JP2020003042A - On-off valve and substrate processing apparatus equipped with this on-off valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an on-off valve capable of preventing leakage at a contact portion between a valve body and a valve seat portion, and a substrate processing device provided with the on-off valve. SOLUTION: A valve body side electromagnet part 43 is provided on a valve body 41 side, and a permanent magnet part 36 is provided on a valve seat part 35 side. When the current supply circuit 11 supplies a current in the first direction to the valve body side electromagnet unit 43, the valve body side electromagnet unit 43 generates a magnetic field. Therefore, the valve body side electromagnet portion 43 is attracted to the permanent magnet portion 36. That is, an attractive force due to a magnetic field acts on the valve body 41 and the valve seat portion 35. As a result, the valve body 41 is brought closer to the valve seat portion 35, and the valve body 41 is pressed against the valve seat portion 35. Further, the valve body 41 can be uniformly pressed against the valve seat portion 35 in the circumferential direction of the valve seat portion 35. As a result, the contact between the valve body 41 and the valve seat portion 35 can be ensured, and the occurrence of leaks can be prevented. [Selection diagram] Fig. 2

Description

  The present invention relates to a semiconductor substrate, a flat panel display (FPD) substrate such as a liquid crystal display device and an organic EL (electroluminescence) display device, a glass substrate for a photomask, a substrate for an optical disk, a substrate for a magnetic disk, a ceramic substrate, and a solar cell. The present invention relates to an on-off valve used for supplying a liquid to a substrate such as a substrate for use, and a substrate processing apparatus provided with the on-off valve.

  The substrate processing apparatus includes a nozzle for discharging a liquid, a liquid container such as a tank, and a pipe connecting the nozzle and the liquid container. The piping is provided with a pump for sending liquid and an on-off valve. The on-off valve supplies the liquid to the nozzle and stops the supply of the liquid to the nozzle (for example, see Patent Document 1).

  As shown in FIG. 12, the on-off valve 101 includes an upstream flow path 102, a valve chamber flow path 103, and a downstream flow path 104. The on-off valve 101 includes a valve seat 105, a diaphragm 106, a movable member 107, a conversion mechanism 108, and an electric motor 109. The outer edge of the diaphragm 106 is attached to the side wall of the valve chamber flow path 103, and the center of the diaphragm 106 is connected to the movable member 107. The conversion mechanism 108 converts the output rotation of the electric motor 109 into a vertical movement of the movable member 107.

  When the diaphragm 106 used as a valve body is brought close to the valve seat 105 by driving the electric motor 109 and the diaphragm 106 is pressed against the valve seat 105, the flow of the liquid between the upstream flow path 102 and the downstream flow path 104 is increased. Stop. On the other hand, when the diaphragm 106 is separated from the valve seat 105 by the drive of the electric motor 109, the liquid flows between the upstream flow path 102 and the downstream flow path 104.

  Another example of the on-off valve is a solenoid valve (for example, see Patent Document 2). As shown in FIG. 13A, the solenoid valve 201 includes a fixed iron core 202, a movable iron core 203, and a coil 204. The fixed core 202 and the movable core 203 are arranged in series, and the coil 204 is provided so as to surround the fixed core 202 and the movable core 203. A valve cover 205 is provided at the end of the movable iron core 203, and a valve seat 208 is provided at a portion connecting the first flow path 206 and the second flow path 207. The movable core 203 is pressed by the spring member 209 in a direction (downward) in which the valve cover 205 approaches the valve seat 208.

  When a current flows through the coil 204, the movable core 203 is attracted to the fixed core 202 while resisting the restoring force of the spring member 209 (see FIG. 13B). Thus, the liquid flows between the first flow path 206 and the second flow path 207. On the other hand, when the current flowing through the coil 204 is stopped, the movable core 203 is not attracted to the fixed core 202, and the valve cover 205 is pressed against the valve seat 208 by the restoring force of the spring member 209 (see FIG. 13A). ). This stops the flow of the liquid between the first flow path 206 and the second flow path 207.

JP 2017-194080 A JP-A-2017-198246

  Such a conventional on-off valve has the following problems. The opening / closing valve performs an opening / closing operation by pressing a valve body against a valve seat or separating the valve body from the valve seat. In a conventional on-off valve, due to its structure, when the valve body is pressed against the valve seat, the axis of the valve body may be inclined with respect to the axis of the valve seat. As a result, when the valve element comes into a one-sided state with respect to the valve seat, there is a possibility that the processing liquid leaks at a contact portion between the valve element and the valve seat.

  The present invention has been made in view of such circumstances, and provides an on-off valve capable of preventing occurrence of a leak at a contact portion between a valve body and a valve seat, and a substrate processing apparatus including the on-off valve. The purpose is to provide.

The present invention has the following configuration to achieve such an object.
That is, the on-off valve according to the present invention includes a valve chamber flow path through which a liquid passes, a first flow path and a second flow path each communicating with the valve chamber flow path, the valve chamber flow path, and the second flow path. And a ferromagnetic member or magnet provided on the valve seat side, surrounding the valve seat portion provided in the valve chamber flow path, and surrounding the second flow path. A valve seat provided in the valve chamber flow path, a valve body for contacting the valve seat, and a movable unit having a valve body-side electromagnet provided on the valve body side; By supplying a current in the first direction to the body-side electromagnet portion and attracting the valve-body-side electromagnet portion to the ferromagnetic material portion or the magnet portion, the valve body is brought closer to the valve seat portion and the valve seat portion is moved to the valve seat portion. And a current supply circuit for pressing the valve element. .

  According to the on-off valve according to the present invention, the valve body-side electromagnet portion is provided on the valve body side, and the ferromagnetic material portion or the magnet portion is provided on the valve seat portion side. When the current supply circuit supplies a current in the first direction to the valve body-side electromagnet unit, the valve body-side electromagnet unit generates a magnetic field. Therefore, the valve body-side electromagnet portion is attracted to the ferromagnetic material portion or the magnet portion. That is, an attractive force by the magnetic field acts on the valve body and the valve seat. As a result, the valve body approaches the valve seat, and the valve body is pressed against the valve seat. Even if the valve element collides with the valve seat portion, a force that tries to contact the valve seat portion also acts on the valve element portion that does not contact one side due to the attracting force. That is, the valve body can be uniformly pressed against the valve seat in the circumferential direction of the valve seat. Thereby, the contact between the valve body and the valve seat can be ensured, and the occurrence of leak can be prevented.

  In the above-described on-off valve, the ferromagnetic member or the magnet is the magnet, and the current supply circuit supplies a current in a first direction to the valve-side electromagnet, and supplies the current to the magnet. By attracting the valve body-side electromagnet part, the valve body is brought close to the valve seat part, and the valve body is pressed against the valve seat part. It is preferable that the valve body is separated from the valve seat by supplying a current in the direction and repelling the valve body-side electromagnet unit from the magnet unit. By the magnetic field generated by the valve body-side electromagnet portion, the valve body can be brought close to the valve seat, the valve body can be pressed against the valve seat, and the valve body can be separated from the valve seat.

  In the above-mentioned on-off valve, it is preferable that the magnet is a permanent magnet. For example, when the magnet portion on the valve seat side is an electromagnet portion, a magnetic field can be generated by both the valve body side electromagnet portion and the valve seat side electromagnet portion. However, if the valve seat side is an electromagnet in addition to the valve body, the structure becomes complicated. Further, heat is generated in the valve seat side electromagnet portion in addition to the valve body side electromagnet portion. According to the present invention, since the valve seat side is a permanent magnet portion, the configuration can be simplified, and since the permanent magnet portion on the valve seat side does not generate heat, heat generation can be suppressed.

  In the above-mentioned on-off valve, it is preferable that the magnet is a valve seat side electromagnet. Thereby, a magnetic field can be generated in both the valve body side electromagnet section and the valve seat section side electromagnet section. Further, the strength of the magnetic field generated in each of the valve body side electromagnet section and the valve seat section side electromagnet section can be adjusted.

