JP2018530196A5 - - Google Patents

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Publication number
JP2018530196A5
JP2018530196A5 JP2018506298A JP2018506298A JP2018530196A5 JP 2018530196 A5 JP2018530196 A5 JP 2018530196A5 JP 2018506298 A JP2018506298 A JP 2018506298A JP 2018506298 A JP2018506298 A JP 2018506298A JP 2018530196 A5 JP2018530196 A5 JP 2018530196A5
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JP
Japan
Prior art keywords
micromachined
ultrasound transducer
integrated circuit
transducer array
coupled
Prior art date
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Application number
JP2018506298A
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English (en)
Japanese (ja)
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JP6767474B2 (ja
JP2018530196A (ja
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Priority claimed from PCT/EP2016/068676 external-priority patent/WO2017025438A1/en
Publication of JP2018530196A publication Critical patent/JP2018530196A/ja
Publication of JP2018530196A5 publication Critical patent/JP2018530196A5/ja
Application granted granted Critical
Publication of JP6767474B2 publication Critical patent/JP6767474B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018506298A 2015-08-11 2016-08-04 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ Expired - Fee Related JP6767474B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562203531P 2015-08-11 2015-08-11
US62/203,531 2015-08-11
EP15183228.4 2015-09-01
EP15183228 2015-09-01
PCT/EP2016/068676 WO2017025438A1 (en) 2015-08-11 2016-08-04 Capacitive micromachined ultrasonic transducers with increased lifetime

Publications (3)

Publication Number Publication Date
JP2018530196A JP2018530196A (ja) 2018-10-11
JP2018530196A5 true JP2018530196A5 (2) 2019-07-25
JP6767474B2 JP6767474B2 (ja) 2020-10-14

Family

ID=54072673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018506298A Expired - Fee Related JP6767474B2 (ja) 2015-08-11 2016-08-04 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ

Country Status (5)

Country Link
US (1) US11097312B2 (2)
EP (1) EP3334538A1 (2)
JP (1) JP6767474B2 (2)
CN (1) CN107921480B (2)
WO (1) WO2017025438A1 (2)

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