JP3788558B2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ Download PDF

Info

Publication number: JP3788558B2
Authority: JP; Japan
Prior art keywords: thread groove; rotor; molecular pump; exhaust; groove exhaust
Prior art date: 1999-03-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP07804899A

Other languages

English (en)

Japanese (ja)

Other versions

JP2000274394A (ja

JP2000274394A5 (2

Inventor

裕之川崎

拓司曽布川

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ebara Corp

Original Assignee

Ebara Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-03-23

Filing date

1999-03-23

Publication date

2006-06-21

1999-03-23 Application filed by Ebara Corp filed Critical Ebara Corp

1999-03-23 Priority to JP07804899A priority Critical patent/JP3788558B2/ja

2000-03-21 Priority to US09/531,894 priority patent/US6343910B1/en

2000-03-21 Priority to SG200001614A priority patent/SG76003A1/en

2000-03-21 Priority to TW089105105A priority patent/TW533276B/zh

2000-03-22 Priority to KR1020000014423A priority patent/KR20000062974A/ko

2000-03-23 Priority to DE60039085T priority patent/DE60039085D1/de

2000-03-23 Priority to EP00106339A priority patent/EP1039137B1/en

2000-10-03 Publication of JP2000274394A publication Critical patent/JP2000274394A/ja

2002-01-04 Priority to US10/035,145 priority patent/US6585480B2/en

2004-12-24 Publication of JP2000274394A5 publication Critical patent/JP2000274394A5/ja

2006-06-21 Application granted granted Critical

2006-06-21 Publication of JP3788558B2 publication Critical patent/JP3788558B2/ja

2019-03-23 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

239000000470 constituent Substances 0.000 claims description 14
239000000463 material Substances 0.000 claims description 9
238000010168 coupling process Methods 0.000 claims description 4
230000008878 coupling Effects 0.000 claims description 3
238000005859 coupling reaction Methods 0.000 claims description 3
238000005086 pumping Methods 0.000 description 35
230000002093 peripheral effect Effects 0.000 description 14
230000006835 compression Effects 0.000 description 13
238000007906 compression Methods 0.000 description 13
238000004519 manufacturing process Methods 0.000 description 8
125000006850 spacer group Chemical group 0.000 description 6
239000000919 ceramic Substances 0.000 description 5
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
229910052782 aluminium Inorganic materials 0.000 description 4
238000003754 machining Methods 0.000 description 4
238000000034 method Methods 0.000 description 4
239000004065 semiconductor Substances 0.000 description 4
229910001069 Ti alloy Inorganic materials 0.000 description 3
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
238000005260 corrosion Methods 0.000 description 3
230000007797 corrosion Effects 0.000 description 3
229910052719 titanium Inorganic materials 0.000 description 3
239000010936 titanium Substances 0.000 description 3
229910000838 Al alloy Inorganic materials 0.000 description 2
230000004323 axial length Effects 0.000 description 2
230000000694 effects Effects 0.000 description 2
230000008569 process Effects 0.000 description 2
238000011144 upstream manufacturing Methods 0.000 description 2
230000009471 action Effects 0.000 description 1
229910045601 alloy Inorganic materials 0.000 description 1
239000000956 alloy Substances 0.000 description 1
230000008901 benefit Effects 0.000 description 1
230000003749 cleanliness Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000006073 displacement reaction Methods 0.000 description 1
230000002708 enhancing effect Effects 0.000 description 1
230000006872 improvement Effects 0.000 description 1
238000010030 laminating Methods 0.000 description 1
238000012423 maintenance Methods 0.000 description 1
230000002040 relaxant effect Effects 0.000 description 1
239000007787 solid Substances 0.000 description 1

Images

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

JP07804899A 1999-03-23 1999-03-23 ターボ分子ポンプ Expired - Fee Related JP3788558B2 (ja)

Priority Applications (8)

Application Number	Priority Date	Filing Date	Title
JP07804899A JP3788558B2 (ja)	1999-03-23	1999-03-23	ターボ分子ポンプ
SG200001614A SG76003A1 (en)	1999-03-23	2000-03-21	Turbo-molecular pump
TW089105105A TW533276B (en)	1999-03-23	2000-03-21	Turbo-molecular pump
US09/531,894 US6343910B1 (en)	1999-03-23	2000-03-21	Turbo-molecular pump
KR1020000014423A KR20000062974A (ko)	1999-03-23	2000-03-22	터보 분자 펌프
DE60039085T DE60039085D1 (de)	1999-03-23	2000-03-23	Turbomolekularpumpe
EP00106339A EP1039137B1 (en)	1999-03-23	2000-03-23	Turbo-molecular pump
US10/035,145 US6585480B2 (en)	1999-03-23	2002-01-04	Turbo-molecular pump

