JP2013188968A5 - - Google Patents
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- Publication number
- JP2013188968A5 JP2013188968A5 JP2012057638A JP2012057638A JP2013188968A5 JP 2013188968 A5 JP2013188968 A5 JP 2013188968A5 JP 2012057638 A JP2012057638 A JP 2012057638A JP 2012057638 A JP2012057638 A JP 2012057638A JP 2013188968 A5 JP2013188968 A5 JP 2013188968A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon substrate
- substrate
- oxide film
- laminated
- sequentially
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 5
- 229910052710 silicon Inorganic materials 0.000 claims 5
- 239000010703 silicon Substances 0.000 claims 5
- 238000010030 laminating Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012057638A JP5645863B2 (ja) | 2012-03-14 | 2012-03-14 | ノズルプレートの製造方法 |
| US13/802,603 US8685763B2 (en) | 2012-03-14 | 2013-03-13 | Method of manufacturing nozzle plate |
| CN201310080906.4A CN103302987B (zh) | 2012-03-14 | 2013-03-14 | 制造喷嘴板的方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012057638A JP5645863B2 (ja) | 2012-03-14 | 2012-03-14 | ノズルプレートの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013188968A JP2013188968A (ja) | 2013-09-26 |
| JP2013188968A5 true JP2013188968A5 (2) | 2013-11-07 |
| JP5645863B2 JP5645863B2 (ja) | 2014-12-24 |
Family
ID=49128895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012057638A Expired - Fee Related JP5645863B2 (ja) | 2012-03-14 | 2012-03-14 | ノズルプレートの製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8685763B2 (2) |
| JP (1) | JP5645863B2 (2) |
| CN (1) | CN103302987B (2) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013103392A (ja) | 2011-11-14 | 2013-05-30 | Seiko Epson Corp | 液体噴射装置 |
| EP2794276B1 (en) * | 2011-12-21 | 2018-07-25 | Hewlett-Packard Development Company, L.P. | Fluid dispenser |
| US10189704B2 (en) * | 2013-06-15 | 2019-01-29 | Brookhaven Science Associates, Llc | Formation of superhydrophobic surfaces |
| JP6333016B2 (ja) * | 2014-03-28 | 2018-05-30 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| EP3511167B1 (en) | 2016-09-12 | 2022-04-27 | Konica Minolta, Inc. | Liquid droplet ejection head and liquid droplet ejection apparatus |
| CN106541706B (zh) * | 2016-09-30 | 2019-04-16 | 西安交通大学 | 一种直通式压电喷墨打印头及其制造方法 |
| US11179935B2 (en) * | 2019-02-19 | 2021-11-23 | Canon Kabushiki Kaisha | Liquid ejection head, liquid ejection module, and method of manufacturing liquid ejection head |
| CN116096579B (zh) | 2020-09-09 | 2025-06-17 | 柯尼卡美能达株式会社 | 喷墨头、喷墨头的制造方法以及喷墨记录装置 |
| WO2022208701A1 (ja) * | 2021-03-31 | 2022-10-06 | コニカミノルタ株式会社 | ノズルプレートの製造方法、ノズルプレート及び流体吐出ヘッド |
| JP7820694B2 (ja) * | 2022-01-19 | 2026-02-26 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5308442A (en) * | 1993-01-25 | 1994-05-03 | Hewlett-Packard Company | Anisotropically etched ink fill slots in silicon |
| US5589083A (en) | 1993-12-11 | 1996-12-31 | Electronics And Telecommunications Research Institute | Method of manufacturing microstructure by the anisotropic etching and bonding of substrates |
| JPH09216360A (ja) * | 1996-02-15 | 1997-08-19 | Seiko Epson Corp | インクジェットヘッド及びその製造方法 |
| US7347532B2 (en) * | 2004-08-05 | 2008-03-25 | Fujifilm Dimatix, Inc. | Print head nozzle formation |
| JP2008049673A (ja) * | 2006-08-28 | 2008-03-06 | Fujifilm Corp | ノズル板の製造方法および液体吐出ヘッドの製造方法 |
| JP4832325B2 (ja) * | 2007-02-02 | 2011-12-07 | 富士フイルム株式会社 | ノズルプレートおよび画像形成装置 |
| US8197029B2 (en) * | 2008-12-30 | 2012-06-12 | Fujifilm Corporation | Forming nozzles |
-
2012
- 2012-03-14 JP JP2012057638A patent/JP5645863B2/ja not_active Expired - Fee Related
-
2013
- 2013-03-13 US US13/802,603 patent/US8685763B2/en not_active Expired - Fee Related
- 2013-03-14 CN CN201310080906.4A patent/CN103302987B/zh not_active Expired - Fee Related
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