JP3045576B2 - ステンレス鋼の不動態膜形成方法及びステンレス鋼 - Google Patents

ステンレス鋼の不動態膜形成方法及びステンレス鋼

Info

Publication number
JP3045576B2
JP3045576B2 JP3212592A JP21259291A JP3045576B2 JP 3045576 B2 JP3045576 B2 JP 3045576B2 JP 3212592 A JP3212592 A JP 3212592A JP 21259291 A JP21259291 A JP 21259291A JP 3045576 B2 JP3045576 B2 JP 3045576B2
Authority
JP
Japan
Prior art keywords
stainless steel
passivation film
gas
treatment
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3212592A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10204526A (ja
Inventor
忠弘 大見
雅一 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP3212592A priority Critical patent/JP3045576B2/ja
Priority to JP51015992A priority patent/JP3181053B2/ja
Priority to EP19920917389 priority patent/EP0596121A4/de
Priority to PCT/JP1992/000699 priority patent/WO1992021786A1/ja
Publication of JPH10204526A publication Critical patent/JPH10204526A/ja
Application granted granted Critical
Publication of JP3045576B2 publication Critical patent/JP3045576B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/80—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D6/00—Heat treatment of ferrous alloys
    • C21D6/002—Heat treatment of ferrous alloys containing Cr
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Treatment Of Metals (AREA)
JP3212592A 1991-05-28 1991-07-30 ステンレス鋼の不動態膜形成方法及びステンレス鋼 Expired - Lifetime JP3045576B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP3212592A JP3045576B2 (ja) 1991-05-28 1991-07-30 ステンレス鋼の不動態膜形成方法及びステンレス鋼
JP51015992A JP3181053B2 (ja) 1991-05-28 1992-05-28 ステンレス鋼の不動態膜形成方法並びにステンレス鋼及び接流体部品
EP19920917389 EP0596121A4 (de) 1991-05-28 1992-05-28 Verfahren zur herstellung einer passivschicht auf stahl und der verbindungsstelle von rostfreiem stahl und flüssigkeit und ga.
PCT/JP1992/000699 WO1992021786A1 (fr) 1991-05-28 1992-05-28 Procede de formation d'un film passif sur l'acier inoxydable, et element entrant en contact avec les gaz, les liquides et l'acier inoxydable

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP15246691 1991-05-28
JP3-152466 1991-07-12
JP19871891 1991-07-12
JP3-198718 1991-07-12
JP3212592A JP3045576B2 (ja) 1991-05-28 1991-07-30 ステンレス鋼の不動態膜形成方法及びステンレス鋼

Publications (2)

Publication Number Publication Date
JPH10204526A JPH10204526A (ja) 1998-08-04
JP3045576B2 true JP3045576B2 (ja) 2000-05-29

Family

ID=27320281

Family Applications (2)

Application Number Title Priority Date Filing Date
JP3212592A Expired - Lifetime JP3045576B2 (ja) 1991-05-28 1991-07-30 ステンレス鋼の不動態膜形成方法及びステンレス鋼
JP51015992A Expired - Lifetime JP3181053B2 (ja) 1991-05-28 1992-05-28 ステンレス鋼の不動態膜形成方法並びにステンレス鋼及び接流体部品

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP51015992A Expired - Lifetime JP3181053B2 (ja) 1991-05-28 1992-05-28 ステンレス鋼の不動態膜形成方法並びにステンレス鋼及び接流体部品

Country Status (3)

