JP2019078563A - Directional coupler - Google Patents

Directional coupler Download PDF

Info

Publication number
JP2019078563A
JP2019078563A JP2017203732A JP2017203732A JP2019078563A JP 2019078563 A JP2019078563 A JP 2019078563A JP 2017203732 A JP2017203732 A JP 2017203732A JP 2017203732 A JP2017203732 A JP 2017203732A JP 2019078563 A JP2019078563 A JP 2019078563A
Authority
JP
Japan
Prior art keywords
detector
detection unit
wiring board
printed wiring
directional coupler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2017203732A
Other languages
Japanese (ja)
Other versions
JP7016238B2 (en
Inventor
研也 中島
Kenya Nakajima
研也 中島
童吾 大橋
Dogo Ohashi
童吾 大橋
善識 宮野
Yoshinori Miyano
善識 宮野
真行 海田
Masayuki Kaida
真行 海田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2017203732A priority Critical patent/JP7016238B2/en
Publication of JP2019078563A publication Critical patent/JP2019078563A/en
Application granted granted Critical
Publication of JP7016238B2 publication Critical patent/JP7016238B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Plasma Technology (AREA)

Abstract

【課題】進行波と反射波の測定を安定して行うことができる方向性結合器を提供する。【解決手段】湾曲した金属板から成る検出器２３ａと、プリント配線板２５に形成した金属膜の内部配線４３とによって巻線を形成し、導電線１５に流れる電流が形成する磁束によって巻線に起電力を発生させ、終端回路２４によって、進行波と反射波とを区別して検出する。検出器２３ａと内部配線４３とで構成された巻線の芯は空気なので、巻線の電気的特性は温度変化の影響を受けない。【選択図】図２PROBLEM TO BE SOLVED: To provide a directional coupler capable of stably measuring a traveling wave and a reflected wave. SOLUTION: A winding is formed by a detector 23a made of a curved metal plate and an internal wiring 43 of a metal film formed on a printed wiring board 25, and the winding is formed by a magnetic flux formed by a current flowing through a conductive wire 15. An electromotive force is generated, and a traveling wave and a reflected wave are detected separately by the termination circuit 24. Since the core of the winding composed of the detector 23a and the internal wiring 43 is air, the electrical characteristics of the winding are not affected by the temperature change. [Selection diagram] Fig. 2

Description

本発明は進行波と反射波とを検出する方向性結合器に関する。   The present invention relates to a directional coupler that detects a traveling wave and a reflected wave.

近年の半導体製造装置の処理技術高度化にともない、プラズマプロセスにおける高周波電力の高精度な測定、精緻な制御が必要とされている。   With the advancement of processing technology of semiconductor manufacturing equipment in recent years, high-precision measurement and fine control of high-frequency power in plasma processing are required.

伝送線路上を通過する高周波電力を測定する方法としては、特許第3,299,273号公報に代表されるように、伝送線路に発生している電磁界を利用して、２つの高周波信号を検出し、処理する方法が主流である。   As a method of measuring high frequency power passing on the transmission line, as represented by Japanese Patent No. 3,299,273, two high frequency signals are detected and processed using an electromagnetic field generated in the transmission line. Methods are the mainstream.

電磁界センサは、検出される信号の特徴により二つに大別され、方向性結合器、V・Iセンサと呼ばれる。方向性結合器は、伝送線路に存在する伝搬方向に進行する電磁波と、反射して戻ってくる電磁波に着目し、進行波信号・反射波信号を検出する。V・Iセンサは電界・磁界変動を個別に検出して、電圧信号・電流信号またはそれらの合わさった信号として検出する。いずれの方式においても、検出された信号は、加減算、乗除算、位相検出、A/D変換、デジタル信号処理などが行われ、周波数ごとの進行波電力や反射波電力、有効消費電力、負荷インピーダンスなどに変換される。   The electromagnetic field sensors are roughly divided into two depending on the characteristics of the detected signals, and are called directional couplers or VI sensors. The directional coupler detects the traveling wave signal / reflected wave signal, paying attention to the electromagnetic wave traveling in the propagation direction present in the transmission line and the electromagnetic wave reflected back. The V · I sensor separately detects electric field / magnetic field fluctuation and detects it as a voltage signal / current signal or their combined signal. In any of the methods, the detected signal is subjected to addition / subtraction, multiplication / division, phase detection, A / D conversion, digital signal processing, etc., and traveling wave power or reflected wave power for each frequency, effective power consumption, load impedance Converted to etc.

方向性結合器の性能の重要な要素の一つとして、有効消費電力の測定値の環境要因による変動が少ない事が挙げられる。しかしながら、方向性結合器を構成する部材の材質は、温度変化による影響を受けやすく、温度変化によってセンサ自体の検出電圧に変動が生じてしまう。   One important factor in the performance of directional couplers is the fact that the measurement of effective power consumption varies little with environmental factors. However, the material of the member constituting the directional coupler is susceptible to temperature change, and the temperature change causes fluctuation in the detection voltage of the sensor itself.

方向性結合器を構成する部材として抵抗やキャパシタ素子は、温度変化の少ない部品が従来から存在しているが、磁性体は透磁率の温度変化やBHカーブに起因する非線形性により結合度が変化して検出電圧に変化を与えるため、磁性体を使用した従来技術の磁界結合センサは温度変化による検出電圧変動が無視できない。   As components constituting directional couplers, resistance and capacitor elements have conventionally had parts with little temperature change, but the magnetic substance has a change in coupling due to non-linearity due to temperature change of the magnetic permeability and BH curve Since the detection voltage changes, the magnetic field coupling sensor of the prior art using a magnetic material can not ignore the detection voltage fluctuation due to the temperature change.

その対策として、プリント配線板上に形成したマイクロストリップ型方向性結合器や、パターンをスルーホールまたはブラインドビアで接続した電流・電圧センサのように、フォトリソグラフィ技術を用いて形状精度の高いセンサを作成する改善例がある。   As a countermeasure, a sensor with high shape accuracy using photolithography technology such as a microstrip directional coupler formed on a printed wiring board or a current / voltage sensor whose pattern is connected by through holes or blind vias. There is an improvement example to make.

