JP2017005209A - Heat treatment apparatus - Google Patents

Abstract

A heat treatment apparatus capable of suppressing the occurrence of scratches on the back surface of a substrate by a proximity member interposed between a substrate and a heat treatment plate, suppressing wear of the proximity member, and further suppressing the looseness of the proximity member while reducing the number of steps. I will provide a. In a heat treatment apparatus, a proximity member that forms a gap D between a substrate and a heat treatment plate is made of a heat-resistant resin. The resin has low hardness and can suppress the occurrence of scratches on the back surface of the substrate W. The upper surface 21a of the proximity member 21 that contacts the substrate W is formed in a spherical shape, and the curvature radius R1 of the spherical upper surface 21a is configured to be larger than the radius R2 of the screw hole portion 23. . Thereby, even if the proximity member 21 is made of resin, wear of the proximity member 21 can be suppressed. Therefore, the variation amount of the gap D between the substrate W and the heat treatment plate 2 can be reduced, and the frequency of maintenance can be reduced. [Selection] Figure 3

Description

  The present invention relates to a heat treatment apparatus for performing heat treatment on a substrate such as a semiconductor substrate, a glass substrate for liquid crystal display, a glass substrate for photomask, a substrate for optical disk, and the like.

  Conventional heat treatment apparatuses generally perform heat treatment by bringing a substrate close to the hot plate in order to avoid metal contact between the substrate and a metal hot plate. The proximity of the substrate to the hot plate is realized by embedding a ceramic ball in the hot plate and placing the substrate on the ball (see, for example, Patent Documents 1 to 3). That is, a gap (proximity gap) is formed between the substrate and the hot plate by interposing the balls. Such a configuration is the same not only for the substrate heat treatment but also for the cooling treatment.

  FIG. 10 is a diagram showing a configuration for the close arrangement described in Patent Document 1. In FIG. In this configuration, first, the shim 120 and the ball 121 are accommodated in this order in the screw hole portion 123 formed by drilling a hole in the upper surface 103a of the plate 103 and threading. The ball 121 is fixed to the screw hole 123 by tightening the cap 122 threaded on the outer periphery to the screw hole 123 from above the ball 121. The cap 122 has an opening 122a through which a part of the ball 121 passes. With such a configuration, the ball 121 protrudes from the upper surface 103a of the plate 103 at a predetermined height.

Japanese Patent No. 4745191 Japanese Patent Laid-Open No. 08-070007 Japanese Patent Laid-Open No. 10-135228

However, the conventional apparatus having such a configuration has the following three problems.
The first problem is that the ceramic ball 121 scratches the back surface of the substrate. That is, the balls 121 for close arrangement are made of ceramic and have a very high hardness. For this reason, when the substrate is moved up and down with respect to the ball 121 for transporting the substrate, the back surface of the substrate is scratched.

  The second problem is that, with respect to the first problem, when a material other than ceramic and having a low hardness is used as the material of the ball 121, wear is fast. That is, as a material of the ball 121 other than ceramic and having a low hardness, for example, a resin can be used. However, the resin balls 121 wear quickly. If the balls 121 are worn quickly, the frequency of maintenance increases. Therefore, the resin balls 121 cannot be used.

  The third problem is that the configuration for close placement including the ball 121 is composed of a combination of a plurality of fine parts, and the number of assembly steps increases. That is, in the configuration of FIG. 10, the ball 121, the shim 120, and the cap 122 are each composed of fine parts. Further, since the ball height is determined by the thickness of the shim 120, fine adjustment of the ball height is difficult. Furthermore, the cap is tightened with, for example, a torque wrench, taking into account the looseness due to thermal expansion. Therefore, it takes a relatively long time to fix the ball 121. These operations are difficult if the number of balls 121 is large.

  The present invention was made in view of such circumstances, can suppress the occurrence of scratches on the back surface of the substrate by the proximity member interposed between the substrate and the heat treatment plate, can suppress wear of the proximity member, Furthermore, it aims at providing the heat processing apparatus which can suppress the looseness of a proximity member, reducing a man-hour.