Country Link
EP (1) EP0596121A4 (de)
JP (2) JP3045576B2 (de)
WO (1) WO1992021786A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3379070B2 (ja) 1992-10-05 2003-02-17 忠弘 大見 クロム酸化物層を表面に有する酸化不動態膜の形成方法
EP0646400B1 (de) * 1993-04-14 2001-07-18 Nippon Sanso Corporation Vorrichtung zur herabsetzung vom gelöstem sauerstoff
JPH07197206A (ja) * 1993-12-30 1995-08-01 Tadahiro Omi ステンレス鋼及び配管システム
JP2000208431A (ja) * 1999-01-13 2000-07-28 Tadahiro Omi 酸化クロム不働態膜が形成された金属材料及びその製造方法並びに接流体部品及び流体供給・排気システム
US6228445B1 (en) * 1999-04-06 2001-05-08 Crucible Materials Corp. Austenitic stainless steel article having a passivated surface layer
JP2001135237A (ja) * 1999-08-26 2001-05-18 Toray Ind Inc 放電型ディスプレイとその製造方法ならびに製造装置
JP4133397B2 (ja) 2003-02-07 2008-08-13 本田技研工業株式会社 ステンレス鋼材の不働態化処理方法
JP2005152955A (ja) * 2003-11-26 2005-06-16 Tadahiro Omi 溶接方法及び溶接システム
KR101338301B1 (ko) * 2005-09-16 2013-12-09 고에키자이단호진 고쿠사이카가쿠 신고우자이단 표시 장치 등의 전자 장치의 제조 장치, 제조 방법, 및표시 장치 등의 전자 장치
KR20080089418A (ko) 2005-12-21 2008-10-06 엑손모빌 리서치 앤드 엔지니어링 컴퍼니 파울링 감소를 위한 내식성 물질, 내식성 및 내파울링성이개선된 열 전달 부품, 및 파울링 감소 방법
JP5873231B2 (ja) * 2009-10-23 2016-03-01 大陽日酸株式会社 太陽電池用セレン化水素混合ガスの供給装置及び供給方法
JP5615026B2 (ja) * 2010-04-21 2014-10-29 オルガノ株式会社 超純水製造装置用のステンレス及びその製造方法、並びに超純水製造装置
JP5609668B2 (ja) * 2011-01-20 2014-10-22 Ｊｆｅスチール株式会社 耐海水孔食性に優れたステンレスクラッド鋼
JP5527228B2 (ja) * 2011-01-20 2014-06-18 Ｊｆｅスチール株式会社 耐薬品性に優れたステンレスクラッド鋼
WO2013132838A1 (ja) * 2012-03-08 2013-09-12 Ｊｆｅスチール株式会社 ステンレスクラッド鋼
KR101686721B1 (ko) * 2012-03-08 2016-12-14 제이에프이 스틸 가부시키가이샤 내해수 스테인리스 클래드강
JP6502225B2 (ja) * 2015-09-30 2019-04-17 日本特殊陶業株式会社 セラミックヒータ及びその製造方法
JPWO2017188209A1 (ja) * 2016-04-28 2019-02-14 富士フイルム株式会社 精製装置、精製方法、製造装置、薬液の製造方法、容器、及び薬液収容体
CN112449658B (zh) 2018-07-06 2023-11-07 富士胶片株式会社 部件、容器、药液收容体、反应槽、蒸馏塔、过滤器单元、存储罐、管路、药液的制造方法
JP7492206B1 (ja) 2023-11-28 2024-05-29 オロル株式会社 半導体製造装置用ステンレス鋼部材およびその製造方法
JP7812167B2 (ja) * 2024-02-29 2026-02-09 マルイ鍍金工業株式会社 オーステナイト系ステンレスの表面処理方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3345218A (en) * 1964-04-02 1967-10-03 Owens Illinois Inc Preoxidation of stainless steel for glass-to-metal sealing
US4078949A (en) * 1976-09-02 1978-03-14 United States Steel Corporation Method for improving the surface quality of stainless steels and other chromium-bearing iron alloys
US4661171A (en) * 1984-08-29 1987-04-28 Shinko-Pfaudler Company, Ltd. Method for treating the surface of stainless steel by high temperature oxidation
JP2517727B2 (ja) * 1987-07-25 1996-07-24 忠弘 大見 半導体製造装置用ステンレス鋼部材の製造方法
JPH0192389A (ja) * 1987-09-30 1989-04-11 Aichi Steel Works Ltd ステンレス鋼線材の酸洗肌荒れ防止方法
DE3804359C1 (de) * 1988-02-12 1988-11-24 Thyssen Edelstahlwerke Ag, 4000 Duesseldorf, De
JP2768952B2 (ja) * 1988-08-04 1998-06-25 忠弘 大見 金属酸化処理装置及び金属酸化処理方法
JP2862546B2 (ja) * 1988-11-21 1999-03-03 神鋼パンテック株式会社 超純水製造供給装置用機器配管材料
US5051140A (en) * 1989-03-23 1991-09-24 Mitsubishi Jidosha Kogyo Kabushiki Kaisha Surface treatment method for titanium or titanium alloy