  Further, in the above-described on-off valve, the current supply circuit adjusts an amount of current supplied to the valve body-side electromagnet part when supplying the current in the second direction to the valve body-side electromagnet part. It is preferable to adjust the gap between the seat and the valve body. This makes it possible to adjust the flow rate of the liquid flowing between the first flow path and the second flow path when the on-off valve is in the open state.

  In the above-described on-off valve, the ferromagnetic member or the magnet is the ferromagnetic member, the movable unit is provided with a spring member, and the current supply circuit includes the valve-side electromagnet. By supplying a current in the first direction to the valve portion and attracting the valve body-side electromagnet portion to the magnet portion, the valve body approaches the valve seat portion while accumulating energy in the spring member. It is preferable that the valve body is pressed away from the valve seat portion by the energy accumulated in the spring member by stopping the supply of the current in the first direction to the valve body side electromagnet portion. .

  The magnetic field generated by the valve body-side electromagnet section and the energy stored in the spring member allow the valve body to approach the valve seat and press the valve body against the valve seat, and to separate the valve body from the valve seat. be able to.

  Further, the on-off valve according to the present invention includes a valve chamber flow path through which liquid passes, a first flow path and a second flow path each communicating with the valve chamber flow path, and the valve chamber flow path and the second flow path. A valve seat portion provided in the valve chamber flow path and a valve seat side electromagnet portion provided on the valve seat side and surrounding the second flow path. A valve seat block having a valve body provided in the valve chamber flow path, for contacting the valve seat portion, and a movable portion having a ferromagnetic material portion or a magnet portion provided on the valve body side, By supplying a current in the first direction to the valve seat side electromagnet portion and attracting the ferromagnetic material portion or the magnet portion to the valve seat side electromagnet portion, the valve body is brought closer to the valve seat portion. And a current supply circuit for pressing the valve body against the valve seat portion.

  According to the on-off valve according to the present invention, the ferromagnetic portion or the magnet portion is provided on the valve body side, and the valve seat side electromagnet portion is provided on the valve seat portion side. When the current supply circuit supplies a current in the first direction to the valve seat side electromagnet section, the valve seat side electromagnet section generates a magnetic field. Therefore, the valve seat side electromagnet attracts the ferromagnetic material or the magnet. That is, an attractive force by the magnetic field acts on the valve body and the valve seat. As a result, the valve body approaches the valve seat, and the valve body is pressed against the valve seat. Even if the valve element collides with the valve seat portion, a force that tries to contact the valve seat portion also acts on the valve element portion that does not contact one side due to the attracting force. That is, the valve body can be uniformly pressed against the valve seat in the circumferential direction of the valve seat. Thereby, the contact between the valve body and the valve seat can be ensured, and the occurrence of leak can be prevented.

  In the above-described on-off valve, it is preferable that the valve body and the valve seat are formed of PFA. If the valve body or the valve seat is formed of, for example, PTFE, particles may be generated by bringing them into contact. PFA is a material that does not easily generate particles due to contact. Therefore, when the valve body and the valve seat formed together with PFA are brought into contact, generation of particles can be suppressed.

  Further, in the above-described on-off valve, it is preferable that the contact between the valve body and the valve seat is performed between flat surfaces. The contact surfaces of the valve body and the valve seat are both flat. Therefore, the impact force at the time of contact and the force pressing the valve body against the valve seat can be dispersed, so that the generation of particles can be suppressed.

  Further, the substrate processing apparatus according to the present invention is provided with a nozzle for discharging a liquid, a pump for sending the liquid to the nozzle, a pipe for passing the liquid between the nozzle and the pump, and provided in the pipe, An on-off valve capable of selecting the supply of the liquid and stopping the supply thereof, wherein the on-off valve has a first passage and a second passage that respectively communicate with the valve chamber flow path through which the liquid passes, and the valve chamber flow path. The valve seat surrounding the opening that is a boundary between the valve chamber flow path and the second flow path, and surrounding the valve seat portion provided in the valve chamber flow path, and the second flow path; A valve seat block having a ferromagnetic body portion or a magnet portion provided on the valve body side, a valve body provided in the valve chamber flow path, for contacting the valve seat portion, and provided on the valve body side. A movable portion having a valve body-side electromagnet portion; A current supply circuit for supplying a current and attracting the valve body-side electromagnet section to the ferromagnetic body section or the magnet section, thereby bringing the valve body close to the valve seat section and pressing the valve body against the valve seat section. And characterized in that:

  According to the substrate processing apparatus of the present invention, the valve body-side electromagnet section is provided on the valve body side, and the ferromagnetic body section or the magnet section is provided on the valve seat side. When the current supply circuit supplies a current in the first direction to the valve body-side electromagnet unit, the valve body-side electromagnet unit generates a magnetic field. Therefore, the valve body-side electromagnet portion is attracted to the ferromagnetic material portion or the magnet portion. That is, an attractive force by the magnetic field acts on the valve body and the valve seat. As a result, the valve body approaches the valve seat, and the valve body is pressed against the valve seat. Even if the valve element collides with the valve seat portion, a force that tries to contact the valve seat portion also acts on the valve element portion that does not contact one side due to the attracting force. That is, the valve body can be uniformly pressed against the valve seat in the circumferential direction of the valve seat. Thereby, the contact between the valve body and the valve seat can be ensured, and the occurrence of leak can be prevented.

  Further, the substrate processing apparatus according to the present invention is provided with a nozzle for discharging a liquid, a pump for sending the liquid to the nozzle, a pipe for passing the liquid between the nozzle and the pump, and provided in the pipe, An on-off valve that can select the supply of the liquid and the stop of the supply of the liquid, the on-off valve includes a valve chamber flow path through which the liquid passes, a first flow path and a second flow path each communicating with the valve chamber flow path, The valve seat portion surrounding the opening which is a boundary between the valve chamber flow passage and the second flow passage, and surrounding the valve seat portion provided in the valve chamber flow passage, and the second flow passage; A valve seat block having a valve seat side electromagnet portion provided on the side, a valve body provided in the valve chamber flow path, for contacting the valve seat portion, and a ferromagnetic provided on the valve body side A movable portion having a body portion or a magnet portion; By supplying a current and attracting the valve-seat-side electromagnet portion to the ferromagnetic material portion or the magnet portion, the current that causes the valve body to approach the valve seat portion and presses the valve body against the valve seat portion And a supply circuit.

  According to the substrate processing apparatus of the present invention, the ferromagnetic portion or the magnet portion is provided on the valve body side, and the valve seat side electromagnet portion is provided on the valve seat side. When the current supply circuit supplies a current in the first direction to the valve seat side electromagnet section, the valve seat side electromagnet section generates a magnetic field. Therefore, the valve seat side electromagnet attracts the ferromagnetic material or the magnet. That is, an attractive force by the magnetic field acts on the valve body and the valve seat. As a result, the valve body approaches the valve seat, and the valve body is pressed against the valve seat. Even if the valve element collides with the valve seat portion, a force that tries to contact the valve seat portion also acts on the valve element portion that does not contact one side due to the attracting force. That is, the valve body can be uniformly pressed against the valve seat in the circumferential direction of the valve seat. Thereby, the contact between the valve body and the valve seat can be ensured, and the occurrence of leak can be prevented.

  According to the on-off valve and the substrate processing apparatus provided with the on-off valve according to the present invention, it is possible to prevent a leak from occurring at a contact portion between the valve body and the valve seat.

