JP2019178021A5 - - Google Patents
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- JP2019178021A5 JP2019178021A5 JP2018067448A JP2018067448A JP2019178021A5 JP 2019178021 A5 JP2019178021 A5 JP 2019178021A5 JP 2018067448 A JP2018067448 A JP 2018067448A JP 2018067448 A JP2018067448 A JP 2018067448A JP 2019178021 A5 JP2019178021 A5 JP 2019178021A5
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- JP
- Japan
- Prior art keywords
- processing container
- gas
- introduction mechanism
- microwave
- slot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010438 heat treatment Methods 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018067448A JP7109230B2 (ja) | 2018-03-30 | 2018-03-30 | グラフェン構造体を形成する方法および装置 |
| PCT/JP2019/008151 WO2019187987A1 (fr) | 2018-03-30 | 2019-03-01 | Procédé et dispositif de formation de structure de graphène |
| US17/041,649 US12116280B2 (en) | 2018-03-30 | 2019-03-01 | Method and apparatus for forming graphene structure |
| KR1020207030747A KR102455326B1 (ko) | 2018-03-30 | 2019-03-01 | 그래핀 구조체를 형성하는 방법 및 장치 |
| TW108110828A TWI803603B (zh) | 2018-03-30 | 2019-03-28 | 形成石墨烯構造體的方法及裝置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018067448A JP7109230B2 (ja) | 2018-03-30 | 2018-03-30 | グラフェン構造体を形成する方法および装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019178021A JP2019178021A (ja) | 2019-10-17 |
| JP2019178021A5 true JP2019178021A5 (fr) | 2021-01-21 |
| JP7109230B2 JP7109230B2 (ja) | 2022-07-29 |
Family
ID=68061502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018067448A Active JP7109230B2 (ja) | 2018-03-30 | 2018-03-30 | グラフェン構造体を形成する方法および装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12116280B2 (fr) |
| JP (1) | JP7109230B2 (fr) |
| KR (1) | KR102455326B1 (fr) |
| TW (1) | TWI803603B (fr) |
| WO (1) | WO2019187987A1 (fr) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10987735B2 (en) | 2015-12-16 | 2021-04-27 | 6K Inc. | Spheroidal titanium metallic powders with custom microstructures |
| HUE065423T2 (hu) | 2015-12-16 | 2024-05-28 | 6K Inc | Eljárás szferoidális dehidrogénezett titánötvözet részecskék elõállítására |
| AU2019290663B2 (en) | 2018-06-19 | 2023-05-04 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
| CA3134573A1 (fr) | 2019-04-30 | 2020-11-05 | Sunil Bhalchandra BADWE | Charge d'alimentation en poudre alliee mecaniquement |
| WO2021118762A1 (fr) | 2019-11-18 | 2021-06-17 | 6K Inc. | Charges d'alimentation uniques pour poudres sphériques et leurs procédés de fabrication |
| US11590568B2 (en) | 2019-12-19 | 2023-02-28 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
| US12288672B2 (en) * | 2020-01-15 | 2025-04-29 | Applied Materials, Inc. | Methods and apparatus for carbon compound film deposition |
| TWI720868B (zh) * | 2020-04-08 | 2021-03-01 | 大陸商烯美科技（深圳）有限公司 | 工業化量產高純度多孔石墨烯粉末之製程方法及其裝置 |
| AU2021297476A1 (en) | 2020-06-25 | 2022-12-15 | 6K Inc. | Microcomposite alloy structure |
| AU2021349358A1 (en) | 2020-09-24 | 2023-02-09 | 6K Inc. | Systems, devices, and methods for starting plasma |