In order to achieve such an object, the present invention has the following configuration.
That is, a heat treatment apparatus according to the present invention includes a heat treatment plate that performs heat treatment on a substrate, a screw hole portion provided on an upper surface of the heat treatment plate, the inner side surface of which is threaded, and a screw groove of the screw hole portion. A proximity member that is externally threaded to engage and is screwed into the screw hole to form a gap between the substrate and the heat treatment plate; and The proximity member is made of a heat-resistant resin, a surface of the proximity member that contacts the substrate is formed in a spherical shape, and a radius of curvature of the spherical surface is determined by the screw hole portion. It is characterized by being configured to be larger than the radius of.

  According to the heat treatment apparatus of the present invention, the proximity member that forms a gap between the substrate and the heat treatment plate is made of a heat-resistant resin. The resin has a low hardness and can suppress the occurrence of scratches on the back surface of the substrate. The surface of the proximity member that contacts the substrate is formed in a spherical shape, and the radius of curvature of the spherical surface is configured to be larger than the radius of the screw hole portion. Thereby, even if a proximity member is comprised with resin, abrasion of a proximity member can be suppressed. Therefore, the amount of change in the gap between the substrate and the heat treatment plate can be reduced, and the maintenance frequency can be reduced.

  Moreover, the upper surface of the heat treatment plate is provided with a screw hole portion whose internal side surface is threaded. The proximity member has an external side threaded so as to engage with the screw groove of the screw hole portion, and is screwed to be accommodated in the screw hole portion. The proximity member is threaded so as to be engaged with the screw groove of the screw hole portion, and it is easy to adjust the fine gap without combining a plurality of fine parts, so that the number of man-hours can be reduced.

  In the above-described heat treatment apparatus, it is preferable that the heat treatment apparatus further includes a spring member that is accommodated in the screw hole portion and pushes the proximity member in a direction opposite to a screw tightening direction of the proximity member with respect to the screw hole portion. Conventionally, the work of tightening strongly with the consideration of thermal expansion has been one cause of increasing the number of man-hours. Instead of the conventional work, the spring member is accommodated in the screw hole portion, and the proximity member is pushed in the direction opposite to the tightening direction of the screw of the proximity member, so that friction can be increased and screw loosening can be suppressed. As a result, man-hours can be further reduced.

  In the heat treatment apparatus described above, an example of the proximity member is configured integrally with the spring member. When the proximity member and the spring member are integrated, handling of a plurality of fine parts is reduced, and as a result, the number of man-hours can be reduced.

  In the heat treatment apparatus described above, an example of the spring member is made of a heat-resistant resin. It is easy to form a spring member having an arbitrary shape.

  In the above heat treatment apparatus, an example of the spring member is a single ring-shaped spring member. An example of the spring member is a single spiral spring member. By using a single ring-shaped spring member or a single spiral spring member as the spring member, the thickness of the spring member can be suppressed. Thereby, the depth of a screw hole part can be made shallow and the thickness of a heat processing plate can be made thin.

  In the above heat treatment apparatus, an example of the spring member is a plurality of leg spring members arranged in a ring shape. Thereby, a proximity member can be received by the ring shape in which a plurality of leg spring members are arranged. Further, the repulsive force can be adjusted by the number of leg spring members.

  Further, in the example of the heat treatment apparatus described above, a hole portion that accommodates a part of the spring member is provided on a lower surface of the proximity member, and a tip of the spring member accommodated in the hole portion is in the tightening direction. And at least one of the spring member and the hole is formed with an inclined surface inclined with respect to the tightening direction, and the spring member and the hole are formed on the inclined surface. The part is in contact.

  When the proximity member is screwed, the spring member and the hole are in contact with each other via the inclined surface, and the screw tightening force is elastically deformed so that the notch of the spring member in which the tip of the spring member is accommodated becomes narrow. . The repulsive force can suppress the loosening of the proximity member. The tip of the spring member is accommodated in the hole provided in the lower surface of the proximity member. Therefore, the height of the proximity member and the spring member can be kept low, thereby making it possible to reduce the depth of the screw hole portion and reduce the thickness of the heat treatment plate.

  According to the heat treatment apparatus of the present invention, the proximity member that forms a gap between the substrate and the heat treatment plate is made of a heat-resistant resin. The resin has a low hardness and can suppress the occurrence of scratches on the back surface of the substrate. The surface of the proximity member that contacts the substrate is formed in a spherical shape, and the radius of curvature of the spherical surface is configured to be larger than the radius of the screw hole portion. Thereby, even if a proximity member is comprised with resin, abrasion of a proximity member can be suppressed. Therefore, the amount of change in the gap between the substrate and the heat treatment plate can be reduced, and the maintenance frequency can be reduced.