図９は、基板１２５ａ上に、主線路１１５ａが配置され、主線路１１５ａの両側に、副線路１２３ａ、１２３ａが配置されたストリップライン型方向性結合器であり、副線路１２３ａ、１２３ａの一端には終端回路１２４が接続され、主線路１１５ａを流れる進行波の電流と反射波の電流とが、副線路１２３ａ、１２３ａによって個別に検出される。   FIG. 9 shows a stripline type directional coupler in which a main line 115a is disposed on a substrate 125a, and sublines 123a and 123a are disposed on both sides of the main line 115a, one end of the sublines 123a and 123a. The termination circuit 124 is connected, and the current of the traveling wave flowing through the main line 115a and the current of the reflected wave are separately detected by the sub lines 123a and 123a.

図１０は、二個の筺体１１１，１１２間に挟まれたプリント配線板１１６に副線路１２３ｂが設けられたプリント配線板ビア・パターンコイル型方向性結合器であり、ケーブル孔１３６ｂに挿通された内部導体１１５ｂに流れる進行波の電流と反射波の電流とが副線路１２３ｂによって別々に検出される。符号１２４ｂは終端回路である。
しかしながら副線路１２３ａ、１２３ｂの周囲には誘電体となる基板材料があり特性を劣化させる原因の一つとなる。 FIG. 10 shows a printed wiring board via / pattern coil type directional coupler in which a sub-line 123b is provided on a printed wiring board 116 sandwiched between two housings 111 and 112, and is inserted into the cable hole 136b. The current of the traveling wave and the current of the reflected wave flowing to the inner conductor 115b are separately detected by the sub line 123b. Reference numeral 124 b is a termination circuit.
However, there is a substrate material to be a dielectric around the sub-lines 123a and 123b, which is one of the causes of deterioration of the characteristics.

基板材料で一般的に使われるＦＲ４は吸水率・湿度・温度に依存して寸法変化・誘電率変化を起こし、プリント配線板のセンサ回路のインピーダンス変化を生じさせる。また大電力用途では非常に大きな温度変化にさらされることから、測定結果を安定化させる為にはより高価な基板材料を使用せざるを得なかった。   FR4 generally used as a substrate material causes dimensional change and dielectric constant change depending on water absorption, humidity and temperature, and causes impedance change of a sensor circuit of a printed wiring board. In addition, since high power applications are exposed to very large temperature changes, more expensive substrate materials have to be used to stabilize the measurement results.

なお、空芯の１ターン型コイル型電流センサ・方向性結合器は従来から存在するもの、例えば１ＭＨｚ前後の低周波では、結合度を上げる為にセンサ形状が伝搬方向へ長くなりセンサの体積が大きくなる。   In addition, an air-core one-turn coil current sensor and directional coupler are conventionally used. For example, at low frequencies around 1 MHz, the sensor shape becomes longer in the propagation direction to increase the coupling degree, and the sensor volume is increased. growing.

特許第３２９９２７３号公報Patent No. 3 299 273 米国特許第６，４４９，５６８号公報U.S. Patent No. 6,449,568 米国特許第６，５０１，２８５号公報U.S. Patent No. 6,501,285 特許第３３１７６８４号公報Patent No. 3317684 特許第５５９９６０７号公報Patent No. 5599607 gazette 米国特許第８，４１４，３２６号公報U.S. Patent No. 8,414,326 特開平１１−８０９５号公報Japanese Patent Application Laid-Open No. 11-8095 特開平８−３３５８０９号公報JP-A-8-335809 特開２０００−４９５１０号公報JP 2000-49510 A 特開２００３−３２０１３号公報JP 2003-32013 A 特開２００６−１９１２２１号公報JP, 2006-191221, A 特開２００９−１０５８６３号公報JP, 2009-105863, A 米国特許第７，７５５，４５１号公報U.S. Patent No. 7,755,451 米国特許第８，２０３，３９８号公報U.S. Patent No. 8,203,398 米国特許第７，８８５，７７４号公報U.S. Patent No. 7,885,774

本発明は上記温度変化があっても検出精度は低下しない技術を提供することにあり、検出レベル・検出位相が安定する小型方向性結合器を比較的安価に提供する。   The present invention is to provide a technology in which the detection accuracy does not decrease even if there is the above-mentioned temperature change, and provides a small directional coupler relatively stable in detection level and detection phase.

上記課題を解決するために、本発明は、プリント配線板と、前記プリント配線板に形成され、測定対象の導電線が挿通されるべきケーブル孔と、前記プリント配線板に設けられ、前記ケーブル孔に挿通された前記導電線に流れる進行波と反射波のいずれか一方を検出する第一の検出部と、他方を検出する第二の検出部とを有する方向性結合器であって、前記第一、第二の検出部は、中央に測定孔が位置する湾曲形状にされた複数の検出器と、前記検出器と検出器とを接続する複数の内部配線と、を有し、前記検出器の両端部のうち、一方の端部は前記測定孔の縁の近くに配置され他方の端部は前記一方の端部よりも前記縁から遠くに配置されて前記検出器同士は前記プリント配線板上に対面して立設され、前記第一、第二の検出部は、複数の前記検出器と複数の前記内部配線とによって形成された巻線を有し、前記第一の検出部の前記巻線を形成する前記検出器の前記測定孔と、前記第二の検出部の前記巻線を形成する前記検出器の前記測定孔とには、前記ケーブル孔に挿通された前記導電線に電流が流れたときに形成される磁束の少なくとも一部がそれぞれ貫通するように配置された方向性結合器である。
本発明は、前記内部配線は前記プリント配線板に形成された金属膜である方向性結合器である。
本発明は、前記ケーブル孔の中心を中心とする時計回りの方向と反時計回りの方向のいずれか一方を第一の配置方向としたときに、前記第一の検出部は、前記縁の近くに配置された前記端部が、前記第一の配置方向に隣接配置された前記検出器の前記縁から遠くに配置された前記端部に接続された前記検出器を有し、前記第一の配置方向と同じ方向又は逆の方向を第二の配置方向としたときに、前記第二の検出部は、前記縁の近くに配置された前記端部が、前記第二の配置方向に隣接配置された前記検出器の前記縁から遠くに配置された前記端部に接続された前記検出器を有する方向性結合器である。
本発明は、前記第一の検出部の前記検出器と前記第二の検出部の前記検出器とは、前記プリント配線板の同じ面に配置された方向性結合器である。
本発明は、前記第一の検出部の前記検出器と前記第二の検出部の前記検出器とは、前記プリント配線板の異なる面に配置された方向性結合器である。
本発明は、前記ケーブル孔に挿通された前記導電線を有する方向性結合器である。
本発明は、前記導電線には同軸ケーブルの内部導体が用いられた方向性結合器である。 In order to solve the above problems, according to the present invention, a printed wiring board, a cable hole formed in the printed wiring board and into which a conductive wire to be measured is to be inserted, and the cable hole provided in the printed wiring board A directional coupler comprising: a first detection unit for detecting either one of a traveling wave and a reflected wave flowing through the conductive wire inserted in the first and second detection units for detecting the other; The first and second detection units have a plurality of curved detectors each having a measurement hole at the center, and a plurality of internal wirings connecting the detectors and the detectors, and the detectors Among the two end portions, one end portion is disposed near the edge of the measurement hole, and the other end portion is disposed farther from the edge than the one end portion, and the detectors are connected to the printed wiring board The first and second detection units are erected facing each other on the plurality of The measurement hole of the detector which has a winding formed by the detector and the plurality of internal wirings and which forms the winding of the first detection unit; and the second detection unit In the measurement hole of the detector forming a winding, at least a part of the magnetic flux formed when the current flows through the conductive wire inserted in the cable hole is arranged to penetrate respectively It is a directional coupler.
The present invention is the directional coupler, wherein the internal wiring is a metal film formed on the printed wiring board.
In the present invention, the first detection portion is near the edge when one of a clockwise direction and a counterclockwise direction around the center of the cable hole is a first arrangement direction. The end located at the first end having the detector connected to the end located far from the edge of the detector located adjacent in the first disposition direction; When the second arrangement direction is the same as or opposite to the arrangement direction, the second detection unit may be arranged such that the end disposed near the edge is adjacent to the second arrangement direction. A directional coupler comprising the detector connected to the end remote from the edge of the detector.
In the present invention, the detector of the first detector and the detector of the second detector are directional couplers disposed on the same surface of the printed wiring board.
In the present invention, the detector of the first detection unit and the detector of the second detection unit are directional couplers disposed on different sides of the printed wiring board.
The present invention is a directional coupler having the conductive wire inserted into the cable hole.
The present invention is a directional coupler in which an inner conductor of a coaxial cable is used for the conductive wire.

