JP2015062995A - インクジェットヘッドの製造方法及びインクジェットヘッド - Google Patents

インクジェットヘッドの製造方法及びインクジェットヘッド Download PDF

Info

Publication number: JP2015062995A
Authority: JP; Japan
Prior art keywords: silicon layer; groove; jet head; ink jet; pressure chamber
Prior art date: 2012-01-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP2012011578A

Other languages

English (en)

Japanese (ja)

Inventor

篤郎梁田

Atsuro Yanata

篤郎梁田

西　泰男

Yasuo Nishi

泰男西

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Konica Minolta Inc

Original Assignee

Konica Minolta Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2012-01-23

Filing date

2012-01-23

Publication date

2015-04-09

2012-01-23 Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc

2012-01-23 Priority to JP2012011578A priority Critical patent/JP2015062995A/ja

2012-12-18 Priority to PCT/JP2012/082777 priority patent/WO2013111477A1/fr

2015-04-09 Publication of JP2015062995A publication Critical patent/JP2015062995A/ja

Status Pending legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title claims abstract description 36
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 106
229910052710 silicon Inorganic materials 0.000 claims abstract description 106
239000010703 silicon Substances 0.000 claims abstract description 106
238000005530 etching Methods 0.000 claims abstract description 69
239000000758 substrate Substances 0.000 claims abstract description 67
238000000034 method Methods 0.000 claims description 11
230000015572 biosynthetic process Effects 0.000 claims description 8
229910004298 SiO 2 Inorganic materials 0.000 claims description 7
239000000463 material Substances 0.000 claims description 7
238000007599 discharging Methods 0.000 claims description 6
238000010030 laminating Methods 0.000 claims description 3
230000001629 suppression Effects 0.000 abstract description 8
239000010410 layer Substances 0.000 description 135
238000006073 displacement reaction Methods 0.000 description 4
230000000694 effects Effects 0.000 description 4
238000001459 lithography Methods 0.000 description 4
239000011521 glass Substances 0.000 description 2
239000012212 insulator Substances 0.000 description 2
229910018503 SF6 Inorganic materials 0.000 description 1
239000012790 adhesive layer Substances 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000001312 dry etching Methods 0.000 description 1
230000001771 impaired effect Effects 0.000 description 1
238000010791 quenching Methods 0.000 description 1
230000000171 quenching effect Effects 0.000 description 1
230000002940 repellent Effects 0.000 description 1
239000005871 repellent Substances 0.000 description 1
SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
229960000909 sulfur hexafluoride Drugs 0.000 description 1

Images

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Particle Formation And Scattering Control In Inkjet Printers (AREA)

JP2012011578A 2012-01-23 2012-01-23 インクジェットヘッドの製造方法及びインクジェットヘッド Pending JP2015062995A (ja)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
JP2012011578A JP2015062995A (ja)	2012-01-23	2012-01-23	インクジェットヘッドの製造方法及びインクジェットヘッド
PCT/JP2012/082777 WO2013111477A1 (fr)	2012-01-23	2012-12-18	Procédé de fabrication d'une tête à jet d'encre et tête à jet d'encre

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2012011578A JP2015062995A (ja)	2012-01-23	2012-01-23	インクジェットヘッドの製造方法及びインクジェットヘッド

Publications (1)

Publication Number	Publication Date
JP2015062995A true JP2015062995A (ja)	2015-04-09

Family

ID=48873216

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2012011578A Pending JP2015062995A (ja)	2012-01-23	2012-01-23	インクジェットヘッドの製造方法及びインクジェットヘッド

Country Status (2)

Country	Link
JP (1)	JP2015062995A (fr)
WO (1)	WO2013111477A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2024013981A (ja) *	2022-07-21	2024-02-01	キヤノン株式会社	液体吐出ヘッドおよび素子基板とそれらの製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP6201784B2 (ja) *	2014-01-23	2017-09-27	ブラザー工業株式会社	液体吐出装置、及び、液体吐出装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4462777B2 (ja) *	2001-03-14	2010-05-12	株式会社リコー	インクジェットヘッド
JP3951933B2 (ja) *	2002-02-19	2007-08-01	ブラザー工業株式会社	インクジェットヘッド及びこれを有するインクジェットプリンタ
JP2005041054A (ja) *	2003-07-25	2005-02-17	Kyocera Corp	印刷ヘッド及びその製造方法、並びにインクジェットプリンタ
KR100738102B1 (ko) *	2006-02-01	2007-07-12	삼성전자주식회사	압전 방식의 잉크젯 프린트헤드
JP2010220348A (ja) *	2009-03-16	2010-09-30	Brother Ind Ltd	圧電アクチュエータの製造方法、及び、圧電アクチュエータ

2012
- 2012-01-23 JP JP2012011578A patent/JP2015062995A/ja active Pending
- 2012-12-18 WO PCT/JP2012/082777 patent/WO2013111477A1/fr not_active Ceased

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2024013981A (ja) *	2022-07-21	2024-02-01	キヤノン株式会社	液体吐出ヘッドおよび素子基板とそれらの製造方法
JP7714506B2 (ja)	2022-07-21	2025-07-29	キヤノン株式会社	液体吐出ヘッドおよび素子基板とそれらの製造方法

Also Published As

Publication number	Publication date
WO2013111477A1 (fr)	2013-08-01

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JP2018534176A (ja)	2018-11-22	液滴噴射装置の製造プロセス
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JP2018103417A (ja)	2018-07-05	液体噴射ヘッド
CN110065305A (zh)	2019-07-30	一种压电喷头结构及其制造方法
US20130162727A1 (en)	2013-06-27	Substrate, liquid ejection head having such substrate and method of manufacturing such substrate