiation object W, and second gears 324 a and 324 b that drive the second conveyance body 322. The chain belt 326 meshes with the second gear 324a and the second gear 324b. Here, the number of teeth of the second gear 324a and the second gear 324b is substantially equal, and the reduction ratio of the first gear 314a and the second gear 324b is 1.2: 1 (the teeth of the first gear 314a). Number / number of teeth of the second gear 324b = 1.2).

  Note that chain belts (not shown) that mesh with the second gears 324a and 324b are connected to both ends of the second transport body 322, and the chain belts move as the second gears 324a and 324b rotate. At the same time, the second transport body 322 moves in the transport direction.

  The third transport device 330 is configured by a conveyor or the like, and includes a third transport body 332 that transports the irradiated object W, third gears 334a and 334b that drive the third transport body 332, a third gear 334a, and a third gear. A chain belt 336 that meshes with the gear 334b is included. Here, the number of teeth of the third gear 334a and the third gear 334b is substantially equal, and the number of teeth of the third gear 334a is substantially equal to the number of teeth of the second gear 324b. That is, the reduction ratio between the first gear 314b and the third gear 334a is 1.2: 1 (the number of teeth of the first gear 314b / the number of teeth of the third gear 334a = 1.2).

  Note that chain belts (not shown) that mesh with the third gears 334a and 334b are connected to both ends of the third transport body 332, and the chain belts move as the third gears 334a and 334b rotate. At the same time, the third transport body 332 moves in the transport direction.

  Further, the transport system 300 includes a chain belt 410a that meshes the first gear 314a and the second gear 324b, a chain belt 410b that meshes the first gear 314b and the third gear 334a, and a first gear 314a. A motor (not shown) that rotates is provided.

  Therefore, when the first gear 314a is rotated by the motor, the first gear 314b is rotated through the chain belt 316, whereby the chain belt (not shown) connected to the support portion 312b is moved and the first transport body 312 is driven. The When the first gear 314a is rotated by the rotation of the motor, the second gear 324b is rotated through the chain belt 410a, and the rotation of the second gear 324b is transmitted to the second gear 324a through the chain belt 326. As a result, a chain belt (not shown) connected to both ends of the second transport body 322 rotates to drive the second transport body 322. Further, when the first gear 314b is rotated by the rotation of the motor, the third gear 334a is rotated through the chain belt 410b, and the rotation of the third gear 334a is transmitted to the third gear 334b through the chain belt 336. As a result, a chain belt (not shown) connected to both ends of the third transport body 332 rotates and the third transport body 332 is driven.

  In other words, the three transport bodies of the first transport body 312, the second transport body 322, and the third transport body 332 can be driven only by the motor rotating the first gear 314a.

  Further, as described above, the number of teeth of the first gear 314a and the number of teeth of the second gear 324b are made different, and the number of teeth of the first gear 314b and the number of teeth of the third gear 334a are made different. Thus, the motor can cause the transport speed V1 of the first transport body 312 to differ from the transport speed V2 of the second transport body 322 and the transport speed V3 of the third transport body 332 simply by rotating the first gear 314a. it can.

  Further, since the number of teeth of the first gear 314a, 314b, the second gear 324a, 324b, the third gear 334a, 334b is always constant, the transport speeds V2 and V3 have a predetermined ratio with respect to the transport speed V1. The relationship will be maintained. Here, the number of teeth of the first gear 314a and the first gear 314b, the number of teeth of the second gear 324a and the second gear 324b, and the number of teeth of the third gear 334a and the third gear 334b are equal to each other, and the first gear 314a Is 1.2 times the number of teeth of the second gear 324b, and the number of teeth of the first gear 314b is 1.2 times the number of teeth of the third gear 334a. The speed V3 is 1.2 times the transport speed V1. Therefore, the control device 390 can control the transport speed V2 and the transport speed V3 only by controlling the rotation speed of the motor to control the transport speed V1.

  As described above, each of the first transport device 310, the second transport device 320, and the third transport device 330 includes a gear, and the gears that drive the transport bodies are engaged with each other by the chain belts 410a and 410b. If one of the gears is rotated by a motor, all of the first transport body 312, the second transport body 322, and the third transport body 332 can be driven. Therefore, the drive sources of the first transfer device 310, the second transfer device 320, and the third transfer device 330 can be combined into one, and the cost of the entire transfer system 300 can be reduced.

  Further, the control device 390 controls the transport speed V4, the transport speed V5, and the transport speed V6 so as to be substantially equal to the transport speed V2.