温度の影響を受けない検出結果が得られる。   It is possible to obtain detection results that are not affected by temperature.

本発明の一例の方向性検出器の外観を示す図Diagram showing the appearance of a directional detector according to an example of the present invention 本発明の検出器本体を示す図The figure which shows the detector main body of this invention (ａ)、(ｂ)：本発明の検出器を示す図(a), (b): The figure which shows the detector of this invention (ａ)：連結用電極部を説明するための図 (ｂ)：立設された検出器を説明するための図(a): A diagram for explaining the connection electrode part (b): A diagram for explaining the erected detector 本発明の他の例の方向性検出器の外観を示す図Diagram showing the appearance of another example of the directional detector of the present invention その方向性検出器の断面図Cross section of the directional detector 温度とゲイン変動の関係を示すグラフGraph showing the relationship between temperature and gain fluctuation 温度とフェーズ変動の関係を示すグラフGraph showing the relationship between temperature and phase variation 従来技術のストリップライン型方向性結合器Prior art stripline directional coupler 従来技術のプリント配線板ビア・パターンコイル型方向性結合器Prior art printed wiring board via / pattern coil type directional coupler

図１、図２を参照し、符号１０ａは本発明の第一例の方向性結合器であり、第一の筺体１１と、第二の筺体１２と、検出器本体１６とを有している。
検出器本体１６はプリント配線板２５を有しており、プリント配線板２５の中央位置にはプリント配線板２５を貫通するケーブル孔３６が設けられている。符号２９は、方向性結合器１０ａを取りつけるための穴である。図１のプリント配線板２５は、図２のプリント配線板２５のＡ−Ａ線截断断面図に相当する。 1 and 2, reference numeral 10a is a directional coupler according to a first example of the present invention, which comprises a first housing 11, a second housing 12, and a detector main body 16. .
The detector main body 16 has a printed wiring board 25, and a cable hole 36 penetrating the printed wiring board 25 is provided at a central position of the printed wiring board 25. Reference numeral 29 is a hole for mounting the directional coupler 10a. The printed wiring board 25 of FIG. 1 corresponds to a cross-sectional view of the printed wiring board 25 of FIG.

方向性結合器１０ａの測定対象は、例えば高周波電圧を用いる装置に電力を供給するための同軸ケーブル等であり、同軸ケーブルは、一般に、接地電位に接続された筒状の外部導体と、外部導体とは絶縁された状態で外部導体の内部に挿通された太線状の内部導体とを有している。   An object to be measured of the directional coupler 10a is, for example, a coaxial cable or the like for supplying power to a device using a high frequency voltage, and the coaxial cable generally has a cylindrical outer conductor connected to a ground potential, and an outer conductor. And a thick linear inner conductor inserted inside the outer conductor in an insulated state.

図１の符号１５は、本発明の方向性結合器１０ａが測定対象とする導電線であり、ここでは同軸ケーブルの内部導体が導電線１５としてケーブル孔３６に挿通される。導電線は、同軸ケーブルの内部導体に限定されず、例えば平行な二本の電線のうち信号線を導電線として用いることができる。   Reference numeral 15 in FIG. 1 denotes a conductive wire to be measured by the directional coupler 10a of the present invention. Here, the inner conductor of the coaxial cable is inserted into the cable hole 36 as the conductive wire 15. The conductive wire is not limited to the inner conductor of the coaxial cable, and for example, a signal wire of two parallel electric wires can be used as the conductive wire.

ケーブル孔３６の周囲に位置するプリント配線板２５上には検出部２０が配置されている。
検出部２０には、導電線１５中を一方向に流れる進行波電流と反対方向に流れる反射波電流のうち、いずれか一方の電流を検出する第一の検出部２１ａと、他方の電流を検出する第二の検出部２２ａとが設けられている。第一、第二の検出部２１ａ、２２ａは、図４に示す複数の連結用電極部４０と、複数の検出器２３ａとをそれぞれ有している。 A detection unit 20 is disposed on the printed wiring board 25 located around the cable hole 36.
In the detection unit 20, a first detection unit 21a for detecting one of the reflected wave currents flowing in the opposite direction to the traveling wave current flowing in one direction in the conductive wire 15, and the other current are detected. And a second detection unit 22a. The first and second detection units 21a and 22a respectively have a plurality of connection electrode units 40 shown in FIG. 4 and a plurality of detectors 23a.