1 is a schematic configuration diagram of a substrate processing apparatus according to a first embodiment. FIG. 2A is a vertical cross-sectional view illustrating an open / close valve according to a first embodiment, and FIG. 2B is a plan view illustrating a valve seat block viewed from a valve body. FIG. 3 is a longitudinal sectional view showing the on-off valve in a closed state according to the first embodiment. (A) is a longitudinal cross-sectional view showing an on-off valve in an open state according to the second embodiment, and (b) is a longitudinal cross-sectional view showing a part of the on-off valve in a closed state according to the second embodiment. FIG. 7A is a vertical cross-sectional view illustrating an open / close valve according to a third embodiment, and FIG. 7B is a vertical cross-sectional view illustrating a part of the closed open / close valve according to the third embodiment. (A) is a longitudinal cross-sectional view showing an open / close valve according to a fourth embodiment, and (b) is a longitudinal cross-sectional view showing a part of the closed open / close valve according to the fourth embodiment. (A) is a longitudinal cross-sectional view showing the on-off valve in the open state according to the fifth embodiment, and (b) is a longitudinal cross-sectional view showing a part of the on-off valve in the closed state according to the fifth embodiment. (A) is a longitudinal section for explaining operation of an on-off valve concerning a modification, and (b) is a longitudinal section showing a part of an on-off valve concerning other modifications. It is a longitudinal cross-sectional view which shows the on-off valve which concerns on another modification. (A)-(c) is a figure which shows the modification of a valve body and a diaphragm. (A) is a longitudinal sectional view showing a modification of the iron core of the valve body side electromagnet part, and (b) is a longitudinal sectional view showing the modification of the hollow core of the valve seat side electromagnet part. It is a longitudinal section showing the conventional on-off valve driven by an electric motor. (A) is a longitudinal sectional view showing an open state of a conventional solenoid valve, and (b) is a longitudinal sectional view showing an open state of a conventional solenoid valve.

  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of the substrate processing apparatus. FIG. 2A is a longitudinal sectional view showing the on-off valve 9 in an open state. FIG. 2B is a plan view showing the valve seat block 31 viewed from the valve element 41. FIG. 3 is a longitudinal sectional view showing the on-off valve 9 in the closed state.

<Configuration of Substrate Processing Apparatus 1>
Please refer to FIG. The substrate processing apparatus 1 includes a holding and rotating unit 2 that holds the substrate W in a substantially horizontal posture and rotates the held substrate W. The holding and rotating unit 2 includes a spin chuck 3 that holds the back surface of the substrate W by, for example, vacuum suction, and a rotation driving unit 4 that rotates the spin chuck 3 around a vertical rotation axis AX1. The rotation drive unit 4 includes an electric motor.

  The substrate processing apparatus 1 includes a nozzle 5, a processing liquid supply source 6, a processing liquid pipe 7, a pump P, an on-off valve 9, and a control unit 10.

  The nozzle 5 discharges a processing liquid onto the substrate W held by the holding and rotating unit 2. As the treatment liquid, for example, a coating liquid such as a photoresist liquid or a liquid for forming an antireflection film, a solvent such as a thinner, pure water (for example, DIW), a developing liquid, and an etching liquid are used. The processing liquid supply source 6 includes, for example, a tank or a bottle that stores the processing liquid. The processing liquid pipe 7 allows the processing liquid to pass between the nozzle 5 and the processing liquid supply source 6. Note that the processing liquid corresponds to the liquid of the present invention.

  The processing liquid pipe 7 is provided with a pump P and an on-off valve 9. The processing liquid pipe 7 may be provided with a filter or other components. The pump P sucks the processing liquid from the processing liquid supply source 6 and sends out the sucked processing liquid toward the nozzle 5. The on-off valve 9 supplies the processing liquid and stops the supply. The current supply circuit 11 supplies a current (electric power) to the on-off valve main body 9A. Power is supplied to the current supply circuit 11 from a power supply (not shown).

  The control unit 10 includes one or more central processing units (CPU). The control unit 10 controls each component of the substrate processing apparatus 1 including the on-off valve 9. Further, the control unit 10 executes the substrate processing based on, for example, various conditions and programs stored in a storage unit (not shown). The storage unit includes, for example, at least one of a read-only memory (ROM), a random-access memory (RAM), and a hard disk.

<Configuration of on-off valve 9>
Next, the on-off valve 9 which is a characteristic part of the present invention will be described with reference to FIGS. The on-off valve 9 includes a flow path block 21 (also referred to as a body) and a housing 22. The flow path block 21 includes a valve chamber flow path 23, an upstream flow path 25, and a downstream flow path 27. The valve chamber flow path 23, the upstream flow path 25, and the downstream flow path 27 each pass a processing liquid. Each of the upstream flow path 25 and the downstream flow path 27 communicates with the valve chamber flow path 23.

  Note that the upstream flow path 25 corresponds to the first flow path of the present invention. The downstream channel 27 corresponds to the second channel of the present invention.

  The flow path block 21 includes a valve seat block 31. The valve seat block 31 includes a valve seat 35 and a permanent magnet 36. The valve seat 35 surrounds an opening 37 which is a boundary between the valve chamber flow path 23 and the downstream flow path 27. The valve seat 35 is provided in the valve chamber flow path 23. Further, the valve seat 35 is formed in a ring shape so as to extend in the radial direction of the opening 37. FIG. 2B is a plan view showing the valve seat block 31 viewed from the valve element 41.

  The permanent magnet section 36 surrounds the downstream flow path 27 and is provided on the valve seat 35 side. As the permanent magnet, for example, a ferrite magnet or a neodymium magnet is used. Here, the relationship between the valve seat portion 35 and the permanent magnet portion 36 will be described. All surfaces of the permanent magnet portion 36 are covered with a cover 38 made of, for example, PFA (perfluoroalkoxyalkane). The cover 38 is formed of a sheet or a film having a desired thickness. The valve seat 35 is a part of the cover 38. That is, in the cover 38, a flat portion facing the valve body 41 and the electromagnet portion 45 described later becomes the valve seat portion 35. The permanent magnet 36 is adjacent to the valve seat 35.

  The permanent magnet portion 36 is configured such that, for example, the upper side (the valve seat 35 side) in FIG. 2A is the N pole, and the lower side (the opposite side of the valve seat 35) in FIG. 2A is the S pole. ,It is configured. In addition, the permanent magnet part 36 may be comprised so that it may become the reverse arrangement. That is, the permanent magnet portion 36 may be configured such that the upper side is an S pole and the lower side is an N pole.

  The movable portion 33 is disposed so as to straddle the valve chamber flow path 23 and the housing 22. The movable section 33 includes a valve element 41, a valve element-side electromagnet section 43, a valve rod 45, and a diaphragm 46. The valve element 41 is provided in the valve chamber flow path 23. The valve element 41 is for contacting the valve seat 35. That is, the valve element 41 is in contact with the valve seat 35 to close the opening 37. Thus, the flow of the processing liquid from the upstream flow path 25 to the downstream flow path 27 can be stopped.

  The positional relationship between the valve element 41 and the valve element-side electromagnet section 43 will be described. As shown in FIG. 2A, the valve body 41 is provided on the opposite side of the permanent magnet portion 36 with the valve seat portion 35 interposed therebetween. The valve body-side electromagnet part 43 is provided on the opposite side of the valve seat part 35 with the valve body 41 interposed therebetween. That is, the valve element 41 and the valve seat section 35 are disposed between the valve element-side electromagnet section 43 and the permanent magnet section 36.

  Here, the relationship between the valve element 41 and the valve element-side electromagnet section 43 will be described. All surfaces of the valve-side electromagnet section 43 are covered with, for example, a cover 47 made of PFA. The cover 47 is formed of a sheet or a film having a desired thickness. The valve body 41 is a part of the cover 47. That is, the flat portion of the cover 47 facing the valve seat portion 35 and the permanent magnet portion 36 becomes the valve body 41. The valve body-side electromagnet section 43 is adjacent to the valve body 41. The valve stem 45 is connected to the valve body-side electromagnet 43 covered by the cover 47. The housing 22 has a guide hole 48 for guiding the valve stem 45.

  The valve rod 45 is accommodated in the guide hole 48. A gap (play) 49 is formed between the valve stem 45 and the guide hole 48. Thereby, the valve stem 45 (movable part 33) can be slightly inclined with respect to the vertical axis AX2 (or the moving direction) shown in FIG. That is, the valve rod 45 (the movable portion 33) is guided with a gap in order to make the valve body 41 wobble. The axis AX2 is parallel to the central axis of the opening 37 or the permanent magnet section 36 and passes through the central axis of the opening 37 or the permanent magnet section 36. The axis AX2 is orthogonal to the upper surface of the valve seat 35 shown in FIG.