| EP4237174A1 (fr) | 2020-10-30 | 2023-09-06 | 6K Inc. | Systèmes et procédés de synthèse de poudres métalliques sphéroïdales |
| US11515163B2 (en) * | 2021-01-06 | 2022-11-29 | Applied Materials, Inc. | Low temperature graphene growth |
| EP4275239A4 (fr) | 2021-01-11 | 2024-12-18 | 6K Inc. | Procédés et systèmes de réclamation de matériaux de cathode li-ion au moyen d'un traitement au plasma par micro-ondes |
| AU2022246797A1 (en) | 2021-03-31 | 2023-10-05 | 6K Inc. | Systems and methods for additive manufacturing of metal nitride ceramics |
| JP7692775B2 (ja) * | 2021-09-16 | 2025-06-16 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置および半導体構造 |
| KR102928751B1 (ko) | 2021-09-29 | 2026-02-23 | 도쿄엘렉트론가부시키가이샤 | 성막 방법 및 성막 장치 |
| JP7838969B2 (ja) * | 2021-09-29 | 2026-04-01 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
| TWI810772B (zh) | 2021-12-30 | 2023-08-01 | 日揚科技股份有限公司 | 一種快速退火設備 |
| WO2023229928A1 (fr) | 2022-05-23 | 2023-11-30 | 6K Inc. | Appareil à plasma à micro-ondes et procédés de traitement de matériaux à l'aide d'un revêtement intérieur |
| US12040162B2 (en) | 2022-06-09 | 2024-07-16 | 6K Inc. | Plasma apparatus and methods for processing feed material utilizing an upstream swirl module and composite gas flows |
| WO2024044498A1 (fr) | 2022-08-25 | 2024-02-29 | 6K Inc. | Appareil à plasma et procédés de traitement de matériau d'alimentation à l'aide d'un dispositif de prévention d'entrée de poudre (pip) |
| US12195338B2 (en) | 2022-12-15 | 2025-01-14 | 6K Inc. | Systems, methods, and device for pyrolysis of methane in a microwave plasma for hydrogen and structured carbon powder production |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5407921B2 (ja) * | 2010-02-19 | 2014-02-05 | 富士電機株式会社 | グラフェン膜の製造方法 |
| JP5692794B2 (ja) * | 2010-03-17 | 2015-04-01 | 独立行政法人産業技術総合研究所 | 透明導電性炭素膜の製造方法 |
| JP5851804B2 (ja) | 2011-11-09 | 2016-02-03 | 東京エレクトロン株式会社 | 前処理方法、グラフェンの形成方法及びグラフェン製造装置 |
| JP5890204B2 (ja) * | 2012-03-05 | 2016-03-22 | 東京エレクトロン株式会社 | スラグチューナ、それを用いたマイクロ波プラズマ源、およびマイクロ波プラズマ処理装置 |
| JP2014167142A (ja) * | 2013-02-28 | 2014-09-11 | Tokyo Electron Ltd | カーボン膜形成方法及びカーボン膜 |
| JP6002087B2 (ja) | 2013-05-29 | 2016-10-05 | 東京エレクトロン株式会社 | グラフェンの生成方法 |
| US9911544B1 (en) * | 2014-06-10 | 2018-03-06 | The United States Of America As Represented By The Administrator Of Nasa | Metal oxide vertical graphene hybrid supercapacitors |
| KR101662710B1 (ko) * | 2014-06-19 | 2016-10-06 | 울산과학기술원 | 수소플라즈마 처리를 통한 다이아몬드상 필름 제조방법 |
| JP6883953B2 (ja) * | 2016-06-10 | 2021-06-09 | 東京エレクトロン株式会社 | マイクロ波プラズマ処理装置およびマイクロ波プラズマ処理方法 |
-
2018
- 2018-03-30 JP JP2018067448A patent/JP7109230B2/ja active Active
-
2019
- 2019-03-01 WO PCT/JP2019/008151 patent/WO2019187987A1/fr not_active Ceased
- 2019-03-01 US US17/041,649 patent/US12116280B2/en active Active
- 2019-03-01 KR KR1020207030747A patent/KR102455326B1/ko active Active
- 2019-03-28 TW TW108110828A patent/TWI803603B/zh active
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