各検出器２３ａは同じ形状にされており、図３(ａ)は検出器２３ａの形状の一例である。この検出器２３ａは、後述する巻線の中の１ターンを構成する部品であり、一個の検出器２３ａは、両端が近接して離間した場所に位置するように湾曲した形状の一枚の金属板であり、その金属板の形状はＵ字形形状になっている。   Each detector 23 a has the same shape, and FIG. 3A is an example of the shape of the detector 23 a. The detector 23a is a component constituting one turn in a winding described later, and one detector 23a is a metal having a curved shape so that both ends thereof are positioned close and separated. It is a plate, and the shape of the metal plate is U-shaped.

各検出器２３ａの中央には、検出器２３ａの金属板で囲まれる測定孔３１がそれぞれ形成されている。検出器２３ａの中で湾曲された金属板の部分をループ部３２と呼ぶと、ループ部３２の一端と他端とには、ループ部３２の外側に向けられた接続部３３がそれぞれ設けられている。ここでは接続部３３は、ループ部３２の一端付近と他端付近とが折り曲げられて形成されている。   At the center of each detector 23a, a measurement hole 31 surrounded by the metal plate of the detector 23a is formed. When a portion of the metal plate bent in the detector 23a is referred to as a loop portion 32, connection portions 33 directed to the outside of the loop portion 32 are provided at one end and the other end of the loop portion 32, respectively. There is. Here, the connection portion 33 is formed by bending the vicinity of one end and the vicinity of the other end of the loop portion 32.

第一の検出部２１ａが有する複数の連結用電極部４０と、第二の検出部２２ａが有する複数の連結用電極部４０とは、ケーブル孔３６の縁３９に沿って配置されている。
連結用電極部４０は、図４(ａ)に示すように、内側電極４１と外側電極４２と内部配線４３とを有しており、内側電極４１は縁３９の近くに配置され、外側電極４２は内側電極４１よりも縁３９から遠い位置に配置され、一個の内側電極４１と一個の外側電極４２とは一個の内部配線４３によって接続されている。 The plurality of connection electrode portions 40 of the first detection portion 21 a and the plurality of connection electrode portions 40 of the second detection portion 22 a are disposed along the edge 39 of the cable hole 36.
The connection electrode portion 40 has an inner electrode 41, an outer electrode 42, and an internal wire 43, as shown in FIG. 4A. The inner electrode 41 is disposed near the edge 39, and the outer electrode 42 is disposed. Are disposed farther from the edge 39 than the inner electrode 41, and one inner electrode 41 and one outer electrode 42 are connected by one inner wiring 43.

ケーブル孔３６の中心を中心とした時計回りと反時計回りの方向うち、いずれか一方を配置方向とすると、一個の連結用電極部４０の外側電極４２は、内側電極４１に対して配置方向に離間しており、一個の連結用電極部４０の内側電極４１は、配置方向とは反対方向に隣接する連結用電極部４０の外側電極４２と縁３９との間に配置されている。第一の検出部２１ａの配置方向と第二の検出部２２ａの配置方向は同一方向であっても互いに逆の方向であってもよい。   If one of the clockwise and counterclockwise directions about the center of the cable hole 36 is the arrangement direction, the outer electrode 42 of one connecting electrode portion 40 is in the arrangement direction with respect to the inner electrode 41. The inner electrodes 41 of one connecting electrode unit 40 are spaced apart, and are disposed between the outer electrode 42 and the edge 39 of the connecting electrode unit 40 adjacent in the direction opposite to the arrangement direction. The arrangement direction of the first detection unit 21a and the arrangement direction of the second detection unit 22a may be the same or opposite to each other.

ケーブル孔３６は円形であり、内側電極４１と外側電極４２とはケーブル孔３６の中心を中心とする円上に配置されており、一個の連結用電極部４０の外側電極４２と、配置方向に隣接する連結用電極部４０の内側電極４１とは、ケーブル孔３６の中心を通る同じ放射線４４上に位置している。   The cable hole 36 is circular, and the inner electrode 41 and the outer electrode 42 are disposed on a circle centered on the center of the cable hole 36, and the outer electrode 42 of one connecting electrode portion 40 in the arrangement direction The inner electrode 41 of the adjacent connection electrode portion 40 is located on the same radiation 44 passing through the center of the cable hole 36.

配置方向の始点となる連結用電極部４０の内側電極４１の外側には、第一の接続電極４６が配置されており、他方、配置方向の終点となる連結用電極部４０の外側電極４２の内側には、第二の接続電極４７が配置されている。従って、配置方向の始点となる連結用電極部４０の内側電極４１と第一の接続電極４６とが同じ放射線４４上に位置し、配置方向の終点となる連結用電極部４０の外側電極４２と第二の接続電極４７とが同じ放射線４４上に位置している。
第一の接続電極４６には第一の外部配線２７が接続され、第二の接続電極４７には第二の外部配線２８が接続されている。 The first connection electrode 46 is disposed on the outer side of the inner electrode 41 of the connection electrode portion 40 which is the start point of the arrangement direction, while the first connection electrode 46 of the outer electrode 42 of the connection electrode portion 40 which is the end point A second connection electrode 47 is disposed inside. Therefore, the inner electrode 41 of the connecting electrode 40 and the first connection electrode 46, which are the starting point of the arrangement direction, are located on the same radiation 44, and the outer electrode 42 of the connecting electrode 40 is the end The second connection electrode 47 is located on the same radiation 44.
A first external wire 27 is connected to the first connection electrode 46, and a second external wire 28 is connected to the second connection electrode 47.

内側電極４１と、外側電極４２と、内部配線４３と、第一、第二の外部配線２７、２８とは、数μｍ〜数百μｍの金属膜で形成され、プリント配線板２５に密着して固定されており、内側電極４１と外側電極４２との間に形成される寄生誘導性成分は小さくなるようにされている。
また、内側電極４１と外側電極４２との間は離間して配置されており、寄生容量性成分も小さくなるようにされている。 The inner electrode 41, the outer electrode 42, the internal wiring 43, and the first and second external wirings 27 and 28 are formed of metal films of several μm to several hundred μm and are in close contact with the printed wiring board 25. It is fixed, and the parasitic inductive component formed between the inner electrode 41 and the outer electrode 42 is made small.
Further, the inner electrode 41 and the outer electrode 42 are spaced apart, and the parasitic capacitive component is also reduced.