Also Published As

Publication number Publication date
EP0596121A4 (de) 1994-11-23
JP3181053B2 (ja) 2001-07-03
JPH10204526A (ja) 1998-08-04
EP0596121A1 (de) 1994-05-11
WO1992021786A1 (fr) 1992-12-10

Similar Documents

Publication Publication Date Title
JP3045576B2 (ja) ステンレス鋼の不動態膜形成方法及びステンレス鋼
JPWO1992021786A1 (ja) ステンレス鋼の不動態膜形成方法並びにステンレス鋼及び接流体部品
JP2768952B2 (ja) 金属酸化処理装置及び金属酸化処理方法
Ohmi et al. Formation of chromium oxide on 316L austenitic stainless steel
US5951787A (en) Method of forming oxide-passivated film, ferrite system stainless steel, fluid feed system and fluid contact component
US6612898B1 (en) Method for forming oxidation-passive layer, fluid-contacting part, and fluid feed/discharge system
US5789086A (en) Stainless steel surface having passivation film
CN113056811A (zh) 用于储存和供应用于半导体工艺的不含f3no的fno气体和不含f3no的fno气体混合物的系统和方法
WO1993010274A1 (fr) Procede pour former un film d'oxyde passif a base d'oxyde de chrome et d'acier inoxydable
JPH0285358A (ja) 減圧装置
JP3017301B2 (ja) 不動態膜の形成方法
JP2018107438A (ja) 金属部材の表面処理方法及び半導体素子の製造方法
JP2976333B2 (ja) ステンレス鋼及びその製造方法並びに減圧装置
JP3379071B2 (ja) 酸化クロムを主成分とする酸化不動態膜の形成方法及びステンレス鋼
WO1995018240A1 (en) Austenitic stainless steel, piping system and fluid-contacting parts
JPH0254751A (ja) 金属酸化処理装置及び金属酸化処理方法並びに金属装入方法
JP3286697B2 (ja) 溶接部に酸化不動態膜を形成する方法及びプロセス装置
JPH06322512A (ja) 半導体製造装置用ステンレス鋼材の表面処理法
KR102489717B1 (ko) 저 내부식성 금속 기재를 이용한 고순도 불화수소를 저장하기 위한 용기 및 이의 제조방법
JP3037928B2 (ja) ステンレス鋼及びその製造方法並びに減圧装置
WO1994015749A1 (fr) Procede de soudage et structure soudee permettant de former une pellicule en oxyde de chrome passive sur la soudure
JP2000176643A (ja) 溶接部に酸化不動態膜を形成する方法
JPH03215656A (ja) フッ化不働態膜が形成されたステンレス鋼、その製造方法並びにそのステンレスを用いた装置
KR20220089724A (ko) 고순도 불화수소를 저장하기 위한 용기 및 이의 제조방법
US5591267A (en) Reduced pressure device

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313114

S803 Written request for registration of cancellation of provisional registration

Free format text: JAPANESE INTERMEDIATE CODE: R313803

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080317

Year of fee payment: 8

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080317

Year of fee payment: 8

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080317

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090317

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090317

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100317

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100317

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110317

Year of fee payment: 11

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110317

Year of fee payment: 11

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110317

Year of fee payment: 11

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110317

Year of fee payment: 11

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110317

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120317

Year of fee payment: 12

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120317

Year of fee payment: 12