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP07804899A JP3788558B2 (ja)	1999-03-23	1999-03-23	ターボ分子ポンプ

Publications (3)

Publication Number	Publication Date
JP2000274394A JP2000274394A (ja)	2000-10-03
JP2000274394A5 JP2000274394A5 (2)	2004-12-24
JP3788558B2 true JP3788558B2 (ja)	2006-06-21

Family

ID=13650975

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP07804899A Expired - Fee Related JP3788558B2 (ja)	1999-03-23	1999-03-23	ターボ分子ポンプ

Country Status (7)

Country	Link
US (2)	US6343910B1 (2)
EP (1)	EP1039137B1 (2)
JP (1)	JP3788558B2 (2)
KR (1)	KR20000062974A (2)
DE (1)	DE60039085D1 (2)
SG (1)	SG76003A1 (2)
TW (1)	TW533276B (2)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3788558B2 (ja) *	1999-03-23	2006-06-21	株式会社荏原製作所	ターボ分子ポンプ
US20060014684A1 (en) *	2000-03-03	2006-01-19	University Technologies International Inc.	Novel uses of EGF
JP3777498B2 (ja) *	2000-06-23	2006-05-24	株式会社荏原製作所	ターボ分子ポンプ
US6503050B2 (en) *	2000-12-18	2003-01-07	Applied Materials Inc.	Turbo-molecular pump having enhanced pumping capacity
JP2003254285A (ja) *	2002-02-28	2003-09-10	Boc Edwards Technologies Ltd	ポンプ装置
JP2003269364A (ja) *	2002-03-12	2003-09-25	Boc Edwards Technologies Ltd	真空ポンプ
JP4147042B2 (ja) *	2002-03-12	2008-09-10	エドワーズ株式会社	真空ポンプ
US6607351B1 (en) *	2002-03-12	2003-08-19	Varian, Inc.	Vacuum pumps with improved impeller configurations
FR2845737B1 (fr) *	2002-10-11	2005-01-14	Cit Alcatel	Pompe turbomoleculaire a jupe composite
GB0229355D0 (en)	2002-12-17	2003-01-22	Boc Group Plc	Vacuum pumping arrangement
JP2005098210A (ja) *	2003-09-25	2005-04-14	Aisin Seiki Co Ltd	多段ドライポンプ
WO2008035113A1 (en)	2006-09-22	2008-03-27	Edwards Limited	Vacuum pump
GB0618745D0 (en) *	2006-09-22	2006-11-01	Boc Group Plc	Molecular drag pumping mechanism
KR101883026B1 (ko) *	2011-06-17	2018-07-27	에드워즈 가부시키가이샤	진공 펌프와 그 로터
US9759233B2 (en) *	2011-10-31	2017-09-12	Edwards Japan Limited	Stator member and vacuum pump
TWI586893B (zh) *	2011-11-30	2017-06-11	Edwards Japan Ltd	Vacuum pump
JP6353195B2 (ja) *	2013-05-09	2018-07-04	エドワーズ株式会社	固定円板および真空ポンプ
US10222701B2 (en)	2013-10-16	2019-03-05	Asml Netherlands B.V.	Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
JP6228839B2 (ja) *	2013-12-26	2017-11-08	エドワーズ株式会社	真空排気機構、複合型真空ポンプ、および回転体部品
JP6586275B2 (ja) *	2015-01-30	2019-10-02	エドワーズ株式会社	真空ポンプ
JP6433812B2 (ja) *	2015-02-25	2018-12-05	エドワーズ株式会社	アダプタ及び真空ポンプ
GB2545423B (en) *	2015-12-14	2019-06-26	Edwards Ltd	Vacuum pump
CN106015034A (zh) *	2016-07-11	2016-10-12	中国工程物理研究院机械制造工艺研究所	一种高压比复合分子泵
GB201715151D0 (en)	2017-09-20	2017-11-01	Edwards Ltd	A drag pump and a set of vacuum pumps including a drag pump
JP7668613B2 (ja) *	2019-02-04	2025-04-25	エドワーズ株式会社	真空ポンプ
CN110014217A (zh) *	2019-05-16	2019-07-16	江苏博联硕焊接技术有限公司	一种扩散焊用夹具及涡轮分子泵转子的扩散焊接方法
JP7357564B2 (ja) *	2020-02-07	2023-10-06	エドワーズ株式会社	真空ポンプ、及び、真空ポンプ構成部品
JP7546410B2 (ja) *	2020-08-07	2024-09-06	エドワーズ株式会社	真空ポンプおよび真空ポンプ用回転翼
CN114673671B (zh) *	2020-12-25	2024-04-02	广东美的白色家电技术创新中心有限公司	风机和吸尘装置
CN114352553B (zh) *	2021-12-31	2024-01-09	北京中科科仪股份有限公司	一种旋涡机构及复合分子泵
CN114593075B (zh) *	2022-03-15	2023-03-24	北京中科科仪股份有限公司	一种分子泵
EP4155550A1 (de) *	2022-12-30	2023-03-29	Pfeiffer Vacuum Technology AG	Vakuumpumpe und verfahren zum betreiben einer vakuumpumpe