1 is a longitudinal sectional view showing a schematic configuration of a heat treatment apparatus according to Example 1. FIG. It is a top view of a heat processing plate. (A) is a longitudinal cross-sectional view which shows the structure of the proximity member which concerns on Example 1, a screw hole part, and a spring member, (b) is a top view of the proximity member seen from the upper direction of (a). FIG. 6 is a longitudinal sectional view illustrating configurations of a proximity member, a screw hole portion, and a spring member according to a modified example of the first embodiment. It is a figure explaining attachment of a proximity member and a spring member. It is a figure which shows the board | substrate mounting height with respect to the frequency | count of mounting of the board | substrate to a proximity member. (A) is a longitudinal cross-sectional view which shows the structure of the proximity member, screw hole part, and leg spring member which concern on Example 2, (b) is the proximity member and leg spring member which were seen from the downward direction of (a). It is a bottom view. It is a longitudinal cross-sectional view which shows the structure of the proximity member which concerns on a modification, a screw hole part, and a spring member. It is a longitudinal cross-sectional view which shows the structure of the proximity member and spring member which concern on a modification. It is a figure which shows the structure for carrying out the conventional proximity | contact arrangement | positioning.

  Embodiment 1 of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view illustrating a schematic configuration of a heat treatment apparatus 1 according to the first embodiment. FIG. 2 is a plan view of the heat treatment plate 2. FIG. 3A is a longitudinal cross-sectional view illustrating configurations of the proximity member 21, the screw hole portion 23, and the spring member 25 according to the first embodiment. FIG. 3B is a plan view of the proximity member 21 viewed from above in FIG. 1 is a longitudinal sectional view taken along line AA in FIG.

  Please refer to FIG. The heat treatment apparatus 1 includes a heat treatment plate 2 that performs a preset heat treatment on the substrate W. The heat treatment plate 2 includes an upper plate 3 provided in the direction in which the substrate W is placed, a lower plate 4 provided in the opposite direction in which the substrate W is placed, and between the upper plate 3 and the lower plate 4. And a heater (heating mechanism) 5 disposed between the two. The upper plate 3 and the lower plate 4 are made of a metal having high thermal conductivity such as copper or aluminum.

  The heater 5 is formed of a film heater formed by, for example, sandwiching and bonding a metal foil, which is a resistance heating element, with a plurality of insulating films. The film heater is heated by electric power supplied from a power source (not shown). The insulating film is made of, for example, a resin having heat resistance such as polyester or polyimide (PI).

  The heat treatment plate 2 performs a preset heat treatment on the substrate W by the heater 5, but a cooling mechanism may be provided instead of the heater 5. As the cooling mechanism, for example, a Peltier element is used. The heat treatment plate 2 may include both the heater 5 and a cooling mechanism.

  Further, the heat treatment apparatus 1 includes three or more lift pins 7 that lift and lower the substrate W, a through hole 8 through which the lift pins 7 pass, and a lift drive unit (not shown) that is configured by a motor or the like to drive the lift pins 7 up and down. And.

  Further, the heat treatment apparatus 1 includes a control unit 11 configured by a central processing unit (CPU) and the like, and an operation unit 13 for operating the heat treatment apparatus 1. The control unit 11 controls each component of the heat treatment apparatus 1. The operation unit 13 includes a display unit such as a liquid crystal monitor, a storage unit such as a ROM (Read-only Memory), a RAM (Random-Access Memory), and a hard disk, and an input unit such as a keyboard, a mouse, and various buttons. I have. The storage unit stores heat treatment conditions and the like. For example, the control unit 11 controls heating of the heater 5 and raising / lowering of the lift pins 7 based on the heat treatment conditions stored in the storage unit.

  Next, a configuration in which the substrate W is disposed close to the heat treatment plate 2 (upper plate 3) will be described. As described above, the upper plate 3 of the heat treatment plate 2 is made of a metal having high thermal conductivity. In order to prevent the upper plate 3 and the substrate W from contacting each other and the substrate W from being contaminated with metal, the substrate W is disposed on the heat treatment plate 2 with a proximity member (also referred to as a spacer) 21 interposed therebetween. That is, by placing the substrate W on the proximity member 21, a gap D between the back surface of the substrate W and the upper surface 3 a of the heat treatment plate 2 is formed, and heat treatment by the heat treatment plate 2 is performed in a state where the gap D is formed. Is done.

