JP2021123736A - Low thermal expansion casting - Google Patents

Low thermal expansion casting Download PDF

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JP2021123736A
JP2021123736A JP2020016337A JP2020016337A JP2021123736A JP 2021123736 A JP2021123736 A JP 2021123736A JP 2020016337 A JP2020016337 A JP 2020016337A JP 2020016337 A JP2020016337 A JP 2020016337A JP 2021123736 A JP2021123736 A JP 2021123736A
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thermal expansion
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JP7541705B2 (en
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晴康 大野
Haruyasu Ono
晴康 大野
信吾 松村
Shingo Matsumura
信吾 松村
浩太郎 小奈
Kotaro Ona
浩太郎 小奈
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Shinhokoku Steel Corp
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Abstract

【課題】経年変化が小さく、さらに被削性に優れた低熱膨張鋳物を提供する。
【解決手段】低熱膨張鋳物の化学成分を、質量%で、C:1.00〜2.50%、Si:2.50%以下、Mn:1.00%以下、Ni:28.00〜40.00%、Co:0〜10.00%、Mg:0〜0.090%を含有し、残部がFe及び不可避的不純物とし、かつ、固溶C量を0.08質量%以下とする。
【選択図】なし
PROBLEM TO BE SOLVED: To provide a low thermal expansion casting having a small change over time and excellent machinability.
SOLUTION: The chemical composition of a low thermal expansion casting is C: 1.00 to 2.50%, Si: 2.50% or less, Mn: 1.00% or less, Ni: 28.0 to 40 in mass%. It contains 0.00%, Co: 0 to 10.00%, Mg: 0 to 0.090%, the balance is Fe and unavoidable impurities, and the amount of solid solution C is 0.08% by mass or less.
[Selection diagram] None

Description

本発明は低熱膨張合金鋳物に関し、特に、経時寸法変化(以下「経年変化」という)が小さく、かつ被削性に優れた低熱膨張鋳物に関する。 The present invention relates to a low thermal expansion alloy casting, and more particularly to a low thermal expansion casting having a small change over time (hereinafter referred to as "aging") and excellent machinability.

エレクトロニクスや半導体関連機器、レーザ加工機、超精密加工機器の部品材料として、熱的に安定なインバー合金が広く使用されている。一方、精密機器の構成部品に使用される低熱膨張合金においては、長期間にわたる経年変化の問題が指摘されている。 Thermally stable Invar alloys are widely used as component materials for electronics, semiconductor-related equipment, laser processing machines, and ultra-precision processing equipment. On the other hand, it has been pointed out that low thermal expansion alloys used for components of precision equipment have a problem of aging over a long period of time.

特許文献1は、この課題を解決する手段として、γ膨張の原因と考えられるCに加えて、B、Nの含有量を適切な範囲に設定することにより得られる、経年変化が±0.5ppm/年以内の低熱膨張鋳鋼及び鍛鋼品を開示している。 In Patent Document 1, as a means for solving this problem, the secular change obtained by setting the contents of B and N in an appropriate range in addition to C, which is considered to be the cause of γ expansion, is ± 0.5 ppm. / Years of low thermal expansion cast steel and forged steel products are disclosed.

一方、従来インバー合金は被削性が低いため、実用化されているのはかなり狭い分野に限定されるという問題があった。 On the other hand, since the conventional Invar alloy has low machinability, there is a problem that practical use is limited to a fairly narrow field.

特許文献2は、この課題を解決する手段として、鋳造過程において黒鉛が合金組織内に晶出できる成分を有する低熱膨張鋳鉄を開示している。 Patent Document 2 discloses low thermal expansion cast iron having a component in which graphite can crystallize in an alloy structure during a casting process as a means for solving this problem.

特開2018−178151号公報Japanese Unexamined Patent Publication No. 2018-178151 特開平6−172919号公報Japanese Unexamined Patent Publication No. 6-172919

精密機器の構成部品に使用する合金には、加工の容易性の観点から、優れた被削性が求められる。 Alloys used for components of precision equipment are required to have excellent machinability from the viewpoint of ease of processing.