各検出器２３ａはプリント配線板２５に対して垂直にされ、同一の放射線４４上に並んだ内側電極４１と第一の接続電極４６とには一個の検出器２３ａの二個の接続部３３がそれぞれ一個ずつ接続されて固定されており、また、同一の放射線４４上に並んだ第二の接続電極４７と外側電極４２とには、他の一個の検出器２３ａの二個の接続部３３がそれぞれ一個ずつ接続されて固定されており、また、同一の放射線４４上に並んだ内側電極４１と外側電極４２とには、他の一個の検出器２３ａの二個の接続部３３がそれぞれ一個ずつ接続されて固定されている。   Each detector 23 a is perpendicular to the printed wiring board 25, and two connection portions 33 of one detector 23 a are provided on the inner electrode 41 and the first connection electrode 46 arranged on the same radiation 44. The two connection portions 33 of the other one detector 23 a are connected to the second connection electrode 47 and the outer electrode 42 which are connected and fixed one by one and arranged on the same radiation 44. Each of the two connection portions 33 of one other detector 23 a is connected to the inner electrode 41 and the outer electrode 42 which are connected and fixed one by one and arranged on the same radiation 44. Connected and fixed.

この状態では、第一の検出部２１ａが有する検出器２３ａは、隣接する検出器２３ａの測定孔３１が対面されて測定孔３１が連通するように対面してプリント配線板２５の同一面上に立設され、また、第二の検出部２２ａが有する検出器２３ａも、隣接する検出器２３ａの測定孔３１が対面されて測定孔３１が連通するように対面してプリント配線板２５の同一面上に立設されており、各検出器２３ａは、プリント配線板２５に固定されている。   In this state, the detectors 23a of the first detection unit 21a face each other such that the measurement holes 31 of the adjacent detectors 23a face each other and the measurement holes 31 communicate with each other on the same surface of the printed wiring board 25. The detectors 23a of the second detection unit 22a are also erected and face each other such that the measurement holes 31 of the adjacent detectors 23a face each other and the measurement holes 31 communicate with each other, and the same surface of the printed wiring board 25 Each of the detectors 23a is fixed to the printed wiring board 25.

各検出器２３ａの内側電極４１に接続された部分を内側端、外側電極４２に接続された部分を外側端とすると、プリント配線板２５に設けられた内部配線４３により、検出器２３ａの内側端は隣接する検出器２３ａの外側端に接続されており、各検出器２３ａのループ部３２はプリント配線板２５に立設されていることから、検出器２３ａと内部配線４３とによって同じ方向に巻き回された螺旋状の巻線が形成されている。   Assuming that the portion connected to the inner electrode 41 of each detector 23a is the inner end and the portion connected to the outer electrode 42 is the outer end, the inner wiring 43 provided on the printed wiring board 25 makes the inner end of the detector 23a Is connected to the outer end of the adjacent detector 23a, and since the loop portion 32 of each detector 23a is erected on the printed wiring board 25, it is wound in the same direction by the detector 23a and the internal wiring 43. A wound spiral winding is formed.

各検出器２３ａは、同じ巻線を構成する検出器２３ａの測定孔３１が連通するように配置されており、連通する測定孔３１によって巻線の空芯が形成されている。ケーブル孔３６に挿入された内部導体から成る導電線１５に電流が流れ、導電線１５を中心とした円形の磁束が形成されると、その磁束の一部は空芯を構成する測定孔３１を貫通し、磁束が貫通した測定孔３１を有する各検出器２３ａに起電力が発生する。   The respective detectors 23a are arranged such that the measurement holes 31 of the detectors 23a constituting the same winding communicate with each other, and an open core of the winding is formed by the communicating measurement holes 31. When a current flows through the conductive wire 15 composed of the inner conductor inserted in the cable hole 36 and a circular magnetic flux around the conductive wire 15 is formed, a part of the magnetic flux forms the measurement hole 31 forming an air core. An electromotive force is generated in each detector 23a having the measurement hole 31 which penetrates and the magnetic flux penetrates.

同じ巻線の各検出器２３ａは、各検出器２３ａに発生した起電力が打ち消し合わずに加算されるように直列接続されており、増幅された各検出器２３ａの起電力を合計した合計起電力は第一の接続電極４６と第二の接続電極４７との間に現れる。   The detectors 23a of the same winding are connected in series so that the electromotive forces generated in the detectors 23a are added without canceling each other, and the total electromotive force obtained by summing the electromotive forces of the amplified detectors 23a is added. Electrical power appears between the first connection electrode 46 and the second connection electrode 47.

第一、第二の外部配線２７、２８はプリント配線板２５上で延設され、一方の外部配線が電圧出力端子に接続され、他方の外部配線は終端回路２４を介して接地電位に接続されている。第一の外部配線２７は電圧端子に接続され、第二の外部配線２８は終端回路２４を介して接地電位に接続されており、接続された終端回路２４の内部回路の構成によって、第一、第二の検出部２１ａ、２２ａの一方が導電線１５を流れる進行波を検出し、他方が導電線１５を流れる反射波を検出し、進行波の大きさを示す信号と、反射波の大きさを示す信号とを別々の電圧端子から取り出せるようになっている。電圧端子の電圧が電圧端子に接続されたアナログICや作動増幅器等の検出装置によって取り出されると、進行波や反射波の大きさが求められ、求めた大きさをディスプレイ等に表示することができる。
上記の検出器２３ａは剛性を有する金属板によって構成されていることから、変形による電気的特性の変化が無いようになっている。 The first and second external wirings 27 and 28 are extended on the printed wiring board 25, one external wiring is connected to the voltage output terminal, and the other external wiring is connected to the ground potential via the termination circuit 24. ing. The first external wiring 27 is connected to the voltage terminal, and the second external wiring 28 is connected to the ground potential via the termination circuit 24. Depending on the configuration of the internal circuit of the termination circuit 24 connected, One of the second detectors 21a and 22a detects a traveling wave flowing through the conductive wire 15, and the other detects a reflected wave flowing through the conductive wire 15, and a signal indicating the magnitude of the traveling wave and the magnitude of the reflected wave And a signal representing the signal can be taken out from separate voltage terminals. When the voltage at the voltage terminal is taken out by a detection device such as an analog IC or an operational amplifier connected to the voltage terminal, the magnitudes of the traveling wave and the reflected wave are determined, and the determined magnitude can be displayed on a display or the like. .
Since the above-mentioned detector 23a is formed of a rigid metal plate, there is no change in electrical characteristics due to deformation.