  In the plan view of FIG. 2, three or more proximity members 21 are arranged. In FIG. 2, the number is 3, but for example, 10 or 15 may be provided. First, the screw hole 23 in which the proximity member 21 is accommodated will be described.

  Reference is made to FIG. On the upper surface 3a of the upper plate 3 of the heat treatment plate 2, a screw hole 23 for receiving the proximity member 21 is provided. The screw hole portion 23 is dug in a cylindrical shape and has a bottom surface. The internal side surface of the screw hole portion 23 is threaded, and the screw hole portion 23 functions as a female screw.

  On the other hand, the proximity member 21 is cylindrical. The outer side surface of the proximity member 21 is threaded so as to engage with the screw groove 23b of the screw hole 23, and the proximity member 21 functions as a male screw. Therefore, it is screwed and accommodated in the screw hole 23. Reference numeral 21b denotes a screw portion of the proximity member 21, and the proximity member 21 is rotated around the rotation center C, and the screw is tightened or loosened.

  The proximity member 21 is made of a heat-resistant resin. Examples of the resin having heat resistance include polyimide (PI), polybenzimidazole (PBI), and polyether ether ketone (PEEK). PI and PBI can be used in the heat-treated plate 2 having a maximum processing temperature of 350 ° C. On the other hand, PEEK can be used in the heat treatment plate 2 having a maximum processing temperature of 250 ° C. Further, the proximity member 21 is made of a non-metallic material, and the hardness of the resin of the proximity member 21 is preferably smaller than the hardness of the substrate W such as silicon (proximity member <substrate).

  Further, the upper surface 21a of the proximity member 21 in contact with the substrate W is formed in a spherical shape as shown in FIG. Further, the proximity member 21 is configured such that the radius of curvature R1 of the spherical upper surface 21a is larger than the radius R2 of the screw hole 23 (R1> R2). The radius R101 of the ball 121 which is the conventional proximity member in FIG. 10 is configured to be smaller than the radius R102 of the screw hole 123 in which the ball 121 is accommodated (R101 <R102). In the proximity member 21 of this embodiment, the radius of curvature R1 of the spherical upper surface 21a of the proximity member 21 is set larger than the radius R2 without increasing the radius R2 of the screw hole portion 23. Therefore, the amount of wear can be suppressed without increasing the screw hole 23.

  Further, as shown in FIGS. 3A and 3B, the proximity member 21 is formed with a tool groove 21c for receiving a tip of a tool for tightening or loosening a screw. Except for the tool groove 21c, substantially the entire upper surface 21a of the proximity member 21 is formed in a spherical shape.

  A spring member 25 is accommodated in the screw hole portion 23 together with the proximity member 21. The spring member 25 pushes up the proximity member 21 from below the proximity member 21. That is, the spring member 25 pushes the proximity member 21 in the direction L opposite to the screw tightening direction F of the proximity member 21 with respect to the screw hole portion 23. The spring member 25 is made of, for example, metal or resin having heat resistance such as the proximity member 21. If the spring member 25 is made of heat-resistant resin, the spring member 25 having an arbitrary shape can be easily formed.

  In the present embodiment, the spring member 25 is configured by a single ring-shaped spring member or a spiral spring member of almost one turn. If it demonstrates concretely, the spring member 25 will be comprised by the disk spring 25a of FIG. 3, or the spring washer 25b of FIG. 4, for example. By using a single disc spring 25a or a substantially single spring washer 25b as the spring member 25, the thickness of the spring member 25 can be suppressed. Thereby, the depth of the screw hole part 23 can be made shallow, and the thickness of the heat processing plate 2 can be made thin. The spring washer 25b is configured by cutting the ring and shifting the positions of the two cut surfaces along the center line of the ring.

  Further, if necessary, a plurality of disc springs 25a or a plurality of spring washers 25b may be arranged so as to overlap the screw hole 23, or a coil shape in which a plurality of spring washers 25b are connected and wound a plurality of times. It may be a spring member.