特許文献1のような経年変化が小さい低熱膨張鋳鋼の被削性を向上させるためには、特許文献2のようにC含有量を増やし、黒鉛を晶出させることが考えられる。しかしながら、C量の増加に伴い固溶C量が増加すると、経年変化は大きくなる。これは、鋼中に固溶したCが、時間の経過とともに拡散したり析出したりすることによって、鋼の構造がわずかに変化するためと考えられる。 In order to improve the machinability of the low thermal expansion cast steel having a small secular change as in Patent Document 1, it is conceivable to increase the C content and crystallize graphite as in Patent Document 2. However, if the amount of solid solution C increases with the increase in the amount of C, the secular change becomes large. It is considered that this is because C dissolved in the steel diffuses or precipitates with the passage of time, so that the structure of the steel changes slightly.

本発明は、上記の事情に鑑み、経年変化が小さく、さらに被削性に優れた低熱膨張鋳物を提供することを課題とする。 In view of the above circumstances, it is an object of the present invention to provide a low thermal expansion casting having a small change over time and excellent machinability.

本発明者らは、経年変化が小さく、さらに被削性に優れた低熱膨張鋳物を得る方法を鋭意検討した。その結果、C含有量を増やし黒鉛を晶出させ被削性を高めた場合であっても、適切な熱処理を施すことにより固溶C量を減少させることができ、γ経年変化が小さく、かつ、被削性に優れた低熱膨張鋳物が得られることを知見した。 The present inventors have diligently studied a method for obtaining a low-thermal expansion casting having a small change over time and excellent machinability. As a result, even when the C content is increased and graphite is crystallized to improve the machinability, the solid solution C content can be reduced by performing an appropriate heat treatment, the γ aging change is small, and It was found that a low thermal expansion casting with excellent machinability can be obtained.

本発明は上記の知見に基づきなされたものであって、その要旨は以下のとおりである。 The present invention has been made based on the above findings, and the gist thereof is as follows.

(1)質量%で、C:1.00〜2.50%、Si:2.50%以下、Mn:1.00%以下、Ni:28.00〜40.00%、Co:0〜10.00%、Mg:0〜0.090%を含有し、残部がFe及び不可避的不純物であり、固溶C量が0.08質量%以下であることを特徴とする低熱膨張鋳物。 (1) In terms of mass%, C: 1.00 to 2.50%, Si: 2.50% or less, Mn: 1.00% or less, Ni: 28.0 to 40.00%, Co: 0 to 10 A low thermal expansion casting containing .00%, Mg: 0 to 0.090%, the balance being Fe and unavoidable impurities, and the amount of solid solution C being 0.08% by mass or less.

(2)質量%で、Mg:0.040〜0.090%を含有することを特徴とする前記(1)の低熱膨張鋳物。 (2) The low thermal expansion casting according to (1) above, which contains Mg: 0.040 to 0.090% in mass%.

(3)25〜100℃の平均熱膨張係数が5.0×10-6/℃以下であることを特徴とする前記(1)又は(2)の低熱膨張鋳物。 (3) The low thermal expansion casting according to (1) or (2) above, wherein the average coefficient of thermal expansion at 25 to 100 ° C. is 5.0 × 10 -6 / ° C. or less.

(4)前記(1)〜(3)のいずれかの低熱膨張鋳物を製造する方法であって、質量%で、C:1.00〜2.50%、Si:2.50%以下、Mn:1.00%以下、Ni:28.00〜40.00%、Co:0〜10.00%、Mg:0〜0.090%を含有し、残部がFe及び不可避的不純物である凝固後の鋳片に、500〜700℃で30〜60時間保持する熱処理を施す工程を含むことを特徴とする低熱膨張鋳物の製造方法。 (4) A method for producing a low thermal expansion casting according to any one of (1) to (3) above, wherein in terms of mass%, C: 1.00 to 2.50%, Si: 2.50% or less, Mn. : 1.00% or less, Ni: 28.0 to 40.00%, Co: 0 to 10.00%, Mg: 0 to 0.090%, and the balance is Fe and unavoidable impurities after solidification. A method for producing a low thermal expansion casting, which comprises a step of subjecting the slab to a heat treatment of holding the slab at 500 to 700 ° C. for 30 to 60 hours.