従来技術では、プリント配線板の表面と裏面に形成した金属配線とスルーホールに充填した金属充填物とで、巻線を形成することができるが、その巻線の芯はプリント配線板を構成する樹脂になる。樹脂の誘電率は温度によって大きく変動するため、プリント配線板を芯にした巻線は電気特性が温度によって大きく変動する。
本発明の方向性結合器１０ａでは、検出器２３ａと内部配線４３とで構成された巻線の芯は空気なので、巻線の電気特性は温度変化の影響を受けないで済む。 In the prior art, a winding can be formed by the metal wiring formed on the front and back of the printed wiring board and the metal filling filled in the through hole, but the core of the winding constitutes the printed wiring board Become a resin. Since the dielectric constant of the resin largely fluctuates depending on the temperature, the winding centered on the printed wiring board largely fluctuates in electrical characteristics depending on the temperature.
In the directional coupler 10a of the present invention, since the core of the winding formed of the detector 23a and the internal wiring 43 is air, the electrical characteristics of the winding do not need to be affected by the temperature change.

図７は、常温を基準としたときの、温度と検出信号ゲイン変動との関係を示すグラフであり、図８は、常温を基準としたときの、温度と検出信号フェーズ変動との関係を示すグラフである。   FIG. 7 is a graph showing the relationship between temperature and detection signal gain fluctuation when using normal temperature as a standard, and FIG. 8 shows the relationship between temperature and detection signal phase fluctuation when using normal temperature as a reference It is a graph.

図７、８から、検出信号ゲイン変動と検出信号フェーズ変動について、従来技術の方向性結合器の特性は温度の影響が大きいのに対し、本願発明の方向性結合器の特性は、温度変化による影響が無いと言える。   From FIGS. 7 and 8, the characteristics of the directional coupler of the prior art with respect to the detection signal gain fluctuation and the detection signal phase fluctuation are largely affected by the temperature, while the characteristics of the directional coupler of the present invention are due to the temperature change. It can be said that there is no effect.

以上説明した方向性結合器１０ａでは、第一の検出部２１ａと第二の検出部２２ａとがプリント配線板２５の同じ面に配置されていたが、第一の検出部２１ａと第二の検出部２２ａとをプリント配線板２５の異なる面に配置してもよい。   In the directional coupler 10a described above, the first detection unit 21a and the second detection unit 22a are disposed on the same surface of the printed wiring board 25, but the first detection unit 21a and the second detection The portion 22 a may be disposed on a different surface of the printed wiring board 25.

例えば、図５、図６の方向性結合器１０ｂでは、第一の筺体１１と第二の筺体１２とに挟まれたプリント配線板２５の片面に第一の検出部２１ｂの検出器２３ａと、その検出器２３ａ同士を接続する連結用電極部とが配置され、第一の検出部２１ｂの検出器２３ａが配置された面とは反対側の面に第二の検出部２２ｂの検出器２３ａと、その検出器２３ａ同士を接続する連結用電極部とが配置されている。   For example, in the directional coupler 10b of FIGS. 5 and 6, the detector 23a of the first detection unit 21b is provided on one side of the printed wiring board 25 sandwiched between the first housing 11 and the second housing 12. The connection electrode unit for connecting the detectors 23a is disposed, and the detector 23a of the second detection unit 22b and the surface on the opposite side to the surface on which the detector 23a of the first detection unit 21b is disposed. , And a connection electrode unit for connecting the detectors 23a to each other.

このように配置した場合は、同じ面に第一、第二の検出部２１ａ、２２ａを配置する場合に比べて第一、第二の検出部２１ｂ、２２ｂに設ける検出器２３ａの個数を増加させることができるので、検出感度が向上する。   When arranged in this manner, the number of detectors 23a provided in the first and second detection units 21b and 22b is increased as compared to the case where the first and second detection units 21a and 22a are arranged on the same surface. Detection sensitivity is improved.

なお、図４の連結用電極部４０の配置方向は時計回りの方向であったが、終端回路２４の内容により、第一の検出部２１ａの配置方向と第二の検出部２２ａの配置方向は同じ方向であってもよいし、互いに逆方向であってもよい。   Although the arrangement direction of the connection electrode unit 40 in FIG. 4 is a clockwise direction, the arrangement direction of the first detection unit 21a and the arrangement direction of the second detection unit 22a depend on the contents of the termination circuit 24. The directions may be the same or opposite to each other.

また、上記検出器２３ａでは、接続部３３は外側向きであったが、図３(ｂ)のように、ループ部３２の両端に内側向きの接続部３４が設けられた検出器２３ｂを用いることもできる。検出器２３ａ、２３ｂは、厚み０．１ｍｍ以上、幅０．３ｍｍ以上の金属板を曲げることにより巻線を構成させることができる。また、金属以外の電導体を用いることもできる。   Further, in the above-mentioned detector 23a, although the connection portion 33 is directed outward, as shown in FIG. 3B, it is preferable to use the detector 23b provided with inward connection portions 34 at both ends of the loop portion 32. You can also. The detectors 23a and 23b can form a winding by bending a metal plate having a thickness of 0.1 mm or more and a width of 0.3 mm or more. Moreover, conductors other than metal can also be used.

なお、本発明の方向性結合器は導電線が設けられていてもよく、また、測定対象の内部導体等を導電線１５とすることができるように、ケーブル孔３６には導電線１５を挿通させておかないようにしてもよい。   The directional coupler of the present invention may be provided with a conductive wire, and the conductive wire 15 may be inserted through the cable hole 36 so that the internal conductor or the like to be measured can be used as the conductive wire 15. You may not leave it.

内蔵する本発明の方向性結合器によって測定した進行波・反射波を直流電圧に変換し、出力電圧の大きさを制御するＲＦ電源装置が得られる。
内蔵する本発明の方向性結合器によって測定した進行波・反射波から有効電力、インピーダンスを算出し、所定の有効電力になるように周波数や進行波の大きさを変化させるＲＦ電源装置が得られる。 An RF power supply device is obtained which converts the traveling wave / reflected wave measured by the directional coupler according to the present invention into a DC voltage and controls the magnitude of the output voltage.
It is possible to obtain an RF power supply device which calculates active power and impedance from traveling waves and reflected waves measured by the directional coupler of the present invention incorporated therein, and changes the frequency and the magnitude of traveling waves so as to obtain predetermined active power. .

