JP2013200438A - microscope - Google Patents

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JP2013200438A
JP2013200438A JP2012068627A JP2012068627A JP2013200438A JP 2013200438 A JP2013200438 A JP 2013200438A JP 2012068627 A JP2012068627 A JP 2012068627A JP 2012068627 A JP2012068627 A JP 2012068627A JP 2013200438 A JP2013200438 A JP 2013200438A
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optical member
lens
optical
light
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Nobuki Ide
伸樹 井出
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Sinto S Precision Ltd
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Sinto S Precision Ltd
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Priority to JP2012068627A priority Critical patent/JP2013200438A/en
Priority to CN2013100975789A priority patent/CN103364935A/en
Priority to KR1020130031513A priority patent/KR20130109057A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details

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  • Microscoopes, Condenser (AREA)

Abstract

【課題】異なる倍率の被検体像を良好に撮影することができる顕微鏡を提供する。
【解決手段】対物レンズ４と、照明部１０と、被検体から前記対物レンズに入射された被検体光の光路を二つの光路に分割する第１の光学部材４４と、前記第１の光学部材において反射された被検体光に基づく被検体像を第１の撮像素子１４に結像させる第１の結像レンズ４６と、前記第１の光学部材を透過した被検体光の光路を二つの光路に分割する第２の光学部材４８と、前記第２の光学部材において反射された被検体光に基づく被検体像を第２の撮像素子１８に結像させる第２の結像レンズ５０と、前記第２の光学部材を透過した被検体光に基づく被検体像を第３の撮像素子２２に結像させる第３の結像レンズ５６とを備え、前記照明部から射出された前記照明光は、前記対物レンズと前記第１の光学部材との間の光路内に配置された第３の光学部材４０を介して前記対物レンズに入射される。
【選択図】図１Provided is a microscope capable of favorably photographing subject images of different magnifications.
An objective lens, an illuminating unit, a first optical member that divides an optical path of subject light incident on the objective lens from a subject into two optical paths, and the first optical member. The first imaging lens 46 that forms an object image based on the object light reflected at the first imaging element 14 and the optical path of the object light transmitted through the first optical member are two optical paths. A second optical member 48 that divides into two, a second imaging lens 50 that forms a subject image based on subject light reflected by the second optical member on the second imaging element 18, and A third imaging lens 56 that forms an object image based on the object light transmitted through the second optical member on the third imaging element 22, and the illumination light emitted from the illumination unit is Arranged in the optical path between the objective lens and the first optical member Through the third optical member 40 is incident on the objective lens.
[Selection] Figure 1

Description

本発明は、被検体像を異なる倍率で撮像素子に結像させる顕微鏡に関するものである。   The present invention relates to a microscope that forms an image of a subject on an image sensor at different magnifications.

従来、一つの対物レンズと二つの異なる倍率の結像レンズを備えた測定顕微鏡装置が存在する（例えば、特許文献１参照）。この測定顕微鏡装置によれば、対物レンズの切換えを行わずに二つの異なる倍率の被検体像を撮影することができる。   Conventionally, there is a measurement microscope apparatus including one objective lens and two imaging lenses with different magnifications (see, for example, Patent Document 1). According to this measurement microscope apparatus, it is possible to photograph subject images at two different magnifications without switching the objective lens.

特開平８−６１９１４号公報JP-A-8-61914

しかしながら、上述の測定顕微鏡装置において、照明部を対物レンズから離れた位置に設置した場合、照明部から射出された照明光は、複数の光学部材を介した後に対物レンズに入射し被検体を照明することになる。   However, in the measurement microscope apparatus described above, when the illumination unit is installed at a position away from the objective lens, the illumination light emitted from the illumination unit enters the objective lens after passing through a plurality of optical members to illuminate the subject. Will do.

この場合、照明光の光量損失が大きくなるため、十分な明るさで被検体を照明することができず、被検体像を良好に撮影することができないという問題があった。   In this case, since the loss of the amount of illumination light increases, there is a problem that the subject cannot be illuminated with sufficient brightness, and the subject image cannot be captured well.