  In this embodiment, the diaphragm 46 is used to partition the valve chamber passage 23 from the space SP on the valve rod 45 side. The outer peripheral edge of the diaphragm 46 is attached to the side wall 21 </ b> A in the valve chamber flow path 23. On the other hand, the inner peripheral edge of the diaphragm 46 is attached to the movable section 33. 2A, the inner peripheral edge of the diaphragm 46 is attached between the cover 47 and the valve stem 45. The diaphragm 46 is formed of a flexible material, for example, a fluororesin such as PTFE (polytetrafluoroethylene) or PFA.

  The housing 22 is provided with a stopper 50 for receiving the elevation of the valve body-side electromagnet portion 43. For example, a predetermined portion including the end face of the guide hole 48 shown in FIG.

  The valve body-side electromagnet section 43 includes a bobbin 51, a coil 53 formed by winding an electric wire around the bobbin 51, and an iron core 55 passed through a hollow portion 51A of the bobbin 51. The bobbin 51, the coil 53, and the iron core 55 are covered with a fluororesin such as PTFE or another resin. In this case, a current supply path to the coil 53 is secured.

  The current is supplied from the current supply circuit 11 to the coil 53. The current supply circuit 11 supplies a current in the first direction to the valve body-side electromagnet section 43. The first direction refers to, for example, a direction when a current flows when the first end of the electric wire wound around the coil 53 is positive and the second end is negative. The second direction opposite to the first direction refers to, for example, a direction when a current flows with the first end of the electric wire wound around the coil 53 being negative and the second end being positive. . Note that the first direction may be a direction when the first end is set to be negative and the second end is set to be positive.

  The current supply circuit 11 supplies a current in the first direction to the valve body-side electromagnet section 43 and attracts the valve body-side electromagnet section 43 to the permanent magnet section 36, thereby bringing the valve body 41 closer to the valve seat section 35 and thereby closing the valve seat. The valve body 41 is pressed against the portion 35 (see FIG. 3). Further, the current supply circuit 11 supplies a current in a second direction opposite to the first direction to the valve body-side electromagnet section 43 to repel the valve body-side electromagnet section 43 from the permanent magnet section 36, and thereby the valve seat section 35. (See FIG. 2A).

<Operation of substrate processing apparatus 1 and on-off valve 9>
Next, operations of the substrate processing apparatus 1 and the on-off valve 9 will be described. The transport mechanism (not shown) transports the substrate W onto the holding and rotating unit 2 shown in FIG. The spin chuck 3 holds the substrate W by adsorbing the back surface of the substrate W. The rotation drive unit 4 rotates the spin chuck 3 around the rotation axis AX1. Thus, the substrate W held by the spin chuck 3 is rotated at a preset timing, rotation speed, and period. A nozzle moving mechanism (not shown) moves the nozzle 5 above the center of the substrate W.

[Step S01] On-off valve 9 (closed state)
At this time, the on-off valve 9 is closed, and the processing liquid is not discharged from the nozzle 5. As shown in FIG. 3, the valve element 41 is pressed against the valve seat 35, and the flow of the processing liquid between the upstream flow path 25 and the downstream flow path 27 is stopped. At this time, the current supply circuit 11 supplies a current in the first direction to the valve body-side electromagnet section 43. Therefore, the valve body 41 side of the valve body side electromagnet part 43 is an S pole, and the valve body side electromagnet part 43 and the permanent magnet part 36 are attracting each other.

[Step S02] Opening the open / close valve 9 In order to discharge the processing liquid from the nozzle 5, the current supply circuit 11 supplies a current to the valve body-side electromagnet section 43 in a second direction opposite to the first direction. I do. Thereby, as shown in FIG. 2A, the valve body 41 side (lower side) of the valve body side electromagnet part 43 becomes the N pole, and the valve body side electromagnet part 43 and the permanent magnet part 36 repel each other. Therefore, the valve element 41 separates from the valve seat 35. Thereafter, the back surface 45A of the valve rod 45 connected to the valve body-side electromagnet portion 43 contacts the stopper 50, and the valve body-side electromagnet portion 43 is kept in a state where the distance between the valve body 41 and the valve seat portion 35 is maintained at a predetermined distance. Are located on the stopper 50 side.

  This allows the processing liquid to flow between the upstream flow path 25 and the downstream flow path 27. That is, the pump P sucks the processing liquid from the processing liquid supply source 6 and sends out the processing liquid in the direction of the on-off valve 9. In the on-off valve 9, the processing liquid sent to the upstream flow path 25 is sent to the valve chamber flow path 23 and the downstream flow path 27 in order. The processing liquid that has passed through the on-off valve 9 is sent to the nozzle 5, and the processing liquid is discharged from the nozzle 5 onto the substrate W.

[Step S03] Close the on-off valve 9 The processing liquid is discharged from the nozzle 5, and after a preset time has elapsed, the processing liquid is stopped being discharged from the nozzle 5. This operation will be described. The current supply circuit 11 supplies a current in the first direction to the valve body-side electromagnet section 43. Thereby, as shown in FIG. 3, the valve element 41 side (lower side) of the valve element side electromagnet section 43 becomes the S pole, and the valve element side electromagnet section 43 and the permanent magnet section 36 attract each other. Therefore, the valve element 41 is brought close to the valve seat section 35 and the valve element 41 is pressed against the valve seat section 35. The valve element 41 and the valve seat 35 are sandwiched between the valve element-side electromagnet section 43 and the permanent magnet section 36. Therefore, the magnetic field (or magnetic force) generated by the valve body side electromagnet section 43 and the permanent magnet section 36 tends to press the valve body 41 against the valve seat section 35 uniformly in the circumferential direction of the valve seat section 35 and the opening 37. Therefore, the contact between the valve element 41 and the valve seat 35 can be ensured.

  Further, when the valve element 41 is pressed against the valve seat section 35, the contact between the valve element 41 and the valve seat section 35 is performed between flat surfaces. The contact surfaces of the valve element 41 and the valve seat 35 are both flat. Therefore, the impact force (per unit area) at the time of contact and the force (per unit area) for pressing the valve body against the valve seat can be dispersed, so that generation of particles can be suppressed.

  The valve element 41 and the valve seat 35 are both formed of PFA. If the valve element 41 or the valve seat 35 is formed of, for example, PTFE, particles may be generated by bringing them into contact. PFA is a material that does not easily generate particles due to contact. Therefore, when the valve body 41 and the valve seat 35 formed together with PFA are brought into contact with each other, generation of particles can be suppressed.

  When the valve element 41 is pressed against the valve seat 35, the flow of the processing liquid between the upstream flow path 25 and the downstream flow path 27 is stopped. Thus, the discharge of the processing liquid from the nozzle 5 is stopped. The nozzle 5 is moved from a position above the substrate W to a standby position. When the substrate W is rotating, the rotation of the substrate W is stopped. Thereafter, the spin chuck 3 releases the suction of the back surface of the substrate W, and the transport mechanism (not shown) transports the substrate W from above the spin chuck 3 (holding rotating unit 2).

  According to the present embodiment, the valve body-side electromagnet section 43 is provided on the valve body 41 side, and the permanent magnet section 36 is provided on the valve seat section 35 side. When the current supply circuit 11 supplies a current in the first direction to the valve-side electromagnet section 43, the valve-side electromagnet section 43 generates a magnetic field. Therefore, the valve body-side electromagnet 43 is attracted to the permanent magnet 36. That is, an attractive force by the magnetic field acts on the valve element 41 and the valve seat 35. As a result, the valve body 41 is brought closer to the valve seat 35, and the valve body 41 is pressed against the valve seat 35. Even if the valve element 41 collides with the valve seat portion 35, a force for contacting the valve seat portion 35 also acts on the valve element 41 that does not contact with one side due to the attracting force. That is, the valve element 41 can be pressed uniformly against the valve seat 35 in the circumferential direction of the valve seat 35. Thereby, contact between the valve element 41 and the valve seat 35 can be ensured, and occurrence of a leak can be prevented.

