JP3177100B2 - インクジェットヘッドおよびインクジェット装置ならびに前記ヘッドの製造方法および前記ヘッドの製造装置 - Google Patents

インクジェットヘッドおよびインクジェット装置ならびに前記ヘッドの製造方法および前記ヘッドの製造装置

Info

Publication number
JP3177100B2
JP3177100B2 JP16979194A JP16979194A JP3177100B2 JP 3177100 B2 JP3177100 B2 JP 3177100B2 JP 16979194 A JP16979194 A JP 16979194A JP 16979194 A JP16979194 A JP 16979194A JP 3177100 B2 JP3177100 B2 JP 3177100B2
Authority
JP
Japan
Prior art keywords
substrate
ink
energy
flow path
energy generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16979194A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0789073A (ja
Inventor
雅己 笠本
博志 杉谷
剛 折笠
昌士 宮川
輝雄 荒島
昌明 泉田
潤 河合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP16979194A priority Critical patent/JP3177100B2/ja
Priority to US08/281,006 priority patent/US5992981A/en
Priority to DE69423394T priority patent/DE69423394T2/de
Priority to EP94111774A priority patent/EP0636480B1/de
Priority to AT94111774T priority patent/ATE190560T1/de
Publication of JPH0789073A publication Critical patent/JPH0789073A/ja
Priority to US09/360,453 priority patent/US6877225B1/en
Application granted granted Critical
Publication of JP3177100B2 publication Critical patent/JP3177100B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14362—Assembling elements of heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP16979194A 1993-07-29 1994-07-21 インクジェットヘッドおよびインクジェット装置ならびに前記ヘッドの製造方法および前記ヘッドの製造装置 Expired - Fee Related JP3177100B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP16979194A JP3177100B2 (ja) 1993-07-29 1994-07-21 インクジェットヘッドおよびインクジェット装置ならびに前記ヘッドの製造方法および前記ヘッドの製造装置
US08/281,006 US5992981A (en) 1993-07-29 1994-07-27 Ink jet head, ink jet apparatus, and method of and apparatus for manufacturing the head
DE69423394T DE69423394T2 (de) 1993-07-29 1994-07-28 Tintenstrahlaufzeichnungskopf, Aufzeichnungsgerät und Herstellungsverfahren und Vorrichtung für die Herstellung des Kopfes
EP94111774A EP0636480B1 (de) 1993-07-29 1994-07-28 Tintenstrahlaufzeichnungskopf, Aufzeichnungsgerät und Herstellungsverfahren und Vorrichtung für die Herstellung des Kopfes
AT94111774T ATE190560T1 (de) 1993-07-29 1994-07-28 Tintenstrahlaufzeichnungskopf, aufzeichnungsgerät und herstellungsverfahren und vorrichtung für die herstellung des kopfes
US09/360,453 US6877225B1 (en) 1993-07-29 1999-07-26 Method of manufacturing an ink jet head

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP5-188354 1993-07-29
JP5-188356 1993-07-29
JP18835693 1993-07-29
JP18835493 1993-07-29
JP16979194A JP3177100B2 (ja) 1993-07-29 1994-07-21 インクジェットヘッドおよびインクジェット装置ならびに前記ヘッドの製造方法および前記ヘッドの製造装置

Publications (2)

Publication Number Publication Date
JPH0789073A JPH0789073A (ja) 1995-04-04
JP3177100B2 true JP3177100B2 (ja) 2001-06-18

Family

ID=27323239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16979194A Expired - Fee Related JP3177100B2 (ja) 1993-07-29 1994-07-21 インクジェットヘッドおよびインクジェット装置ならびに前記ヘッドの製造方法および前記ヘッドの製造装置

Country Status (5)