  FIG. 5 is a diagram for explaining attachment (assembly) of the proximity member 21 and the spring member 25. The spring member 25 is accommodated in the screw hole portion 23, and subsequently, the proximity member 21 is accommodated. Since the proximity member 21 is a male screw and the screw hole portion 23 is a female screw, the proximity member 21 is screwed to the screw hole portion 23. When the proximity member 21 approaches the target height position with respect to the screw hole portion 23, the proximity member 21 comes into contact with and presses the spring member 25. The proximity member 21 is screwed to the target height position. The spring member 25 is elastically deformed by tightening by the proximity member 21. After the proximity member 21 is installed, a repulsive force of the spring member 25 is applied to the proximity member 21. As a result, the screw portion 21b of the proximity member 21 is pressed against the screw groove 23b of the screw hole portion 23, and the frictional force increases. Therefore, loosening of the proximity member 21 can be suppressed.

  According to the present embodiment, the proximity member 21 that forms the gap D between the substrate W and the heat treatment plate 2 is made of a resin having heat resistance. The resin has low hardness and can suppress the occurrence of scratches on the back surface of the substrate W. The upper surface 21a of the proximity member 21 that contacts the substrate W is formed in a spherical shape, and the curvature radius R1 of the spherical upper surface 21a is configured to be larger than the radius R2 of the screw hole portion 23. . Thereby, even if the proximity member 21 is made of resin, wear of the proximity member 21 can be suppressed. Therefore, the variation amount of the gap D between the substrate W and the heat treatment plate 2 can be reduced, and the frequency of maintenance can be reduced.

  Here, with reference to FIG. 6, the effect which can suppress the abrasion of the proximity member 21 is demonstrated. FIG. 6 is a diagram illustrating the substrate placement height with respect to the number of times the substrate W is placed on the proximity member 21. The number of times the substrate W is placed (horizontal axis) is the number of times the substrate W is moved up and down and placed on the proximity member 21. On the other hand, the substrate placement height (vertical axis) is the height at which the substrate is placed. That is, the amount of variation from the initial height is the wear amount AD. In FIG. 6, a comparison is made between two types of cases where the radius of curvature R1 of the spherical upper surface 21a is large and small. As the number of times of mounting increases, the proximity member 21 wears, so that point contact becomes surface contact. However, when the radius of curvature R1 is small, the wear amount AD is large, whereas when the radius of curvature R1 is large, the radius of curvature R1 is small. Compared to the case, the wear amount AD can be reduced. For example, it is assumed that there is a gap D between the heat treatment plate 2 and the substrate W and an allowable amount (range) P of the gap D. If the wear amount AD is smaller than the allowable amount P (P> AD), it is not necessary to adjust the gap D again. However, if the wear amount AD is larger than the allowable amount P (P <AD), the gap D needs to be adjusted again.

  In addition, if the proximity member 21 is worn and changes from point contact to surface contact, it is conceivable to make the upper surface 21a of the proximity member 21 flat from the beginning. In this case, when the substrate W comes into contact with the flat upper surface 21a, there is a drawback that, for example, wear occurs at the contacted portion and the generation of dust increases.

  In addition, the upper surface 3a of the heat treatment plate 2 is provided with a screw hole portion 23 whose internal side surface is threaded. The proximity member 21 is threaded on the outer side surface so as to be engaged with the screw groove 23 b of the screw hole 23, and is screwed to be accommodated in the screw hole 23. The proximity member 21 is threaded so as to engage with the screw groove 23b of the screw hole 23, and the fine gap D can be easily adjusted without combining a plurality of conventional fine parts. Therefore, man-hours can be reduced.

  The heat treatment apparatus 1 further includes a spring member 25 that is accommodated in the screw hole portion 23 and pushes the proximity member 21 in a direction L opposite to the screw tightening direction F of the proximity member 21 with respect to the screw hole portion 23. Conventionally, the work of tightening strongly with the consideration of thermal expansion has been one cause of increasing the number of man-hours. Instead of the conventional work, the spring member 25 is accommodated in the screw hole portion 23, and the proximity member 21 is pushed in the direction L opposite to the tightening direction F of the screw of the proximity member 21, so that the friction is increased at the portion where the screw is engaged. And screw loosening can be suppressed. As a result, man-hours can be further reduced.

  Next, Embodiment 2 of the present invention will be described with reference to the drawings. In addition, the description which overlaps with Example 1 is abbreviate | omitted. FIG. 7A is a longitudinal cross-sectional view illustrating configurations of the proximity member 21, the screw hole portion 23, and the leg spring member 25c according to the second embodiment. FIG. 7B is a bottom view of the proximity member 21 and the leg spring member 25c as viewed from below in FIG.