本発明によれば、経年変化が小さく、さらに被削性に優れた低熱膨張鋳物が得られるので、長期間にわたるわずかな寸法変化が問題となるような精密機器の構成部品等に適用でき、さらに精密機器の構成部品への加工を容易に行えるようになる。 According to the present invention, since a low thermal expansion casting having a small aging change and excellent machinability can be obtained, it can be applied to a component part of a precision instrument or the like in which a slight dimensional change over a long period of time becomes a problem. It will be possible to easily process the components of precision equipment.

以下、本発明について詳細に説明する。以下、成分組成に関する「%」は特に断りのない限り「質量%」を表すものとする。はじめに、本発明の鋳物の成分組成について説明する。 Hereinafter, the present invention will be described in detail. Hereinafter, "%" regarding the component composition shall represent "mass%" unless otherwise specified. First, the component composition of the casting of the present invention will be described.

[C:1.00〜2.50%]
Cは、鋳物中に黒鉛として晶出し被削性を高める元素である。この効果を得るために、C量を1.00以上、好ましくは1.50%以上とする。C量が多すぎると、機械的強度が低下し、鋳造性が低下することがあるので、C量は2.50%以下、好ましくは2.40%以下とする。なお、Cは黒鉛として晶出するCと、鋳物中に固溶するCに分かれる。ここで規定されるC量は、黒鉛として晶出するC、鋳物中に固溶するCを含む、全C量である。固溶C量については後述する。
[C: 1.00 to 2.50%]
C is an element that crystallizes as graphite in castings and enhances machinability. In order to obtain this effect, the amount of C is set to 1.00 or more, preferably 1.50% or more. If the amount of C is too large, the mechanical strength may decrease and the castability may decrease. Therefore, the amount of C is 2.50% or less, preferably 2.40% or less. C is divided into C that crystallizes as graphite and C that dissolves in the casting. The amount of C defined here is the total amount of C including C that crystallizes as graphite and C that dissolves in the casting. The amount of solid solution C will be described later.

[Si:2.50%以下]
Siは、脱酸材として添加される。また、黒鉛の晶出を促進させる元素でもある。本発明の低熱膨張鋳物は黒鉛化促進元素であるNiを30%程度含有するので、Siは必須ではなく含有量は0でもよいが、2.50%以下の範囲で含有させてもよい。Si量が多すぎると熱膨張係数が増加するので、Si量は2.50%以下、好ましくは2.10%以下とする。
[Si: 2.50% or less]
Si is added as a deoxidizing material. It is also an element that promotes the crystallization of graphite. Since the low thermal expansion casting of the present invention contains about 30% of Ni, which is a graphitization promoting element, Si is not essential and the content may be 0, but it may be contained in the range of 2.50% or less. If the amount of Si is too large, the coefficient of thermal expansion increases, so the amount of Si is 2.50% or less, preferably 2.10% or less.

[Mn:1.00%以下]
Mnは、脱酸材として添加される。また、固溶強化による強度向上にも寄与する。この効果を得るためには、Mn量を0.10%以上とするのが好ましい。Mnの含有量が1.00%を超えると熱膨張係数が増加するので、Mn量は1.00%以下、好ましくは0.50%以下とする。Mnは必須の元素ではなく、含有量は0でもよい。
[Mn: 1.00% or less]
Mn is added as a deoxidizing material. It also contributes to the improvement of strength by strengthening the solid solution. In order to obtain this effect, the amount of Mn is preferably 0.10% or more. Since the coefficient of thermal expansion increases when the Mn content exceeds 1.00%, the Mn amount is set to 1.00% or less, preferably 0.50% or less. Mn is not an essential element and its content may be zero.