Country Link
US (1) US5992981A (de)
EP (1) EP0636480B1 (de)
JP (1) JP3177100B2 (de)
AT (1) ATE190560T1 (de)
DE (1) DE69423394T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3143308B2 (ja) 1994-01-31 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
SG52140A1 (en) 1994-03-04 1998-09-28 Canon Kk Ink jet recording head and method of manufacture therefor and laser processing apparatus and ink jet recording apparatus
JPH08281960A (ja) * 1995-04-13 1996-10-29 Canon Inc インクジェット記録ヘッド
US6062675A (en) * 1996-01-09 2000-05-16 Canon Kabushiki Kaisha Recording head, recording apparatus and manufacturing method of recording head
US6180018B1 (en) * 1996-04-12 2001-01-30 Canon Kabushiki Kaisha Ink jet printing head, manufacturing method therefor, and ink jet printing apparatus
US6516509B1 (en) * 1996-06-07 2003-02-11 Canon Kabushiki Kaisha Method of manufacturing a liquid jet head having a plurality of movable members
JPH1178033A (ja) 1997-03-12 1999-03-23 Canon Inc 液体噴射記録ヘッドの製造方法
JP3559701B2 (ja) 1997-12-18 2004-09-02 キヤノン株式会社 インクジェット記録ヘッド用基板、該基板の製造方法及びインクジェット記録ヘッド及びインクジェット記録装置
JPH11348261A (ja) * 1998-06-10 1999-12-21 Canon Inc 液体噴射記録ヘッドにおける液体吐出状態検査方法および液体吐出状態検査装置
EP1000745A3 (de) 1998-10-27 2001-01-24 Canon Kabushiki Kaisha Platine zur elektrothermischen Umwandlung, Tintenstrahldruckkopf und Tintenstrahlaufzeichnungsgerät mit derselben, und Verfahren zur Herstellung eines Tintenstrahldruckkopfes
US6447984B1 (en) 1999-02-10 2002-09-10 Canon Kabushiki Kaisha Liquid discharge head, method of manufacture therefor and liquid discharge recording apparatus
JP2002001959A (ja) * 2000-04-17 2002-01-08 Canon Inc 液体吐出ヘッドおよびカートリッジおよび画像形成装置ならびに液体吐出ヘッドの製造方法
US8322834B2 (en) * 2010-03-31 2012-12-04 Eastman Kodak Company Snap-in die mount assembly for inkjet printhead
JP5724263B2 (ja) * 2010-09-16 2015-05-27 株式会社リコー インクジェットヘッド

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Publication number Priority date Publication date Assignee Title
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
US4330787A (en) * 1978-10-31 1982-05-18 Canon Kabushiki Kaisha Liquid jet recording device
US4345262A (en) * 1979-02-19 1982-08-17 Canon Kabushiki Kaisha Ink jet recording method
US4520373A (en) * 1979-04-02 1985-05-28 Canon Kabushiki Kaisha Droplet generating method and apparatus therefor
US4463359A (en) * 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4313124A (en) * 1979-05-18 1982-01-26 Canon Kabushiki Kaisha Liquid jet recording process and liquid jet recording head
JPS57102366A (en) * 1980-12-18 1982-06-25 Canon Inc Ink jet head
US4437100A (en) * 1981-06-18 1984-03-13 Canon Kabushiki Kaisha Ink-jet head and method for production thereof
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
JPS58220754A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツド
JPS58220756A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツドの製造方法
US4609427A (en) * 1982-06-25 1986-09-02 Canon Kabushiki Kaisha Method for producing ink jet recording head
JPS59123670A (ja) * 1982-12-28 1984-07-17 Canon Inc インクジエツトヘツド
JPS59138461A (ja) * 1983-01-28 1984-08-08 Canon Inc 液体噴射記録装置
DE3446968A1 (de) * 1983-12-26 1985-07-04 Canon K.K., Tokio/Tokyo Fluessigkeitsstrahlaufzeichnungskopf
JPH064322B2 (ja) * 1984-03-31 1994-01-19 キヤノン株式会社 液体噴射記録装置
DE3528064A1 (de) * 1984-08-06 1986-02-13 Canon K.K., Tokio/Tokyo Fluessigkeitsstrahlaufzeichnungskopf und damit versehenes fluessigkeitsstrahlaufzeichnungsgeraet
GB2176443B (en) * 1985-06-10 1990-11-14 Canon Kk Liquid jet recording head and recording system incorporating the same
JPH0698755B2 (ja) * 1986-04-28 1994-12-07 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPS63202455A (ja) * 1987-02-17 1988-08-22 Alps Electric Co Ltd インクジエツトヘツドおよびその製造方法
US4774530A (en) * 1987-11-02 1988-09-27 Xerox Corporation Ink jet printhead
US5175565A (en) * 1988-07-26 1992-12-29 Canon Kabushiki Kaisha Ink jet substrate including plural temperature sensors and heaters
JPH0267140A (ja) * 1988-09-01 1990-03-07 Ricoh Co Ltd 液体噴射記録ヘッド
EP0379781B1 (de) * 1988-10-31 1995-09-13 Canon Kabushiki Kaisha Flüssigkeitsstrahlaufzeichnungsvorrichtung
CA2009631C (en) * 1989-02-17 1994-09-20 Shigeo Nonoyama Pressure damper of an ink jet printer
US5098503A (en) * 1990-05-01 1992-03-24 Xerox Corporation Method of fabricating precision pagewidth assemblies of ink jet subunits
JP3402618B2 (ja) * 1991-11-12 2003-05-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法および記録装置

Also Published As

Publication number Publication date
EP0636480B1 (de) 2000-03-15
EP0636480A2 (de) 1995-02-01
ATE190560T1 (de) 2000-04-15
JPH0789073A (ja) 1995-04-04
DE69423394T2 (de) 2000-08-31
US5992981A (en) 1999-11-30
EP0636480A3 (de) 1996-03-06
DE69423394D1 (de) 2000-04-20

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