JP3086158B2 - 超音波ボンディング方法 - Google Patents

超音波ボンディング方法

Info

Publication number
JP3086158B2
JP3086158B2 JP07190410A JP19041095A JP3086158B2 JP 3086158 B2 JP3086158 B2 JP 3086158B2 JP 07190410 A JP07190410 A JP 07190410A JP 19041095 A JP19041095 A JP 19041095A JP 3086158 B2 JP3086158 B2 JP 3086158B2
Authority
JP
Japan
Prior art keywords
bonding
ultrasonic
vibration
electrode terminal
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP07190410A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0945736A (ja
Inventor
良一 梶原
敏幸 高橋
和弥 高橋
正博 小泉
宏 渡辺
雪治 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP07190410A priority Critical patent/JP3086158B2/ja
Priority to TW085107370A priority patent/TW302315B/zh
Priority to KR1019960029923A priority patent/KR100456381B1/ko
Priority to US08/686,538 priority patent/US5884835A/en
Publication of JPH0945736A publication Critical patent/JPH0945736A/ja
Application granted granted Critical
Publication of JP3086158B2 publication Critical patent/JP3086158B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004—Wire welding
    • B23K20/005—Capillary welding
    • B23K20/007—Ball bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/019—Manufacture or treatment of bond pads
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07141—Means for applying energy, e.g. ovens or lasers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07531—Techniques
    • H10W72/07532—Compression bonding, e.g. thermocompression bonding
    • H10W72/07533—Ultrasonic bonding, e.g. thermosonic bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07541—Controlling the environment, e.g. atmosphere composition or temperature
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/59—Bond pads specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/951—Materials of bond pads
    • H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/981—Auxiliary members, e.g. spacers
    • H10W72/983—Reinforcing structures, e.g. collars

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Wire Bonding (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
JP07190410A 1995-07-26 1995-07-26 超音波ボンディング方法 Expired - Fee Related JP3086158B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP07190410A JP3086158B2 (ja) 1995-07-26 1995-07-26 超音波ボンディング方法
TW085107370A TW302315B (2) 1995-07-26 1996-06-18
KR1019960029923A KR100456381B1 (ko) 1995-07-26 1996-07-24 초음파본딩방법및초음파본딩장치
US08/686,538 US5884835A (en) 1995-07-26 1996-07-26 Ultrasonic bonding method and ultrasonic bonding apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07190410A JP3086158B2 (ja) 1995-07-26 1995-07-26 超音波ボンディング方法

Publications (2)

Publication Number Publication Date
JPH0945736A JPH0945736A (ja) 1997-02-14
JP3086158B2 true JP3086158B2 (ja) 2000-09-11

Family

ID=16257685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07190410A Expired - Fee Related JP3086158B2 (ja) 1995-07-26 1995-07-26 超音波ボンディング方法

Country Status (4)

