JP2015175502A5 - - Google Patents
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- Publication number
- JP2015175502A5 JP2015175502A5 JP2014054756A JP2014054756A JP2015175502A5 JP 2015175502 A5 JP2015175502 A5 JP 2015175502A5 JP 2014054756 A JP2014054756 A JP 2014054756A JP 2014054756 A JP2014054756 A JP 2014054756A JP 2015175502 A5 JP2015175502 A5 JP 2015175502A5
- Authority
- JP
- Japan
- Prior art keywords
- fluid control
- control device
- joint members
- flow path
- support mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 12
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014054756A JP6347969B2 (ja) | 2014-03-18 | 2014-03-18 | 流体制御装置および流体制御装置用継手部材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014054756A JP6347969B2 (ja) | 2014-03-18 | 2014-03-18 | 流体制御装置および流体制御装置用継手部材 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015175502A JP2015175502A (ja) | 2015-10-05 |
| JP2015175502A5 true JP2015175502A5 (2) | 2016-11-24 |
| JP6347969B2 JP6347969B2 (ja) | 2018-06-27 |
Family
ID=54254863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014054756A Active JP6347969B2 (ja) | 2014-03-18 | 2014-03-18 | 流体制御装置および流体制御装置用継手部材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6347969B2 (2) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109312874B (zh) | 2016-06-21 | 2020-11-03 | 株式会社富士金 | 流体控制装置 |
| CN109563942B (zh) * | 2016-06-21 | 2020-04-10 | 株式会社富士金 | 流体控制装置 |
| KR102237047B1 (ko) | 2017-05-31 | 2021-04-08 | 가부시키가이샤 후지킨 | 밸브 장치 및 유체제어장치 |
| CN111836985A (zh) | 2018-02-28 | 2020-10-27 | 株式会社富士金 | 阀装置以及流体控制装置 |
| KR102543591B1 (ko) | 2018-10-31 | 2023-06-13 | 가부시키가이샤 후지킨 | 유체 제어 장치 및 유체 제어 장치의 제조 방법 |
| CN113227623A (zh) | 2018-12-27 | 2021-08-06 | 株式会社富士金 | 流体控制装置、接头块和流体控制装置的制造方法 |
| CN117628239A (zh) * | 2022-08-30 | 2024-03-01 | 广东威灵电机制造有限公司 | 热管理系统 |
| CN115839480A (zh) * | 2022-11-25 | 2023-03-24 | 中科艾尔(北京)科技有限公司 | 一种特气柜 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3482601B2 (ja) * | 2000-06-30 | 2003-12-22 | 東京エレクトロン株式会社 | 流体制御装置 |
| JP2002130479A (ja) * | 2000-10-23 | 2002-05-09 | Tokyo Electron Ltd | 集積化流体供給装置及びこれに用いるシール材及びこれを用いた半導体製造装置 |
-
2014
- 2014-03-18 JP JP2014054756A patent/JP6347969B2/ja active Active
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