  As described above, the irradiation object W is irradiated in the irradiation region R by making the conveyance speed V1 of the first conveyance device 310, which is a conveyance device that passes the irradiation object W through the irradiation region R, slower than the conveyance speed V2. They can be transported closely. Thereby, the electron beam which is not irradiated to the to-be-irradiated object W can be reduced.

  Further, the control device 390 calculates the sending interval PT of the sending unit 370 based on the conveyance speed V1 determined by the irradiated object W detected by the irradiated object determination unit 380, and based on the calculated sending interval PT. The sending unit 370 is caused to send the irradiated object W. Since each of the first transport device 310, the second transport device 320, and the third transport device 330 includes a gear and the gears that drive the transport bodies are engaged with each other by the chain belts 410a and 410b, the control device The conveyance speed V1, the conveyance speed V2, and the conveyance speed V3 can be controlled only by controlling the number of rotations of the motor for rotating the first gear 314a by the 390. Therefore, the user can appropriately convey the object W in close contact with the irradiation region R without setting the conveyance speed V1, the conveyance speed V2, and the delivery interval PT for each object W.

  Furthermore, the irradiation object W conveyed closely by the 1st conveying apparatus 310 can be separated by making conveyance speed V3 faster than conveyance speed V1. Thereby, in the 3rd conveyance apparatus 330, the counter 382 can count the irradiated object W reliably, and the electron beam is irradiated in the irradiation area | region R, and the number management of the sterilized irradiated object W is performed reliably. It becomes possible to do.

  By the way, as described above, in the present embodiment, the electron beam is irradiated from the electron beam irradiation apparatus 200 in the vertical downward direction, and at this time, it is scanned in the horizontal direction by the scan horn 120 (see FIG. 2). Therefore, the electron beam is irradiated in the direction of the Y axis in FIG. Here, if the length in the direction (X-axis direction in FIG. 2) orthogonal to the conveyance direction of the irradiation object W is made to coincide with the length in the X-axis direction in FIG. Thus, there is no electron beam that is not irradiated on the laser beam, and unnecessary electron beam irradiation can be further reduced.

  Therefore, the first transport device 310 of the present embodiment includes an elevating mechanism. FIG. 7 is an explanatory diagram for explaining the lifting mechanism 420 of the first transport device 310. As shown in FIG. 7, the first transport device 310 is provided with a lifting mechanism 420 that lifts and lowers the first transport body 312. In the normal state shown in FIG. 7A, the lifting mechanism 420 is substantially the same in height in the vertical direction (Y-axis direction in FIG. 7) as the first transport body 312 and the second transport body 322 and the third transport body 332. Therefore, the height of the 1st conveyance body 312 is maintained so that it may become equal.

  Here, for example, the length in the direction (X-axis direction in FIG. 7) perpendicular to the conveyance direction of the irradiation object W detected by the irradiation-object determining unit 380 is the irradiation region R in the X-axis direction in FIG. 7B, the control device 390 drives the elevating mechanism 420 to move the first transport body 312 vertically upward, as shown in FIG. 7B. Then, the distance between the object to be irradiated W and the electron beam extraction unit 124 becomes short, and the length in the direction orthogonal to the transport direction of the object to be irradiated W approaches the width of the irradiation region R in the X-axis direction in FIG. (Or match). Here, the chain belts 410a and 410b mesh with the first gears 314a and 314b so as to have a play that allows the first transport body 312 to be lifted and lowered by the lifting mechanism 420.

  Thus, the 1st conveyance apparatus 310 is provided with the raising / lowering mechanism 420, and the control apparatus 390 controls the raising / lowering mechanism 420 according to the length of the direction orthogonal to the conveyance direction of the to-be-irradiated object W, and the 1st conveyance body 312. Raise and lower. Thereby, the length of the direction orthogonal to the conveyance direction of the irradiation object W and the width of the irradiation region R in the X-axis direction in FIG. 7 can be made to coincide with each other. Further reduction is possible.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this embodiment. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Is done.

  For example, in the above-described embodiment, the irradiation object determination unit 380 that detects the length L0 of the irradiation object W is provided. However, even if the user inputs the length L0 of the irradiation object W to the control device 390. Good. Further, in the above-described embodiment, the irradiation object determination unit 380 detects the length L0 of the irradiation object R in the transport direction in the irradiation region R, but the control device 390 determines the type of the irradiation object W. In addition, the irradiation time of the electron beam is stored in advance, and the irradiated object determination unit 380 can detect the type of the irradiated object W. In this case, the control device 390 sets the delivery interval PT as the irradiation time.

  In the above-described embodiment, since the control device 390 maintains the transport speed V1 and the transport speed V2 at a predetermined ratio, the control device 390 calculates the transport speed V1 and the delivery interval PT to obtain the motor. If the delivery unit 370 is controlled, the irradiated object W can be transported in close contact with the first transport device 310.