本発明の目的は、異なる倍率の被検体像を良好に撮影することができる顕微鏡を提供することである。   The objective of this invention is providing the microscope which can image | photograph the object image of a different magnification favorably.

本発明の顕微鏡は、所定の倍率で被検体を観察する対物レンズと、前記対物レンズを介して前記被検体を照明する照明光を射出する光源を有する照明部と、前記被検体から前記対物レンズに入射された被検体光の光路を二つの光路に分割する第１の光学部材と、前記第１の光学部材において反射された被検体光に基づく被検体像を第１の撮像素子に結像させる第１の結像レンズと、前記第１の光学部材を透過した被検体光の光路を二つの光路に分割する第２の光学部材と、前記第２の光学部材において反射された被検体光に基づく被検体像を第２の撮像素子に結像させる第２の結像レンズと、前記第２の光学部材を透過した被検体光に基づく被検体像を第３の撮像素子に結像させる第３の結像レンズとを備え、前記照明部から射出された前記照明光は、前記対物レンズと前記第１の光学部材との間の光路内に配置された第３の光学部材を介して前記対物レンズに入射されることを特徴とする。   The microscope according to the present invention includes an objective lens that observes the subject at a predetermined magnification, an illumination unit that emits illumination light that illuminates the subject via the objective lens, and the objective lens from the subject. A first optical member that divides the optical path of the subject light incident on the light into two optical paths, and a subject image based on the subject light reflected by the first optical member on the first imaging element A first imaging lens to be formed, a second optical member that divides the optical path of the subject light transmitted through the first optical member into two optical paths, and the subject light reflected by the second optical member A second imaging lens that forms a subject image based on the second imaging element and a subject image based on the subject light transmitted through the second optical member on the third imaging element. A third imaging lens, and emitted from the illumination unit Meiko is characterized in that it is incident on the objective lens through the third optical member disposed in an optical path between said objective lens first optical member.

また、本発明の顕微鏡は、前記照明部が、前記光源から射出された照明光を所定の位置に集光する集光レンズを備えることを特徴とする。   Moreover, the microscope of the present invention is characterized in that the illumination unit includes a condensing lens that condenses illumination light emitted from the light source at a predetermined position.

また、本発明の顕微鏡は、前記第１の撮像素子、前記第２の撮像素子、及び前記第３の撮像素子に結像される被検体像の倍率が、それぞれ低倍率、高倍率、及び中倍率であることを特徴とする。   In the microscope of the present invention, the magnification of the subject image formed on the first image sensor, the second image sensor, and the third image sensor is low, high, and medium, respectively. It is characterized by a magnification.

また、本発明の顕微鏡は、前記第２の光学部材を透過した被検体光の光路を二つの光路に分割する第４の光学部材と、前記第４の光学部材を透過した被検体光を集光する少なくとも一つの結像レンズと、前記少なくとも一つの結像レンズによって集光された被検体光に基づく被検体像を撮像する少なくとも一つの撮像素子とを備え、前記第３の撮像素子は、前記第４の光学部材において反射され、前記第３の結像レンズによって集光された被検体光に基づく被検体像を撮像することを特徴とする。   Further, the microscope of the present invention collects the fourth optical member that divides the optical path of the subject light transmitted through the second optical member into two optical paths, and the subject light transmitted through the fourth optical member. At least one imaging lens that illuminates; and at least one imaging element that images a subject image based on subject light collected by the at least one imaging lens; and the third imaging element comprises: A subject image based on subject light reflected by the fourth optical member and collected by the third imaging lens is picked up.

本発明の顕微鏡によれば、異なる倍率の被検体像を良好に撮影することができる。   According to the microscope of the present invention, it is possible to properly photograph subject images with different magnifications.

実施の形態に係る顕微鏡の内部の構成を示す図である。It is a figure which shows the structure inside the microscope which concerns on embodiment.