  Further, the electric motor 109 for driving the on-off valve shown in FIG. 12 is relatively easy to generate heat, and the heat generated by the heat is transmitted from the output of the electric motor 109 to the diaphragm 106 to the processing liquid passing through the on-off valve 9. May have an effect. The movable section 33 including the valve element 41 is moved by the valve element-side electromagnet section 43, but the electromagnet generates less heat than the electric motor 109. Therefore, the present invention can suppress the influence on the processing liquid due to heat generation.

  The on-off valve driven by the electric motor shown in FIG. 12 and the solenoid valve 201 shown in FIG. 13 are driven at one end of the movable core 203 (movable member), and contact the valve seat 208 at the other end of the movable core 203. And contact release. Therefore, strict assembling accuracy is required to prevent the movable iron core 203 from hitting against the valve seat 208. However, a valve body-side electromagnet section 43 is provided on the valve body 41 side, and a permanent magnet section 36 is provided on the valve seat section 35 side. Thereby, since the contact between the valve element 41 and the valve seat 35 can be ensured, the present invention does not require strict assembly accuracy. Therefore, assembly can be easily performed.

  Further, the current supply circuit 11 supplies a current in a second direction opposite to the first direction to the valve body-side electromagnet section 43 to repel the valve body-side electromagnet section 43 from the permanent magnet section 36, and thereby the valve seat section 35. From the valve body 41. Thereby, the valve element 41 can be brought close to the valve seat 35 by the magnetic field generated by the valve element-side electromagnet section 43, and the valve element 41 can be pressed against the valve seat 35, and the valve element 41 can be removed from the valve seat 35. Can be separated.

  Further, the valve seat block 31 includes a permanent magnet portion 36. For example, when the permanent magnet portion 36 on the valve seat 35 side is an electromagnet, a magnetic field can be generated in both the valve body side electromagnet portion 43 and the valve seat side electromagnet portion. However, if the valve seat 35 side is an electromagnet in addition to the valve body 41 side, the structure becomes complicated. In addition, heat is generated in the valve-seat-side electromagnet portion in addition to the valve-body-side electromagnet portion 43. According to the present embodiment, since the valve seat block 31 includes the permanent magnet portion 36, the configuration can be simplified, and since the permanent magnet portion 36 on the valve seat side does not generate heat, heat generation can be suppressed. .

  Next, a second embodiment of the present invention will be described with reference to the drawings. Note that the description overlapping with the first embodiment will be omitted. FIG. 4A is a longitudinal sectional view showing the on-off valve 9 in the open state. FIG. 4B is a longitudinal sectional view showing a part of the on-off valve 9 in the closed state.

  In the first embodiment, the valve seat block 31 includes the permanent magnet section 36, and the movable section 33 includes the valve body-side electromagnet section 43. In this regard, in the present embodiment, as shown in FIG. 4A, the valve seat block 31 includes a valve seat side electromagnet portion 61, and the movable portion 33 includes a permanent magnet portion 63.

  Referring to FIG. The on-off valve 9 of the present embodiment includes a valve chamber flow path 23 through which the processing liquid passes, and an upstream flow path 25 and a downstream flow path 27 each communicating with the valve chamber flow path 23. Further, the on-off valve 9 includes a valve seat block 31, a movable portion 33, and a current supply circuit 11.

  The valve seat block 31 includes a valve seat 35 and a valve seat side electromagnet 61. The valve seat 35 surrounds an opening 37 which is a boundary between the valve chamber flow path 23 and the downstream flow path 27. The valve seat 35 is provided in the valve chamber flow path 23. The valve seat portion 35 is a part of the cover 38 that covers all surfaces of the valve seat side electromagnet portion 61. The valve seat portion side electromagnet portion 61 surrounds the downstream flow path 27 and is provided on the valve seat portion 35 side. The valve seat portion side electromagnet portion 61 is adjacent to the valve seat portion 35.

  The valve seat side electromagnet portion 61 includes a bobbin 65 that arranges the downstream flow path 27 in the hollow portion 65A, a coil 66 formed by winding an electric wire around the bobbin 65, and a hollow that passes through the hollow portion 65A of the bobbin 65. An iron core 67 is provided. The hollow iron core 67 is formed in a cylindrical shape, and the downstream flow path 27 is arranged in a hollow portion of the central axis portion of the hollow iron core 67. The bobbin 65, the coil 66, and the hollow iron core 67 are covered with a fluororesin such as PTFE or another resin. Also in this case, a current supply path to the coil 66 is secured.

  The movable section 33 includes a valve body 41 and a permanent magnet section 63. The valve element 41 is constituted by a part of the cover 47. The permanent magnet section 63 is provided on the valve body 41 side. Further, the permanent magnet section 63 is adjacent to the valve element 41.

  The permanent magnet portion 63 is configured such that, for example, the upper side (opposite to the valve element 41) in FIG. 4A is the S pole, and the lower side (the valve element 41 side) in FIG. 4A is the N pole. Have been. The current supply circuit 11 selectively supplies a current in the first direction and a second direction opposite to the first direction to the valve seat side electromagnet section 61.

<Operation to close the on-off valve 9>
In FIG. 4A, the on-off valve 9 is in an open state. In order to close the on-off valve 9, the current supply circuit 11 supplies a current in the first direction to the valve seat side electromagnet section 61. Thereby, as shown in FIG. 4B, the upper side (the valve seat 35 side) of the valve seat side electromagnet section 61 becomes the S pole, and the lower side (the opposite side of the valve seat 35) becomes the N pole. . Therefore, the permanent magnet portion 63 and the valve seat side electromagnet portion 61 attract each other. As a result, the valve element 41 is brought closer to the valve seat section 35 and the valve element 41 is pressed against the valve seat section 35. Therefore, the flow of the processing liquid between the upstream flow path 25 and the downstream flow path 27 is stopped.

<Operation to open / close valve 9>
In FIG. 4B, the on-off valve 9 is in a closed state. In order to open the on-off valve 9, the current supply circuit 11 supplies a current in the second direction to the valve seat side electromagnet section 61. Thereby, as shown in FIG. 4A, the upper side (the valve seat 35 side) of the valve seat side electromagnet section 61 becomes the N pole, and the lower side (the opposite side of the valve seat 35) becomes the S pole. . Therefore, the permanent magnet portion 63 and the valve seat side electromagnet portion 61 repel each other. Thereby, the valve element 41 is separated from the valve seat 35. Therefore, the processing liquid flows between the upstream flow path 25 and the downstream flow path 27.

  According to this embodiment, the permanent magnet 63 is provided on the valve body 41 side, and the valve seat side electromagnet 61 is provided on the valve seat 35 side. When the current supply circuit 11 supplies a current in the first direction to the valve seat side electromagnet section 61, the valve seat side electromagnet section 61 generates a magnetic field. Therefore, the valve seat side electromagnet portion 61 attracts the permanent magnet portion 63. That is, an attractive force by the magnetic field acts on the valve element 41 and the valve seat 35. As a result, the valve body 41 is brought closer to the valve seat 35, and the valve body 41 is pressed against the valve seat 35. Even if the valve element 41 collides with the valve seat portion 35, a force for contacting the valve seat portion 35 also acts on the valve element 41 that does not contact with one side due to the attracting force. That is, the valve element 41 can be pressed uniformly against the valve seat 35 in the circumferential direction of the valve seat 35. Thereby, contact between the valve element 41 and the valve seat 35 can be ensured, and occurrence of a leak can be prevented.

  Next, a third embodiment of the present invention will be described with reference to the drawings. Note that the description overlapping with the first and second embodiments will be omitted. FIG. 5A is a longitudinal sectional view showing the on-off valve 9 in the open state. FIG. 5B is a longitudinal sectional view showing a part of the on-off valve 9 in the closed state.

  In the first embodiment described above, the valve seat block 31 was provided with the permanent magnet portion 36, as shown in FIG. In this regard, instead of the permanent magnet section 36, the valve seat block 31 may include a ferromagnetic body section 71.

  5A, the valve seat block 31 includes a valve seat 35 and a ferromagnetic body 71. The ferromagnetic portion 71 surrounds the downstream flow path 27 and is provided on the valve seat 35 side. The ferromagnetic portion 71 is configured to include at least one of iron, nickel, and cobalt. The ferromagnetic portion 71 may be an alloy or an oxide. The ferromagnetic member 71 is not a permanent magnet, but may be a permanent magnet.

