JP2877960B2 - 弁装置、特に空気制御用の弁装置 - Google Patents

弁装置、特に空気制御用の弁装置

Info

Publication number
JP2877960B2
JP2877960B2 JP8519427A JP51942796A JP2877960B2 JP 2877960 B2 JP2877960 B2 JP 2877960B2 JP 8519427 A JP8519427 A JP 8519427A JP 51942796 A JP51942796 A JP 51942796A JP 2877960 B2 JP2877960 B2 JP 2877960B2
Authority
JP
Japan
Prior art keywords
valve
switching position
valve device
gap
shut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP8519427A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10505655A (ja
Inventor
リゼク・トーマス
ヴァーグナー・ベルント
クロイツァー・マルティン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FURAUNHOOFUAA G TSUA FUORUDERUNGU DEA ANGEUANTEN FUORUSHUNGU EE FUAU
Original Assignee
FURAUNHOOFUAA G TSUA FUORUDERUNGU DEA ANGEUANTEN FUORUSHUNGU EE FUAU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FURAUNHOOFUAA G TSUA FUORUDERUNGU DEA ANGEUANTEN FUORUSHUNGU EE FUAU filed Critical FURAUNHOOFUAA G TSUA FUORUDERUNGU DEA ANGEUANTEN FUORUSHUNGU EE FUAU
Publication of JPH10505655A publication Critical patent/JPH10505655A/ja
Application granted granted Critical
Publication of JP2877960B2 publication Critical patent/JP2877960B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/04—Circuit elements having moving parts using diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0036—Operating means specially adapted for microvalves operated by temperature variations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/009—Fluid power devices

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Fluid-Driven Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Check Valves (AREA)
  • Lift Valve (AREA)
  • Valve Device For Special Equipments (AREA)
JP8519427A 1994-12-21 1995-12-20 弁装置、特に空気制御用の弁装置 Expired - Fee Related JP2877960B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4445686A DE4445686C2 (de) 1994-12-21 1994-12-21 Mikroventilanordnung, insbesondere für pneumatische Steuerungen
DE4445686.7 1994-12-21
PCT/DE1995/001852 WO1996019689A2 (de) 1994-12-21 1995-12-20 Ventilanordnung, insbesondere für pneumatische steuerungen

Publications (2)

Publication Number Publication Date
JPH10505655A JPH10505655A (ja) 1998-06-02
JP2877960B2 true JP2877960B2 (ja) 1999-04-05

Family

ID=6536518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8519427A Expired - Fee Related JP2877960B2 (ja) 1994-12-21 1995-12-20 弁装置、特に空気制御用の弁装置

Country Status (6)

