JP3652014B2 - 距離計測装置 - Google Patents

距離計測装置 Download PDF

Info

Publication number: JP3652014B2
Authority: JP; Japan
Prior art keywords: image; images; control circuit; memory; stage
Prior art date: 1996-06-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP16580496A

Other languages

English (en)

Japanese (ja)

Other versions

JPH109819A (ja

JPH109819A5 (2

Inventor

靖忠三浦

茂小林

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Olympus Corp

Original Assignee

Olympus Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-06-26

Filing date

1996-06-26

Publication date

2005-05-25

1996-06-26 Application filed by Olympus Corp filed Critical Olympus Corp

1996-06-26 Priority to JP16580496A priority Critical patent/JP3652014B2/ja

1998-01-16 Publication of JPH109819A publication Critical patent/JPH109819A/ja

2004-07-15 Publication of JPH109819A5 publication Critical patent/JPH109819A5/ja

2005-05-25 Application granted granted Critical

2005-05-25 Publication of JP3652014B2 publication Critical patent/JP3652014B2/ja

2016-06-26 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

230000003287 optical effect Effects 0.000 claims description 29
238000012545 processing Methods 0.000 claims description 25
230000007246 mechanism Effects 0.000 claims description 12
238000003384 imaging method Methods 0.000 claims description 11
238000011084 recovery Methods 0.000 claims description 5
238000005259 measurement Methods 0.000 description 26
238000010586 diagram Methods 0.000 description 10
238000006073 displacement reaction Methods 0.000 description 4
239000011159 matrix material Substances 0.000 description 4
238000000034 method Methods 0.000 description 4
238000009826 distribution Methods 0.000 description 3
230000006870 function Effects 0.000 description 3
239000004065 semiconductor Substances 0.000 description 3
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
230000008859 change Effects 0.000 description 2
230000008569 process Effects 0.000 description 2
229910052710 silicon Inorganic materials 0.000 description 2
239000010703 silicon Substances 0.000 description 2
238000012935 Averaging Methods 0.000 description 1
230000008901 benefit Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000007689 inspection Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
238000012986 modification Methods 0.000 description 1
210000001747 pupil Anatomy 0.000 description 1
230000000153 supplemental effect Effects 0.000 description 1

Images

Landscapes

Automatic Focus Adjustment (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)
Length Measuring Devices By Optical Means (AREA)
Measurement Of Optical Distance (AREA)
Focusing (AREA)
Microscoopes, Condenser (AREA)

JP16580496A 1996-06-26 1996-06-26 距離計測装置 Expired - Fee Related JP3652014B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP16580496A JP3652014B2 (ja)	1996-06-26	1996-06-26	距離計測装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP16580496A JP3652014B2 (ja)	1996-06-26	1996-06-26	距離計測装置

Publications (3)

Publication Number	Publication Date
JPH109819A JPH109819A (ja)	1998-01-16
JPH109819A5 JPH109819A5 (2)	2004-07-15
JP3652014B2 true JP3652014B2 (ja)	2005-05-25

Family

ID=15819316

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP16580496A Expired - Fee Related JP3652014B2 (ja)	1996-06-26	1996-06-26	距離計測装置

Country Status (1)

Country	Link
JP (1)	JP3652014B2 (2)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4522668B2 (ja) *	2002-06-03	2010-08-11	オリンパス株式会社	画像処理装置
JP4650107B2 (ja) *	2005-05-31	2011-03-16	株式会社ニコン	共焦点光学系を有した測定装置
JP5576739B2 (ja) *	2010-08-04	2014-08-20	オリンパス株式会社	画像処理装置、画像処理方法、撮像装置及びプログラム
JP6830548B2 (ja) *	2017-11-08	2021-02-17	富士フイルム株式会社	顕微鏡装置及びプログラム
JPWO2021141048A1 (2) *	2020-01-07	2021-07-15

1996
- 1996-06-26 JP JP16580496A patent/JP3652014B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JPH109819A (ja)	1998-01-16

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