[Ni:28.00〜40.00]
Niは、熱膨張係数を低下させる、必須の元素である。本発明の低熱膨張鋳物は、25〜100℃の平均熱膨張係数が5.0×10-6/℃以下である。この熱膨張係数は、主として、Ni及びCoの含有量を適切な範囲とすることで得られる。Ni量は多すぎても少なすぎても熱膨張係数が十分に小さくならない。熱膨張係数を十分に小さくするために、Ni量は28.00〜40.00%、好ましくは30.00〜37.00%の範囲とする。
[Ni: 28.0 to 40.00]
Ni is an essential element that lowers the coefficient of thermal expansion. The low thermal expansion casting of the present invention has an average coefficient of thermal expansion of 5.0 × 10 -6 / ° C or less at 25 to 100 ° C. This coefficient of thermal expansion is mainly obtained by setting the contents of Ni and Co in an appropriate range. If the amount of Ni is too large or too small, the coefficient of thermal expansion will not be sufficiently small. In order to sufficiently reduce the coefficient of thermal expansion, the amount of Ni is set in the range of 28.0 to 40.00%, preferably 30.00 to 37.00%.

[Co:0〜10.00%]
Coは、Niとの組み合わせにより熱膨張係数の低下に寄与する。Coの含有量は0であってもよい。所望の熱膨張係数を得るため、Coの範囲は0〜10.00%、好ましくは0〜9.00%とする。
[Co: 0 to 10.00%]
Co contributes to a decrease in the coefficient of thermal expansion in combination with Ni. The Co content may be zero. In order to obtain a desired coefficient of thermal expansion, the range of Co is 0 to 10.00%, preferably 0 to 9.00%.

[Mg:0〜0.090%]
Mgは黒鉛を球状化して晶出させる元素であり、必要に応じて含有させることができる。この効果を得るためには、Mgの含有量を0.040%以上とすることが好ましい。Mgは必須の元素ではなく、含有量は0でもよい。
[Mg: 0 to 0.090%]
Mg is an element that spheroidizes and crystallizes graphite, and can be contained as needed. In order to obtain this effect, the Mg content is preferably 0.040% or more. Mg is not an essential element and its content may be zero.

[固溶C:0.08%以下]
固溶Cは粒界、又は粒内に固溶し、時間の経過とともに拡散したり炭化物として析出したりする。その結果、わずかに鋳物の寸法を変化させる。本発明の低熱膨張鋳物では、経年変化を極力小さくするために、固溶C量を0.08%以下とする。固溶C量を0.08%以下とする方法については後述する。ここで、固溶C量は、鋳物の化学組成のC含有量から、鋳物中の黒鉛及び炭化物の量を引いた値として求められる。鋳物中の黒鉛及び炭化物の量は、鋳物に対して抽出残渣分析を実施する公知の方法から得ることができる。
[Solid solution C: 0.08% or less]
The solid solution C dissolves in the grain boundaries or in the grains, and diffuses or precipitates as carbides with the passage of time. As a result, the dimensions of the casting are slightly changed. In the low thermal expansion casting of the present invention, the amount of solid solution C is 0.08% or less in order to minimize the change over time. The method for reducing the amount of solid solution C to 0.08% or less will be described later. Here, the amount of solid solution C is determined as a value obtained by subtracting the amounts of graphite and carbides in the casting from the C content of the chemical composition of the casting. The amount of graphite and carbides in the casting can be obtained from a known method of performing extraction residue analysis on the casting.

成分組成の残部は、Fe及び不可避的不純物である。不可避的不純物とは、本発明で規定する成分組成を有する鋳物を工業的に製造する際に、原料や製造環境等から不可避的に混入するものをいう。 The rest of the composition is Fe and unavoidable impurities. The unavoidable impurities refer to those that are unavoidably mixed from the raw materials, the manufacturing environment, etc. when the casting having the component composition specified in the present invention is industrially manufactured.

次に、本発明の低熱膨張鋳物を得るための製造方法について説明する。 Next, a manufacturing method for obtaining the low thermal expansion casting of the present invention will be described.

はじめに、上記の化学成分を有する鋳片を製造する。鋳片の製造に用いる鋳型や、鋳型への溶鋼の注入装置、注入方法は特に限定されるものではなく、公知の装置、方法を用いればよい。 First, a slab having the above chemical components is produced. The mold used for producing the slab, the apparatus for injecting molten steel into the mold, and the injection method are not particularly limited, and a known apparatus and method may be used.