以下、図面を参照して、本発明の実施の形態に係る顕微鏡について説明する。図１は、実施の形態に係る顕微鏡の内部の構成を示す図である。顕微鏡２は、液晶パネルや有機ＥＬパネル等のフラットパネルの生産工程において使用される検査装置に備えられるものであり、所定の倍率（例えば対物５０倍）で被検体（不図示）を観察する対物レンズ４が下部に取付けられた筐体６、及び対物レンズ４に入射した被検体光の光路となる光路ボックス８を備えている。   Hereinafter, a microscope according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram illustrating an internal configuration of a microscope according to an embodiment. The microscope 2 is provided in an inspection apparatus used in a production process of a flat panel such as a liquid crystal panel or an organic EL panel, and an objective for observing a subject (not shown) at a predetermined magnification (for example, an objective 50 times). A housing 6 having a lens 4 attached to the lower portion thereof and an optical path box 8 serving as an optical path of subject light incident on the objective lens 4 are provided.

また、光路ボックス８の上部には、対物レンズ４に近い側から順に、対物レンズ４を介して被検体を照明する照明光を射出する照明部１０、照明光により照明された被検体の被検体像を撮影する第１のカメラ１４を備える第１の鏡筒１６、第２のカメラ１８を備える第２の鏡筒２０、及び第３のカメラ２２を備える第３の鏡筒２４が備えられている。また、筐体６には、レーザー光を用いて対物レンズ４の焦点調整を行うレーザーオートフォーカス装置２５が組み込まれている。   In addition, an illumination unit 10 that emits illumination light that illuminates the subject via the objective lens 4 in order from the side closer to the objective lens 4, and the subject of the subject illuminated by the illumination light are disposed above the optical path box 8. A first lens barrel 16 having a first camera 14 for taking an image, a second lens barrel 20 having a second camera 18, and a third lens barrel 24 having a third camera 22 are provided. Yes. The housing 6 incorporates a laser autofocus device 25 that adjusts the focus of the objective lens 4 using laser light.

次に、図面を参照して実施の形態に係る顕微鏡２の処理について説明する。まず、レーザーオートフォーカス装置２５によりレーザー光が射出されると、レーザー光はダイクロイックミラー２６を透過し、対物レンズ４を介して被検体を照射する。被検体で反射された反射光は、対物レンズ４を介してダイクロイックミラー２６を透過し、レーザーオートフォーカス装置２５に入射する。そして、レーザーオートフォーカス装置２５に入射した情報に基づいて対物レンズ４の焦点が調整される。   Next, processing of the microscope 2 according to the embodiment will be described with reference to the drawings. First, when laser light is emitted by the laser autofocus device 25, the laser light passes through the dichroic mirror 26 and irradiates the subject via the objective lens 4. The reflected light reflected by the subject passes through the dichroic mirror 26 through the objective lens 4 and enters the laser autofocus device 25. Then, the focus of the objective lens 4 is adjusted based on the information incident on the laser autofocus device 25.

次に、光ファイバー３２の端部３２ａから照明光が射出されると、照明光は、第１の集光レンズ３４により集光ポイント３６に集光される。次に、照明光は、集光ポイント３６を疑似的な点光源として下方に進行した後、第２の集光レンズ３８に入射し、ハーフミラー４０及びダイクロイックミラー２６で反射された後に対物レンズ４の入射部４２に集光される。次に、照明光は、入射部４２を疑似的な点光源として対物レンズ４に入射し、対物レンズ４を介して被検体を照明する。   Next, when the illumination light is emitted from the end portion 32 a of the optical fiber 32, the illumination light is condensed at the condensing point 36 by the first condenser lens 34. Next, the illumination light travels downward using the condensing point 36 as a pseudo point light source, then enters the second condensing lens 38, is reflected by the half mirror 40 and the dichroic mirror 26, and then the objective lens 4. The light is condensed on the incident portion 42. Next, the illumination light enters the objective lens 4 using the incident portion 42 as a pseudo point light source, and illuminates the subject via the objective lens 4.

被検体により反射された被検体光は、対物レンズ４に入射し、ダイクロイックミラー２６で反射された後、ハーフミラー４０を透過する。ハーフミラー４０を透過した被検体光の光路は、第１のビームスプリッタ（第１ＢＳ）４４において二つの光路に分割される。   The subject light reflected by the subject enters the objective lens 4, is reflected by the dichroic mirror 26, and then passes through the half mirror 40. The optical path of the subject light transmitted through the half mirror 40 is divided into two optical paths by the first beam splitter (first BS) 44.