  The movable portion 33 includes a valve element 41 and a valve element-side electromagnet section 43, as in the first embodiment. In this modified example, the movable member 33 has a spring member 73 attached thereto. The spring member 73 is attached to the surface 22 </ b> A of the housing 22 facing the valve seat 35, for example, so as to suspend the movable unit 33. In FIG. 5A, two spring members 73 are provided to suspend the movable portion 33, but one or three or more spring members 73 may be provided.

  The current supply circuit 11 supplies a current in the first direction (or the second direction) to the valve body-side electromagnet section 43. The spring member 73 presses the movable portion 33 against the stopper 50 when the current supply circuit 11 does not supply a current to the valve body-side electromagnet portion 43 (when the valve body-side electromagnet portion 43 does not generate a magnetic field). When the current supply circuit 11 supplies a current to the valve body-side electromagnet unit 43, the valve body-side electromagnet unit 43 generates a magnetic field, and the generated magnetic field opposes the restoring force of the spring member 73, and the movable unit including the valve body 41. 33 is moved in a direction to approach the valve seat 35. When the current supply circuit 11 stops the current supplied to the valve body-side electromagnet section 43, the valve body-side electromagnet section 43 stops generating a magnetic field, and the resilient force of the spring member 73 causes the movable section 33 including the valve body 41 to move. It is moved in a direction away from the valve seat 35.

<Operation to close the on-off valve 9>
In FIG. 5A, the on-off valve 9 is in an open state. In order to close the on-off valve 9, the current supply circuit 11 supplies a current in the first direction to the valve body-side electromagnet section 43. As a result, as shown in FIG. 5B, the lower side (valve body 41 side) of the valve body side electromagnet portion 43 becomes the S pole (or N pole). Therefore, the valve body-side electromagnet section 43 is attracted to the ferromagnetic body section 71. As a result, the valve element 41 is made to approach the valve seat section 35 while the energy is accumulated in the spring member 73 (that is, while resisting the restoring force of the spring member 73), and the valve element 41 is pressed against the valve seat section 35. Therefore, the flow of the processing liquid between the upstream flow path 25 and the downstream flow path 27 is stopped.

<Operation to open / close valve 9>
In FIG. 5B, the on-off valve 9 is in a closed state. In order to open the on-off valve, the current supply circuit 11 stops supplying the current in the first direction to the valve body-side electromagnet unit 43. As a result, as shown in FIG. 5A, the valve body-side electromagnet portion 43 does not generate a magnetic field, and the valve body 41 is separated from the valve seat portion 35 by the energy (ie, restoring force) accumulated in the spring member 73. You. Therefore, the processing liquid flows between the upstream flow path 25 and the downstream flow path 27. Further, since the spring member 73 presses the movable portion 33 against the stopper 50, the position of the valve body 41 in the open state can be stabilized.

  According to the present embodiment, the valve element 41 is brought close to the valve seat section 35 and the valve element 41 is pressed against the valve seat section 35 by the magnetic field generated by the valve element-side electromagnet section 43 and the energy accumulated in the spring member 73. And the valve element 41 can be separated from the valve seat 35.

  Next, a fourth embodiment of the present invention will be described with reference to the drawings. The description overlapping with the first to third embodiments will be omitted. FIG. 6A is a longitudinal sectional view showing the on-off valve 9 in the open state. FIG. 6B is a longitudinal sectional view showing a part of the on-off valve 9 in the closed state.

  In the above-described second embodiment, as shown in FIG. 4A, the movable section 33 includes the permanent magnet section 63. In this regard, the movable section 33 may include a ferromagnetic body section 75 instead of the permanent magnet section 63.

  6A, the movable section 33 includes a valve element 41 and a ferromagnetic body section 75. The ferromagnetic body portion 75 is provided on the valve body 41 side. The valve body 41 and the valve seat 35 are disposed between the ferromagnetic body 75 and the valve seat side electromagnet 61. The ferromagnetic member 75 is made of iron or the like, like the ferromagnetic member 71 of the third embodiment. The ferromagnetic member 75 is not a permanent magnet, but may be a permanent magnet.

  The movable member 33 has a spring member 73 attached thereto as in the third embodiment. The current supply circuit 11 supplies a current in a first direction (or a second direction) to the valve seat side electromagnet section 61. When the current supply circuit 11 supplies a current to the valve-seat-side electromagnet portion 61, the valve-seat-side electromagnet portion 61 generates a magnetic field. Is moved in a direction to approach the valve seat 35. When the current supply circuit 11 stops supplying current to the valve seat side electromagnet portion 61, the valve seat side electromagnet portion 61 stops generating a magnetic field, and the repulsive force of the spring member 73 includes the valve element 41. The movable part 33 is moved in a direction away from the valve seat 35.

<Operation to close the on-off valve 9>
In FIG. 6A, the on-off valve 9 is in an open state. In order to close the on-off valve 9, the current supply circuit 11 supplies a current in the first direction to the valve seat side electromagnet section 61. Thus, as shown in FIG. 6B, the upper side (valve seat 35 side) of the valve seat side electromagnet section 61 becomes the S pole (or N pole). Therefore, the ferromagnetic body portion 75 is attracted to the valve seat side electromagnet portion 61. As a result, the valve body 41 is brought closer to the valve seat portion 35 while energy is stored in the spring member 73, and the valve body 41 is pressed against the valve seat portion 35. Therefore, the flow of the processing liquid between the upstream flow path 25 and the downstream flow path 27 is stopped.

<Operation to open / close valve 9>
In FIG. 6B, the on-off valve 9 is in a closed state. In order to open the on-off valve 9, the current supply circuit 11 stops supplying the current in the first direction to the valve seat side electromagnet section 61. Thus, as shown in FIG. 6A, the valve seat side electromagnet portion 61 does not generate a magnetic field, and the energy accumulated in the spring member 73 causes the valve body 41 to separate from the valve seat portion 35. Therefore, the processing liquid flows between the upstream channel 25 and the downstream channel 27. Further, since the spring member 73 presses the movable portion 33 against the stopper 50, the position of the valve body 41 in the open state can be stabilized.

  According to the present embodiment, the valve element 41 is brought close to the valve seat section 35 by the magnetic field generated by the valve seat section-side electromagnet section 61 and the energy stored in the spring member 73. Can be pressed, and the valve element 41 can be separated from the valve seat 35.

  Next, a fifth embodiment of the present invention will be described with reference to the drawings. Note that the description overlapping with the first and second embodiments will be omitted. FIG. 7A is a longitudinal sectional view showing the on-off valve 9 in the open state. FIG. 7B is a longitudinal sectional view showing a part of the on-off valve 9 in the closed state.

  In Embodiments 1 and 2 described above, as shown in FIGS. 2A and 4A, one of the valve seat block 31 and the movable portion 33 includes an electromagnet portion, and the other includes a permanent magnet portion. I was In this regard, both the valve seat block 31 and the movable section 33 may include an electromagnet section.

  In FIG. 7A, the valve seat block 31 includes a valve seat 35 and a valve seat side electromagnet 61 as in the second embodiment. The movable section 33 includes a valve body 41 and a valve body-side electromagnet section 43 as in the first embodiment.

  The current supply circuit 11 supplies a current to the valve body-side electromagnet section 43 and the valve seat-side electromagnet section 61. The amount of current supplied to the valve body-side electromagnet section 43 and the valve seat-side electromagnet section 61 is adjusted. The current supply circuit 11 uses, for example, one of the valve body-side electromagnet section 43 and the valve seat-side electromagnet section 61 like a permanent magnet in order to supply current to the two electromagnet sections 43 and 61. I do.

  That is, the current supply circuit 11 supplies a current in a preset direction (first direction or second direction) to the valve body-side electromagnet section 43. Thus, for example, the valve body-side electromagnet portion is configured such that the upper side (the valve body 41 side) in FIG. 7A is the S pole and the lower side (the side opposite to the valve body 41) in FIG. 43 generates a magnetic field.