続いて、凝固後の鋳片を500〜700℃で30〜60時間保持する熱処理を施す。この処理により、鋳物中に固溶したCの黒鉛としての析出をさらに促進させ、鋳物中の固溶C量を減少させる。これにより、経年変化が小さく、さらに被削性に優れた低熱膨張鋳物が得ることができる。 Subsequently, a heat treatment is performed in which the solidified slab is held at 500 to 700 ° C. for 30 to 60 hours. By this treatment, the precipitation of C dissolved in the casting as graphite is further promoted, and the amount of solid C dissolved in the casting is reduced. As a result, it is possible to obtain a low thermal expansion casting having a small change over time and excellent machinability.

さらに必要に応じて、冷却後の鋳物を300〜350℃に加熱し、1〜5時間保持する応力除去焼きなまし処理を施してもよい。これにより、凝固、冷却の過程で生じた残留応力を除去することができる。 Further, if necessary, the cooled casting may be heated to 300 to 350 ° C. and subjected to a stress-relieving annealing treatment that holds it for 1 to 5 hours. Thereby, the residual stress generated in the process of solidification and cooling can be removed.

[実施例1]
表1に示す成分組成となるように調整した溶湯を鋳型に注湯し鋳片を製造した。その後、表1に記載の熱処理を施し鋳物を得た。
[Example 1]
A molten metal adjusted to have the composition shown in Table 1 was poured into a mold to produce a slab. Then, the heat treatment shown in Table 1 was performed to obtain a casting.

得られた各鋳物から、φ5×20Lの試験片を加工して、熱膨張測定装置により、25℃から100℃の平均熱膨張係数を求めた。 A test piece having a diameter of 5 × 20 L was processed from each of the obtained castings, and an average coefficient of thermal expansion from 25 ° C. to 100 ° C. was obtained by a thermal expansion measuring device.

また、No.2、3、7、8、12、13について、9mm×35mm×200mmの直方体の試料を作製し、9×35端面間の長さを測定することで24か月の経年変化を調査した。試料の長さ方向の平行度は0.01、9×200面と200×35面の直角度は0.1であった。測定面平面度交差はJIS B7506のK級とした。 In addition, No. For 2, 3, 7, 8, 12, and 13, 9 mm × 35 mm × 200 mm rectangular parallelepiped samples were prepared, and the length between the 9 × 35 end faces was measured to investigate the secular change for 24 months. The parallelism in the length direction of the sample was 0.01, and the squareness of the 9 × 200 plane and the 200 × 35 plane was 0.1. The measurement surface flatness intersection was set to K class of JIS B7506.

結果を表1に示す。 The results are shown in Table 1.

本発明の低熱膨張鋳物は固溶C量が少なく、経年変化が小さいことが確認できた。これに対して、比較例では固溶C量が多く、経年変化が大きくなった。なお、No.13は、従来の経年変化が小さい低熱膨張鋳鋼を使用した参考例である。本発明の低熱膨張鋳物は、従来知られている経年変化が小さい低熱膨張鋳鋼と同等の経年変化であることが確認できた。

Figure 2021123736
It was confirmed that the low thermal expansion casting of the present invention has a small amount of solid solution C and a small change over time. On the other hand, in the comparative example, the amount of solid solution C was large and the change over time was large. In addition, No. Reference numeral 13 denotes a reference example in which a conventional low thermal expansion cast steel having a small change over time is used. It was confirmed that the low thermal expansion casting of the present invention has the same secular change as the conventionally known low thermal expansion cast steel having a small secular change.
Figure 2021123736

[実施例2]
表1に示したNo.2、3、7、12、13の成分組成を有する鋳物について、ドリル(コバルトハイス、ドリル径2.6mm)を用いて、切削油を使用し、切削速度:45m/min、1回転あたりの送り量:0.013mm/revで、深さ13mmの穴あけ加工を行ったときの切削抵抗で被削性を評価した。評価は、切削時に測定したスラストとトルクの平均値で行った。
[Example 2]
No. 1 shown in Table 1. For castings having a composition of 2, 3, 7, 12, and 13, using a drill (cobalt heiss, drill diameter 2.6 mm) and cutting oil, cutting speed: 45 m / min, feed per rotation. The machinability was evaluated by the cutting resistance when drilling with a depth of 13 mm at a quantity of 0.013 mm / rev. The evaluation was performed by the average value of thrust and torque measured at the time of cutting.

