JP2016540374A5 - - Google Patents

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Publication number
JP2016540374A5
JP2016540374A5 JP2016523293A JP2016523293A JP2016540374A5 JP 2016540374 A5 JP2016540374 A5 JP 2016540374A5 JP 2016523293 A JP2016523293 A JP 2016523293A JP 2016523293 A JP2016523293 A JP 2016523293A JP 2016540374 A5 JP2016540374 A5 JP 2016540374A5
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JP
Japan
Prior art keywords
processing apparatus
semiconductor processing
carriage
transfer
sealable chamber
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JP2016523293A
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English (en)
Japanese (ja)
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JP6594304B2 (ja
JP2016540374A (ja
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Priority claimed from PCT/US2014/060893 external-priority patent/WO2015057959A1/en
Publication of JP2016540374A publication Critical patent/JP2016540374A/ja
Publication of JP2016540374A5 publication Critical patent/JP2016540374A5/ja
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Publication of JP6594304B2 publication Critical patent/JP6594304B2/ja
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JP2016523293A 2013-10-18 2014-10-16 処理装置 Active JP6594304B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361892849P 2013-10-18 2013-10-18
US61/892,849 2013-10-18
US201361904908P 2013-11-15 2013-11-15
US61/904,908 2013-11-15
PCT/US2014/060893 WO2015057959A1 (en) 2013-10-18 2014-10-16 Processing apparatus

Publications (3)

Publication Number Publication Date
JP2016540374A JP2016540374A (ja) 2016-12-22
JP2016540374A5 true JP2016540374A5 (2) 2017-11-24
JP6594304B2 JP6594304B2 (ja) 2019-10-23

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Family Applications (1)

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JP2016523293A Active JP6594304B2 (ja) 2013-10-18 2014-10-16 処理装置

Country Status (5)

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US (1) US10777438B2 (2)
JP (1) JP6594304B2 (2)
KR (1) KR102316440B1 (2)
CN (1) CN105814677B (2)
WO (1) WO2015057959A1 (2)

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