  On the other hand, the current supply circuit 11 supplies a current in the first direction to the valve seat side electromagnet section 61. Thereby, as shown in FIG. 7B, the upper side (the valve seat 35 side) of the valve seat side electromagnet section 61 becomes the S pole, and the lower side (the opposite side of the valve seat 35) becomes the N pole. . Therefore, the valve body side electromagnet part 43 and the valve seat part side electromagnet part 61 attract each other.

  The current supply circuit 11 supplies a current in the second direction to the valve-seat-side electromagnet section 61. Thereby, as shown in FIG. 7A, the upper side (the valve seat 35 side) of the valve seat side electromagnet section 61 becomes the N pole, and the lower side (the opposite side of the valve seat 35) becomes the S pole. . Therefore, the valve body side electromagnet part 43 and the valve seat part side electromagnet part 61 repel each other.

  The operation of the current supply circuit 11 describes the case where the valve body-side electromagnet section 43 is used as a permanent magnet. The operation of the current supply circuit 11 when the valve seat side electromagnet portion 61 is used as a permanent magnet is performed in the same manner.

  According to the present embodiment, it is possible to generate a magnetic field in both the valve body side electromagnet section 43 and the valve seat section side electromagnet section 61. Further, the strength of the magnetic field generated by each of the valve body-side electromagnet section 43 and the valve seat-side electromagnet section 61 can be adjusted. Further, the magnetic field generated by each of the valve body side electromagnet part 43 and the valve seat part side electromagnet part 61 allows the valve body 41 to approach the valve seat part 35 and press the valve body 41 against the valve seat part 35, The valve element 41 can be separated from the valve seat 35.

  The present invention is not limited to the above embodiment, but can be modified as follows.

  (1) In the first, second, and fifth embodiments, when the on-off valve 9 is in the open state, the movable portion 33 is pressed against the stopper 50, and the gap between the valve body 41 and the valve seat portion 35 ( Opening) was constant. In this regard, the gap between the valve body 41 and the valve seat 35 may be adjusted by adjusting the amount of current supplied to at least one of the valve body-side electromagnet 43 and the valve seat-side electromagnet 61. .

  For example, the current supply circuit 11 adjusts the amount of current supplied to the valve body-side electromagnet section 43 when supplying the current in the second direction to the valve body-side electromagnet section 43, so that the valve seat section 35 and the valve body 41 are Adjust the gap between them. This makes it possible to adjust the flow rate of the processing liquid flowing between the upstream flow path 25 and the downstream flow path 27 when the on-off valve 9 is in the open state. Here, the current in the second direction is a current in the direction for causing the valve body-side electromagnet portion 43 and the permanent magnet portion 36 to repel each other in the on-off valve 9 in FIG.

  For example, as shown in FIG. 8A, when the movable body 33 is pressed against the stopper 50 by repelling the valve body-side electromagnet part 43 and the permanent magnet part 36, the gap between the valve body 41 and the valve seat part 35 is increased. Is the distance D1, and the amount of current supplied to the valve body-side electromagnet portion 43 is the current amount CA1 (absolute value). When the gap between the valve body 41 and the valve seat portion 35 is set to a distance D2 smaller than the distance D1 (D1> D2), the current supply circuit 11 determines the amount of current supplied to the valve body-side electromagnet portion 43 by the amount of current The current amount CA2 (absolute value) is adjusted to be smaller than CA1 (CA1> CA2).

  When the on-off valve 9 includes the valve body-side electromagnet section 43 and the valve seat-side electromagnet section 61 as shown in FIG. 7A, at least one of the valve body-side electromagnet section 43 and the valve seat-side electromagnet section 61. The gap between the valve body 41 and the valve seat 35 may be adjusted by adjusting the amount of current supplied to the valve body 41.

  8A, when the processing liquid in the valve chamber flow path 23 passes between the valve element 41 and the valve seat 35 and flows to the downstream flow path 27, the valve element 41 and the valve seat There is a possibility to push between 35. In order to suppress this, for example, as shown in FIG. 8B, a rise suppressing portion 76 for suppressing the rise of the movable portion 33 may be provided. The lift suppressing portion 76 includes a contact portion 77 and a spring member 78. The spring member 78 is connected to the housing 22 and the contact portion 77, and is not connected to the movable portion 33. For this reason, the lift suppressing portion 76 does not function when the valve body 41 is in contact with the valve seat 35, and functions when the valve body 41 is separated from the valve seat 35. The rise suppressing portion 76 can suppress the force for expanding the space between the valve body 41 and the valve seat 35, and can suppress the fluctuation of the gap between the valve body 41 and the valve seat 35.

  9B, the gap between the valve body 41 and the valve seat 35 may be changed by a screw 79 shown in FIG. That is, the screw 79 is passed through the screw hole 80 provided in the housing 22, and the screw thread of the screw 79 and the screw thread of the screw hole 80 mesh with each other. A knob 79A is provided at one end of the screw 79, and a contact surface 79B at the other end of which is in contact with the valve rod 45 (the movable portion 33). When the screw 79 is turned, the screw 79 moves up or down with respect to the screw hole 80. That is, when the screw 79 is turned, the height position of the contact surface 79B can be changed.

  When the state is changed from the closed state to the open state, the current supply circuit 11 supplies a current in the second direction to the valve body-side electromagnet section 43 to cause the valve body-side electromagnet section 43 and the permanent magnet section 36 to repel each other. As a result, the valve element 41 is separated from the valve seat 35, and then the upper surface 45 </ b> B of the valve rod 45 is pressed against the contact surface 79 </ b> B whose height has been adjusted by the screw 79. The gap between the valve body 41 and the valve seat 35 is set by the height position where the upper surface 45B of the valve rod 45 is in contact with the contact surface 79B of the screw 79.

  (2) In each of the above embodiments and modified examples (1), the diaphragm 46 is provided separately from the valve element 41. In this regard, as shown in FIGS. 10A to 10C, the diaphragm 81 may function not only as a partition between the valve chamber flow path 23 and the space SP but also as a valve body. A valve body portion of the diaphragm 81 is represented by reference numeral 83.

  In FIG. 10A, the diaphragm 81 is joined to the lower surface and the side surface of the valve body-side electromagnet portion 43 facing the valve seat 35. In FIG. 10B, the diaphragm 81 is not joined to the side surface of the valve body-side electromagnet portion 43 but is joined to the lower surface of the valve body-side electromagnet portion 43 facing the valve seat 35. Further, in FIG. 10C, the portion of the valve body 83 of the diaphragm 81 may be configured to be thicker than the thickness of the portion other than the valve body 83. In FIGS. 10A to 10C, the diaphragm 81 is joined to the valve body-side electromagnet portion 43, and is replaced with the permanent magnet portion 36 or the ferromagnetic portion 75 depending on the configuration of the on-off valve 9. You may.

  (3) In each of the above-described embodiments and modifications, the core 55 and the hollow core 67 of the valve body-side electromagnet portion 43 and the valve seat portion-side electromagnet portion 61 are configured to have the same diameter in the axial direction. . In this regard, as shown in FIGS. 11A and 11B, the iron core 55 and the hollow iron core 67 have a diameter larger than the inner diameter ID of each of the bobbins 51 and 65 at the end facing the valve seat 35. May be provided. The facing portions 85 and 86 are made of, for example, the same iron-containing material as the iron core 55 and the hollow iron core 67. FIG. 11A is a diagram illustrating the valve body-side electromagnet section 43. FIG. 11B is a diagram illustrating the valve seat side electromagnet portion 61. Note that the facing portion 86 is formed in a ring shape. Further, the facing portions 85 and 86 are provided as a part of the iron core 55 or the hollow iron core 67, respectively, but may be provided separately from the iron core 55 and the hollow iron core 67, respectively.

  (4) In each of the embodiments and the modifications described above, the contact between the valve body 41 and the valve seat 35 is made between the planes. In this regard, for example, when there is almost no generation of particles, one of the valve element 41 and the valve seat 35 may be brought into point contact in a longitudinal sectional view as shown in FIG.