第１ＢＳ４４で反射された被検体光は、第１の結像レンズ４６により集光され、第１のカメラ１４の図示しない第１の撮像素子に結像される。ここで、第１の結像レンズ４６の倍率が０．５倍である場合、第１のカメラ１４によって２５倍（対物５０倍×０．５倍）の被検体像が撮影される。   The subject light reflected by the first BS 44 is collected by the first imaging lens 46 and imaged on a first imaging element (not shown) of the first camera 14. Here, when the magnification of the first imaging lens 46 is 0.5 times, a subject image of 25 times (objective 50 times × 0.5 times) is captured by the first camera 14.

一方、第１ＢＳ４４を透過した被検体光の光路は、第２のビームスプリッタ（第２ＢＳ）４８において二つの光路に分割される。   On the other hand, the optical path of the subject light transmitted through the first BS 44 is divided into two optical paths by the second beam splitter (second BS) 48.

第２ＢＳ４８において反射された被検体光は、第２の結像レンズ５０及びテレコンバージョンレンズ５２により集光され、第２のカメラ１８の図示しない第２の撮像素子に結像される。ここで、第２の結像レンズ５０の倍率が１．０倍、テレコンバージョンレンズ５２の倍率が２．０倍である場合、第２のカメラ１８によって１００倍（対物５０倍×１．０倍×２．０倍）の被検体像が撮影される。   The subject light reflected by the second BS 48 is collected by the second imaging lens 50 and the teleconversion lens 52 and imaged on a second imaging element (not shown) of the second camera 18. Here, when the magnification of the second imaging lens 50 is 1.0 and the magnification of the teleconversion lens 52 is 2.0, the second camera 18 performs 100 times (objective 50 times × 1.0 times). A subject image of (× 2.0 times) is taken.

一方、第２ＢＳ４８を透過した被検体光は、全反射ミラー５４において全反射され、第３の結像レンズ５６により集光された後、第３のカメラ２２の図示しない第３の撮像素子に結像される。ここで、第３の結像レンズ５６の倍率が１．０倍である場合、第３のカメラ２２によって５０倍（対物５０倍×１．０倍）の被検体像が撮影される。   On the other hand, the subject light that has passed through the second BS 48 is totally reflected by the total reflection mirror 54, collected by the third imaging lens 56, and then coupled to a third image sensor (not shown) of the third camera 22. Imaged. Here, when the magnification of the third imaging lens 56 is 1.0, an object image of 50 times (objective 50 × 1.0) is imaged by the third camera 22.

即ち、第１のカメラ１４、第２のカメラ１８、及び第３のカメラ２２によって、２５倍、１００倍、５０倍の３種類の倍率（１：４：２の比率）の被検体像が撮影される。   That is, the first camera 14, the second camera 18, and the third camera 22 photograph subject images at three magnifications (1: 4: 2 ratio) of 25 times, 100 times, and 50 times. Is done.

この実施の形態に係る顕微鏡２によれば、照明部１０を第１の鏡筒１６よりも対物レンズ４側に配置し、複数のミラー等を透過をすることによる光量損失の少ない照明光で明るく被検体を照明できるため、それぞれの撮像素子に適切な光量の被検体像を結像させることができ、３種の異なる倍率の被検体像を良好に撮影することができる。   According to the microscope 2 according to this embodiment, the illumination unit 10 is arranged closer to the objective lens 4 than the first lens barrel 16, and is brightened with illumination light with little light loss due to transmission through a plurality of mirrors and the like. Since the subject can be illuminated, a subject image with an appropriate amount of light can be formed on each imaging element, and three types of subject images with different magnifications can be favorably captured.

また、３種の異なる倍率の被検体像を撮影することができるため、近年高精細化する被検体を最適な倍率で的確に検査することができる。また、対物レンズ４の切換えを行わずに効率よく被検体を検査することができる。   In addition, since three types of subject images with different magnifications can be taken, it is possible to accurately examine a subject whose resolution has been increased in recent years at an optimum magnification. In addition, the subject can be inspected efficiently without switching the objective lens 4.