Country Link
US (1) US5884835A (2)
JP (1) JP3086158B2 (2)
KR (1) KR100456381B1 (2)
TW (1) TW302315B (2)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6079607A (en) * 1997-04-29 2000-06-27 Texas Instruments Incorporated Method for high frequency bonding
US6165888A (en) * 1997-10-02 2000-12-26 Motorola, Inc. Two step wire bond process
JPH11330134A (ja) * 1998-05-12 1999-11-30 Hitachi Ltd ワイヤボンディング方法およびその装置並びに半導体装置
JP3942738B2 (ja) * 1998-07-17 2007-07-11 松下電器産業株式会社 バンプ接合装置及び方法、並びに半導体部品製造装置
JP2000278073A (ja) * 1999-03-26 2000-10-06 Asahi Rubber Kk 超音波複合振動を用いた表面実装型振動子等の封止方法
JP3474132B2 (ja) * 1999-09-28 2003-12-08 インターナショナル・ビジネス・マシーンズ・コーポレーション ワイヤボンディング方法および装置
US6519500B1 (en) 1999-09-16 2003-02-11 Solidica, Inc. Ultrasonic object consolidation
US6814823B1 (en) 1999-09-16 2004-11-09 Solidica, Inc. Object consolidation through sequential material deposition
JP3227444B2 (ja) * 1999-11-10 2001-11-12 ソニーケミカル株式会社 多層構造のフレキシブル配線板とその製造方法
US6279810B1 (en) * 2000-02-23 2001-08-28 Asm Assembly Automation Ltd Piezoelectric sensor for measuring bonding parameters
EP1275143B1 (en) * 2000-04-20 2007-08-22 Elwyn Paul Michael Wakefield Process for forming electrical/mechanical connections
US6299052B1 (en) * 2000-06-28 2001-10-09 American Technology, Inc. Anti-slide splice welder
KR20030066344A (ko) * 2002-02-01 2003-08-09 에섹 트레이딩 에스에이 와이어본더로 접합시에 최적의 접합 파라미터들을결정하기 위한 방법
JP3860088B2 (ja) * 2002-07-25 2006-12-20 Ｎｅｃエレクトロニクス株式会社 ボンディング方法及びボンディング装置
US7170181B2 (en) * 2003-11-19 2007-01-30 International Business Machines Corporation Optimum padset for wire bonding RF technologies with high-Q inductors
JP4403955B2 (ja) * 2004-03-05 2010-01-27 セイコーエプソン株式会社 ワイヤボンディング方法
DE102004026826B4 (de) * 2004-05-28 2010-01-14 Schunk Ultraschalltechnik Gmbh Ultraschallschweißvorrichtung und Konverter einer Ultraschallschweißvorrichtung
DE102005044048B4 (de) * 2004-09-30 2007-05-03 Unaxis International Trading Ltd. Wire Bonder
US7597231B2 (en) * 2006-04-10 2009-10-06 Small Precision Tools Inc. Wire bonding capillary tool having multiple outer steps
CN101730605A (zh) * 2007-07-24 2010-06-09 小精密工具有限公司 具有多个外部台阶的焊丝接合毛细管工具
JP4595018B2 (ja) * 2009-02-23 2010-12-08 株式会社新川 半導体装置の製造方法およびボンディング装置
WO2011019692A2 (en) 2009-08-12 2011-02-17 Kulicke And Soffa Industries, Inc. Ultrasonic transducers for wire bonding and methods for forming wire bonds using ultrasonic transducers
US8129220B2 (en) 2009-08-24 2012-03-06 Hong Kong Polytechnic University Method and system for bonding electrical devices using an electrically conductive adhesive
JP6022784B2 (ja) * 2011-04-07 2016-11-09 日産自動車株式会社 セパレータ溶着装置、およびセパレータの溶着方法
US8800846B2 (en) * 2012-01-27 2014-08-12 Apple Inc. Ultrasonic bonding
JP6008603B2 (ja) * 2012-06-15 2016-10-19 エスアイアイ・セミコンダクタ株式会社 半導体装置
US8767351B1 (en) * 2013-01-31 2014-07-01 Seagate Technology Llc Ambient temperature ball bond
US9809893B2 (en) * 2015-02-26 2017-11-07 City University Of Hong Kong Surface mechanical attrition treatment (SMAT) methods and systems for modifying nanostructures
JP2018527465A (ja) * 2015-08-26 2018-09-20 アリゾナ・ボード・オブ・リージェンツ・オン・ビハーフ・オブ・アリゾナ・ステイト・ユニバーシティーＡｒｉｚｏｎａ Ｂｏａｒｄ ｏｆ Ｒｅｇｅｎｔｓ ｏｎ ｂｅｈａｌｆ ｏｆ Ａｒｉｚｏｎａ Ｓｔａｔｅ Ｕｎｉｖｅｒｓｉｔｙ 局所的な超音波増大した材料の流れと融合を利用する付加製造のための装置および方法
JP6688725B2 (ja) * 2016-12-26 2020-04-28 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US11517977B2 (en) * 2017-09-15 2022-12-06 Tech-Sonic, Inc. Dual cam servo weld splicer
CN120073439B (zh) * 2025-04-29 2025-08-22 陕西华达科技股份有限公司 一种连接器金丝键合方法及装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2705423B2 (ja) * 1992-01-24 1998-01-28 株式会社日立製作所 超音波接合装置及び品質モニタリング方法
US5360155A (en) * 1993-07-09 1994-11-01 Kabushiki Kaisha Shinkawa Wire bonding apparatus
US5494207A (en) * 1994-05-20 1996-02-27 National Semiconductor Corporation Wire bonder transducer arrangement and method
US5626276A (en) * 1996-03-14 1997-05-06 International Business Machines Corporation Linkage drive mechanism for ultrasonic wirebonding

Also Published As

Publication number Publication date
KR970008448A (ko) 1997-02-24
US5884835A (en) 1999-03-23
JPH0945736A (ja) 1997-02-14
KR100456381B1 (ko) 2005-04-06
TW302315B (2) 1997-04-11

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