JP3645381B2 - 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置 - Google Patents

半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置 Download PDF

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Publication number
JP3645381B2
JP3645381B2 JP32797896A JP32797896A JP3645381B2 JP 3645381 B2 JP3645381 B2 JP 3645381B2 JP 32797896 A JP32797896 A JP 32797896A JP 32797896 A JP32797896 A JP 32797896A JP 3645381 B2 JP3645381 B2 JP 3645381B2
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Prior art keywords
oxide film
thermal oxide
film
heat treatment
forming
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Expired - Fee Related
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JP32797896A
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English (en)
Japanese (ja)
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JPH09312259A5 (cs
JPH09312259A (ja
Inventor
久 大谷
舜平 山崎
聡 寺本
潤 小山
靖 尾形
昌彦 早川
光明 納
敏次 浜谷
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to JP32797896A priority Critical patent/JP3645381B2/ja
Publication of JPH09312259A publication Critical patent/JPH09312259A/ja
Publication of JPH09312259A5 publication Critical patent/JPH09312259A5/ja
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Publication of JP3645381B2 publication Critical patent/JP3645381B2/ja
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  • Recrystallisation Techniques (AREA)
JP32797896A 1996-01-19 1996-11-22 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置 Expired - Fee Related JP3645381B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32797896A JP3645381B2 (ja) 1996-01-19 1996-11-22 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置

Applications Claiming Priority (15)

Application Number Priority Date Filing Date Title
JP8-26210 1996-01-19
JP2621096 1996-01-19
JP2603796 1996-01-20
JP8-26037 1996-01-20
JP3287596 1996-01-26
JP8-32875 1996-01-26
JP3287496 1996-01-26
JP8-32874 1996-01-26
JP3298196 1996-01-27
JP8-32981 1996-01-27
JP5833496 1996-02-20
JP8-58334 1996-02-20
JP8-88759 1996-03-17
JP8875996 1996-03-17
JP32797896A JP3645381B2 (ja) 1996-01-19 1996-11-22 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置

Publications (3)

Publication Number Publication Date
JPH09312259A JPH09312259A (ja) 1997-12-02
JPH09312259A5 JPH09312259A5 (cs) 2004-11-11
JP3645381B2 true JP3645381B2 (ja) 2005-05-11

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JP32797896A Expired - Fee Related JP3645381B2 (ja) 1996-01-19 1996-11-22 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置

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JP (1) JP3645381B2 (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4646343B2 (ja) * 1998-11-27 2011-03-09 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2002124678A (ja) * 2000-10-13 2002-04-26 Sony Corp 薄膜トランジスタの製造方法
KR100623229B1 (ko) * 2003-11-29 2006-09-18 삼성에스디아이 주식회사 유기 전계 발광 표시 장치 및 그의 제조 방법

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JPH09312259A (ja) 1997-12-02

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