JP2019021911A5 - - Google Patents
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- JP2019021911A5 JP2019021911A5 JP2018110443A JP2018110443A JP2019021911A5 JP 2019021911 A5 JP2019021911 A5 JP 2019021911A5 JP 2018110443 A JP2018110443 A JP 2018110443A JP 2018110443 A JP2018110443 A JP 2018110443A JP 2019021911 A5 JP2019021911 A5 JP 2019021911A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- forming region
- adjusting unit
- energy
- pattern forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 5
- 230000007261 regionalization Effects 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000465 moulding Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020180078592A KR102375485B1 (ko) | 2017-07-14 | 2018-07-06 | 임프린트 장치, 물품 제조 방법, 및 성형 장치 |
| KR1020220031201A KR102523310B1 (ko) | 2017-07-14 | 2022-03-14 | 임프린트 장치, 물품 제조 방법, 및 성형 장치 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017137750 | 2017-07-14 | ||
| JP2017137750 | 2017-07-14 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019021911A JP2019021911A (ja) | 2019-02-07 |
| JP2019021911A5 true JP2019021911A5 (2) | 2021-07-26 |
| JP7262934B2 JP7262934B2 (ja) | 2023-04-24 |
Family
ID=65355939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018110443A Active JP7262934B2 (ja) | 2017-07-14 | 2018-06-08 | インプリント装置、物品製造方法および、平坦化装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7262934B2 (2) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7195789B2 (ja) * | 2018-06-29 | 2022-12-26 | キヤノン株式会社 | 平坦化装置、及び物品の製造方法 |
| JP7278135B2 (ja) * | 2019-04-02 | 2023-05-19 | キヤノン株式会社 | インプリント装置および物品製造方法 |
| US11181819B2 (en) * | 2019-05-31 | 2021-11-23 | Canon Kabushiki Kaisha | Frame curing method for extrusion control |
| JP7325232B2 (ja) * | 2019-06-07 | 2023-08-14 | キヤノン株式会社 | 膜形成装置および物品製造方法 |
| JP7284639B2 (ja) * | 2019-06-07 | 2023-05-31 | キヤノン株式会社 | 成形装置、および物品製造方法 |
| JP7263152B2 (ja) * | 2019-06-27 | 2023-04-24 | キヤノン株式会社 | 成形装置、成形装置を用いた物品製造方法 |
| US11550216B2 (en) * | 2019-11-25 | 2023-01-10 | Canon Kabushiki Kaisha | Systems and methods for curing a shaped film |
| JP7558674B2 (ja) * | 2020-04-06 | 2024-10-01 | キヤノン株式会社 | インプリント装置、インプリント方法及び物品の製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4481698B2 (ja) * | 2004-03-29 | 2010-06-16 | キヤノン株式会社 | 加工装置 |
| JP4928963B2 (ja) * | 2007-01-30 | 2012-05-09 | 東芝機械株式会社 | 転写方法及び装置 |
| US8012394B2 (en) * | 2007-12-28 | 2011-09-06 | Molecular Imprints, Inc. | Template pattern density doubling |
| JP5787922B2 (ja) * | 2013-03-15 | 2015-09-30 | 株式会社東芝 | パターン形成方法及びパターン形成装置 |
| JP6632270B2 (ja) * | 2014-09-08 | 2020-01-22 | キヤノン株式会社 | インプリント装置、インプリント方法および物品の製造方法 |
| JP6437387B2 (ja) * | 2015-05-25 | 2018-12-12 | 東芝メモリ株式会社 | 基板平坦化方法 |
-
2018
- 2018-06-08 JP JP2018110443A patent/JP7262934B2/ja active Active
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