  Reference is made to FIG. In the first embodiment, the proximity member 21 is configured separately from the spring member 25, and is configured by two members. In this regard, in the present embodiment, the proximity member 21 is configured integrally with the spring member 25. Further, in the first embodiment, as the spring member 25, for example, the disc spring 25a or the spring washer 25b is used. In this regard, the spring member 25 of the present embodiment is composed of a plurality of leg-like leg spring members 25c arranged in a ring shape apart from each other.

  In the present embodiment, the proximity member 21 is configured integrally with the leg spring member 25c. That is, the proximity member 21 and the leg spring member 25c are formed by integral molding. The leg spring member 25c is made of a heat resistant resin. The leg spring member 25c is preferably made of, for example, the same resin as that of the proximity member 21, but the leg spring member 25c may be made of a resin different from that of the proximity member 21.

  Further, as shown in FIG. 7B, the leg spring member 25 c is configured to be branched into four by a cross-shaped cut 31. That is, the four leg spring members 25c are arranged in a ring shape apart from each other. When the proximity member 21 is screwed, the leg spring member 25c integrated with the proximity member 21 contacts the bottom surface of the screw hole 23 in front of the target position. When the leg spring member 25 c is pushed in by screwing the proximity member 21, the deformed leg spring member 25 c is received in the notch 31.

  In FIG. 7A, the leg spring member 25c is formed to extend along the rotation center C. However, the leg spring member 25c is inclined with respect to the rotation center C like the disc spring 25a in FIG. It may be formed to extend. Further, the leg spring members 25c are not limited to four, and may be two or more. Further, the leg spring members 25c may be arranged in a vertical and horizontal matrix. Further, the leg spring member 25c may be one instead of being arranged in a ring shape.

  According to the present embodiment, when the proximity member 21 and the spring member 25 are integrated, the handling of a plurality of fine parts is reduced, and as a result, the number of man-hours can be reduced. The spring members 25 are four leg spring members 25c arranged in a ring shape. Accordingly, the proximity member 21 can be received in a ring shape in which the four leg spring members 25c are arranged. Further, the repulsive force can be adjusted by the number of leg spring members 25c.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) Instead of the proximity member 21 and the spring member 25 (the disc spring 25a, the spring washer 25b, or the leg spring member 25c) of each embodiment described above, a configuration as shown in FIG. 8 may be used. That is, in FIG. 8, the lower surface 41 d of the proximity member 41 is provided with a hole 47 that accommodates a part of the spring member 45. The tip of the spring member 45 accommodated in the hole 47 is configured to be branched with a cut 49 in the tightening direction F (or the loosening direction L, that is, the rotation center C). The spring member 45 and the hole 47 are formed with inclined surfaces 45a and 47a inclined with respect to the fastening direction F, and the spring member 45 and the hole 47 are in contact with each other through the inclined surfaces 45a and 47a.

  The inclined surface 45 a is an outer side surface of the spring member 45, and the inclined surface 47 a is an inner side surface of the hole 47. That is, the spring member 45 is formed in a truncated cone shape or a truncated pyramid shape, and the hole 47 is also dug in a truncated cone shape or a truncated pyramid shape. In addition, inclined surfaces 45 a and 47 b may be formed on one of the spring member 45 and the hole 47. For example, as long as the inclined surface 45a is formed in the spring member 45, the hole 47 does not need to be formed with the inclined surface 47a.

  When the proximity member 41 is screwed, the proximity member 41 is pressed against the spring member 45 via the inclined surfaces 45a and 47a. By pressing the proximity member 41, the tip of the spring member 45 is deformed so that the cut 49 becomes narrow. When the proximity member 41 is disposed at the target height position, the proximity member 41 is pushed in the direction opposite to the tightening direction F (the loosening direction L) by a repulsive force such as deformation of the tip of the spring member 45. Therefore, screw loosening can be suppressed.

  According to this modification, when the proximity member 41 is screwed, the spring member 45 and the hole 47 come into contact with each other through the inclined surfaces 45a and 47a, and the tip of the spring member 45 is moved by the screw tightening force. The spring member 45 accommodated is elastically deformed so that the cut 49 is narrowed. The repulsive force can suppress the loosening of the proximity member 41. Further, the tip of the spring member 45 is accommodated in the hole 47 provided in the lower surface 41 d of the proximity member 41. For this reason, the height of the proximity member 41 and the spring member 45 can be kept low, whereby the depth of the screw hole portion 23 can be reduced and the thickness of the heat treatment plate 2 can be reduced.