また、光ファイバー３２の端部３２ａから射出された照明光を一旦第１の集光レンズ３４により集光ポイント３６に集光し、疑似的な点光源を生成してケーラー照明により被検体の照明を行うことから、照明効率を高くすることができる。   Further, the illumination light emitted from the end portion 32a of the optical fiber 32 is once condensed at the condensing point 36 by the first condenser lens 34, and a pseudo point light source is generated to illuminate the subject by Koehler illumination. Since it does, illumination efficiency can be made high.

また、被検体光の光路長さ及び被検体光の光量損失を考慮し、対物レンズ４に近い側から、照明部１０、第１の鏡筒１６、第２の鏡筒２０、及び第３の鏡筒２４の順に配置することにより、最大の倍率である１００倍の被検体像の精度を最も高くすることができる。   Further, in consideration of the optical path length of the subject light and the light quantity loss of the subject light, the illumination unit 10, the first lens barrel 16, the second lens barrel 20, and the third lens barrel are arranged from the side close to the objective lens 4. By arranging in order of the lens barrel 24, the accuracy of the subject image of 100 times, which is the maximum magnification, can be maximized.

なお、上述の実施の形態においては、対物レンズ４の倍率が対物５０倍の場合を例に説明しているが、良好な被検体像を撮影することができれば、対物レンズ４の倍率は上述の例に限定されない。また、それぞれの結像レンズの倍率も上述の例に限定されない。   In the above-described embodiment, the case where the magnification of the objective lens 4 is 50 × objective is described as an example. However, if a good subject image can be captured, the magnification of the objective lens 4 is as described above. It is not limited to examples. Further, the magnification of each imaging lens is not limited to the above example.

また、上述の実施の形態において、テレコンバージョンレンズ５２の倍率は上述の例に限定されない。なお、例えば、テレコンバージョンレンズ５２の倍率を４倍とした場合、第２のカメラ１８により２００倍（対物５０倍×１．０倍×４．０倍）の被検体像を撮影することができ、１：８：２の３種類の比率の被検体像を得ることができる。   In the above-described embodiment, the magnification of the teleconversion lens 52 is not limited to the above example. For example, when the magnification of the teleconversion lens 52 is set to 4 times, an object image of 200 times (object 50 times × 1.0 times × 4.0 times) can be taken by the second camera 18. , 1: 8: 2 three types of object images can be obtained.

また、上述の実施の形態においては、光ファイバー３２の端部３２ａを光源として照明光が射出される場合を例に説明しているが、照明光の光源は光ファイバー３２に限定されない。例えば、光ファイバー３２に代えて、照明部１０にＬＥＤ光源等を接続するようにしてもよい。   Further, in the above-described embodiment, the case where illumination light is emitted using the end portion 32a of the optical fiber 32 as a light source is described as an example, but the light source of the illumination light is not limited to the optical fiber 32. For example, instead of the optical fiber 32, an LED light source or the like may be connected to the illumination unit 10.

また、上述の実施の形態においては、顕微鏡２が３つの鏡筒を備え、３種の異なる倍率の被検体像を得ることができる場合を例に説明しているが、良好な被検体像を撮影することができれば、更に鏡筒を増設してもよい。   In the above-described embodiment, the case where the microscope 2 includes three lens barrels and can obtain subject images with three different magnifications has been described as an example. If photographing can be performed, a lens barrel may be further added.