内蔵する本発明の方向性結合器によって測定した進行波・反射波から反射係数を求め、可変リアクタンスを制御して反射係数をゼロにするマッチングボックスが得られる。   The reflection coefficient is determined from the traveling wave / reflected wave measured by the built-in directional coupler of the present invention, and a matching box is obtained which controls the variable reactance to make the reflection coefficient zero.

１０ａ、１０ｂ……方向性結合器
１５……導電線
２１ａ、２１ｂ……第一の検出部
２２ａ、２２ｂ……第二の検出部
２３ａ、２３ｂ……検出器
２５……プリント配線板
３６……ケーブル孔
４１……内側電極
４２……外側電極
４３……内部配線
10a, 10b ... directional coupler 15 ... conductive wire 21a, 21b ... first detection unit 22a, 22b ... second detection unit 23a, 23b ... detector 25 ... printed wiring board 36 ... Cable hole 41: inner electrode 42: outer electrode 43: internal wiring

Claims (7)

プリント配線板と、
前記プリント配線板に形成され、測定対象の導電線が挿通されるべきケーブル孔と、
前記プリント配線板に設けられ、前記ケーブル孔に挿通された前記導電線に流れる進行波と反射波のいずれか一方を検出する第一の検出部と、他方を検出する第二の検出部とを有する方向性結合器であって、
前記第一、第二の検出部は、中央に測定孔が位置する湾曲形状にされた複数の検出器と、
前記検出器と検出器とを接続する複数の内部配線と、を有し、
前記検出器の両端部のうち、一方の端部は前記測定孔の縁の近くに配置され他方の端部は前記一方の端部よりも前記縁から遠くに配置されて前記検出器同士は前記プリント配線板上に対面して立設され、
前記第一、第二の検出部は、複数の前記検出器と複数の前記内部配線とによって形成された巻線を有し、
前記第一の検出部の前記巻線を形成する前記検出器の前記測定孔と、前記第二の検出部の前記巻線を形成する前記検出器の前記測定孔とには、前記ケーブル孔に挿通された前記導電線に電流が流れたときに形成される磁束の少なくとも一部がそれぞれ貫通するように配置された方向性結合器。 Printed wiring board,
A cable hole which is formed on the printed wiring board and through which a conductive wire to be measured is to be inserted;
A first detection unit provided on the printed wiring board for detecting one of a traveling wave and a reflected wave flowing through the conductive wire inserted into the cable hole; and a second detection unit for detecting the other. A directional coupler having
The first and second detectors include a plurality of curved detectors each having a measurement hole at the center thereof;
A plurality of internal wires connecting the detector and the detector;
Among the both ends of the detector, one end is disposed near the edge of the measurement hole, and the other end is disposed farther from the edge than the one end, and the detectors are connected to each other. Set up facing the printed wiring board,
The first and second detection units have a winding formed by a plurality of the detectors and a plurality of the internal wirings,
The cable hole is formed in the measurement hole of the detector forming the winding of the first detection unit and the measurement hole of the detector forming the winding of the second detection unit. A directional coupler that is disposed such that at least a portion of the magnetic flux formed when an electric current flows through the inserted conductive wire. 前記内部配線は前記プリント配線板に形成された金属膜である請求項１記載の方向性結合器。   The directional coupler according to claim 1, wherein the internal wiring is a metal film formed on the printed wiring board. 前記ケーブル孔の中心を中心とする時計回りの方向と反時計回りの方向のいずれか一方を第一の配置方向としたときに、前記第一の検出部は、前記縁の近くに配置された前記端部が、前記第一の配置方向に隣接配置された前記検出器の前記縁から遠くに配置された前記端部に接続された前記検出器を有し、前記第一の配置方向と同じ方向又は逆の方向を第二の配置方向としたときに、前記第二の検出部は、前記縁の近くに配置された前記端部が、前記第二の配置方向に隣接配置された前記検出器の前記縁から遠くに配置された前記端部に接続された前記検出器を有する請求項１又は請求項２のいずれか１項記載の方向性結合器。   The first detection unit is disposed near the edge when one of the clockwise direction and the counterclockwise direction around the center of the cable hole is a first arrangement direction. The end having the detector connected to the end located far from the edge of the detector located adjacent to the first placement direction, the same as the first placement direction When the direction or the reverse direction is a second arrangement direction, the second detection unit may be configured such that the end arranged near the edge is arranged adjacent to the second arrangement direction 3. A directional coupler as claimed in any one of the preceding claims, comprising the detector connected to the end remote from the edge of the vessel. 前記第一の検出部の前記検出器と前記第二の検出部の前記検出器とは、前記プリント配線板の同じ面に配置された請求項１乃至請求項３のいずれか１項記載の方向性結合器。   The direction according to any one of claims 1 to 3, wherein the detector of the first detection unit and the detector of the second detection unit are disposed on the same surface of the printed wiring board. Sexual coupler. 前記第一の検出部の前記検出器と前記第二の検出部の前記検出器とは、前記プリント配線板の異なる面に配置された請求項１乃至請求項３のいずれか１項記載の方向性結合器。   The direction according to any one of claims 1 to 3, wherein the detector of the first detection unit and the detector of the second detection unit are disposed on different sides of the printed wiring board. Sexual coupler. 前記ケーブル孔に挿通された前記導電線を有する請求項１乃至請求項５のいずれか１項記載の方向性結合器。   The directional coupler according to any one of claims 1 to 5, further comprising the conductive wire inserted into the cable hole. 前記導電線には同軸ケーブルの内部導体が用いられた請求項６記載の方向性結合器。   The directional coupler according to claim 6, wherein an inner conductor of a coaxial cable is used as the conductive wire.
JP2017203732A 2017-10-20 2017-10-20 Directional coupler Active JP7016238B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017203732A JP7016238B2 (en) 2017-10-20 2017-10-20 Directional coupler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017203732A JP7016238B2 (en) 2017-10-20 2017-10-20 Directional coupler

Publications (2)

Publication Number Publication Date
JP2019078563A true JP2019078563A (en) 2019-05-23
JP7016238B2 JP7016238B2 (en) 2022-02-04

Family

ID=66628741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017203732A Active JP7016238B2 (en) 2017-10-20 2017-10-20 Directional coupler

