JP2542237C - - Google Patents

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Publication number
JP2542237C
JP2542237C JP2542237C JP 2542237 C JP2542237 C JP 2542237C JP 2542237 C JP2542237 C JP 2542237C
Authority
JP
Japan
Prior art keywords
tio
dielectric
composition
oxide
small
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
Other languages
English (en)
Japanese (ja)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal SMI Electronics Device Inc
Original Assignee
Sumitomo Metal SMI Electronics Device Inc
Publication date

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