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0129709A3 (en) *	1983-04-26	1985-03-06	Anelva Corporation	Combinational molecular pump capable of readily being cleaned
US4732529A (en) *	1984-02-29	1988-03-22	Shimadzu Corporation	Turbomolecular pump
DE3410905A1 (de) *	1984-03-24	1985-10-03	Leybold-Heraeus GmbH, 5000 Köln	Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS61247893A (ja) *	1985-04-26	1986-11-05	Hitachi Ltd	真空ポンプ
JP2556320B2 (ja)	1987-03-18	1996-11-20	セイコ−精機株式会社	真空ポンプ
DE4216237A1 (de) *	1992-05-16	1993-11-18	Leybold Ag	Gasreibungsvakuumpumpe
DE4314418A1 (de) *	1993-05-03	1994-11-10	Leybold Ag	Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE4314419A1 (de) *	1993-05-03	1994-11-10	Leybold Ag	Reibungsvakuumpumpe mit Lagerabstützung
JP3098139B2 (ja) *	1993-06-17	2000-10-16	株式会社大阪真空機器製作所	複合分子ポンプ
DE29516599U1 (de) *	1995-10-20	1995-12-07	Leybold AG, 50968 Köln	Reibungsvakuumpumpe mit Zwischeneinlaß
IT1281025B1 (it) *	1995-11-10	1998-02-11	Varian Spa	Pompa turbomolecolare.
GB9609281D0 (en) *	1996-05-03	1996-07-10	Boc Group Plc	Improved vacuum pumps
DE19632874A1 (de) *	1996-08-16	1998-02-19	Leybold Vakuum Gmbh	Reibungsvakuumpumpe
JP3788558B2 (ja) *	1999-03-23	2006-06-21	株式会社荏原製作所	ターボ分子ポンプ

1999
- 1999-03-23 JP JP07804899A patent/JP3788558B2/ja not_active Expired - Fee Related
2000
- 2000-03-21 US US09/531,894 patent/US6343910B1/en not_active Expired - Lifetime
- 2000-03-21 TW TW089105105A patent/TW533276B/zh not_active IP Right Cessation
- 2000-03-21 SG SG200001614A patent/SG76003A1/en unknown
- 2000-03-22 KR KR1020000014423A patent/KR20000062974A/ko not_active Withdrawn
- 2000-03-23 DE DE60039085T patent/DE60039085D1/de not_active Expired - Fee Related
- 2000-03-23 EP EP00106339A patent/EP1039137B1/en not_active Expired - Lifetime
2002
- 2002-01-04 US US10/035,145 patent/US6585480B2/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JP2000274394A (ja)	2000-10-03
EP1039137A2 (en)	2000-09-27
EP1039137A3 (en)	2002-03-13
SG76003A1 (en)	2000-10-24
TW533276B (en)	2003-05-21
US6585480B2 (en)	2003-07-01
EP1039137B1 (en)	2008-06-04
US20020054815A1 (en)	2002-05-09
DE60039085D1 (de)	2008-07-17
KR20000062974A (ko)	2000-10-25
US6343910B1 (en)	2002-02-05

Legal Events

Date	Code	Title	Description
2004-01-30	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040129
2005-12-07	A977	Report on retrieval	Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20051207
2005-12-14	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20051213
2006-02-07	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060206
2006-03-17	TRDD	Decision of grant or rejection written
2006-03-23	A01	Written decision to grant a patent or to grant a registration (utility model)	Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20060322
2006-04-06	A61	First payment of annual fees (during grant procedure)	Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20060322
2006-04-07	R150	Certificate of patent or registration of utility model	Free format text: JAPANESE INTERMEDIATE CODE: R150
2008-03-13	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20090407 Year of fee payment: 3
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2015-03-17	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250
2016-04-07	LAPS	Cancellation because of no payment of annual fees

Publication	Publication Date	Title
JP3788558B2 (ja)	2006-06-21	ターボ分子ポンプ
US8109744B2 (en)	2012-02-07	Turbo vacuum pump
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JP3144272U (ja)	2008-08-21	ターボ分子ポンプ
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