２…顕微鏡、４…対物レンズ、６…筐体、８…光路ボックス、１０…照明部、１４…第１のカメラ、１６…第１の鏡筒、１８…第２のカメラ、２０…第２の鏡筒、２２…第３のカメラ、２４…第３の鏡筒、２６…ダイクロイックミラー、３２…光ファイバー、３４…第１の集光レンズ、３８…第２の集光レンズ、４０…ハーフミラー、４４…第１ＢＳ、４６…第１の結像レンズ、４８…第２ＢＳ、５０…第２の結像レンズ、５２…テレコンバージョンレンズ、５４…全反射ミラー、５６…第３の結像レンズ   DESCRIPTION OF SYMBOLS 2 ... Microscope, 4 ... Objective lens, 6 ... Case, 8 ... Optical path box, 10 ... Illumination part, 14 ... 1st camera, 16 ... 1st lens barrel, 18 ... 2nd camera, 20 ... 2nd 22 ... the third camera 24 ... the third lens barrel 26 ... the dichroic mirror 32 ... the optical fiber 34 ... the first condenser lens 38 ... the second condenser lens 40 ... the half mirror 44 ... first BS, 46 ... first imaging lens, 48 ... second BS, 50 ... second imaging lens, 52 ... teleconversion lens, 54 ... total reflection mirror, 56 ... third imaging lens

Claims (4)

所定の倍率で被検体を観察する対物レンズと、
前記対物レンズを介して前記被検体を照明する照明光を射出する光源を有する照明部と、
前記被検体から前記対物レンズに入射された被検体光の光路を二つの光路に分割する第１の光学部材と、
前記第１の光学部材において反射された被検体光に基づく被検体像を第１の撮像素子に結像させる第１の結像レンズと、
前記第１の光学部材を透過した被検体光の光路を二つの光路に分割する第２の光学部材と、
前記第２の光学部材において反射された被検体光に基づく被検体像を第２の撮像素子に結像させる第２の結像レンズと、
前記第２の光学部材を透過した被検体光に基づく被検体像を第３の撮像素子に結像させる第３の結像レンズとを備え、
前記照明部から射出された前記照明光は、前記対物レンズと前記第１の光学部材との間の光路内に配置された第３の光学部材を介して前記対物レンズに入射されることを特徴とする顕微鏡。 An objective lens for observing the subject at a predetermined magnification;
An illumination unit having a light source that emits illumination light that illuminates the subject through the objective lens;
A first optical member that divides an optical path of subject light incident on the objective lens from the subject into two optical paths;
A first imaging lens that forms an object image based on the object light reflected by the first optical member on the first image sensor;
A second optical member that divides the optical path of the subject light transmitted through the first optical member into two optical paths;
A second imaging lens that forms a subject image based on the subject light reflected by the second optical member on a second imaging element;
A third imaging lens that forms a subject image based on the subject light transmitted through the second optical member on a third imaging element;
The illumination light emitted from the illumination unit is incident on the objective lens via a third optical member disposed in an optical path between the objective lens and the first optical member. A microscope. 前記照明部は、前記光源から射出された照明光を所定の位置に集光する集光レンズを備えることを特徴とする請求項１記載の顕微鏡。   The microscope according to claim 1, wherein the illumination unit includes a condensing lens that condenses illumination light emitted from the light source at a predetermined position. 前記第１の撮像素子、前記第２の撮像素子、及び前記第３の撮像素子に結像される被検体像の倍率は、それぞれ低倍率、高倍率、及び中倍率であることを特徴とする請求項１または２記載の顕微鏡。   The magnifications of the subject images formed on the first image sensor, the second image sensor, and the third image sensor are a low magnification, a high magnification, and a medium magnification, respectively. The microscope according to claim 1 or 2. 前記第２の光学部材を透過した被検体光の光路を二つの光路に分割する第４の光学部材と、
前記第４の光学部材を透過した被検体光を集光する少なくとも一つの結像レンズと、
前記少なくとも一つの結像レンズによって集光された被検体光に基づく被検体像を撮像する少なくとも一つの撮像素子とを備え、
前記第３の撮像素子は、前記第４の光学部材において反射され、前記第３の結像レンズによって集光された被検体光に基づく被検体像を撮像することを特徴とする請求項１〜３の何れか一項に記載の顕微鏡。
A fourth optical member that divides the optical path of the subject light transmitted through the second optical member into two optical paths;
At least one imaging lens for condensing the subject light transmitted through the fourth optical member;
Comprising at least one imaging element for imaging a subject image based on subject light collected by the at least one imaging lens;
The third imaging element picks up a subject image based on subject light reflected by the fourth optical member and collected by the third imaging lens. 4. The microscope according to any one of 3.
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