C量の多いNo.2,3,7,12は、No.13と比べてスラスト及びトルクともに低い値となり切削抵抗が小さく、高い被削性を示すことが確認できた。実施例1とあわせて、本発明例のNo.2,3,7については、経年変化が少なく、かつ、被削性に優れた低熱膨張鋳物が得られたことが確認できた。 No. with a large amount of C Nos. 2, 3, 7, and 12 are No. It was confirmed that both the thrust and the torque were lower than those of No. 13, the cutting resistance was small, and the machinability was high. In addition to Example 1, No. 1 of the present invention example. Regarding 2, 3 and 7, it was confirmed that low thermal expansion castings with little change over time and excellent machinability were obtained.

Figure 2021123736
Figure 2021123736

Claims (4)

質量%で、
C :1.00〜2.50%、
Si:2.50%以下、
Mn:1.00%以下、
Ni:28.00〜40.00%、
Co:0〜10.00%、
Mg:0〜0.090%
を含有し、残部がFe及び不可避的不純物であり、
固溶C量が0.08質量%以下
であることを特徴とする低熱膨張鋳物。
By mass%
C: 1.00 to 2.50%,
Si: 2.50% or less,
Mn: 1.00% or less,
Ni: 28.0 to 40.00%,
Co: 0 to 10.00%,
Mg: 0 to 0.090%
The balance is Fe and unavoidable impurities.
A low thermal expansion casting characterized in that the amount of solid solution C is 0.08% by mass or less.
質量%で、Mg:0.040〜0.090%を含有することを特徴とする請求項1に記載の低熱膨張鋳物。 The low thermal expansion casting according to claim 1, wherein the low thermal expansion casting contains Mg: 0.040 to 0.090% in mass%. 25〜100℃の平均熱膨張係数が5.0×10-6/℃以下であることを特徴とする請求項1又は2に記載の低熱膨張鋳物。 The low thermal expansion casting according to claim 1 or 2, wherein the average coefficient of thermal expansion at 25 to 100 ° C. is 5.0 × 10 -6 / ° C. or less. 請求項1〜3のいずれか1項に記載の低熱膨張鋳物を製造する方法であって、
質量%で、
C :1.00〜2.50%、
Si:2.50%以下、
Mn:1.00%以下、
Ni:28.00〜40.00%、
Co:0〜10.00%、
Mg:0〜0.090%
を含有し、残部がFe及び不可避的不純物である凝固後の鋳片に、500〜700℃で30〜60時間保持する熱処理を施す工程を含む
ことを特徴とする低熱膨張鋳物の製造方法。
The method for producing a low thermal expansion casting according to any one of claims 1 to 3.
By mass%
C: 1.00 to 2.50%,
Si: 2.50% or less,
Mn: 1.00% or less,
Ni: 28.0 to 40.00%,
Co: 0 to 10.00%,
Mg: 0 to 0.090%
A method for producing a low thermal expansion casting, which comprises a step of subjecting a solidified slab containing Fe and an unavoidable impurity to a heat treatment for holding the slab at 500 to 700 ° C. for 30 to 60 hours.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024214777A1 (en) * 2023-04-13 2024-10-17 新報国マテリアル株式会社 Low-thermal-expansion alloy

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000345278A (en) * 1999-06-03 2000-12-12 Toshiba Corp Austenitic spheroidal graphite cast iron and method for producing the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000345278A (en) * 1999-06-03 2000-12-12 Toshiba Corp Austenitic spheroidal graphite cast iron and method for producing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024214777A1 (en) * 2023-04-13 2024-10-17 新報国マテリアル株式会社 Low-thermal-expansion alloy

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