  It may be configured as shown in FIG. That is, the inclined surface (inner side surface) 47a of the hole 47 is provided with a protrusion 49, while the inclined surface (outer peripheral side surface) 45a of the spring member 45 is provided with a guide portion 53 recessed in a cylindrical shape. It has been. Accordingly, when the tip of the spring member 45 is accommodated in the hole 47, the spring member 45 is held in the hole 47. That is, the proximity member 41 is configured integrally with the spring member 45. The spring member 45 can move substantially along the center of rotation C within a preset range with respect to the proximity member 41 by the protrusion 51 and the guide 53.

  (2) In Example 1 mentioned above, the proximity member 21 was comprised separately from the spring member 25, and was comprised by two members. In this regard, the proximity member 21 may be configured integrally with the spring member 25. Including the case where the spring member 25 is a metal, the proximity member 21 and the spring member 25 may be formed by integral molding. Further, a holding mechanism may be provided as shown in FIG. When the proximity member 21 and the spring member 25 are integrated, handling of a plurality of fine parts is reduced, and as a result, the number of man-hours can be reduced.

  (3) In each of the above-described embodiments and modifications, the proximity members 21 and 41 are made of only heat-resistant resin, but may be a combination of other materials. For example, the spherical upper surface 21a in contact with the substrate W may be coated with a heat resistant resin. In this case, the material to be coated may be ceramic or metal. The thickness of the coating is set in consideration of the amount of wear and the like.

DESCRIPTION OF SYMBOLS 1 ... Heat processing apparatus 2 ... Heat processing plate 3 ... Upper plate 3a ... Upper surface 21, 41 ... Proximity member 21a ... Upper surface 23 ... Screw hole part 23b ... Screw groove 25, 45 ... Spring member 25a ... Disc spring 25b ... Spring washer 25c ... Leg Spring member 31, 49 ... Notch 41d ... Lower surface 45a, 47a ... Inclined surface 47 ... Hole part D ... Crevice F ... Tightening direction R1 ... Radius of curvature of spherical upper surface of proximity member R2 ... Radius of screw hole part

Claims (8)

A heat treatment plate for heat treating the substrate;
A screw hole provided on the upper surface of the heat treatment plate, the inner side surface of which is threaded;
An outer side surface is threaded so as to engage with a screw groove of the screw hole portion, and is a proximity member that is screwed and accommodated in the screw hole portion, and a gap is formed between the substrate and the heat treatment plate. The proximity member to be formed,
The proximity member is made of a heat-resistant resin,
A surface of the proximity member that contacts the substrate is formed in a spherical shape, and a radius of curvature of the spherical surface is configured to be larger than a radius of the screw hole portion. Heat treatment equipment. The heat treatment apparatus according to claim 1,
A heat treatment apparatus, further comprising: a spring member that is accommodated in the screw hole portion and pushes the proximity member in a direction opposite to a tightening direction of a screw of the proximity member with respect to the screw hole portion. The heat treatment apparatus according to claim 2,
The heat treatment apparatus, wherein the proximity member is integrally formed with the spring member. In the heat treatment apparatus according to claim 2 or 3,
The heat treatment apparatus, wherein the spring member is made of heat-resistant resin. In the heat processing apparatus in any one of Claim 2 to 4,
The heat treatment apparatus, wherein the spring member is a single ring-shaped spring member. In the heat processing apparatus in any one of Claim 2 to 4,
The heat treatment apparatus according to claim 1, wherein the spring member is a single spiral spring member.
A heat treatment apparatus characterized by In the heat processing apparatus in any one of Claim 2 to 4,
The heat treatment apparatus, wherein the spring member is a plurality of leg spring members arranged in a ring shape. The heat treatment apparatus according to any one of claims 2 to 4, wherein a hole for accommodating a part of the spring member is provided on a lower surface of the proximity member.
The tip of the spring member accommodated in the hole is configured to be branched with a cut in the tightening direction,
At least one of the spring member and the hole is formed with an inclined surface inclined with respect to the tightening direction, and the spring member and the hole are in contact with each other on the inclined surface.

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