  However, when the control device 390 does not maintain the transport speed V1 and the transport speed V2 at a predetermined ratio, the control device 390 sets the transport speed V1, the transport speed V2, and the delivery interval PT according to the irradiation object W. By setting them separately, the irradiated object W can be transported in close contact with the first transport device 310.

  For example, the control device 390 first determines the transport speed V1 based on the output of the electron beam emitted by the electron beam irradiation device 200 and the length L0 of the irradiation object W detected by the irradiation object determination unit 380. To do. Subsequently, the control device 390 determines the first conveyance device 310 according to the conveyance distance L2 of the second conveyance device 320 stored in advance and the length L0 of the irradiation object W determined by the irradiation object determination unit 380. The sending interval PT is calculated so that the irradiated object W is conveyed in close proximity. That is, the control device 390 calculates the transport speed V2 so that the irradiated object W2 sent to the sending unit 370 starts to be placed on the first transport device 310 from the second transport device 320 after L0 / V1 sec.

  That is, the control device 390 sets the speed at which the distance L2 of the second transport device 320 can be transported at L0 / V1 sec as the transport speed V2 (V2 = L2 / (L0 / V1) = L2 × V1 / L0). . At this time, if the calculated transport speed V2 exceeds the transport capability of the second transport device 320, the transport speed V2 may be set to the maximum value in the second transport device 320 to control the delivery interval PT. Then, in the state shown in FIG. 4B, the object to be irradiated W1, the object to be irradiated W2, and the object to be irradiated W3 are placed on the second transfer device 320.

  In the above-described embodiment, the vertical height of the irradiation object W is changed by the first transport device 310 including the lifting mechanism 420, but the control device 390 controls the scan electromagnet 122. By changing the scanning width of the electron beam by the scanning electromagnet 122, the length in the direction orthogonal to the conveyance direction of the irradiation object W can be matched with the width of the irradiation direction R in the X-axis direction in FIG. .

  INDUSTRIAL APPLICABILITY The present invention can be used for an electron beam irradiation system and a transport system that irradiate an object with an electron beam.

R ... Irradiation area V1 ... Conveying speed V2 ... Conveying speed W ... Irradiated object 100 ... Electron beam irradiation system 200 ... Electron beam irradiation apparatus 300 ... Conveying system 310 ... First conveying apparatus 312 ... First conveying body 314 ... First gear 320 ... 2nd conveying apparatus 322 ... 2nd conveying body 324 ... 2nd gear 70 ... Sending part 390 ... Control apparatus 410 ... Chain belt

Claims (4)

An electron beam irradiation apparatus for irradiating an object with an electron beam;
A first transport device that transports the irradiated object and passes the irradiated object to an irradiation area that is an area where the electron beam irradiation apparatus irradiates the electron beam with the electron beam irradiation apparatus;
Provided on the upstream side of the first transport device in the transport direction of the irradiated object, transports the irradiated object at a transport speed faster than the transport speed of the first transport device, and A second transfer device for carrying out the irradiated object;
A delivery section for delivering the irradiated object to the second transport device;
A control device for controlling the transport speed of the first transport device, the transport speed of the second transport device, and the sending interval of the sending section according to the object to be irradiated;
An electron beam irradiation system comprising: The controller is
The electron beam irradiation system according to claim 1, wherein the transport speed of the first transport device and the transport speed of the second transport device are maintained at a predetermined ratio. The first transport device is
A first transport body configured to transport the irradiation object;
The second transport device is
A second transport body for transporting the irradiated object;
The first transport body and the second transport body are connected to one motor whose rotational speed is controlled by the control device,
3. The electron beam according to claim 1, wherein the control device makes the transport speed of the first transport device different from the transport speed of the second transport device by rotating the one motor. 4. Irradiation system. A transport system for transporting the irradiated object to an electron beam irradiation apparatus that irradiates the irradiated object with an electron beam,
A first transport device that transports the irradiated object and passes the irradiated object to an irradiation area that is an area where the electron beam irradiation apparatus irradiates the electron beam with the electron beam irradiation apparatus;
Provided on the upstream side of the first transport device in the transport direction of the irradiated object, transports the irradiated object at a transport speed faster than the transport speed of the first transport device, and A second transfer device for carrying out the irradiated object;
A delivery section for delivering the irradiated object to the second transport device;
A control device for controlling the transport speed of the first transport device, the transport speed of the second transport device, and the sending interval of the sending section according to the object to be irradiated;
A conveyance system characterized by comprising:

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