Country Status (1)

Country Link
JP (1) JP7016238B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115656864A (en) * 2022-09-09 2023-01-31 北京北方华创微电子装备有限公司 A radio frequency power signal acquisition circuit and semiconductor process equipment
KR20230075809A (en) * 2021-11-23 2023-05-31 한국교통대학교산학협력단 A 3-Phase Current Detecting Device Using the Induction Coils
WO2023109676A1 (en) * 2021-12-16 2023-06-22 华为技术有限公司 Coupler and signal detection system
EP4411785A1 (en) * 2023-02-06 2024-08-07 Korea Institute of Fusion Energy Module for measuring current/voltage/power of plasma apparatus and plasma apparatus including the same
KR20240178098A (en) * 2023-06-21 2024-12-30 주식회사 뉴파워 프라즈마 Radio frequency voltage current sensor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4622558A (en) * 1980-07-09 1986-11-11 Corum Janes F Toroidal antenna
JP2007201199A (en) * 2006-01-26 2007-08-09 Matsushita Electric Works Ltd Toroidal coil structure
JP2010266233A (en) * 2009-05-12 2010-11-25 Murata Mfg Co Ltd Device for detection of magnetic field
JP2012026780A (en) * 2010-07-21 2012-02-09 Daihen Corp High-frequency detection device and coaxial tube provided with high-frequency detection device
WO2014203346A1 (en) * 2013-06-19 2014-12-24 ルネサスエレクトロニクス株式会社 Power transmission device, wireless power feeding system, and control method
JP2015173189A (en) * 2014-03-12 2015-10-01 株式会社村田製作所 Coil device and manufacturing method of coil device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4622558A (en) * 1980-07-09 1986-11-11 Corum Janes F Toroidal antenna
JP2007201199A (en) * 2006-01-26 2007-08-09 Matsushita Electric Works Ltd Toroidal coil structure
JP2010266233A (en) * 2009-05-12 2010-11-25 Murata Mfg Co Ltd Device for detection of magnetic field
JP2012026780A (en) * 2010-07-21 2012-02-09 Daihen Corp High-frequency detection device and coaxial tube provided with high-frequency detection device
WO2014203346A1 (en) * 2013-06-19 2014-12-24 ルネサスエレクトロニクス株式会社 Power transmission device, wireless power feeding system, and control method
JP2015173189A (en) * 2014-03-12 2015-10-01 株式会社村田製作所 Coil device and manufacturing method of coil device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230075809A (en) * 2021-11-23 2023-05-31 한국교통대학교산학협력단 A 3-Phase Current Detecting Device Using the Induction Coils
KR102687202B1 (en) 2021-11-23 2024-07-19 국립한국교통대학교산학협력단 A 3-Phase Current Detecting Device Using the Induction Coils
WO2023109676A1 (en) * 2021-12-16 2023-06-22 华为技术有限公司 Coupler and signal detection system
CN115656864A (en) * 2022-09-09 2023-01-31 北京北方华创微电子装备有限公司 A radio frequency power signal acquisition circuit and semiconductor process equipment
CN115656864B (en) * 2022-09-09 2024-03-26 北京北方华创微电子装备有限公司 Radio frequency power supply signal acquisition circuit and semiconductor process equipment
EP4411785A1 (en) * 2023-02-06 2024-08-07 Korea Institute of Fusion Energy Module for measuring current/voltage/power of plasma apparatus and plasma apparatus including the same
JP2024111819A (en) * 2023-02-06 2024-08-19 コリア インスティテュート オブ フュージョン エナジー Current/voltage/power measurement module for plasma device and plasma device having same
JP7636597B2 (en) 2023-02-06 2025-02-26 コリア インスティテュート オブ フュージョン エナジー Current/voltage/power measurement module for plasma device and plasma device having same
US12580167B2 (en) 2023-02-06 2026-03-17 Koreas Institute of Fusion Energy Module for measuring current/voltage/power of plasma apparatus and plasma apparatus including the same
KR20240178098A (en) * 2023-06-21 2024-12-30 주식회사 뉴파워 프라즈마 Radio frequency voltage current sensor
KR102844445B1 (en) 2023-06-21 2025-08-11 주식회사 뉴파워 프라즈마 Radio frequency voltage current sensor

Also Published As

Publication number Publication date
JP7016238B2 (en) 2022-02-04

Similar Documents

Publication Publication Date Title
JP7016238B2 (en) Directional coupler
US7714594B2 (en) Current detection printed board, voltage detection printed board, and current/voltage detector using same, and current detector and voltage detector
US7538562B2 (en) High performance miniature RF sensor for use in microelectronics plasma processing tools
JP5151032B2 (en) Magnetic field probe device and magnetic field probe element
KR101257980B1 (en) Orthogonal radio frequency voltage/current sensor with high dynamic range
KR20230027087A (en) RF voltage and current (V-I) sensors and measurement methods
US10545177B2 (en) Non-contact sensor based Rogowski coil
US10901005B2 (en) Low power based Rogowski coil
US6696834B2 (en) Magnetic field probe having a shielding layer to protect lead wires with an isolating layer
JP5418424B2 (en) Electromagnetic field probe
JP3583276B2 (en) Near magnetic field probe, near magnetic field probe unit, near magnetic field probe array, and magnetic field measurement system
CN105388352B (en) B dot probes and electric current spatial distribution measuring system based on PCB formula magnetic induction coils
US3829770A (en) Directional coupler for transmission lines
JP2010088011A (en) Directional coupler
US7482814B2 (en) Electric/magnetic field sensor
US11946953B2 (en) Electromagnetic field sensor
JP2000028661A (en) Method and apparatus for measuring ground resistance
JP6985317B2 (en) Discharge measurement circuit
JP2010081507A (en) Directional coupler
CN101405607A (en) High performance miniature RF sensor for use in microelectronics plasma processing tools
CN111610368A (en) Impedance sensor and semiconductor device
JP2012013582A (en) Noise measurement cable and noise measurement device
JP2009058384A (en) Probe and apparatus for measuring intensity of electromagnetic field
JPH1114679A (en) High frequency current detector
JP2014115133A (en) Magnetic sensor and ampere meter

Legal Events

Date Code Title Description
RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20200727

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20200805

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200817

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200817

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20211019

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20211220

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20211220

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220111

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220125

R150 Certificate of patent or registration of utility model

Ref document number: 7016238

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250