Country Link
US (1) US6129002A (de)
EP (1) EP0799393B1 (de)
JP (1) JP2877960B2 (de)
AT (1) ATE168178T1 (de)
DE (2) DE4445686C2 (de)
WO (1) WO1996019689A2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69620569T2 (de) * 1995-07-27 2002-10-31 Seiko Epson Corp., Tokio/Tokyo Mikroventil und methode zu dessen herstellung, mikropumpe die dieses mikroventil benutzt und methode zu ihrer herstellung, sowie vorrichtung, die diese mikropumpe verwendet
US5810325A (en) * 1996-06-25 1998-09-22 Bcam International, Inc. Microvalve
DE19857890B4 (de) * 1998-12-15 2008-06-19 Dbt Gmbh Ventilanordnung
WO2000074532A1 (en) * 1999-06-07 2000-12-14 Mccord Winn Textron Inc. Microvalve controller for pneumatically contoured support
JP2002147406A (ja) * 2000-11-16 2002-05-22 Smc Corp 空気圧機器の動作シミュレート結果表示処理装置および結果表示処理記録物
US8479375B2 (en) 2010-01-13 2013-07-09 The Aerospace Corporation Method of making an embedded electromagnetic device
US8410660B2 (en) 2010-01-13 2013-04-02 The Aerospace Corporation Acoustic devices embedded in photostructurable ceramics
US20110167941A1 (en) * 2010-01-13 2011-07-14 The Aerospace Corporation Photostructured Mechanical Devices and Methods for Making Same
US8940241B2 (en) 2010-01-13 2015-01-27 The Aerospace Corporation Photostructured chemical devices and methods for making same
US9146377B2 (en) * 2010-01-13 2015-09-29 The Aerospace Corporation Photostructured optical devices and methods for making same
WO2013119661A1 (en) 2012-02-07 2013-08-15 Mueller International, Llc Flushing hydrant
US9194108B2 (en) * 2012-02-07 2015-11-24 Mueller International, Llc Flushing hydrant with fail-safe
US9726299B2 (en) 2014-03-18 2017-08-08 Fisher Controls International Llc Integrated transducer
US10539251B2 (en) * 2017-06-30 2020-01-21 Fisher Controls International Llc Integrated transducer
US10564653B2 (en) 2018-04-13 2020-02-18 Mueller International, Llc Flushing verification and management system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2155152A (en) 1984-03-01 1985-09-18 Allied Corp A microminiature valve
US4826131A (en) 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7002383A (de) * 1970-02-19 1971-08-23
DE2043428A1 (en) * 1970-09-02 1972-03-09 Festo Maschf Stoll G Connector for pneumatic sensors - with polyamide housing and mylar (rtm) foil element
US3768875A (en) * 1970-09-25 1973-10-30 Bendix Corp Adaptive control for fluid pressure braking system
JPS6084404A (ja) * 1983-06-02 1985-05-13 Seiichi Ito サーボ弁
US4516605A (en) * 1984-04-20 1985-05-14 Taplin John F Four-way control valve
SE8801299L (sv) * 1988-04-08 1989-10-09 Bertil Hoeoek Mikromekanisk envaegsventil
FR2639085B1 (fr) * 1988-11-15 1991-04-19 Neuchatel Universite Microvanne electrostatique integree et procede de fabrication d'une telle microvanne
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
DE4227998C2 (de) * 1992-08-24 1995-11-02 Fraunhofer Ges Forschung Mikrominiaturisierbare Ventilanordnung
US5681024A (en) * 1993-05-21 1997-10-28 Fraunhofer-Gesellschaft zur Forderung der angerwanden Forschung e.V. Microvalve

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2155152A (en) 1984-03-01 1985-09-18 Allied Corp A microminiature valve
US4826131A (en) 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates

Also Published As

Publication number Publication date
EP0799393B1 (de) 1998-07-08
EP0799393A1 (de) 1997-10-08
DE4445686A1 (de) 1996-06-27
WO1996019689A2 (de) 1996-06-27
JPH10505655A (ja) 1998-06-02
DE59502788D1 (de) 1998-08-13
WO1996019689A3 (de) 1996-09-19
US6129002A (en) 2000-10-10
DE4445686C2 (de) 1999-06-24
ATE168178T1 (de) 1998-07-15

Similar Documents

Publication Publication Date Title
JP2877960B2 (ja) 弁装置、特に空気制御用の弁装置
JP2807085B2 (ja) マイクロ弁
US6142444A (en) Piezoelectrically actuated microvalve
JP3418741B2 (ja) 超小型弁
US6131879A (en) Piezoelectrically actuated microvalve
US6694998B1 (en) Micromachined structure usable in pressure regulating microvalve and proportional microvalve
JP3837672B2 (ja) 電気油圧比例減圧−リリーフ弁
Henning et al. A thermopneumatically actuated microvalve for liquid expansion and proportional control
CN101668973A (zh) 先导式滑阀
Ray et al. A silicon-based shape memory alloy microvalve
JP2001502248A (ja) 電気的に駆動される一体型マイクロバルブ
JP2007512489A (ja) 可変容量形コンプレッサの制御に適したマイクロバルブ・デバイス
US6557820B2 (en) Two-stage valve suitable as high-flow high-pressure microvalve
Yang et al. A bimetallic thermally actuated micropump
Sutanto et al. Design, microfabrication and testing of a CMOS compatible bistable electromagnetic microvalve with latching/unlatching mechanism on a single wafer
Grosjean et al. A practical thermopneumatic valve
JP2003074506A (ja) 低エネルギ消費ソレノイド弁
Meckes et al. Electromagnetically driven microvalve fabricated in silicon
Schaible et al. Electrostatic microvalves in silicon with 2-way-function for industrial applications
JPH11125362A (ja) パイロット式切換弁
JP2001041340A (ja) 電磁弁
JPH0336768Y2 (de)
Wroblewski et al. MEMS micro-valve arrays for fluidic control
JPH04135218A (ja) 圧力制御弁
JPH0247820Y2 (de)

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090122

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100122

Year of fee payment: 11

LAPS Cancellation because of no payment of annual fees