  (5) In each of the embodiments and the modifications described above, each of the permanent magnet portions 36 and 63 is formed of one permanent magnet. However, for example, a plurality (for example, three or more) of ring-shaped arrangements are provided. It may be constituted by a permanent magnet. Although the valve body-side electromagnet section 43 and the valve seat-side electromagnet section 61 are each configured by one electromagnet, for example, they may be configured by a plurality of electromagnets arranged in a ring shape. Further, each of the ferromagnetic portions 71 and 75 is made of one ferromagnetic material, but may be made of a plurality of ferromagnetic materials arranged in a ring shape, for example.

  (6) In each of the above-described embodiments and modifications, for example, in FIG. 2A, the processing liquid flows from the upstream flow path 25 to the downstream flow path 27. The processing liquid may flow through the channel 25.

  (7) In the above-described embodiments and modifications, for example, in FIG. 2A, the entire surface of the permanent magnet portion 36 and the valve body-side electromagnet portion 43 are covered with the covers 38 and 47, respectively. In this regard, the permanent magnet portion 36 and the valve body-side electromagnet portion 43 may be covered with the covers 38 and 47 only at portions corresponding to the valve seat portion 35 or the valve body 41, respectively. When the valve seat block 21 is made of PFA, the permanent magnet portion 36 may be embedded in the valve seat block 21. Further, the bobbin 51, the coil 53, and the iron core 55 of the valve body-side electromagnet section 43 may be embedded in PFA.

  (8) In the above-described embodiments and modifications, for example, in FIG. 2A, the permanent magnet portion 36 is provided below the valve seat portion 35, but is provided on the side of the valve seat portion 35. It may be provided. Further, the valve body-side electromagnet section 43 is provided above the valve body 41, but may be provided on the side of the valve body 41. In this case, for example, the valve body-side electromagnet section 43 may include a hollow iron core.

DESCRIPTION OF SYMBOLS 1 ... Substrate processing apparatus 5 ... Nozzle P ... Pump 9 ... On-off valve 10 ... Control part 11 ... Current supply circuit 23 ... Valve room flow path 25 ... Upstream flow path 27 ... Downstream flow path 31 ... Valve seat block 33 ... Movable Portion 35 ... Valve seat portion 36, 63 ... Permanent magnet portion 37 ... Opening 41, 83 ... Valve body 43 ... Valve body side electromagnet portion 61 ... Valve seat portion side electromagnet portion 71, 75 ... Ferromagnetic body portion 73 ... Spring member

Claims (11)

A valve chamber passage through which liquid passes;
A first flow path and a second flow path each communicating with the valve chamber flow path;
The valve seat portion surrounding the opening which is a boundary between the valve chamber flow passage and the second flow passage, and surrounding the valve seat portion provided in the valve chamber flow passage, and the second flow passage; A valve seat block having a ferromagnetic portion or a magnet portion provided on the side,
A valve body provided in the valve chamber flow path, and a valve body for contacting the valve seat, and a movable unit having a valve body-side electromagnet unit provided on the valve body side,
By supplying a current in a first direction to the valve body-side electromagnet unit and attracting the valve body-side electromagnet unit to the ferromagnetic body unit or the magnet unit, the valve body is brought close to the valve seat unit, and the valve seat is brought close to the valve seat unit. A current supply circuit for pressing the valve body against the part,
An on-off valve characterized by comprising: The on-off valve according to claim 1,
The ferromagnetic portion or the magnet portion is the magnet portion,
The current supply circuit supplies a current in a first direction to the valve body-side electromagnet unit, and attracts the valve body-side electromagnet unit to the magnet unit, thereby bringing the valve body close to the valve seat unit and the valve seat unit. The valve seat by pressing the valve body against the valve body and supplying a current in a second direction opposite to the first direction to the valve body-side electromagnet section to repel the valve body-side electromagnet section from the magnet section. An on-off valve, wherein the valve element is separated from a portion. The on-off valve according to claim 2,
The on-off valve, wherein the magnet unit is a permanent magnet unit. The on-off valve according to claim 2,
The said magnet part is a valve seat part side electromagnet part, The on-off valve characterized by the above-mentioned. The open / close valve according to any one of claims 2 to 4,
The current supply circuit adjusts an amount of current supplied to the valve body-side electromagnet portion when supplying the current in the second direction to the valve body-side electromagnet portion, so that the current between the valve seat portion and the valve body is adjusted. An on-off valve characterized by adjusting the gap between the valves. The on-off valve according to claim 1,
The ferromagnetic portion or the magnet portion is the ferromagnetic portion,
The movable portion has a spring member attached thereto,
The current supply circuit supplies a current in a first direction to the valve body-side electromagnet section, and attracts the valve body-side electromagnet section to the magnet section, thereby accumulating energy in the spring member and applying the current to the valve seat section. By bringing the valve body close, pressing the valve body against the valve seat part, and stopping the supply of current in the first direction to the valve body-side electromagnet part, the energy stored in the spring member allows the valve seat part to move. An on-off valve characterized by separating a valve body from a part. A valve chamber passage through which liquid passes;
A first flow path and a second flow path each communicating with the valve chamber flow path;
The valve seat portion surrounding the opening which is a boundary between the valve chamber flow passage and the second flow passage, and surrounding the valve seat portion provided in the valve chamber flow passage, and the second flow passage; A valve seat block having a valve seat side electromagnet portion provided on the side,
A valve body provided in the valve chamber flow path, for contacting the valve seat portion, and a movable portion having a ferromagnetic material portion or a magnet portion provided on the valve body side,
By supplying a current in the first direction to the valve seat side electromagnet portion and attracting the ferromagnetic body portion or the magnet portion to the valve seat side electromagnet portion, the valve body is brought close to the valve seat portion. Current supply circuit for pressing the valve body against the valve seat portion,
An on-off valve characterized by comprising: The on-off valve according to any one of claims 1 to 7,
The on-off valve, wherein the valve element and the valve seat are formed of PFA. The open / close valve according to any one of claims 1 to 8,
The on-off valve according to claim 1, wherein the contact between the valve body and the valve seat portion is performed between flat surfaces. A nozzle for discharging liquid,
A pump for sending liquid to the nozzle;
Piping for passing liquid between the nozzle and the pump;
An on-off valve provided on the pipe and capable of selecting supply of the liquid to the nozzle and supply stop thereof,
The on-off valve, a valve chamber flow path through which liquid passes,
A first flow path and a second flow path each communicating with the valve chamber flow path;
The valve seat portion surrounding the opening which is a boundary between the valve chamber flow passage and the second flow passage, and surrounding the valve seat portion provided in the valve chamber flow passage, and the second flow passage; A valve seat block having a ferromagnetic portion or a magnet portion provided on the side,
A valve body provided in the valve chamber flow path, and a valve body for contacting the valve seat, and a movable unit having a valve body-side electromagnet unit provided on the valve body side,
By supplying a current in a first direction to the valve body-side electromagnet part and attracting the valve body-side electromagnet part to the ferromagnetic body part or the magnet part, the valve body is brought close to the valve seat part, and the valve seat And a current supply circuit for pressing the valve body against the portion. A nozzle for discharging liquid,
A pump for sending liquid to the nozzle;
Piping for passing liquid between the nozzle and the pump;
An on-off valve provided on the pipe and capable of selecting supply of the liquid to the nozzle and supply stop thereof,
The on-off valve, a valve chamber flow path through which liquid passes,
A first flow path and a second flow path each communicating with the valve chamber flow path;
The valve seat portion surrounding the opening which is a boundary between the valve chamber flow passage and the second flow passage, and surrounding the valve seat portion provided in the valve chamber flow passage, and the second flow passage; A valve seat block having a valve seat side electromagnet portion provided on the side,
A valve body provided in the valve chamber flow path, for contacting the valve seat portion, and a movable portion having a ferromagnetic material portion or a magnet portion provided on the valve body side,
By supplying a current in a first direction to the valve seat side electromagnet portion and attracting the valve seat side electromagnet portion to the ferromagnetic material portion or the magnet portion, the valve body is brought close to the valve seat portion. And a current supply circuit for pressing the valve body against the valve seat.

Images